JPS59142442A - Method and device for detecting abnormality of surface of object - Google Patents
Method and device for detecting abnormality of surface of objectInfo
- Publication number
- JPS59142442A JPS59142442A JP1714883A JP1714883A JPS59142442A JP S59142442 A JPS59142442 A JP S59142442A JP 1714883 A JP1714883 A JP 1714883A JP 1714883 A JP1714883 A JP 1714883A JP S59142442 A JPS59142442 A JP S59142442A
- Authority
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- Japan
- Prior art keywords
- optical system
- reflected light
- inspection surface
- electrical signal
- abnormality
- Prior art date
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/952—Inspecting the exterior surface of cylindrical bodies or wires
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Abstract
Description
【発明の詳細な説明】
この発明は物体表面の異常検出方法および装置に係り、
特に、物体表面に投光し、その反射光の反射率に基づい
て光学的に物体表面の異常を検出する方法および装置の
改良に関する。[Detailed Description of the Invention] The present invention relates to a method and apparatus for detecting an abnormality on the surface of an object,
In particular, the present invention relates to improvements in methods and devices for optically detecting abnormalities on the surface of an object by projecting light onto the surface of the object and based on the reflectance of the reflected light.
物体表面の異常、例えば、旋削作業中にバイト先端欠損
によって生じるデツピング、或いは、アルミ材等の押出
成型時に、ワーク表面に生じるすし、むしれ等は、従来
は、検査員の目視によって持つ一〇いたが、検査のため
に、生産工程全体が長くなり、非能率であるという問題
点があった。Conventionally, abnormalities on the surface of objects, such as depping caused by chipping of the tool tip during turning operations, or cracks and peeling that occur on the work surface during extrusion molding of aluminum materials, etc., have been detected by visual inspection by inspectors. However, the inspection process lengthened the entire production process, resulting in inefficiency.
これに対して、例えば、光ファイバを利用して、光ファ
イバから物体表面に投光し、且つその反剣光線を受光し
て、反射率の変化によって連続的且つ非接触で物体表面
の異常を検出する方法が考えられる。On the other hand, for example, an optical fiber can be used to project light from the optical fiber onto the object surface and receive the anti-sword rays, thereby continuously and non-contactly detecting abnormalities on the object surface by changing the reflectance. There are ways to detect it.
しかしながら、このような光学的な物体表面の異常検出
方法は、該物体表面の反射率が低い場合、或いＩｎ２中
に反射率が変動した場合、Ｓ／Ｎ比が小さくなり、物体
表面の異常を検出できない場合があるという問題点があ
る。However, in such an optical method for detecting an abnormality on the surface of an object, when the reflectance of the object surface is low, or when the reflectance changes during In2, the S/N ratio becomes small and the abnormality on the object surface is detected. There is a problem that it may not be possible to detect the
又、物体表面の正常部分と異常部分との反射率の差が小
さい場合も異常を検出できない場合がある。Further, an abnormality may not be detected if the difference in reflectance between a normal part and an abnormal part of the object surface is small.
この発明は上記従来の問題点に鑑みてなされたものであ
って、物体表面の反射率が連続３１測中に変動した場合
、全体の反射率が低い場合、又は物体表面の正常部分と
異常部分の反射率の差が小さい場合でも、感度よく、連
続的且つ自動的に物体表面の異常を検出できるようにし
た物体表面の異常検出方法および装置を提供することを
目的とする。This invention was made in view of the above-mentioned conventional problems, and is applicable when the reflectance of the object surface fluctuates during 31 consecutive measurements, when the overall reflectance is low, or between normal and abnormal parts of the object surface. An object of the present invention is to provide a method and apparatus for detecting abnormalities on the surface of an object that can detect abnormalities on the surface of an object continuously and automatically with high sensitivity even when the difference in reflectance between the two is small.
この発明は、光軸が検査面に対して垂直に配置された第
１光学系と、光軸が前記検査面に対して鋭角に傾けて配
置された第２光学系と、からなる検出光学系を、前記検
査面に対して前記第１光学系の光軸と直角方向に相対移
動させ、前記第１光学系および第２光学系の少なくとも
一方から前記検査面に投光し、該検査面から前記第２光
学系に受光される傾斜反射光と、前記第１光学系に受光
される正反射光と、をそれぞれ光電変換し、前者が変換
された傾斜反射光相当電気信号を、後者が変換された正
反射光相当電気信号により割算し、この割幹の商の一定
以上の変化量から検査面の異常を連続的に検出するよう
にして上記目的を達成するものである。This invention provides a detection optical system that includes a first optical system whose optical axis is arranged perpendicular to the inspection surface and a second optical system whose optical axis is arranged at an acute angle with respect to the inspection surface. is moved relative to the inspection surface in a direction perpendicular to the optical axis of the first optical system, and light is projected onto the inspection surface from at least one of the first optical system and the second optical system, and from the inspection surface. The oblique reflected light received by the second optical system and the specular reflected light received by the first optical system are each photoelectrically converted, and the latter converts an electrical signal equivalent to the oblique reflected light converted by the former. The above object is achieved by continuously detecting abnormalities on the inspection surface based on the amount of change of the quotient of the divided stem by the electric signal corresponding to the specularly reflected light.
又この発明は、前記物体表面の異常検出方法において、
前記検出光学系を、前記検査面に一定方向に連続して直
線状に出現するすしのすし目方向に対して直角方向に相
対移動させるようにして上記目的を達成するものである
。The present invention also provides the method for detecting an abnormality on the surface of an object, comprising:
The above object is achieved by moving the detection optical system in a direction perpendicular to the direction of the sushi grains that appear continuously and linearly in a fixed direction on the inspection surface.
又この発明は、前記物体表面の異常検出方法において、
前記検出光学系を、前記検査面に一定方向に、間欠的に
直線状に出現するむしれのむしれ方向に対して、平行方
向に相対移動させることにより上記目的を達成するもの
である。The present invention also provides the method for detecting an abnormality on the surface of an object, comprising:
The above object is achieved by relatively moving the detection optical system in a direction parallel to the direction of the plucking that appears intermittently in a straight line on the inspection surface.
又この発明は、光軸が鋭角に交差する第１光学系および
第２光学系を備えた検出光学系と、前記第１光学系およ
び第２光学系の少なくとも一方を介して検査面に投光す
る光源装置と、前記検査面から前記第１光学系を介して
受光される正反射光を光電変換して正反射光相当電気信
号とする第１の光電変換器と、前記検査面から前記第２
光学系を介して受光される傾斜反射光を充電変換して傾
斜反射光相当電気信号とする第２の光電変換器と、前記
傾斜反射光相当電気信号を前記正反射光相当電気信号で
割算する割算器と、この割算器による割算器出力と基準
値と比較して割算器出力が該基準値を越える時前記検査
面の異常として異常信号を出力する比較検出器とにより
物体表面の異常検出装置を構成して上記目的を達成する
ものである。The present invention also provides a detection optical system including a first optical system and a second optical system whose optical axes intersect at an acute angle, and a detection optical system that projects light onto an inspection surface through at least one of the first optical system and the second optical system. a first photoelectric converter that photoelectrically converts specularly reflected light received from the inspection surface via the first optical system into an electrical signal equivalent to the specularly reflected light; 2
a second photoelectric converter that charges and converts the obliquely reflected light received through the optical system into an electrical signal equivalent to the obliquely reflected light; and a second photoelectric converter that divides the electrical signal equivalent to the obliquely reflected light by the electrical signal equivalent to the specularly reflected light. and a comparison detector that compares the divider output from this divider with a reference value and outputs an abnormal signal as an abnormality on the inspection surface when the divider output exceeds the reference value. The above object is achieved by configuring a surface abnormality detection device.
又この発明は、前記物体表面の異常検出ｉ置においで、
前記第１光学系および第２光学系を、それぞれ往路およ
び復路を備えた光ファイバーから構成して上記目的を達
成するものである。Further, the present invention provides, at the point of detecting an abnormality on the surface of the object,
The above object is achieved by constructing the first optical system and the second optical system from optical fibers each having an outgoing path and a returning path.
又この発明は、前記物体表面の異常検出装置において、
前記割算器をアナログ演算器とすることにより上記目的
を達成するものである。Further, the present invention provides the above-mentioned object surface abnormality detection device,
The above object is achieved by using the divider as an analog arithmetic unit.
以下本発明の実施例を図面を参照して説明する。Embodiments of the present invention will be described below with reference to the drawings.
この実施例は、図に示されるように、光軸が鋭角（θ）
に交差する第１光学系１１および第２光学系１２を備え
た検出光学系１０と、前記第１光学系１１および第２光
学系１２の両方を介して検査すべき物体１３の検査面１
３Ａに投光する光源装置１４と、前記検査面１３Ａから
前記第１光学系１１を介して受光される正反射光を光電
変換して正反射光相当電気信号Ａとする第１の光電変換
器１５と、前記検査面１３Ａから前記第２光学系１２を
介して受光される傾斜反射光を光電変換して傾斜反射光
相当電気信号Ｂとする第２の光電変換器１６と、前記傾
斜反射光相当電気信号Ｂを前記正反射光相当電気信号Ａ
で割棹する割算器１７と、この割算器１７による割算器
出力Ｂ 、、／ Ａと基準値と比較して該割算器出力Ｂ
／Ａが該基準値を越える時前記検査面１３Ａの異常とし
て異常信号を出力する比較検出器１８とにより物体表面
の異常検出装置を構成したものである。In this example, the optical axis is at an acute angle (θ) as shown in the figure.
a detection optical system 10 comprising a first optical system 11 and a second optical system 12 intersecting with each other, and an inspection surface 1 of an object 13 to be inspected through both the first optical system 11 and the second optical system 12;
3A, and a first photoelectric converter that photoelectrically converts specularly reflected light received from the inspection surface 13A via the first optical system 11 into an electrical signal A corresponding to specularly reflected light. 15, a second photoelectric converter 16 that photoelectrically converts the oblique reflected light received from the inspection surface 13A via the second optical system 12 into an electric signal B corresponding to the oblique reflected light, and the oblique reflected light. The equivalent electrical signal B is converted into the electrical signal A equivalent to the specularly reflected light.
A divider 17 divides the stick by , and the divider output B by this divider 17 is compared with the reference value and the divider output B
A comparison detector 18 outputs an abnormality signal indicating that the inspection surface 13A is abnormal when /A exceeds the reference value, and an object surface abnormality detection device is constructed.
前記検出光学系１０における第１光学系１１および、＠
２光学系１２は、第２図に示されるように、中心に断面
円形状に投光用ファイバ１９を束ね、又、その外周に同
心リング状に受光用ファイバ２０を束ねて光の往路およ
び復路が形成されている。The first optical system 11 in the detection optical system 10 and @
As shown in FIG. 2, the optical system 12 has light emitting fibers 19 bundled in a circular cross section at the center, and light receiving fibers 20 bundled in a concentric ring shape around the outer periphery of the light emitting fibers 19, so that the outgoing and return paths of light are controlled. is formed.
第１図の符号２１は前記第１の光電変換器１５からの正
反射光相当電気信＠Ａを増幅して割算器１７に送るアン
プ、２２は同様に第２の光電変換器１６からの傾斜反射
光相当電気信号Ｂを増幅するアンプ、２３は基準値設定
器をそれぞれ示す。Reference numeral 21 in FIG. 1 is an amplifier that amplifies the electric signal @A equivalent to specular reflection light from the first photoelectric converter 15 and sends it to the divider 17, and 22 is an amplifier that similarly sends the electric signal @A from the second photoelectric converter 16. An amplifier amplifies the electric signal B corresponding to the tilted reflected light, and 23 represents a reference value setter.
この実施例において、表面が検査される物体１３が、図
に示されるように、断面円形の棒状部材である場合は、
この物体１３を軸回りに回転させつつ検出光学系１０と
物体１３をその軸線に沿つて相対的に移動さゼ、これに
よって、物体１３の表面全部を連続的に検査できるよう
にする。In this example, if the object 13 whose surface is to be inspected is a rod-shaped member with a circular cross section as shown in the figure,
The detection optical system 10 and the object 13 are moved relative to each other along the axis while the object 13 is rotated about the axis, thereby making it possible to continuously inspect the entire surface of the object 13.
上記のような装置におい（、前記第１光学系１１の光軸
と第２光学系１２の光軸との交差角度θを３０６として
、例えば物体１３をアルミ材とし、且つ、異常条件とし
てバイトの刃先を故意に欠損させて物体１３の検査面１
３Ａに所謂チッピングを生じさせたものを検査した結果
、正反射光相当電気信号Ａおよび傾斜反射光相当電気信
号Ｂならびに割算器１７の割算器出力Ｂ／Ａは第３図お
よび第４図に示されるようになった。In the above-mentioned apparatus (the intersection angle θ between the optical axis of the first optical system 11 and the optical axis of the second optical system 12 is 306, the object 13 is made of aluminum, and the abnormal condition is a cutting tool). Inspection surface 1 of object 13 by intentionally chipping the cutting edge
As a result of inspecting what is called chipping in 3A, the electrical signal A corresponding to specular reflection light, the electrical signal B corresponding to oblique reflection light, and the divider output B/A of divider 17 are as shown in FIGS. 3 and 4. is now shown.
即ち、第３図に示されるように、正反射光相当電気信号
Ａは、その出力が、正常面におけるよりも異常面におい
て増大し、逆に、傾斜反射光相当電気信号Ｂは異常面に
おいて正常面よりも減少し、両者のＳ／Ｎ比は前者にお
いては０．７２、後者においては０．７８となった。That is, as shown in FIG. 3, the output of the electrical signal A corresponding to specularly reflected light increases on the abnormal surface than on the normal surface, and conversely, the output of the electrical signal B corresponding to obliquely reflected light increases on the abnormal surface. The S/N ratio of both was 0.72 in the former and 0.78 in the latter.
又割算器１７における割算器出力は０．８５となり、前
記２つの電気信号ＡおよびＢよりもＳ／Ｎ比が増大され
ている。Further, the divider output in the divider 17 is 0.85, which has a higher S/N ratio than the two electric signals A and B.
これは、検査面１３Ａにおける正常面から異常面に移る
峙点での反射率の変化即ち正反射光相当電気信号Ａおよ
び傾斜反射光相当電気信号Ｂの出力の微係数が逆となる
ためである。This is because the change in reflectance at the opposite point where the inspection surface 13A changes from the normal surface to the abnormal surface, that is, the differential coefficients of the outputs of the electrical signal A corresponding to specular reflection light and the electrical signal B corresponding to oblique reflection light are opposite. .
従って、前記比較検出器１８の基準値を、例えば第４図
における割算器出力Ｂ 、、／ Ａが２．０ボルトに設
定すると、割算器出力がこの基準値を越えることにより
、異常面を容易に検出することができる。Therefore, if the reference value of the comparison detector 18 is set to, for example, 2.0 volts for the divider output B, , /A in FIG. can be easily detected.
特にこの実施例においては、２つの電気信号の比に基づ
いて異常面を検出するようにしているので、物体１３の
検査面１３Ａにおける反射率が材質等によって全体的に
低下して２つの電気信号の出力の絶対値か低下した場合
でも、正常面から異常面への僅かの変化を捉えることが
できる。In particular, in this embodiment, since an abnormal surface is detected based on the ratio of two electrical signals, the reflectance on the inspection surface 13A of the object 13 is reduced overall depending on the material, etc., and the two electrical signals are Even if the absolute value of the output decreases, it is possible to detect a slight change from a normal surface to an abnormal surface.
又、物体１３が黄銅の場合のように、第５図に参照され
る如く、傾斜反射光相当電気信号Ｂが、正常面と異常面
とでその出力レベルの差が小さい場合であっても、正反
射光相当電気信号への出力の差が大きく、且つ、両信号
Ａ、Ｂの微係数が異なれば、割算器出力Ｂ／Ａも正常面
と異常面では大きなレベルの差があり、従って、検査面
１３Ａの異常部分を容易に検出することができる。Furthermore, even when the difference in the output level of the electrical signal B corresponding to the inclined reflected light between the normal surface and the abnormal surface is small, as in the case where the object 13 is brass, as shown in FIG. If the difference in the output to the electrical signal equivalent to specularly reflected light is large, and the differential coefficients of both signals A and B are different, the divider output B/A will also have a large level difference between the normal surface and the abnormal surface. , an abnormal portion of the inspection surface 13A can be easily detected.
又上記実施例は、前記割算器１７をアナログ演舞器とし
ているので、単純な構成で、且つ安価でリアルタイムで
検査面の異常を検出することができる。Further, in the above embodiment, since the divider 17 is an analog operator, abnormalities on the inspection surface can be detected in real time with a simple configuration and at low cost.
次に上記実施例装置により押出成型したアルミ材表面の
すしおよびむしれを検出する場合について説明する。Next, a case will be described in which the above-mentioned embodiment apparatus detects cracks and peeling on the surface of an extrusion-molded aluminum material.
アルミ材２３がダイスから押出される時に生じるすしは
、第７図に示されるように押出し方向Ｘに沿って連続的
に形成され、その断面曲線は第８図に示されるようにな
る。このようなアルミ材２３のすじ２４を検出する場合
は、前記検出光学系１０をすじ２４の方向に対して直角
方向Ｙに相対移動させることによって（第７図参照）、
第９図に示されるような正反射光相当電気信号Ａ１傾斜
反射光相当電気信＠Ｂおよび割算器出力Ｂ／Ａを得るこ
とができ、これによって、すじ２４を割算器出力Ｂ／Ａ
が一定値以上となることから検出づることができた。The sushi produced when the aluminum material 23 is extruded from the die is continuously formed along the extrusion direction X as shown in FIG. 7, and its cross-sectional curve is as shown in FIG. When detecting such streaks 24 on the aluminum material 23, by relatively moving the detection optical system 10 in the direction Y perpendicular to the direction of the streaks 24 (see FIG. 7),
As shown in FIG. 9, it is possible to obtain the specularly reflected light equivalent electrical signal A1, the obliquely reflected light equivalent electrical signal @B, and the divider output B/A.
It was possible to detect this because it exceeded a certain value.
又、第１０図に示されるように、アルミ材２３の表面に
その押出し方向Ｘに平行に間欠的に発生する所謂むしれ
２５に対しては、検出光学系１０をアルミ材２３の押出
し方向と平行に相対移動させることによって、第１２図
に示されるような正反射光相、当電気信号Ａ１傾斜反射
光相当電気信号Ｂおよび割算器出力Ｂ／Ａを得ることが
できた。Furthermore, as shown in FIG. 10, in order to prevent so-called peeling 25 that occurs intermittently on the surface of the aluminum material 23 in parallel to the extrusion direction By relatively moving in parallel, it was possible to obtain the regular reflection light phase, the electric signal A1, the electric signal B corresponding to the oblique reflection light, and the divider output B/A as shown in FIG.
第１２図からも明確なように、正反射光相当電気信号Ａ
と傾斜反射光相当電気信号Ｂのむしれ２５における出力
の微係数が逆になるので、割算器出力Ｂ／Ａは、良好な
Ｓ／Ｎ比を以てむしれ２５を検出できる。As is clear from Fig. 12, the electric signal A corresponding to the specularly reflected light is
Since the differential coefficient of the output of the electrical signal B corresponding to the tilted reflected light at the plucking 25 is reversed, the divider output B/A can detect the plucking 25 with a good S/N ratio.
尚上記実施例は、第１光学系１１と第２光学系１２の交
差角度θを３０’ としたものであるが、本発明はこれ
に限定されるものでなく、両者の交差角度θは鋭角であ
ればよい。In the above embodiment, the intersection angle θ between the first optical system 11 and the second optical system 12 is 30', but the present invention is not limited to this, and the intersection angle θ between the two is an acute angle. That's fine.
又、前記実施例は、第１光学系１１および第２光学系１
２をそれぞれ投光用ノアイバ１９、受光用ファイバ２０
を備えた光ファイバから構成し、２つの光学系から検査
面１３Ａに投光するようにしたものであるが、これは、
どちらが一方の光学系のみから投光するようにしてもよ
い。Further, in the embodiment, the first optical system 11 and the second optical system 1
2 to the light emitting fiber 19 and the light receiving fiber 20, respectively.
It is constructed from an optical fiber with a
Light may be emitted from only one optical system.
本発明は上記のように構成したので、物体表面の反射率
の変動、反射出力の低下が生じても、Ｓ／Ｎ比の高い２
系統の出力の割算出力から確実に物体表面の異常を検出
することができるという優れた効果を有する。Since the present invention is configured as described above, even if the reflectance of the object surface changes or the reflected output decreases, the two
It has the excellent effect of being able to reliably detect an abnormality on the surface of an object from the divided output of the system output.
第１図は本発明に係る物体表面の異常検出方法を実施す
るための装置の実施例を示すブロック図、第２図は同実
施例における光学系の光ファイバの構成を示す拡大断面
図、第３図は上記実施例装置によって得られたアルミ材
表面からの反射光出力を示す縮図、第４図は第３図に示
される２系統の反射光出力の割算出力を示す線図、第５
図は上記実施例装置により黄銅材の表面から得られた２
系統の反射光出力を示す線図、第６図は第５図の２系統
の反射゛光出力の割算出力を示す線図、第７図は押出成
型される際にすしが形成されたアルミ材を示す斜視図、
第８図は第７図の■−■線に沿う断面曲線、第９図は前
記実施例装置によって前記アルミ材のすし部分を検査し
た場合の２系統の反射光出力波形およびこれらの割算器
出力波形を示す線図、第１０図は押出成型された際にむ
しれが生じたアルミ材を示す斜視図、第１１図は第１０
図のＸ、、１− Ｘ 、Ｔ線に沿う断面曲線、第１２図
は同実施例装置においてむしれの生じたアルミ材を検査
した場合の２系統の反射光出力波形およびこれらの出力
の割算器出力波形を示す線図である。
１０・・・検出光学系、
１１・・・第１光学系、
１２・・・第２光学系、
１３・・・物体、
１３Ａ・・・検査面、
１４・・・光源装置、
１５・・・第１の光電変換器、
１６・・・第２の充電変換器、
１７・・・割算器、
１８・・・比較検出器、
１９・・・投光用ファイバ、
２０・・・受光用ファイバ、
２３・・・アルミ材、
２４・・・すし、
２５・・・むしれ、
θ・・・傾き角、
Ａ・・・正反射光相当電気信号、
Ｂ・・・傾斜反射光相当電気信号、
Ｂ／Ａ・・・割算器出力。
代理人 松 山 圭 佑
（ばか１名）
第７図
第８図
第９図
第１０図
第１１図
第１２図FIG. 1 is a block diagram showing an embodiment of an apparatus for carrying out the method for detecting an abnormality on an object surface according to the present invention, FIG. 2 is an enlarged sectional view showing the configuration of an optical fiber of an optical system in the same embodiment, Fig. 3 is a miniature diagram showing the reflected light output from the aluminum material surface obtained by the above embodiment device, Fig. 4 is a diagram showing the divided output of the reflected light output of the two systems shown in Fig. 3, and Fig. 5 is a diagram showing the divided output of the reflected light output of the two systems shown in Fig. 3.
The figure shows 2 obtained from the surface of a brass material using the above-mentioned example apparatus.
A line diagram showing the reflected light output of the two systems. Figure 6 is a diagram showing the divided output of the reflected light output of the two systems in Figure 5. Figure 7 is a diagram showing the aluminum with sushi formed during extrusion molding. A perspective view showing the material;
FIG. 8 shows a cross-sectional curve along the line ■-■ in FIG. 7, and FIG. 9 shows two systems of reflected light output waveforms and their dividers when inspecting the sushi part of the aluminum material using the apparatus of the embodiment. A line diagram showing the output waveform, FIG. 10 is a perspective view showing an aluminum material that has peeled during extrusion molding, and FIG.
The cross-sectional curves along lines X, 1- FIG. 3 is a diagram showing a calculator output waveform. DESCRIPTION OF SYMBOLS 10... Detection optical system, 11... First optical system, 12... Second optical system, 13... Object, 13A... Inspection surface, 14... Light source device, 15... 1st photoelectric converter, 16... Second charging converter, 17... Divider, 18... Comparison detector, 19... Light emitting fiber, 20... Light receiving fiber , 23... Aluminum material, 24... Sushi, 25... Peeling, θ... Tilt angle, A... Electrical signal equivalent to regular reflected light, B... Electrical signal equivalent to oblique reflected light, B/A...Divider output. Agent Keisuke Matsuyama (1 idiot) Figure 7 Figure 8 Figure 9 Figure 10 Figure 11 Figure 12
Claims (6)
系と、光軸が前記検査面に対して鋭角に傾けて配置され
た第２光学系と、からなる検出光学系を、前記検査面に
対して前記第１光学系の光軸と直角方向に相対移動させ
、前記第１光学系および第２光学系の少なくとも一方か
ら前記検査面に投光し、該検査面から前記第２光学系に
受光される傾斜反射光と、前記第１光学系に受光される
正反射光と、をそれぞれ光電変換し、前者が変換された
傾斜反射光相当電気信号を、後者が変換された正反射光
相当電気信号により割算し、この割算の商の一定以上の
変化量から検査面の異常を連続的に検出するようにした
物体表面の異常検出方法。(1) A detection optical system consisting of a first optical system whose optical axis is arranged perpendicular to the inspection surface and a second optical system whose optical axis is arranged at an acute angle to the inspection surface. , the first optical system is moved relative to the inspection surface in a direction perpendicular to the optical axis of the first optical system, and light is projected onto the inspection surface from at least one of the first optical system and the second optical system, and the The oblique reflected light received by the second optical system and the specular reflected light received by the first optical system are each photoelectrically converted, and the electric signal equivalent to the oblique reflected light converted by the former is converted into an electrical signal by the latter. A method for detecting an abnormality on the surface of an object, in which abnormalities on the inspection surface are continuously detected based on the amount of change of the quotient of the division by an electric signal equivalent to specularly reflected light.
して直線状に出現するすしのすし目方向に対して直角方
向に相対移動させることを特徴とする特許請求の範囲第
１項記載の物体表面の異常検出方法。(2) The detection optical system is moved relative to the direction perpendicular to the direction of the sushi grains that appear continuously and linearly in a fixed direction on the inspection surface. A method for detecting abnormalities on the surface of an object as described.
欠的に直５線状に出現するむしれのむしれ方向に対して
、平行方向に相対移動させることを特徴とする特許請求
の範囲第１項記載の物体表面の異常検出方法。(3) A patent claim characterized in that the detection optical system is moved in a direction parallel to the direction of plucking that appears intermittently in five straight lines in a fixed direction on the inspection surface. The method for detecting an abnormality on the surface of an object according to item 1.
系を備えた検出光学系と、前記第１光学系および第２光
学系の少なくとも一方を介して検査面に投光する光源装
置と、前記検査面から前記第１光学系を介して受光され
る正反射光を光電変換して正反射光相当電気信号とする
第１の光電変換器と、前記検査面から前記第２光学系を
介して受光される傾斜反射光を光電変換して傾斜反射光
相当電気信号とする第２の光電変換器と、前記傾斜反射
光相当電気信号を前記正反射光相当電気信号で割算する
割算器と、この割算器による割算器出力と基＊値と比較
して割算器出力が該基準値を越える時前記検査面の異常
として異常信号を出力する比較検出器と、を有してなる
物体表面の異常検出装置。(4) A detection optical system including a first optical system and a second optical system whose optical axes intersect at an acute angle, and a light source that projects light onto the inspection surface via at least one of the first optical system and the second optical system. a first photoelectric converter that photoelectrically converts specularly reflected light received from the inspection surface via the first optical system into an electrical signal equivalent to specularly reflected light; and a first photoelectric converter that photoelectrically converts specularly reflected light received from the inspection surface via the first optical system, a second photoelectric converter that photoelectrically converts the tilted reflected light received through the system into an electrical signal equivalent to tilted reflected light; and a second photoelectric converter that photoelectrically converts the tilted reflected light received through the system into an electrical signal equivalent to tilted reflected light, and divides the electrical signal equivalent to tilted reflected light by the electrical signal equivalent to specular reflected light. a divider; and a comparison detector that compares the divider output from the divider with a base value and outputs an abnormal signal as an abnormality on the inspection surface when the divider output exceeds the reference value. An abnormality detection device on the surface of an object.
路および復路を備えた光ファイバーから構成したことを
特徴する特許請求の範囲第４項記載の物体表面の異常検
出装置。(5) The apparatus for detecting an abnormality on the surface of an object according to claim 4, wherein the first optical system and the second optical system are each constituted by an optical fiber having an outgoing path and a returning path.
する特許請求の範囲第４項または第５項記載の物体表面
の異常検出装置。(6) The abnormality detection device on the surface of an object according to claim 4 or 5, wherein the divider is an analog computing unit.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1714883A JPS59142442A (en) | 1983-02-04 | 1983-02-04 | Method and device for detecting abnormality of surface of object |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1714883A JPS59142442A (en) | 1983-02-04 | 1983-02-04 | Method and device for detecting abnormality of surface of object |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59142442A true JPS59142442A (en) | 1984-08-15 |
| JPH0410583B2 JPH0410583B2 (en) | 1992-02-25 |
Family
ID=11935901
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1714883A Granted JPS59142442A (en) | 1983-02-04 | 1983-02-04 | Method and device for detecting abnormality of surface of object |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59142442A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6432154A (en) * | 1987-07-16 | 1989-02-02 | Miles Inc | Apparatus for measuring reflection factor of sample |
| JP2020067280A (en) * | 2018-10-22 | 2020-04-30 | 三菱電機株式会社 | Defect inspection device for spirally covered winding wire, spirally covered winding wire production system with defect inspection device, and defect inspection method |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS55124003A (en) * | 1979-03-19 | 1980-09-24 | Sankusu:Kk | Reflection type photoelectric switch |
-
1983
- 1983-02-04 JP JP1714883A patent/JPS59142442A/en active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS55124003A (en) * | 1979-03-19 | 1980-09-24 | Sankusu:Kk | Reflection type photoelectric switch |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6432154A (en) * | 1987-07-16 | 1989-02-02 | Miles Inc | Apparatus for measuring reflection factor of sample |
| JP2020067280A (en) * | 2018-10-22 | 2020-04-30 | 三菱電機株式会社 | Defect inspection device for spirally covered winding wire, spirally covered winding wire production system with defect inspection device, and defect inspection method |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0410583B2 (en) | 1992-02-25 |
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