JPS5855642B2 - Kanshitsusoshi - Google Patents
KanshitsusoshiInfo
- Publication number
- JPS5855642B2 JPS5855642B2 JP50102067A JP10206775A JPS5855642B2 JP S5855642 B2 JPS5855642 B2 JP S5855642B2 JP 50102067 A JP50102067 A JP 50102067A JP 10206775 A JP10206775 A JP 10206775A JP S5855642 B2 JPS5855642 B2 JP S5855642B2
- Authority
- JP
- Japan
- Prior art keywords
- humidity
- moisture
- present
- sensing element
- powder
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
- Compositions Of Oxide Ceramics (AREA)
- Non-Adjustable Resistors (AREA)
Description
【発明の詳細な説明】
本発明は酸化物半導体からなり、湿度を電気抵抗の変化
として検出する感湿素子に関する。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a humidity sensing element that is made of an oxide semiconductor and detects humidity as a change in electrical resistance.
周知のように一般に金属酸化物（Ｆｅ０４ 、Ｆｅ２０
３ＡＩ ２０３ ＊ Ｃｒ２０３等）は吸水性にすぐれ
ているため感湿素子として利用できる。As is well known, metal oxides (Fe04, Fe20
3AI 203 * Cr203, etc.) has excellent water absorbency and can be used as a moisture sensing element.
すなわちこの種の金属酸化物の微粉末を一対の対向電極
を有する無機質絶縁基板の表面に被着してなる層が、湿
度の変化に応じてその電気抵抗が大幅に変化することを
利用したものである。In other words, it takes advantage of the fact that the electrical resistance of a layer formed by depositing this type of metal oxide fine powder on the surface of an inorganic insulating substrate with a pair of opposing electrodes changes significantly in response to changes in humidity. It is.
上記金属酸化物の微粉末を利用した感湿素子は物理的、
化学的、熱均に安定であるが、一般に固有抵抗が高いた
め吸脱湿現象によって多少の抵抗変化があってもこれを
電気的に高精度に検出することはむずかしい。Moisture sensing elements using fine powder of the above metal oxides are physically
Although it is chemically and thermally stable, it generally has a high specific resistance, so even if there is a slight change in resistance due to moisture absorption and desorption phenomena, it is difficult to electrically detect this with high precision.
そこで固有抵抗を低下させる試みがいくつかなされてお
り、たとえばアルカリ金属酸化物（Ｌ １２０− Ｋ２
Ｏ−Ｎｏ ２０等）を添加含有せしめることが行なわれ
ている。Therefore, several attempts have been made to lower the resistivity, such as using alkali metal oxides (L 120-K2
O-No. 20, etc.) have been added.
しかしながら、この場合、湿度サイクルの履歴が著るし
く大きくなる欠点があるばかりでなく、再現性が悪かっ
たり経時変化も大きいなどの欠点がある。However, in this case, there are disadvantages that not only the humidity cycle history becomes significantly large, but also that reproducibility is poor and changes over time are large.
従って、本発明は上記欠点の除去された感湿素子を提供
しようとするものである。Accordingly, the present invention aims to provide a moisture-sensitive element in which the above-mentioned drawbacks are eliminated.
本発明の感湿素子は、Ｌ ｔ ２Ｍ ｅ Ｔ ｉ３０ｇ
からなる焼結体に少なくとも一対の電極を設けてなる感
湿素子及びＬｉ２ＭｅＴｉ３０ｇ５モル以上（たたし１
００モル幅を除く）、Ｚ ｎ ０９５モル係以下（ただ
し０モル％を除く）の組成を採る焼結体に少なくとも一
対の電極を設けてなる感湿素子である（ただし、Ｍｅは
ＣｄｅＣｏ、Ｃｕ、Ｍｇ、Ｍｎ、Ｚｎのうち少なくとも
一種）。The moisture sensitive element of the present invention has a temperature of L t 2M e T i30g
A moisture sensing element comprising at least one pair of electrodes provided on a sintered body made of
It is a moisture-sensitive element comprising at least one pair of electrodes provided on a sintered body having a composition of Z n 095 molar percentage or less (excluding 0 mol%) (however, Me is CdeCo, Cu , Mg, Mn, and Zn).
即ち本発明の感湿素子は酸化カドミニウム、炭酸コバル
ト、酸化銅、炭酸マグネシウム、炭酸マンガン、酸化亜
鉛のうち少なくとも一種と、炭酸リチウム、酸化チタン
を組成分として焼結してなる疑スピネル構造をもつＬ
ｉ ２ＭｅＴ ｉ ３０Ｂを必須外とし、要すれば酸化
亜鉛を混合し、プレス成形して得られたものを本体とし
てなるものである。That is, the moisture sensing element of the present invention has a pseudo-spinel structure formed by sintering at least one of cadmium oxide, cobalt carbonate, copper oxide, magnesium carbonate, manganese carbonate, and zinc oxide, as well as lithium carbonate and titanium oxide. L
The main body is obtained by press molding, excluding i 2MeT i 30B and mixing zinc oxide if necessary.
本発明において主成分をなすＬ ｉ ２Ｍｅ Ｔ ｉ
３０ｇ粉末は例えばＬｉ２ＣＯ３，Ｍｅ Ｏ（Ｍｅ ＝
Ｃｄ 、 Ｃｏ 。In the present invention, L i 2Me T i which is the main component
30g powder is, for example, Li2CO3, Me O (Me =
Cd, Co.
Ｃｕ 、Ｍｇ、Ｍｎ Ｚｎのうち少なくとも一種）およ
びＴｉＯ２を１：１：３のモル比に正確に秤取し、これ
をボールミルによってよく混合し、７００℃程度の温度
で１時間前後予備焼成し、粉砕することによって容易に
得られる。At least one of Cu, Mg, Mn, Zn) and TiO2 are weighed out in a molar ratio of 1:1:3, mixed well with a ball mill, and pre-calcined at a temperature of about 700°C for about 1 hour. Easily obtained by grinding.
しかして本発明の感湿素子は、上記Ｌ ｉ２Ｍｅ Ｔ
ｔ ３０Ｂ粉末のみまたはＬ ｉ ２ＭｅＴ １３０ｇ
粉末にＺｎＯ粉末を添加混合したものを原料としてプレ
ス成形、焼成して得ることができる。Therefore, the moisture sensitive element of the present invention has the above-mentioned L i2Me T
t 30B powder only or Li 2MeT 130g
It can be obtained by press-molding and firing a powder obtained by adding and mixing ZnO powder as a raw material.
しかしＺｎＯ成分を添加混合する場合には、その組成比
は９５モル幅以下に選択する必要がある。However, when adding and mixing the ZnO component, the composition ratio needs to be selected to be 95 molar range or less.
その理由はＺｎＯの組成比が９５モル％以上を占めると
湿度に対する抵抗値の変化幅が小さくなり実用上適さな
くなるからである。The reason for this is that if the composition ratio of ZnO is 95 mol % or more, the range of change in resistance value with respect to humidity becomes small, making it unsuitable for practical use.
次に本発明について具体例を挙げて説明する。Next, the present invention will be explained by giving specific examples.
先ずＬｉ２ＣＯ３，ＭｅＯ（Ｍｅ＝Ｃｄ 、Ｃｏ 、Ｃ
ｕ 。First, Li2CO3, MeO (Me=Cd, Co, C
u.
Ｍｇ 、Ｍｎ 、Ｚｎのうち少なくとも一種）およびＴ
ｉＯ２をモル比で１：１：３の組成比に正確に秤取し、
ボールミルによってよく混合した。at least one of Mg, Mn, Zn) and T
Accurately weigh iO2 to a composition ratio of 1:1:3 in molar ratio,
Mix well by ball mill.
しかる後この混合物を７００℃で１時間予備焼成を施し
てからボールミルによって粉砕してＬｔ ２ＭｅＴｉ３
０Ｂ（Ｍｅ＝Ｃｄ、Ｃｏ、Ｃｕ、Ｍｇ、Ｍｎ、Ｚｎのう
ち少なくとも一種）を得た。Thereafter, this mixture was pre-calcined at 700°C for 1 hour and then ground in a ball mill to obtain Lt2MeTi3.
0B (Me=at least one of Cd, Co, Cu, Mg, Mn, and Zn) was obtained.
かくして得たＬｉ２ＭｅＴｉ３０ｇ粉末とＺｎＯ粉末と
を次表に示す如き組成比（モル幅）に選び混合したりし
て比較例を含め５７種の原料を調製用意した。57 kinds of raw materials including comparative examples were prepared by mixing 30 g of the Li2MeTi powder thus obtained and the ZnO powder at the composition ratio (mole width) shown in the following table.
次いで上記原料粉末にポリビニルアルコール、（粘結剤
）を加え１トン／ｃｓｔの圧力でプレス成形してから８
００〜１３００℃の温度で２時間加熱焼結して厚さ１山
、径２０順の円板形焼結体を得た。Next, polyvinyl alcohol (binder) was added to the raw material powder and press-molded at a pressure of 1 ton/cst.
The mixture was heated and sintered at a temperature of 00 to 1300° C. for 2 hours to obtain a disk-shaped sintered body with a thickness of 1 peak and a diameter of 20 degrees.
この円板形焼結体の主面に銀ペーストを焼付は一対の電
極を設ける一方リード線を半田付けして感湿素子をそれ
ぞれ作成した。A silver paste was baked on the main surface of this disc-shaped sintered body, a pair of electrodes were provided, and lead wires were soldered to each to produce moisture-sensitive elements.
第１図は上記感湿素子を平面的に示したもので１は焼結
体を２．２′は電極を３，３′はリード線を示す。FIG. 1 is a plan view of the above-mentioned humidity sensing element, in which 1 is a sintered body, 2 and 2' are electrodes, and 3 and 3' are lead wires.
上記によってそれぞれ得た感湿素子について相対湿度と
抵抗値との関係を表２．に示す。Table 2 shows the relationship between relative humidity and resistance value for the humidity sensing elements obtained as above. Shown below.
第２図に実施例３５の相対湿度−抵抗値特性を示す。FIG. 2 shows the relative humidity-resistance value characteristics of Example 35.
湿度サイクルによるずれが認められず、安定した特性を
示した。No deviation due to humidity cycles was observed, and stable characteristics were exhibited.
第２図には参考までに従来例としてマグネタイトコロイ
ド型の場合も併せて示した。For reference, FIG. 2 also shows a magnetite colloid type case as a conventional example.
さらに実施例２８．４２．４９について４０℃相対湿度
９５％下１０００Ｈｒ放置し、特性（抵抗値−湿度関係
）の経時変化を求めたところ、第３図に示す如くであっ
た。Further, Examples 28, 42, and 49 were left for 1000 hours at 40° C. and 95% relative humidity, and changes in characteristics (resistance value-humidity relationship) over time were determined, as shown in FIG.
図からも明らかなように本発明に係るＬ ｉ２ＭｅＴ
１３０ｇ系の感湿素子は抵抗値の変化がほとんどみられ
ず経時に対しても安定している。As is clear from the figure, Li2MeT according to the present invention
The 130 g moisture sensitive element shows almost no change in resistance value and is stable over time.
このように本発明に係る感湿素子は常に所要の特性を示
し、湿度サイクルによるずれもなく且つ、湿度変化に対
する抵抗変化も大きいので、正確に湿度を測定しうろこ
とになるので、その製造の容易さ、取扱品さなどの点と
相俟って実用上多くの利点をもたらすものと云える。As described above, the humidity sensing element according to the present invention always exhibits the required characteristics, does not deviate due to humidity cycles, and has a large change in resistance against changes in humidity, making it easy to accurately measure humidity. It can be said that it brings many practical advantages in combination with the ease of handling and ease of handling.
第１図は本発明に係る感湿素子の構成例を示す平面図、
第２図は本発明に係る感湿素子について相対湿度と抵抗
値との関係を示す特性図、第３図は本発明に係る感湿素
子についての経時特性を示す図である。FIG. 1 is a plan view showing an example of the configuration of a moisture-sensitive element according to the present invention;
FIG. 2 is a characteristic diagram showing the relationship between relative humidity and resistance value of the humidity sensing element according to the present invention, and FIG. 3 is a diagram showing the temporal characteristics of the humidity sensing element according to the present invention.
Claims (1)
れた少なくとも一種）からなる焼結体に少なくとも一対
の電極を具備してなる感湿素子。 ２ Ｌ ｉ２Ｍｅ Ｔ ｔ ３０ Ｂ （Ｍｅ＝Ｃｄ、Ｃｏ、Ｃｕ、Ｍｇ、Ｍｎ、Ｚｎから選ば
れた少なくとも一種）５モル２以上（ただし１００モル
％を除く）、Ｚｎ０９５％以下（ただし０モル％を除く
）の組ｇ＋採る焼結体に少なくとも一対の電極を具備し
てなる感湿素子。[Scope of Claims] A moisture sensing element comprising at least one pair of electrodes on a sintered body made of I L i2MeT 1 ass (Me=at least one selected from Cd, Co, CutMgtMn, and Zn). 2 L i2Me T t 30 B (Me = at least one selected from Cd, Co, Cu, Mg, Mn, Zn) 5 mol 2 or more (excluding 100 mol%), Zn0 95% or less (however, excluding 0 mol%) A moisture sensing element comprising at least one pair of electrodes on a sintered body of group g+ (excluding).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP50102067A JPS5855642B2 (en) | 1975-08-25 | 1975-08-25 | Kanshitsusoshi |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP50102067A JPS5855642B2 (en) | 1975-08-25 | 1975-08-25 | Kanshitsusoshi |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5226293A JPS5226293A (en) | 1977-02-26 |
| JPS5855642B2 true JPS5855642B2 (en) | 1983-12-10 |
Family
ID=14317407
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP50102067A Expired JPS5855642B2 (en) | 1975-08-25 | 1975-08-25 | Kanshitsusoshi |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5855642B2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5236788A (en) * | 1975-09-18 | 1977-03-22 | Matsushita Electric Ind Co Ltd | Porcelain composition for humidity sensig resister |
-
1975
- 1975-08-25 JP JP50102067A patent/JPS5855642B2/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5226293A (en) | 1977-02-26 |
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