JPS5857681B2 - Precision measuring device - Google Patents
Precision measuring deviceInfo
- Publication number
- JPS5857681B2 JPS5857681B2 JP16235278A JP16235278A JPS5857681B2 JP S5857681 B2 JPS5857681 B2 JP S5857681B2 JP 16235278 A JP16235278 A JP 16235278A JP 16235278 A JP16235278 A JP 16235278A JP S5857681 B2 JPS5857681 B2 JP S5857681B2
- Authority
- JP
- Japan
- Prior art keywords
- stylus
- frequency
- amplitude
- contact
- vibration
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
Description
【発明の詳細な説明】
本発明はプレス型、モデル等の各部寸法測定装置、ある
いは尺、対象物間の長さ、距離の測定装置、また接触状
態の検出装置、特に先端部材の改良である。DETAILED DESCRIPTION OF THE INVENTION The present invention is an improvement of a device for measuring dimensions of press dies, models, etc., a device for measuring scales, lengths and distances between objects, and a device for detecting contact status, especially for tip members. .
従来の装置は連続してアナログ的に移動して、そのとき
の近接度とか接触度を検出するものであるが、変化量が
少ない微小移動ではそれの検出判定が困難で、接触程度
によって誤差が大きく正確度が低下する欠点があった。Conventional devices move continuously in an analog manner and detect the degree of proximity or contact at that time, but it is difficult to detect and judge minute movements with small amounts of change, and errors may occur depending on the degree of contact. The drawback was that the accuracy was greatly reduced.
本発明は触針に振動を行なわせ、触針と被測定体との接
近距離に応じて振巾を減少させる制御を行なうことによ
って精度の向上とｍｌｊ定操作を容易にし従来の欠点を
除去したものである。The present invention makes the stylus vibrate and performs control to reduce the amplitude according to the approach distance between the stylus and the object to be measured, thereby improving accuracy and facilitating mlj constant operation and eliminating the drawbacks of the conventional method. It is something.
以下一実施例図により説明すると、第１図において、１
はＡｌＦｅ 、 Ｎｉ系、Ｐ ｂ Ｔ １０３系、Ｐｂ
（ＴＩｚｒ）０３系等磁歪、電歪材の振動子で、２が振
動伝達ホーン、３が触針、４は振動子１に高周波振動エ
ネルギを供給する発振器、５は発振変化を検出する検出
器であり、検出信号（ζ応して発振器４を制御するよう
にしである。Below, explanation will be given with reference to the drawings of an embodiment. In Fig. 1, 1
is AlFe, Ni-based, P b T 103-based, Pb
(TIzr) 03 series isomagnetostrictive and electrostrictive material vibrator, 2 is a vibration transmission horn, 3 is a stylus, 4 is an oscillator that supplies high frequency vibration energy to the vibrator 1, and 5 is a detector that detects oscillation changes. The oscillator 4 is controlled in response to the detection signal (ζ).
第２図は振動子１として水晶を用いたマルチバイブレー
クで、支持板ｌＬ１２間にパルス電圧を加えて振動させ
る。FIG. 2 shows a multi-vibrator using a crystal as the vibrator 1, which is vibrated by applying a pulse voltage between the supporting plates 1L12.
マルチバイブレークはオン・オフトランジスタＴ１．Ｔ
２と回路定数Ｃ１，Ｃ２゜Ｒ７，Ｒ２により横取され、
トランジスタＴ２のコレクターエミッタ間のパルス電圧
を振動子１に加える。Multi-by-break is an on/off transistor T1. T
2 and the circuit constants C1, C2°R7, R2,
A pulse voltage between the collector and emitter of the transistor T2 is applied to the vibrator 1.
１２は水晶片に対向した検出板で、振動にもとすく電圧
信号が検出され、これをトランジスタＴ２のコレクタ電
流を制御するトランジスタＴ３に加えて制御する。Reference numeral 12 denotes a detection plate facing the crystal piece, which detects a voltage signal due to vibrations, and adds this to the transistor T3 which controls the collector current of the transistor T2.
発振周波数は２〜３ＫＨ２から１０〜５０ＫＨ２程度、
先端触針３の振巾は０．１〜１μから２〜１０μ程度を
利用する。The oscillation frequency is about 2-3KH2 to 10-50KH2,
The amplitude of the tip stylus 3 is approximately 0.1 to 1 μ to 2 to 10 μ.
触針３の振動は何物にも近接または接触しないでフリー
の状態にあるときは振巾振動数に変化はなく、所定の振
巾、振動数で振動しでいるが、触針３が対象物直に近接
し接触すると前記振動に変化を生じ、変化度が接触状態
によって変化するから、これを検出器５で検出する。When the stylus 3 is in a free state without being close to or in contact with anything, there is no change in the amplitude and frequency, and it continues to vibrate at a predetermined amplitude and frequency, but the stylus 3 is the target. When the object comes into close contact with an object, the vibration changes, and the degree of change changes depending on the state of contact, which is detected by the detector 5.
検出器５で検出信号を判別し表示したり自動的に触針３
の送りを停止することによって常に一定の接触程度で長
さ、距離等の測定ができる。The detector 5 distinguishes and displays the detection signal, and the stylus 3
By stopping the feed, length, distance, etc. can be measured with constant contact.
第２図において、水晶片として０．９９２％（Ｐｂ２
（Ｍ、９了Ｎｂ−ｙ）−０，０６３％Ｔｉ０−０．４３
７％Ｚｒ−０，５％０３）＋０．００８％ｃｂｏを１．
２００°Ｃ２２００ｋｇ／ｃｉｔ、 ２Ｈの焼結を空気
中で行ない、その後１６００Ｇ、０゜５Ｈ５ＫＶ／關の
ＤＣ電圧を印加して熱処理したものを用いたとき、６Ｖ
、０．３６ｍＡで駆動し発振周波数６．８ＫＨｚで発振
した、これを対象物に近づけるとインピーダンスが増加
して発振周波数が低下する、更に接触すれば周波数は急
減する。In Figure 2, the crystal piece is 0.992% (Pb2 (M, 9 completed Nb-y) - 0,063% Ti0 - 0.43
7%Zr-0,5%03)+0.008%cbo 1.
When using a product that was sintered at 200°C, 2200kg/cit, 2H in air, and then heat-treated by applying a DC voltage of 1600G, 0°5H5KV/degree, 6V
, it was driven at 0.36 mA and oscillated at an oscillation frequency of 6.8 KHz. When it is brought close to an object, the impedance increases and the oscillation frequency decreases, and if it comes into contact further, the frequency decreases rapidly.
近接によりインピーダンスが増大して水晶片の振動数が
低下すると、検出端１３の検出信号が低減し、信号によ
って制御されるトランジスタＴ３が導通抵抗を増大する
。When the impedance increases due to proximity and the frequency of the crystal piece decreases, the detection signal at the detection end 13 decreases, and the transistor T3 controlled by the signal increases the conduction resistance.
したがって今まで変化しなかった発振出力のトランジス
タＴ２のコレクタ電圧を電圧降下により低減制御し水晶
振動子１に加える振動電力を低下する。Therefore, the collector voltage of the transistor T2 whose oscillation output has not changed until now is controlled to be reduced by a voltage drop, and the oscillation power applied to the crystal resonator 1 is reduced.
周知のように励起するパワーが低下すれば振動子１は振
巾を減少し、今までより微小振動するようになる。As is well known, when the excitation power decreases, the amplitude of the vibrator 1 decreases, causing it to vibrate more minutely than before.
この振巾変化は触針３の対象物への近接、接触程度によ
って、接触圧が高まれば高まるほど振巾は低下するよう
になる。This amplitude change depends on the proximity of the stylus 3 to the object and the degree of contact, and as the contact pressure increases, the amplitude decreases.
振動子は電歪材に限らす磁歪材でも同様である。The same applies even if the vibrator is made of a magnetostrictive material other than an electrostrictive material.
以上による接触検知の測定操作に当っては、先づ始めに
は振動子１に加わるパワーを増大しで振動振巾を増大し
ておく、そして先端触針３を対象物に接近させる。In the above-described contact detection measurement operation, first, the power applied to the vibrator 1 is increased to increase the vibration amplitude, and the tip stylus 3 is brought closer to the object.
次第に距離が狭まると、あるところで振巾が大きいので
接近距離が大きくても先端が僅かに接触開離するように
なる。As the distance gradually narrows, the amplitude is large at a certain point, so even if the approach distance is large, the tips will come into contact and separate slightly.
この僅か接触でも、今までの自由振動時に比べて振動数
が低下するから、これをキャッチして、第２図のトラン
ジスタＴ３の抵抗を増加し出力を低下させるよう制御す
る。Even this slight contact lowers the vibration frequency compared to the previous free vibration, so this is caught and controlled to increase the resistance of the transistor T3 in FIG. 2 and reduce the output.
振動子１に加わるパワーの減少により振動振巾が低下す
るから、そのまＸの位置では触針３は対象物に接触しな
くなる。Since the vibration amplitude decreases due to the decrease in the power applied to the vibrator 1, the stylus 3 no longer comes into contact with the object at the position X.
そこで更に近接送りを与えて接近してやると再び触針３
が対象物と接触し振動数を低下するから、これを信号と
して振動パワーを減少し、これを連続的に繰返しながら
振動振巾を次第に減少し触針３を対象物に近づけてやり
、振動数、振巾等の減少状態を所定値で判別して所定に
なったところで近接送りを止めてやれば常に一定の近接
または接触程度で先端触針３を接近して長さ距離等を正
確に検出測定ができることになる。Then, when I gave the proximity feed further and approached the stylus again, the stylus 3
When the stylus 3 comes into contact with the object and its frequency decreases, this signal is used as a signal to reduce the vibration power, and while this process is repeated continuously, the vibration amplitude is gradually reduced and the stylus 3 is brought closer to the object, causing the vibration frequency to decrease. If the decreasing state of the oscillation width, etc. is determined by a predetermined value, and the proximity feed is stopped when the predetermined value is reached, the tip stylus 3 is always approached at a constant proximity or contact level to accurately detect length, distance, etc. This allows measurements to be taken.
振巾は始めに１０μ位にし接近送りにしたがって次第に
減少しｌμ程度まで減少するようにすれば、１μ精度で
検出測定することができる。If the oscillation width is initially set to about 10μ and gradually decreases to about 1μ as the feed approaches, detection and measurement can be performed with an accuracy of 1μ.
測定送り操作及び振巾制御は手動または自動制御によっ
てするが、判定結果をメータ、ランプ等に表示して、ま
た判別信号にたり制御回路を制御して行なわせることに
よって得られる。The measurement feed operation and swing width control are performed manually or automatically, and can be obtained by displaying the determination result on a meter, lamp, etc., and by controlling a control circuit based on a determination signal.
なお振巾制御は振動数を変化させることによってもでき
、振動数を増加させれば振巾が小さくなり、振動数を減
少させれば振巾が大きくなるので、２０〜３０ＫＨ２程
度から３〜５ＫＨ２程度に変化させ、これにより接近状
態に応じて振巾制御をすることができる。The amplitude can also be controlled by changing the vibration frequency; increasing the frequency will reduce the amplitude, and decreasing the frequency will increase the amplitude, so from about 20 to 30 KH2 to 3 to 5 KH2. This allows the amplitude to be controlled depending on the approach state.
接近状態の検出は反射波を利用することも、圧力変化、
通電変化を利用することもできる。Approach state can be detected by using reflected waves, pressure changes,
It is also possible to use changes in energization.
以上のように測定操作に、始めに対象物との距離が大き
い間は振巾を太きくしているからラフな粗送りができ、
近接送りが極めて容易にでき、しかもこの粗送りで接近
が検出されたとき振巾を小さく制御し最終的には１μ乃
至はそれ以下になるよう制御して精密な送りを行なって
検出測定を行なうから測定正確度は１μ前後の精密阻Ｊ
定が行なえることになる。As mentioned above, during the measurement operation, the amplitude is widened while the distance to the object is large, so rough coarse feed is possible.
Proximity feeding is extremely easy, and when approach is detected with this coarse feeding, the amplitude is controlled to a small value, ultimately controlling it to 1μ or less, and precise feeding is performed to perform detection measurements. The measurement accuracy is around 1 μm.
This will allow you to make decisions.
なお振動はレシプロ振動に限らす、先端の１振り振動で
あってもよく、振動による近接々触による振動変化を検
出するから極めて簡単に高精度に検出することができる
。Note that the vibration is not limited to reciprocating vibration, and may be one swing vibration of the tip, and since changes in vibration caused by close contact are detected, it can be detected extremely easily and with high precision.
第１図は本発明の一実施例概略構成図、第２図はその一
部詳細図である。
１は振動子、２伝達ホーン、３は触針、４は発振器、５
は検出制御回路である。FIG. 1 is a schematic configuration diagram of an embodiment of the present invention, and FIG. 2 is a partially detailed diagram thereof. 1 is a vibrator, 2 is a transmission horn, 3 is a stylus, 4 is an oscillator, 5
is the detection control circuit.
Claims (1)
その接近接触度を検出して長さ、位置等を測定する装置
において、前記触針を振動させる高周波振動装置を設け
ると共に、前記触針と被測定体との接近状態を検出する
検出装置を設け、該検出装置の検出にもとづき前記触針
の被測定体への接近に応じて前記触針の振幅を減少させ
るよう前記高周波振動装置の制御をする制御装置を設け
たことを特徴とする精密測定装置。 ２ 高周波発振器の周波数またはパワーを制御して触針
の振巾を制御することを特徴とする特許請求の範囲第１
項に記載の精密測定装置。 ３ 振動子の振動数低下を検出する装置を設け、該検出
装置により高周波発振器の周波数またはパワーを制御し
て触針の振巾を減少するようにしたことを特徴とする特
許請求の範囲第１項または第２項に記載の精密測定装置
。[Claims] 1. Providing approach feed to the tip stylus toward the object to be measured, and
A device for measuring length, position, etc. by detecting the degree of close contact is provided with a high-frequency vibration device that vibrates the stylus, and a detection device that detects the state of approach between the stylus and the object to be measured. Precision measurement, characterized in that a control device is provided for controlling the high-frequency vibration device so as to reduce the amplitude of the stylus in accordance with the approach of the stylus to the object to be measured based on the detection by the detection device. Device. 2 Claim 1, characterized in that the amplitude of the stylus is controlled by controlling the frequency or power of a high-frequency oscillator.
Precision measuring equipment as described in section. 3. Claim 1, characterized in that a device for detecting a decrease in the frequency of the vibrator is provided, and the frequency or power of the high-frequency oscillator is controlled by the detection device to reduce the amplitude of the stylus. Precision measuring device according to item 1 or 2.
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16235278A JPS5857681B2 (en) | 1978-12-22 | 1978-12-22 | Precision measuring device |
| US06/038,174 US4294121A (en) | 1978-06-06 | 1979-05-11 | Position measuring system |
| DE7979301031T DE2965496D1 (en) | 1978-06-06 | 1979-06-01 | Solid surface detecting and measuring device and method |
| EP79301031A EP0006022B1 (en) | 1978-06-06 | 1979-06-01 | Solid surface detecting and measuring device and method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16235278A JPS5857681B2 (en) | 1978-12-22 | 1978-12-22 | Precision measuring device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5585204A JPS5585204A (en) | 1980-06-27 |
| JPS5857681B2 true JPS5857681B2 (en) | 1983-12-21 |
Family
ID=15752924
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16235278A Expired JPS5857681B2 (en) | 1978-06-06 | 1978-12-22 | Precision measuring device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5857681B2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001264050A (en) * | 2000-03-14 | 2001-09-26 | Mitsutoyo Corp | Minute shape measuring apparatus |
-
1978
- 1978-12-22 JP JP16235278A patent/JPS5857681B2/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5585204A (en) | 1980-06-27 |
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