JPS5898112A - Laminate type filter unit made of fluorine-contained resin - Google Patents
Laminate type filter unit made of fluorine-contained resinInfo
- Publication number
- JPS5898112A JPS5898112A JP56197137A JP19713781A JPS5898112A JP S5898112 A JPS5898112 A JP S5898112A JP 56197137 A JP56197137 A JP 56197137A JP 19713781 A JP19713781 A JP 19713781A JP S5898112 A JPS5898112 A JP S5898112A
- Authority
- JP
- Japan
- Prior art keywords
- filter unit
- liquid
- support
- disc
- fluorine
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
Description
【発明の詳細な説明】
この発明は精密濾過用の積層型フィルタで弗素樹脂材料
のみから成るフィルタユニットに関する。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a filter unit that is a laminated filter for precision filtration and is made only of fluororesin material.
最近ＩＣ，ＬＳＩなどの電子機器部品の製造工程におい
て、エツチング用の強酸あるいは洗浄用の溶剤に混入し
た微細な粒子を除去するため、精密濾過用のフィルタが
必袂とさｎている。このような用途に用いらｎるフィル
タの材料には耐熱、耐酸および耐薬品性にすぐｎた弗素
樹脂が現在では唯一の適当な材料と云ってよい状態であ
り、炉材には従来から用いられていたが、戸がＦ液中に
溶出するので、上記のような用途のフィルタ構成部材と
して不適当であった。ちなみに弗素樹脂がフィルタの構
成部材に用いら几ないのは、溶着等の２次加工がきわめ
て困難であり従来は成形加工品のねじ等による機械的結
合方法しか利用できなかつたため、精密濾過フィルタに
適う十分なシール性が得らｎないからである。このため
弗素樹脂製の薄膜０Ｍ材と弗素樹脂製の支持体とではゾ
ールができず、従来は支持体に他の材料を用いてフィル
タユニットを構成していたものである０
この発明は上記の問題を解決したフィルタユニットを提
供するものであって、炉材および支持体共に弗素樹脂の
みから成るフィルタユニットに関するものである。Recently, in the manufacturing process of electronic device parts such as ICs and LSIs, precision filtration filters have become indispensable in order to remove fine particles mixed in strong acids for etching or cleaning solvents. At present, fluororesin, which has excellent heat, acid, and chemical resistance, is the only suitable material for filters used in such applications, and it has traditionally been used for furnace materials. However, since the door was eluted into the F liquid, it was unsuitable as a filter component for the above-mentioned applications. Incidentally, the reason why fluororesin is not used in filter components is that secondary processing such as welding is extremely difficult, and in the past, only mechanical connection methods such as screws of molded products could be used, which is why fluororesins are not used in precision filtration filters. This is because sufficient sealing performance cannot be obtained. For this reason, sol cannot be formed between the fluororesin thin film 0M material and the fluororesin support, and conventionally, filter units have been constructed using other materials for the support. The present invention provides a filter unit that solves the problem, and relates to a filter unit in which both the furnace material and the support are made of only fluororesin.
実施例によってこの発明を説明すると、第１図に平面の
一部金示し、第２図に側面の断面會示す支持体ＩＶｉ軸
方向の中央通孔２會設は友ボス部３とその周囲の円盤ｓ
４とから成る。円Ｉｉ部４はボス部３寄りから順次外側
へ環状に内側平坦ｓ５、網目部６および外側平坦部７を
上下面に夫々有している。網目部６は多数の開口６ａが
表面に設けら几その内部は網目部６、内側平坦部５、お
よびボス部３の甲に放射状に設けられ几複数の内部通路
８によって中央通孔２と連通している。To explain the present invention by way of an example, the central through hole 2 in the axial direction of the support IVi is shown in FIG. 1 as a plan view and as a side cross section in FIG. s
It consists of 4. The circle Ii portion 4 has an inner flat portion s5, a mesh portion 6, and an outer flat portion 7 in an annular manner sequentially outward from the boss portion 3 on the upper and lower surfaces, respectively. The mesh part 6 has a large number of openings 6a on its surface, and the inside thereof is radially provided in the mesh part 6, the inner flat part 5, and the instep of the boss part 3, and communicates with the central through hole 2 through a plurality of internal passages 8. ing.
弗素樹脂製の多孔質薄膜で成る環状の炉材２１が前記円
盤部４の上下面に配設さル、炉材２１の円周縁部２２は
前記内側平坦部５に液密に固着さ几て環状のシール部を
形成している。ま友Ｐ材２１の外周縁ｓ２３は前記外側
平坦部７に液密に固着さｎて環状のシール部を形成して
いる０
次に第３図ｉｃ側面の断面の一部金示す他の実施例につ
いて説明すると、支持休日はいず１も弗素樹脂製の上支
持片１１ａと下支持片１１ｂとから成り上支持片目ａ外
周の複数の爪間ｃＫよって下支持片１１ｂに係止さ几結
合さまた支持体ｌｌを形成する。An annular furnace material 21 made of a porous thin film made of fluororesin is disposed on the upper and lower surfaces of the disk portion 4, and a circumferential edge portion 22 of the furnace material 21 is fixed to the inner flat portion 5 in a liquid-tight manner. It forms an annular seal. The outer peripheral edge s23 of the friend P material 21 is liquid-tightly fixed to the outer flat part 7 to form an annular seal part. To explain an example, each support holiday consists of an upper support piece 11a and a lower support piece 11b made of fluororesin, and is connected to the lower support piece 11b by a plurality of claws cK on the outer periphery of the upper support eye a. A support 11 is formed.
上支持片＋１ａは中央通孔＋２ａを有する上ボス部ｌ３
３１上内側平坦部１５ａ、上網口部＋６ａお、しびその
外側に拶数の前記爪部＋ｔｃｔ有する。下支持片目すは
中央通孔１２ｂを有する下ボス部＋３ ｂ 、下内側平
坦部１５ｂ１下網目部１６ｂ１下外側平坦部１７ｂおる
複数の溝１８ａ・＋８ｂが設けら几ており、背面１９ａ
と背面１９ｂが接触するように重ね合わさ几て支持体１
１となり、ボス部１３と円盤部１４とを形成する。The upper support piece +1a has an upper boss portion l3 having a central through hole +2a.
31 has an upper inner flat portion 15a, an upper mesh opening portion +6a, and a number of claw portions +tct on the outer side thereof. The lower supporting one eye is provided with a lower boss part +3b having a central through hole 12b, a plurality of grooves 18a and +8b including a lower inner flat part 15b1, a lower mesh part 16b1, a lower outer flat part 17b, and a rear surface 19a.
and the back surface 19b are overlapped so that they are in contact with each other.
1, forming a boss portion 13 and a disk portion 14.
上記支持体１１の円盤部１４の上下面に弗素樹脂製の多
孔質薄膜の環状炉材２４が配設されその内周縁部２５が
内側平坦部１５ａ・１５ｂに液密に固着さ几ていること
は第１の実施例と同様である。Ｆ材２４は上下の網目部
１６ａ・＋６ｂおよび外側平坦部１７ａ寺１７ｂを蓋っ
て円盤部１４の外側に延び上下の炉材２４の外周縁部２
６が互に液密に固着されて環状のシール部を形成する。An annular furnace material 24 made of a porous thin film made of fluororesin is disposed on the upper and lower surfaces of the disk portion 14 of the support body 11, and the inner peripheral edge portion 25 of the annular furnace material 24 is fixed to the inner flat portions 15a and 15b in a liquid-tight manner. is the same as in the first embodiment. The F material 24 covers the upper and lower mesh portions 16a and +6b and the outer flat portion 17a and the temple 17b, and extends to the outside of the disk portion 14, and extends to the outer peripheral edge 2 of the upper and lower furnace materials 24.
6 are liquid-tightly fixed to each other to form an annular seal.
第１の実施例の支持体１に第２の実施例の炉材５−
２４のような炉材同志を支持体外（１１１１で固層−「
るものを用いてもよく、第２の実施例の支持体１１に第
１の実施例の炉材２Ｉのようにその外周縁＠２３ｆ外側
平坦部１７ａ−１７ｂに固着するものを用いてもよい。Furnace materials such as the furnace materials 5-24 of the second example are placed on the support 1 of the first example outside the support (1111 is a solid layer).
Alternatively, the support 11 of the second embodiment may be fixed to the outer peripheral edge @ 23f of the outer flat portion 17a-17b like the furnace material 2I of the first embodiment. .
また上下支持片＋１ａ・ｌｌｂを成型するには内部通路
が孔を穿つことなく溝でよいので成型が容易である。Moreover, in order to mold the upper and lower support pieces +1a and llb, the internal passages can be formed by grooves without having to make holes, so that molding is easy.
前記の炉材と支持体又は炉材同志の液密な固着°Ｃ〜３
２７°Ｃに加熱すると弗素樹脂は固体状態と昇華直前の
状態との間で高粘度ながら溶融状態となり、圧着され接
合部が相互に溶けおい、加熱を停止すると固着状悲とな
る。そして、その圧着圧力や上記温間範囲内での適当な
温度および加熱時間は融着部分の膜厚、形状等によ！ｌ
ｌ実験的に選択して定まるものである。Liquid-tight adhesion of the furnace material and support or furnace materials to each other °C ~ 3
When heated to 27°C, the fluororesin becomes a molten state with a high viscosity between the solid state and the state just before sublimation, and the bonded parts melt into each other, and when heating is stopped, they become stuck. The compression pressure, appropriate temperature within the above warm range, and heating time will depend on the film thickness, shape, etc. of the fused portion! l
l It is determined by experimental selection.
上記の固着状態により一体的に結合された支持体と薄膜
炉材とからなる弗素樹脂製のフィルタユ６一
ニットは炉材を通過して濾過されたＦ液１に網目部の開
口を経て支持体内部通路を通しボス部の中央通路へ導び
くがＦ材および支持体が弗素樹脂のみで成っており、熱
融着によって両者が液密にソールされていて、他の樹脂
、金属、接着剤など他の材料を含まずにフィルタユニ、
トが構成されているので、Ｆ液が強酸や強力な溶剤であ
ってもこ几らに侵さｎることなくＦ液の漬汁側に不都合
な金属や樹脂その池の有機成分等を溶出することなくｎ
密濾過の作用を持続させ前駅ＬＳＩ９造用の強酸や洗浄
液を不純化することがない。The filter unit 6 made of fluororesin, which is composed of the support and the thin film furnace material which are integrally connected in the above-mentioned fixed state, passes through the furnace material and the filtered F liquid 1 is passed through the opening of the mesh part to the support. The internal passage leads to the central passage of the boss part, but the F material and the support are made only of fluororesin, and the two are sealed liquid-tight by heat fusion, and other resins, metals, adhesives, etc. Filter Uni, without containing other materials
Even if the F solution is a strong acid or a strong solvent, it will not be attacked by these substances and will elute undesirable metals, resins, and organic components from the pickling liquid side of the F solution. Naku n
It maintains the effect of dense filtration and does not impure the strong acid or cleaning solution used to create the previous station LSI9.
第１図は本発明の実施例１示す支持体の一例の部分平面
図、第２図は第１図の実施例のフィルタユニットの側面
断面図、第３図は他の実施例を示すフィルタユニットの
側面部外断面図である。
１、ＩＩ・・・弗素樹脂製の支持体
２、＋２３．１２ｂ−・中央通孔
５．１５ａ 、 ＋５ｂ −内側平坦部６．１６ａ 、
１６ｂ−網目部
７．１７ａ、１７ｂ・・−外側平坦部
２１、２４・・・弗素樹脂薄膜戸材FIG. 1 is a partial plan view of an example of a support shown in Embodiment 1 of the present invention, FIG. 2 is a side cross-sectional view of the filter unit of the embodiment shown in FIG. 1, and FIG. 3 is a filter unit showing another embodiment. FIG. 1, II...Fluororesin support 2, +23.12b--center through hole 5.15a, +5b-inner flat portion 6.16a,
16b-Mesh portion 7.17a, 17b...-Outer flat portion 21, 24...Fluororesin thin film door material
Claims (1)
部とから成る支持体の盤状部に膜状の炉材を固着した積
層型フィルタユニットにおいて、盤状部は上下面共に中
央ボス寄りから順次に内側平坦部、多数の開***有する
網目部および外側平坦部より成り、網目部の開口は盤状
部およびボス部の中に設けた内部通路によってボス部の
前記中央通孔に連通している弗素樹脂製の支持体を具え
、弗素樹脂製の多孔質薄膜炉材を前記支持体の盤状部の
上下面に夫々配設し、上下の炉材の内周縁部を前記盤状
部の内側平坦部に熱融着で液密に固着し、前記炉材の外
周縁を前記網目部より外側において熱融着により液密に
シールして、炉材によって網目部を外部と区画したこと
を特徴とする弗素樹脂製積層型フィルタユニット。 ２前記戸材の外周縁部が前記支持体盤状部の外側平坦部
に熱融着に工す液密に固着シールされている特許請求の
範囲第１項記絨の弗素樹脂製積層型フィルタユニット。 ３前記Ｐ材の外周縁部が支持体盤状部の外方に延在して
、上下の炉材外周縁部相互が熱融着により液密に固着シ
ールされている特許請求の範囲第１項記載の弗素樹ＢＶ
ｉ製積層型フィルタユニット。[Scope of Claims] 1. In a laminated filter unit in which a membrane-like furnace material is fixed to a plate-shaped part of a support body consisting of a boss part having an axial central hole and a plate-shaped part outside the boss part, the plate-shaped The upper and lower surfaces of the part consist of an inner flat part, a mesh part containing a large number of openings, and an outer flat part in order from the central boss side. A porous thin film furnace material made of fluororesin is disposed on the upper and lower surfaces of the plate-shaped portion of the support, and the inside of the upper and lower furnace materials is provided. The peripheral edge part is liquid-tightly fixed to the inner flat part of the plate-shaped part by heat fusion, and the outer periphery of the furnace material is liquid-tightly sealed by heat fusion on the outside of the mesh part, so that the mesh part is formed by the furnace material. A fluororesin laminated filter unit characterized by a section separated from the outside. 2. The fluororesin laminated filter as set forth in claim 1, wherein the outer peripheral edge of the door material is sealed in a liquid-tight manner by heat-sealing to the outer flat part of the support disc-shaped part. unit. 3. The outer circumferential edge of the P material extends outward from the support disc-shaped portion, and the outer circumferential edges of the upper and lower furnace materials are liquid-tightly sealed by thermal fusion. Fluorine tree BV described in section
i-manufactured laminated filter unit.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56197137A JPS5898112A (en) | 1981-12-08 | 1981-12-08 | Laminate type filter unit made of fluorine-contained resin |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56197137A JPS5898112A (en) | 1981-12-08 | 1981-12-08 | Laminate type filter unit made of fluorine-contained resin |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5898112A true JPS5898112A (en) | 1983-06-10 |
| JPS6328654B2 JPS6328654B2 (en) | 1988-06-09 |
Family
ID=16369365
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP56197137A Granted JPS5898112A (en) | 1981-12-08 | 1981-12-08 | Laminate type filter unit made of fluorine-contained resin |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5898112A (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01218605A (en) * | 1988-02-26 | 1989-08-31 | Asahi Chem Ind Co Ltd | Hollow fiber type filtration module |
| JP2002535133A (en) * | 1999-01-29 | 2002-10-22 | ミリポア・コーポレイション | Perfluorinated thermoplastic filter cartridge |
| US7254212B2 (en) | 2003-04-16 | 2007-08-07 | Horiba, Ltd. | Particulate matter analyzer, collecting filter and system for analyzing and collecting samples from fluids |
| JP2018057339A (en) * | 2016-10-06 | 2018-04-12 | ジェックス株式会社 | Water supply device for pet and filter thereof |
| JP2018057340A (en) * | 2016-10-06 | 2018-04-12 | ジェックス株式会社 | Water supply device for pet and filter thereof |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3077020B2 (en) | 1996-04-25 | 2000-08-14 | 株式会社キッツ | Hollow fiber type separation membrane module |
Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4962563A (en) * | 1972-10-19 | 1974-06-18 | ||
| JPS5118991A (en) * | 1974-06-28 | 1976-02-14 | Cyprus Metallurg Process | Kinzokuryukabutsuno sankaho |
| JPS5210915A (en) * | 1975-07-15 | 1977-01-27 | Kawasaki Heavy Ind Ltd | Multiple bend |
| JPS5522504A (en) * | 1978-06-15 | 1980-02-18 | Nippon Denso Co Ltd | Heating apparatus employing hot water |
| JPS5525964A (en) * | 1978-08-15 | 1980-02-25 | Matsushita Electric Works Ltd | Illuminating device |
| JPS5617216A (en) * | 1979-07-24 | 1981-02-19 | Central Jidosha Kk | Plastic press die and production thereof |
| JPS5628602A (en) * | 1979-08-14 | 1981-03-20 | Nitto Electric Ind Co Ltd | Production of liquid separating pipe |
| JPS5649606A (en) * | 1979-09-28 | 1981-05-06 | Japanese National Railways<Jnr> | Sensing method for relative position between car mounted magnet of linear synchronous motor and ground conductor during car it stopped |
| JPS56129016A (en) * | 1979-11-05 | 1981-10-08 | Rimipoa Corp | Filter cartridge and method of manufacturing said filter cartridge and its forming element |
-
1981
- 1981-12-08 JP JP56197137A patent/JPS5898112A/en active Granted
Patent Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4962563A (en) * | 1972-10-19 | 1974-06-18 | ||
| JPS5118991A (en) * | 1974-06-28 | 1976-02-14 | Cyprus Metallurg Process | Kinzokuryukabutsuno sankaho |
| JPS5210915A (en) * | 1975-07-15 | 1977-01-27 | Kawasaki Heavy Ind Ltd | Multiple bend |
| JPS5522504A (en) * | 1978-06-15 | 1980-02-18 | Nippon Denso Co Ltd | Heating apparatus employing hot water |
| JPS5525964A (en) * | 1978-08-15 | 1980-02-25 | Matsushita Electric Works Ltd | Illuminating device |
| JPS5617216A (en) * | 1979-07-24 | 1981-02-19 | Central Jidosha Kk | Plastic press die and production thereof |
| JPS5628602A (en) * | 1979-08-14 | 1981-03-20 | Nitto Electric Ind Co Ltd | Production of liquid separating pipe |
| JPS5649606A (en) * | 1979-09-28 | 1981-05-06 | Japanese National Railways<Jnr> | Sensing method for relative position between car mounted magnet of linear synchronous motor and ground conductor during car it stopped |
| JPS56129016A (en) * | 1979-11-05 | 1981-10-08 | Rimipoa Corp | Filter cartridge and method of manufacturing said filter cartridge and its forming element |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01218605A (en) * | 1988-02-26 | 1989-08-31 | Asahi Chem Ind Co Ltd | Hollow fiber type filtration module |
| JP2002535133A (en) * | 1999-01-29 | 2002-10-22 | ミリポア・コーポレイション | Perfluorinated thermoplastic filter cartridge |
| US7254212B2 (en) | 2003-04-16 | 2007-08-07 | Horiba, Ltd. | Particulate matter analyzer, collecting filter and system for analyzing and collecting samples from fluids |
| US8012231B2 (en) | 2003-04-16 | 2011-09-06 | Horiba, Ltd. | Particulate matter analyzer, collecting filter and system for analyzing and collecting samples from fluids |
| JP2018057339A (en) * | 2016-10-06 | 2018-04-12 | ジェックス株式会社 | Water supply device for pet and filter thereof |
| JP2018057340A (en) * | 2016-10-06 | 2018-04-12 | ジェックス株式会社 | Water supply device for pet and filter thereof |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6328654B2 (en) | 1988-06-09 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US4663041A (en) | Fluorocarbon filter element | |
| US5556541A (en) | Process for making hermetically sealed filter units and filters made thereby | |
| EP1088640B1 (en) | Method for sealing a filter element in a filter cartridge and filter devices produced therefrom | |
| JPH11502771A (en) | Filter cartridge having an etched track membrane and method of making same | |
| US5230760A (en) | Method for manufacturing micro membrane pleats type filter cartridge | |
| SE8007745L (en) | FILTER PATTERN AND SET AND COMPONENTS FOR PREPARING IT | |
| JPH084720B2 (en) | Plate-shaped porous thin film laminated filter and method for producing the same | |
| US4680118A (en) | Pleated and sealed filter cartridge with connected film | |
| JPS5898112A (en) | Laminate type filter unit made of fluorine-contained resin | |
| JPS60153902A (en) | Capsule type filter and its preparation | |
| JPH03118807A (en) | Color-marked throwaway filter holder | |
| JPH0810522A (en) | Filter for high viscosity fluid | |
| JPS5831205B2 (en) | Ekitaioyobi Kitairokasouchi | |
| JPH0445812A (en) | Supporting formation of filter | |
| JPH0372324B2 (en) | ||
| JPH0671535B2 (en) | Flat thin film laminated filter | |
| JPH0194903A (en) | Production of filter cartridge | |
| JPS6372305A (en) | Bonding method for filter membrane of filter cartridge | |
| JPH06218240A (en) | Production of membrane module | |
| JPS5898111A (en) | Laminated filter cartridge made of fluorine-contained resin | |
| JPH05329338A (en) | Production of pleat type filter element | |
| JPS6335770Y2 (en) | ||
| JPH0639783Y2 (en) | Stacked filter cartridge | |
| JPH0353011B2 (en) | ||
| JPH067766Y2 (en) | Filter element |