JPS59112434A - Magnetic disk - Google Patents

Abstract

PURPOSE:To obtain a disk which is large in its track density and suitable in its track follow-up property by sticking uniformly a magnetic material film onto the whole surface of a non-magnetic substrate, leaving only a desired part on the magnetic material film by a photolithographic technique, and removing other part by means of etching. CONSTITUTION:A magnetic material film 2 is formed by dispersing uniformly needle-like magnetic material particles of gamma-Fe2O3 in a thermosetting polyimide resin and applying it uniformly on the whole surface of a non-magnetic disk 1 of Al, etc., and stoving it. Subsequently, an ultraviolet hardening photoresist 12 is applied on the whole surface of the film 2, a glass mask 13 provided with a concentric circle-like window of a window interval (g) by a window opening dimension (w) is made to adhere closely, parallel ultraviolet rays 14 (indicated with an arrow) are irradiated, and parts 15, 15- corresponding to the window are hardened, and thereafter, an unhardened resist 12 is removed. Subsequently, a magnetic disk is obtained by removing the part which is not covered with the resist film 15 of the film 2, by an HF-HNO3 etching liquid, etc. Residual projecting lines 11, 11- become a track gap. In this way, the track follow-up is executed suitably by the projecting line 11.

Description

【発明の詳細な説明】 技術分野 この発明は、磁気記録原理を応用したＶＴ’Ｒやコンピ
ュータ等の電子機器に用いられている磁気ディスクの構
造に関するものである。DETAILED DESCRIPTION OF THE INVENTION Technical Field The present invention relates to the structure of a magnetic disk used in electronic equipment such as VT'Rs and computers to which magnetic recording principles are applied.

１」」ＵＬ 従来より、磁気ディスクは、例えば第１図に示すように
、アルミニウム合金等の非磁性体円盤１の表面に、γ−
Ｆ０２０３等の強磁性体粉末を熱硬化性塗料と混合して
から熱硬化させて、磁性体膜２を円盤全面均一に付着さ
せたものである。そして、リング状コア３にコイル４を
巻き付け、磁気コア３に磁気ギャップ５を設け、磁気ヘ
ッド６を近接させて、磁気ギャップ５より漏洩させる磁
束７によって磁性体膜２へ磁気誘導によって部分磁化、
つまり微小磁区８，８．・・・・・　を形成５させて記
録している。捷た逆に微小磁区８，８．・・・・・・か
らの磁束７′の空間的、時間的変化による電磁誘導によ
って再生を行っている。1'' UL Conventionally, magnetic disks have a non-magnetic disk 1 made of aluminum alloy or the like with γ-
A ferromagnetic powder such as F0203 is mixed with a thermosetting paint and then thermally cured to uniformly adhere the magnetic film 2 to the entire surface of the disk. Then, a coil 4 is wound around the ring-shaped core 3, a magnetic gap 5 is provided in the magnetic core 3, a magnetic head 6 is brought close, and the magnetic flux 7 leaked from the magnetic gap 5 causes the magnetic film 2 to be partially magnetized by magnetic induction.
In other words, minute magnetic domains 8, 8. ... is formed and recorded. On the contrary, minute magnetic domains 8, 8. Reproduction is performed by electromagnetic induction due to spatial and temporal changes in the magnetic flux 7' from .

ところで上述の磁気ディスクは、記憶容量の増大やアク
セスタイムの短縮化が要求’Ｊｉ”ｌ（いるが、現状で
は、次に述べるように限界がある。すなわち、第２図に
示すように、ト・ラック９，９には、記録時に、その円
周方向つまりトラック長手方向に微小磁区８，８．・・
・・　が形成されるが、トラック密度を高密度化、要す
るにトラック９，９０間隔ｔを小さくすると、矢印１０
．１０・・　で示すように不要な磁区の乱れ、いわゆる
クロストーク現象と称されている。このため記憶容量を
増そうとすれば、磁気ディスクの径が大径化してしまう
問題があった。By the way, the above-mentioned magnetic disks are required to have increased storage capacity and shortened access time, but currently they have limitations as described below.In other words, as shown in Figure 2, - During recording, minute magnetic domains 8, 8, etc. are formed in the racks 9, 9 in the circumferential direction, that is, in the longitudinal direction of the track.
.
．． As shown in 10..., unnecessary disturbance of magnetic domains is called a so-called crosstalk phenomenon. For this reason, if an attempt was made to increase the storage capacity, there was a problem in that the diameter of the magnetic disk would increase.

発明の開示 この発明は、上記従来の磁気ディスクのトラック密度の
高密度化の問題を解決するために提唱されたもので、次
のように要約される。つまり、この発明による磁気ディ
スクは、非磁性体基板上に全面均一に磁性体膜を付着さ
せておき、磁性体膜にフォトリゾグラフィ技術により所
望部分のみを残してトラックを多数形成し、他の部分は
エツチング処理して除去し、トラック間隙には、非磁性
体基板上朋１全露出はせたものとするものである。DISCLOSURE OF THE INVENTION The present invention was proposed to solve the problem of increasing the track density of the conventional magnetic disk, and can be summarized as follows. In other words, in the magnetic disk according to the present invention, a magnetic film is uniformly adhered to the entire surface of a non-magnetic substrate, and a large number of tracks are formed on the magnetic film using photolithography technology, leaving only desired areas. This portion is removed by etching, and the non-magnetic substrate top layer 1 is completely exposed in the track gap.

その結果この発明によれば、トラック密度を大きく採る
ことができることの（ＬＩ）に、トラック帯域が視覚的
に観測できるので保守点検作業が容易となり、さらに磁
気ヘッド作動中のトラック追従が極めて好適となる優れ
た実用的な効果を奏する。As a result, according to the present invention, the track density can be increased (LI), the track band can be visually observed, making maintenance and inspection work easier, and track following while the magnetic head is in operation is extremely suitable. It has excellent practical effects.

第３図は、この発明の一実加Ｔ例を示す磁気ディスクの
一部断面視斜視図で、従来と同様な非磁性体基板である
アルミニウム円盤ｌの表面］二に、γ−Ｆ８２０３　ｇ
！＋状磁性体粒子からなり、幅寸法Ｗがトラック幅の細
いリング状で円盤］と同心円を形成し、それらの間隙寸
法りが数μｍ程度まで縮められた磁性体突条１１　、１
１　、・・・・・・が形成された構造のものである。FIG. 3 is a partial cross-sectional perspective view of a magnetic disk showing an example of the applied T of the present invention, showing the surface of an aluminum disk l which is a non-magnetic substrate similar to the conventional one.Secondly, γ-F8203 g
! The magnetic protrusions 11, 1 are made of +-shaped magnetic particles and form a concentric circle with the ring-shaped disk whose width dimension W is a narrow track width, and the gap size between them is reduced to about several μm.
1, . . . are formed.

上述した磁気ディスクの詳細は、次の磁性体突条１１　
、１１　、・・・・　の製作の仕方より１１１らかとな
る。すなわち、第４［ン（〜第８図は、磁性体突条１１
　、１１　、・・・・・・の各製作工程断面図で、まず
第４図は、全〈従来と同様に、アルミニウム円盤１の表
面全面に亘り、それぞれの長径が約１μｍ短径が約０．
１μｍ程度のγ−Ｆ１３２０３針状磁性体粒子を熱硬化
性のポリイミド系樹脂等と混合しさらに有機バインダと
混練して、均一に塗布後、焼付硬化させ、磁性体＠２を
付着させたものである。つぎに、第５図のように、薄く
紫外線硬化性のフォトレジスト１２を余聞に積層被着さ
せる。そして、第６図のように、窓開幅寸法がＷで、窓
間隔がりであって円盤ｌと同心円状のリング形窓を設け
たガラスマスク１３をフォトレジスト１２上に密着押圧
しておき、平行な紫外Ｍ１４全照射させる。The details of the above-mentioned magnetic disk are as follows:
, 11 , . . . It is 111 brighter than the manufacturing method. That is, the fourth [n] (~FIG. 8 shows the magnetic material protrusion 11
, 11, . . . , FIG. ．．
γ-F13203 needle-shaped magnetic particles of about 1 μm are mixed with thermosetting polyimide resin, etc., and further kneaded with an organic binder, coated uniformly, baked and hardened, and magnetic material @2 is attached. be. Next, as shown in FIG. 5, a thin layer of ultraviolet curable photoresist 12 is deposited over the entire surface. Then, as shown in FIG. 6, a glass mask 13 having ring-shaped windows having a window opening width W and spaced apart and concentric with the disk L is tightly pressed onto the photoresist 12. Fully irradiated with parallel ultraviolet M14.

すると、フォトレジスト１２中の紫外［１４が照射され
た同心円状のリング形窓対応箇所１５　、　ｌ　５゜・
・・・・・は硬化して磁性体膜２と極めて頑丈に接着す
る。その後フオトレジス）１２の未硬化部を現像液にて
耕像除去して第７図の状態とし、さらにＨＦ−ＨＮＯ３
系等のエッチ、ング液により、磁性体膜２の硬化フオト
レジス）１５，１５．・・・・・　に覆れていない部分
を溶解除去させて第１図に示した磁気ディスクを得る。Then, the corresponding concentric ring-shaped windows 15, l 5°, which are irradiated with ultraviolet rays [14] in the photoresist 12.
. . . hardens and adheres to the magnetic film 2 extremely firmly. Thereafter, the uncured portion of the photoresist (12) was removed using a developer to obtain the state shown in Fig. 7, and further HF-HNO3
The hardened photoresist of the magnetic film 2 is cured with an etching solution such as a system (15, 15. The uncovered portion is dissolved and removed to obtain the magnetic disk shown in FIG.

以上のように、この実施例によって得られる磁気ディス
クでは、トラックは磁性体膜２の残部である突条１１　
、１１　、・・曲であるので、トラック間隙は空隙とな
り、従来のような磁性体ではないのでトラック密度を著
しく高くすることができる。As described above, in the magnetic disk obtained by this example, the track is formed by the protrusion 11 which is the remaining part of the magnetic film 2.
, 11, . . . Since it is a song, the track gap becomes an air gap, and since it is not made of magnetic material as in the conventional case, the track density can be significantly increased.

しかもこの場合、トラック間隙はアルミニウム円盤ｌの
地肌が露出するので１次のような特色が顕　５− 著となる。つまり、アルミニウムに対してγ−Ｆｅ２０
の突条１１，１１．・・・・　は、光反射係数が小さく
、大差があでので、レーザービームを照射してやること
により、突条１１よりレーザービームが外れると照射さ
れることになり、トラック追従が極めて好適に行えるの
である。Moreover, in this case, since the surface of the aluminum disk 1 is exposed in the track gap, first-order features become prominent. In other words, γ-Fe20 for aluminum
Projections 11, 11. . . . has a small light reflection coefficient and there is a large difference, so by irradiating the laser beam, if the laser beam deviates from the protrusion 11, it will be irradiated, and track following can be performed extremely well. be.

尚この発明け、上記実施例以外の実施例が可能であり、
例えばトラック追従性をより一層増したい場合には、第
９図のように、アルミニウム円盤ｌの地肌に、ドツト状
の光記録穴１６，１６．・・・・・・を設け、これにレ
ーザービームを勲射させて観測追従させるようにしても
よい。It should be noted that embodiments other than the above-mentioned embodiments are possible with this invention.
For example, if you want to further increase track followability, as shown in FIG. 9, dot-shaped optical recording holes 16, 16. . . . may be provided and a laser beam may be emitted from this to follow the observation.

【図面の簡単な説明】[Brief explanation of drawings]

第１図は、従来の磁気ディスクの一部断面視斜視図、第
２図は、その要部を模型化した拡大平面図、第３図はこ
の発明の一実施例を示す磁気ディスクの一部断面視斜視
図、第４図〜第８図はその突条磁性体製作工程における
磁気ディスクの断面図、第９図はその他の実施例を示す
磁気ディスク　６− の一部断面視部分斜視図である。 ］・・・非磁性体基板（アルミニウム円盤）、２・−・
磁性体膜、 １１．１１．・・・・・・　・・・突条（トラック）。 防・−・　トラック幅、 り・・・トラック間隙。 　７−FIG. 1 is a partially cross-sectional perspective view of a conventional magnetic disk, FIG. 2 is an enlarged plan view showing a model of its main parts, and FIG. 3 is a part of a magnetic disk showing an embodiment of the present invention. FIG. 4 to FIG. 8 are cross-sectional views of the magnetic disk in the manufacturing process of the protruding magnetic material, and FIG. 9 is a partial cross-sectional perspective view of the magnetic disk 6- showing another embodiment. be. ]...Nonmagnetic substrate (aluminum disk), 2...
Magnetic film, 11.11. ...... Track. Prevention -- Track width, Ri -- Track gap. 7-

Claims (1)

【特許請求の範囲】[Claims] 非磁性体基板上に全面均一に磁性体膜を付着はせておき
、磁性体膜にフォトリゾグラフィ技術により、所望部分
のみを残してトランクを多数形成し、他の部分はエツチ
ング処理して除去し、トラック間隙には非磁性体基板地
肌を露出はせることを特徴とする磁気ディスク。A magnetic film is deposited uniformly over the entire surface of a non-magnetic substrate, and a large number of trunks are formed on the magnetic film using photolithography, leaving only the desired parts, and the other parts are removed by etching. A magnetic disk characterized in that the surface of the non-magnetic substrate is exposed in the track gap.