JPS5898639U - photo mask holder - Google Patents

photo mask holder

Info

Publication number
JPS5898639U
JPS5898639U JP1981196493U JP19649381U JPS5898639U JP S5898639 U JPS5898639 U JP S5898639U JP 1981196493 U JP1981196493 U JP 1981196493U JP 19649381 U JP19649381 U JP 19649381U JP S5898639 U JPS5898639 U JP S5898639U
Authority
JP
Japan
Prior art keywords
photo mask
mask holder
photomask
frame members
holder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1981196493U
Other languages
Japanese (ja)
Inventor
渡辺　広道
Original Assignee
富士通株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 富士通株式会社 filed Critical 富士通株式会社
Priority to JP1981196493U priority Critical patent/JPS5898639U/en
Publication of JPS5898639U publication Critical patent/JPS5898639U/en
Pending legal-status Critical Current

Links

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of drawings]

第１図と第２図は本考案に係るフォトマスクホ・　　ル
ダを露光装置受台にセットした状態を示す平面−図と側
面図である。 〔符号の説明〕、１，２・・・・・・枠部材、３・・・
・・・フォトマスク、４・・・・・・受台。FIGS. 1 and 2 are a plan view and a side view showing a photomask holder according to the present invention set in an exposure apparatus holder. [Explanation of symbols], 1, 2... Frame member, 3...
...Photomask, 4...Case.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] フォトマスクの４隅を２枚の枠部材ではさむように保持
すると共に、該枠部材を露光装置の受台に着脱自在に取
付けてフォトマスクの位置設定を行なうようにしなるこ
とを特徴としたフォトマスクホルダ。A photomask characterized in that the four corners of the photomask are held between two frame members, and the frame members are detachably attached to a pedestal of an exposure device to set the position of the photomask. holder.
JP1981196493U 1981-12-26 1981-12-26 photo mask holder Pending JPS5898639U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1981196493U JPS5898639U (en) 1981-12-26 1981-12-26 photo mask holder

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1981196493U JPS5898639U (en) 1981-12-26 1981-12-26 photo mask holder

Publications (1)

Publication Number Publication Date
JPS5898639U true JPS5898639U (en) 1983-07-05

Family

ID=30109733

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1981196493U Pending JPS5898639U (en) 1981-12-26 1981-12-26 photo mask holder

Country Status (1)

Country Link
JP (1) JPS5898639U (en)

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