JPS5912259U - Mark detection device - Google Patents
Mark detection deviceInfo
- Publication number
- JPS5912259U JPS5912259U JP10774582U JP10774582U JPS5912259U JP S5912259 U JPS5912259 U JP S5912259U JP 10774582 U JP10774582 U JP 10774582U JP 10774582 U JP10774582 U JP 10774582U JP S5912259 U JPS5912259 U JP S5912259U
- Authority
- JP
- Japan
- Prior art keywords
- detection device
- circuit
- mark detection
- mark
- takes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Electron Sources, Ion Sources (AREA)
- Electron Beam Exposure (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図及び第２図はマークの例を示したもの、第３図及
び第４図は従来のマーク検出法による信 −号波形図
、第５図は本考案の一実施例を示したマーク検出装置の
概略図、第６図〜第８図は該検出装置の動作の説明を補
足する為の信号波形図である。
５：電子銃、７：偏向器、８：材料、９Ａ、 ９Ｂ：
反射電子検出器、１０：引算回路、１１，１５：足算回
路、１２．１６：微分回路、１３，１４：整形回路、１
７：制御装置。Figures 1 and 2 show examples of marks, Figures 3 and 4 are signal waveform diagrams obtained by conventional mark detection methods, and Figure 5 shows marks according to an embodiment of the present invention. The schematic diagrams of the detection device and FIGS. 6 to 8 are signal waveform diagrams to supplement the explanation of the operation of the detection device. 5: Electron gun, 7: Deflector, 8: Material, 9A, 9B:
Backscattered electron detector, 10: Subtraction circuit, 11, 15: Addition circuit, 12.16: Differential circuit, 13, 14: Shaping circuit, 1
7: Control device.
Claims (1)
ことによりマーク情報を検出するようにしｈマーク検出
装置において、少なくとも一対の荷電ビーム検出器を光
軸の周りに配置し、該各々の検出器の出力の和を取る足
算回路と差を取る引算回路を互いに並列に設け、該足算
回路の出力と引算回路の出力の和を取る足算回路を設け
たことを特徴とするマーク検出装置。Mark information is detected by scanning a mark provided on a material with a charged beam. In the mark detection device, at least a pair of charged beam detectors are arranged around an optical axis, and each detection The present invention is characterized in that an addition circuit that takes the sum of the outputs of the circuit and a subtraction circuit that takes the difference are provided in parallel with each other, and an addition circuit that takes the sum of the output of the addition circuit and the output of the subtraction circuit is provided. Mark detection device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10774582U JPS5912259U (en) | 1982-07-16 | 1982-07-16 | Mark detection device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10774582U JPS5912259U (en) | 1982-07-16 | 1982-07-16 | Mark detection device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5912259U true JPS5912259U (en) | 1984-01-25 |
Family
ID=30251640
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10774582U Pending JPS5912259U (en) | 1982-07-16 | 1982-07-16 | Mark detection device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5912259U (en) |
-
1982
- 1982-07-16 JP JP10774582U patent/JPS5912259U/en active Pending
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