JPS5910856A - Probe card - Google Patents

Probe card

Info

Publication number
JPS5910856A
JPS5910856A JP11929382A JP11929382A JPS5910856A JP S5910856 A JPS5910856 A JP S5910856A JP 11929382 A JP11929382 A JP 11929382A JP 11929382 A JP11929382 A JP 11929382A JP S5910856 A JPS5910856 A JP S5910856A
Authority
JP
Japan
Prior art keywords
probe card
screw
hole
mounting member
probe
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11929382A
Other languages
Japanese (ja)
Other versions
JPS6331742B2 (en
Inventor
Masao Okubo
昌男 大久保
Yasuyoshi Yoshimitsu
吉光　康良
Fumio Nakai
中井　文男
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Japan Electronic Materials Corp
Original Assignee
Japan Electronic Materials Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Japan Electronic Materials Corp filed Critical Japan Electronic Materials Corp
Priority to JP11929382A priority Critical patent/JPS5910856A/en
Publication of JPS5910856A publication Critical patent/JPS5910856A/en
Publication of JPS6331742B2 publication Critical patent/JPS6331742B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/07342—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card the body of the probe being at an angle other than perpendicular to test object, e.g. probe card

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Measuring Leads Or Probes (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Abstract

PURPOSE:To detach easily and uncompulsively a probe card body from an attaching member, by providing a hole having a diameter smaller than the peak part of a screw for insertion and extraction for operating the screw to the probe card body. CONSTITUTION:The probe card body 20 coupled with the attaching member 10 coupled with a printed board 1 with an attaching screw 17 is provided with probes 23 in a radial shape, etc., connected electrically to male pins 24 of the body 10 through female pins 4. Further, the hole 25 having the diameter smaller than the peak part of the screw 13 for inserting and extracting the member 10 is formed in this body 20 oppositely to the screw 13, and a wrench is inserted from a hole 25 after a screw 27 is detached; and the screw 13 is operated successively, and consequently while uniform force is applied to the circumference of the body 20, the probe card body is separated from the attaching member easily and uncompulsively.

Description

【発明の詳細な説明】 本発明はプローブカード本体の周辺部に植設した雄ビン
を取付部材に埋設した雌ピンに嵌合することにより、プ
ローブカード本体とプリント基板が一体となるプローブ
カードに関する。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a probe card in which a probe card main body and a printed circuit board are integrated by fitting a male pin embedded in the periphery of the probe card main body into a female pin embedded in a mounting member. .

最近のプローブカードは、その製造・保守の便カラ、或
いは設計に自由度をもたせるという観点から、一般的に
は前記プリント基板と、探針を具備するプローブカード
本体とは別体に構成されており、前記雄ピンと雌ピンを
嵌合すること番こよりプリント基板とプローブカード本
体が一体化される一方、雌ビンから雄ビンを抜脱するこ
とにより両者は別体に分離される、いわば着脱自在な型
式を探るものが多くなっている。In recent probe cards, the printed circuit board and the probe card main body, which includes the probe, are generally constructed separately from the viewpoint of ease of manufacturing and maintenance, or to provide flexibility in design. When the male pin and the female pin are fitted together, the printed circuit board and the probe card body are integrated, but when the male pin is removed from the female pin, they are separated into separate bodies, so to speak, they are detachable. There are many people searching for new models.

しかしながら、近時の集積回路における集積度の増大傾
向のため、プローブカードも必然的に多探針化して来て
おり、そのため前記雄ビンと雌ピンの抜脱には多大の外
力を必要とし、しかも均一な外力でもって抜脱すること
は従来方式のプローブカードでは甚だ困難であり、局部
的に過大の力を加え、た場合にはプローブカード本体の
変形、あるいは破損を招くおそれがあったのである。１
本発明は上記事情に鑑みてなされたもので、プローブカ
ード本体周辺に均一な力を加えつ５、前記本体を無理な
くかつ容易に分離することのできる新らしいタイプのプ
ローブカードを提供することを目的とする。However, due to the recent trend toward increasing the degree of integration in integrated circuits, probe cards have inevitably become multi-probe, and as a result, a large amount of external force is required to remove the male pin and female pin. Moreover, it is extremely difficult for conventional probe cards to remove the probe card with a uniform external force, and if excessive force is applied locally, there is a risk of deformation or damage to the probe card body. be. 1
The present invention has been made in view of the above circumstances, and it is an object of the present invention to provide a new type of probe card that can apply a uniform force to the periphery of the probe card body and easily and easily separate the body. purpose.

以下本発明に係るプローブカードの実施例につき図示・
説明する。Examples of the probe card according to the present invention are illustrated below.
explain.

第１図は本発明に係るプローブカードの外観図であって
、図示の如く、プローブカードはプローブカード本体２
０が取付部材１０を介してプリント基板１に嵌合され一
体となっている。第２図は第１の発明の構成を略本する
部分破断斜視図である−すなわち円形の（但し本発明で
は円形に限定されない）プローブカード本体の中央開口
部に嵌合密着したリング２１の端面には複数個６探針２
３が放射状に周設されていて、探針の根元部はそれに対
応して配設されたプリント配線２２ｉこ半田付でもって
固定されている。そして、プリント配線２２のスルーホ
ールには接続ピンたる雄ビン２４が挿入され半田付でも
−）て固定されている。FIG. 1 is an external view of a probe card according to the present invention, and as shown in the figure, the probe card has a probe card main body 2.
0 is fitted onto the printed circuit board 1 via the mounting member 10 and is integrated therewith. FIG. 2 is a partially cutaway perspective view schematically showing the configuration of the first invention - that is, the end face of the ring 21 that fits and tightly fits into the central opening of the circular (but not limited to circular in the present invention) probe card body. has multiple 6 probes 2
3 are arranged radially around the probe, and the base of the probe is fixed by soldering to printed wiring 22i arranged correspondingly. A male pin 24 serving as a connection pin is inserted into the through hole of the printed wiring 22 and fixed by soldering.

一方、前記雄ビンに対応して雌ビン４かプリント基板１
に設けられたプリント配線３のスルーホールに挿入され
、このスルーホールでもって雌ピンが半田付固定されて
いる。しかして両ビンの嵌合により探針２３は両ピンを
介してプリント基板の図示しないプリント配線を通じ、
コネクタ端子田に電気的に接続されている。On the other hand, the female bottle 4 or the printed circuit board 1 corresponds to the male bottle.
The female pin is inserted into a through hole of the printed wiring 3 provided in the through hole, and a female pin is fixed by soldering through this through hole. By fitting both bottles, the probe 23 passes through both pins and through printed wiring (not shown) on the printed circuit board.
electrically connected to the connector terminal field.

なお取付部材１０とプリント基板１は図示しない取付ネ
ジによってプリント基板１の裏面側から結合密着されて
おり、取付部材１０とプローブカード本体２０はプロー
ブカード本体２０に周設された小孔２６を縦貫する取付
ネジ２７でもって結合密着されている、 しかして前述までの構成は従来のプローブカードに於て
提案実施されたものであり、本発明の最も顕著な特徴は
前記取付部材１０の内部に抜脱用ネジ（図面では六角穴
付ボルト）１３が螺入収納されていることにある。The mounting member 10 and the printed circuit board 1 are tightly coupled from the back side of the printed circuit board 1 with mounting screws (not shown), and the mounting member 10 and the probe card main body 20 are inserted vertically through a small hole 26 provided around the probe card main body 20. However, the above-mentioned configuration has been proposed and implemented in the conventional probe card, and the most remarkable feature of the present invention is that the mounting screw 27 has a mounting screw 27. The reason is that a removal screw (hexagon socket head bolt in the drawing) 13 is screwed and housed.

すなわち、取付部材１０の外縁付込には複数個の段付ネ
ジ孔１１が穿設されており、このネジ孔には。That is, a plurality of stepped screw holes 11 are bored in the outer edge of the mounting member 10.

それぞれ前記抜脱用ネジ１３が螺入収納されているとと
もに、プローブカード本体２０には前記抜脱用ネジ１３
を抜脱するための例えばレンチ挿入用の小孔２５か、段
付ネジ孔１１にそれぞれ対応して穿設されている。そし
て小孔２５の内径は抜脱用ネジ１３の頭部の径よりも小
径で、かつレンチが挿入されるだけの径を有している。The ejection screw 13 is screwed into each case, and the ejection screw 13 is screwed into the probe card main body 20.
For example, a small hole 25 for inserting a wrench or a stepped screw hole 11 is formed to correspond to the hole 25 for inserting a wrench. The inner diameter of the small hole 25 is smaller than the diameter of the head of the removal screw 13, and has a diameter large enough to insert a wrench.

ド本体をプリント基板から分離する場合について説明す
る。The case where the card body is separated from the printed circuit board will be explained.

まづ複数個ある取付ネジｎをすべて取去った後レンチで
もって抜脱用ネジ１３をそれが抜ける方向に回転する。First, after removing all the plurality of mounting screws n, use a wrench to rotate the removal screw 13 in the direction in which it will come out.

そうすると抜脱用ネジ１３は浮上するとともにその頚部
でもって、プローブカード本体を上方向に押上げること
になる。従って抜脱用ネジを順次僅かつ一抜脱、浮上せ
しめることにより、僅かな外力で均一に無理なく、プロ
ーブカード本体をプリント基板から分離することかでき
る。Then, the extraction screw 13 floats up and pushes the probe card body upward with its neck. Therefore, by sequentially removing and removing the screws slightly and floating, the probe card main body can be separated from the printed circuit board evenly and easily with a slight external force.

本実施例では抜脱用ネジ１３に頭付ネジを使用しネジ頭
を収納する為に段付ネジ孔】１を使用したが頭無しネジ
と段無しネジ孔を使用することも勿論可能である。In this embodiment, a head screw is used as the removal screw 13, and a stepped screw hole [1] is used to accommodate the screw head, but it is of course possible to use a headless screw and a stepped screw hole. .

第３図は本出願に係る第２の発明の構成を略本する部分
破断斜視図である。FIG. 3 is a partially cutaway perspective view schematically showing the configuration of the second invention according to the present application.

すなわち第３図に示すプローブカードにあっては取付ネ
ジが抜脱用ネジを兼用する如く構成されており、取付部
材】０には第２図の取付部材と同じく複数個の段付ネジ
孔１１が穿設されていて、このネジ孔には取付ネジ】４
が螺入収納されているとともに、プローブカード本体２
０には段付ネジ孔に対応して小孔墓か穿設されている。In other words, the probe card shown in FIG. 3 is configured such that the mounting screws also serve as removal screws, and the mounting member 0 has a plurality of stepped screw holes 11 as in the mounting member shown in FIG. is drilled, and this screw hole has a mounting screw】4
is screwed into the probe card body 2.
0 has a small hole grave corresponding to the stepped screw hole.

そして前記取付ネジ（但し抜脱用ネジでもある）】４の
頚部に設けた細溝には例えばＥ　ＩＪソング如き止め輪
１５が係止されている。A retaining ring 15, such as an E IJ song, is locked in a narrow groove provided in the neck of the mounting screw (but also a removal screw) 4.

従−１て取付ネジ１４を螺脱すると止め輪１５か前記の
如くプローブカード本体の裏面を押上げる結果、極めて
容易にプローブカード本体を分離することができる。な
おこの場合には止め輪】５はＥリングには限らすまたそ
の係止は取付ネジの頚部の細溝のみに限定されず、他の
適宜な係止手段であってもよい。When the attachment screw 14 is unscrewed, the retaining ring 15 pushes up the back surface of the probe card body as described above, and as a result, the probe card body can be separated very easily. In this case, the retaining ring 5 is limited to an E-ring, and its locking is not limited to the narrow groove in the neck of the mounting screw, but may be any other suitable locking means.

本発明は以上のように構成しであるので、プローブカー
ドの多探針化にも拘わらずプローブカード本体のプリン
ト基板からの分離は極めて容易であり、高価なプローブ
カードを破損するおそれがない新規なプローブカードを
提供することかできる。Since the present invention is constructed as described above, it is extremely easy to separate the probe card main body from the printed circuit board even though the probe card has a large number of probes, and there is no risk of damaging the expensive probe card. We can provide probe cards that are suitable for your needs.

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は本発明に係るプローブカードの外観図、第２図
および第３図はそれぞれ第１の発明および第２の発明の
構成を略本する部分破断斜視図である。 １・・・プリント基板、４・・・雌ピン、１０・・・取
付部材、１１・・・段付ネジ孔、１３・・・抜脱用ネジ
、１４・・・取付ネジ、】訃・・止め輪、２０・・プロ
ーブトド本体、２４・・・雄ピン。 特許出願人　日本電子材料株式会奸FIG. 1 is an external view of a probe card according to the present invention, and FIGS. 2 and 3 are partially cutaway perspective views schematically showing the configurations of the first invention and the second invention, respectively. DESCRIPTION OF SYMBOLS 1... Printed circuit board, 4... Female pin, 10... Mounting member, 11... Stepped screw hole, 13... Screw for removal, 14... Mounting screw,] Retaining ring, 20... Probe body, 24... Male pin. Patent applicant: Japan Electronic Materials Co., Ltd.

Claims (2)

【特許請求の範囲】[Claims] （１）プローブカード本体に植設した雄ピンを取付部材
に埋設した雌ピンに嵌合するようにしたプローブカード
において、取付部材に穿設したネジ孔には抜脱用ネジが
螺入収納されるとともに、前記プローブカード本体には
前記ネジ孔に対応して、抜脱用ネジの頂部よりも径小の
小孔が穿設されていることを特徴とするプローブカード
。(1) In a probe card in which a male pin embedded in the probe card body is fitted into a female pin embedded in a mounting member, a removal screw is screwed into the screw hole drilled in the mounting member. The probe card is further characterized in that the probe card main body is provided with a small hole having a smaller diameter than the top of the extraction screw, corresponding to the screw hole. （２）　　プローブカード本体に植設した雄ビンを取付
部材に埋設した雌ビンに嵌合するようにしたプローブカ
ードにおいて、取付部材に穿設した段付ネジ孔には取付
ネジが螺入収納されるとともに、前記プローブカード本
体には前記段付ネジ孔に対応して小孔が穿設されており
、かつ取付ネジの頚部には止め輪が係止されていること
を特徴とするプローブカード。(2) In a probe card in which a male bottle embedded in the probe card body is fitted into a female bottle embedded in a mounting member, the mounting screw is screwed into the stepped screw hole drilled in the mounting member. A probe card characterized in that a small hole is bored in the probe card main body in correspondence with the stepped screw hole, and a retaining ring is secured to the neck of the mounting screw.
JP11929382A 1982-07-09 1982-07-09 Probe card Granted JPS5910856A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11929382A JPS5910856A (en) 1982-07-09 1982-07-09 Probe card

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11929382A JPS5910856A (en) 1982-07-09 1982-07-09 Probe card

Publications (2)

Publication Number Publication Date
JPS5910856A true JPS5910856A (en) 1984-01-20
JPS6331742B2 JPS6331742B2 (en) 1988-06-27

Family

ID=14757817

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11929382A Granted JPS5910856A (en) 1982-07-09 1982-07-09 Probe card

Country Status (1)

Country Link
JP (1) JPS5910856A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60143372U (en) * 1984-03-06 1985-09-24 株式会社東芝 Equipment for measuring electrical characteristics of semiconductor devices
FR2571861A1 (en) * 1984-10-16 1986-04-18 Radiotechnique Compelec Measuring head for testing under points of circuits

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60143372U (en) * 1984-03-06 1985-09-24 株式会社東芝 Equipment for measuring electrical characteristics of semiconductor devices
FR2571861A1 (en) * 1984-10-16 1986-04-18 Radiotechnique Compelec Measuring head for testing under points of circuits

Also Published As

Publication number Publication date
JPS6331742B2 (en) 1988-06-27

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