JPS5844662A - X-ray tube with encircling ceramic case - Google Patents
X-ray tube with encircling ceramic caseInfo
- Publication number
- JPS5844662A JPS5844662A JP14099281A JP14099281A JPS5844662A JP S5844662 A JPS5844662 A JP S5844662A JP 14099281 A JP14099281 A JP 14099281A JP 14099281 A JP14099281 A JP 14099281A JP S5844662 A JPS5844662 A JP S5844662A
- Authority
- JP
- Japan
- Prior art keywords
- ceramic
- encircling
- envelope
- cover coat
- ray tube
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J35/00—X-ray tubes
- H01J35/02—Details
- H01J35/16—Vessels; Containers; Shields associated therewith
Landscapes
- X-Ray Techniques (AREA)
Abstract
Description
【発明の詳細な説明】
本発明はセラミック外S器内表藺のf8Wi耐電圧勢性
を改善したセラミック外seX線管に関する。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to an external ceramic X-ray tube in which the f8Wi voltage resistance of the internal ceramic external X-ray tube is improved.
X線管の外1111にはガラスが多く用いられていたが
、近年ガラスよりも機械的強度が優れたセフォックスが
用いられるようkなってきた。Glass was often used for the outside 1111 of the X-ray tube, but in recent years, Cefox, which has better mechanical strength than glass, has come to be used.
第1図は従来のセラミック外5isX線管の例を示し、
セラ建ツタ外囲器lの両端には、それぞれ。Figure 1 shows an example of a conventional non-ceramic 5is X-ray tube.
At both ends of the cella-built ivy envelope l, respectively.
陰極2が亀付けられた陰極端子31.陽極筒4が堆付け
られた111m端子6が亀付けである。陰@!にはフィ
ラメント6がII!けてあり通電加熱により電子を放出
する。iew曽4ICは陽極7が設け【あり、この−極
の陰極と対向する画にはターゲット8が埋込まれている
。フィラメy)6から放出された電子Ilは、陰陽極間
に印加された高電圧に加速されてターゲット8に射11
L、ここからX線を放射させる。このxIlは陽極筒4
に設けたX線放射−〇から外部に取出されて利用される
。X線管は一欽に極力小漸化することが望まれ【いるが
、陰陽極間には高電圧が印加され、セラセック外囲器1
はこの高電圧に十分耐えなければならない。高電圧をs
l縁するkは外■器の表■を清浄に保たなければならな
いが、馴造工鴇中で多少の汚れが41着することはさけ
られない、このためガラス外囲器の場会は洗浄により汚
れを除去している。しかしセツ々ツク外sisの場会、
内表面がセッセツタスfR鳩のままのため、セラ々ツク
スの粒子間に汚れが入り込む、しかし令ツ電ツクス外5
iinc対して従来のガラス外meのときの洗浄方法を
眉いても汚れの除去は困難で、この汚れのために従来の
竜う建ツク外囲器X線管ではセラミック外囲器内表面の
沿面耐電圧を十分高くとりkくいという問題がありた。A cathode terminal 31 to which the cathode 2 is attached. The 111m terminal 6 on which the anode tube 4 is attached is hemlocked. shadow@! filament 6 is II! It emits electrons when heated with electricity. The iew so 4 IC is provided with an anode 7, and a target 8 is embedded in the negative electrode opposite the cathode. The electrons Il emitted from the filament y) 6 are accelerated by the high voltage applied between the cathode and anode and are irradiated to the target 8 (11).
L, emit X-rays from here. This xIl is the anode tube 4
The X-ray radiation provided at - is taken out to the outside and used. It is desirable for the X-ray tube to be as small as possible in one step, but a high voltage is applied between the cathode and the anode, and the Cerasec envelope 1
must be able to withstand this high voltage. High voltage
Although the outer surface of the container must be kept clean, it is unavoidable that some dirt may get on the surface of the glass container. Dirt is removed by washing. However, the occasion of SIS outside of Setsutsuku,
Because the inner surface remains as it is, dirt gets in between the particles of the ceramics, but the outside surface of the ceramics is 5.
Compared to iinc, it is difficult to remove dirt even if you use the conventional cleaning method for outside glass, and due to this dirt, the creepage of the inner surface of the ceramic envelope is There was a problem in that it was difficult to maintain a sufficiently high withstand voltage.
またX纏管内では動作中に散乱電子や二次電子が発生す
る。これらの散乱電子や二次電子の多くのものが1う々
ツク外囲器内面に捕捉され、そとに員の電荷として蓄積
されて行く。他方セラミック外囲器の内amに散乱電子
が衝央する際の速度、入射角によっ【は、二次電子放出
比が1以上となる個所もあり、そこでは正に帯電して行
く。このよ5Kして、外囲器の内面には負に帯電した部
分、峰とんど帯電しない部分、正に帯電した部分が生じ
、それらの部分間に生ずる電位差がある限度以上に達す
ると、なだれ状の電子の移動すなわち放電が生じ、その
ために、外ms壁が破損する場合−が少なくない。かか
る現象は外囲器内表面の絶縁性が高く、帯電した電荷が
移動し難いために生ずる。従来の竜う建ツク外囲器X線
管の外囲器内表面に汚れが付着したとき除去困難といっ
ても、全藺が一様KFjれて一様に絶縁低下するのでは
な%、1かも、この放電iK象は一秦の毫ツ電ツタ外S
SX線管でもやはり生ずる。Furthermore, scattered electrons and secondary electrons are generated within the X-tube during operation. Many of these scattered electrons and secondary electrons are captured on the inner surface of the single envelope, and are accumulated therein as electric charge. On the other hand, depending on the speed and angle of incidence when the scattered electrons are concentrated in the ceramic envelope, there are some locations where the secondary electron emission ratio becomes 1 or more, and the electrons become positively charged there. After 5K, the inner surface of the envelope has negatively charged parts, parts that are hardly charged, and positively charged parts, and when the potential difference between these parts reaches a certain limit or more, There are many cases in which an avalanche of electron movement, ie, discharge, occurs, and as a result, the outer MS wall is damaged. This phenomenon occurs because the inner surface of the envelope has high insulation properties, making it difficult for charged charges to move. Even though it is difficult to remove dirt when it adheres to the inner surface of the envelope of a conventional double-walled envelope X-ray tube, it does not mean that all the dirt is uniformly KFj and the insulation deteriorates uniformly. It may be 1, but this discharge iK phenomenon is outside of Ichihata's tsutsuden tsuta.
This also occurs in SX-ray tubes.
本発明の目的は上記の如會藺題がなく、セラミック外囲
器の取扱いが容易で、内表面の沿面放電を抑制したセラ
ミック外囲器X纏、管を提供するととkある。An object of the present invention is to provide a ceramic envelope or tube which does not have the above-mentioned problems, is easy to handle, and suppresses creeping discharge on the inner surface.
上記目的を達成するために本発明においてi家。In order to achieve the above object, the present invention includes:
セラミック外囲器の内*Wにゆ5(釉)ll&施シてガ
ラス外−優の場合同様、 **を平滑かつ洗浄容易なも
のとし、][Kゆう蘂の1IIiK黴細金属粒子な微小
間隔で散在させ、微小放電をおこさせて、高電位差帯電
部が生じる以前に電荷が移動してしまうようにするか、
又はゆう蘂とし【、それ自体適当な低い導電性を有する
ものを選択して用〜1為こととした。As in the case of the inside of the ceramic envelope, the inside of the ceramic envelope is smooth and easy to clean, as is the case with the outside of the glass. Either by scattering them at intervals and causing micro discharges so that the charge moves before a high potential difference charged area is generated, or
Alternatively, a material having an appropriate low conductivity was selected for use.
第3図は本発明の一実施例を示し、竜ツ叱ツク外111
11の内表面ICi!、その食面にわたりてゆう蘂10
を施し、更に、ψう@10の上に微細金属粒子群11を
微小間隔で散在させである。なお同図中その傭の符号は
第imlの場合と同様である。FIG. 3 shows an embodiment of the present invention.
11 inner surface ICi! , over its eating surface, Yuyu 10
Further, fine metal particle groups 11 are scattered on the ψ@10 at minute intervals. Incidentally, in the same figure, the numerals are the same as in the case of iml.
この場合ゆう@10はセラミック外囲器1のセラ建ツク
ス粒子間に汚れが入り込まないよ5KL、、絶縁性能を
保つため絶縁抵抗の鳥いガラス質材料を用いており、微
細金属粒子群11をその上に散在させるととによって、
七う電ツク外囲器1の内面の局1部に多量の電荷が蓄積
し、各局部間に高電位差が生じて強烈な放電に発展する
のを防止する。In this case, Yu@10 uses a vitreous material with high insulation resistance to prevent dirt from entering between the ceramic particles of the ceramic envelope 1, and the fine metal particles 11 are used to maintain insulation performance. By interspersing it on top of it,
This prevents a large amount of charge from accumulating in one local part of the inner surface of the seven insulator envelope 1, causing a high potential difference between each local part, and developing into an intense discharge.
この金属粒子群11は、スパツタリングを緩やかに行う
か、その他適宜な手段によって、金属例えば銅の粒子径
が10′〜100 sm@変のものを、金属粒子径と同
@度の間隔で散在するようkするとよい、こうすること
によって、セラミック外囲器1を従来のガラス外囲器と
同様な方法を洗浄でき、また、セラミック外囲器1の内
表面では、帯電電荷による高電位差が生じな(なり、セ
ラミック外囲器1の内表面の沿面耐電圧を向上できる。This metal particle group 11 is made by sputtering gently or by other appropriate means, and particles of metal such as copper having a particle diameter of 10' to 100 sm are scattered at intervals of the same degree as the metal particle diameter. By doing this, the ceramic envelope 1 can be cleaned in the same manner as a conventional glass envelope, and the inner surface of the ceramic envelope 1 can be cleaned without causing a high potential difference due to electrical charges. (As a result, the creeping withstand voltage of the inner surface of the ceramic envelope 1 can be improved.
上記実施例では高絶縁性のゆう檗を施し、かつ金属粒子
群を散在させたが、ゆう蘂一体に、所要の高電圧に酎え
、かつ強い局部帯電を生ぜしめないように多少の導電性
(例えば絶縁−抗力tlG”〜10″1Ω・1ulF)
をもたせた材料を用いるととにようても、金属粒子群を
散在させることなくセラミック外囲器1の内IIwのa
爾耐電i漬上することができる。なお本発明を実施した
一谷は、陰−極間に高電圧を印加している間、セラセッ
ク外囲器1の内lNN上上當1cIII洩電流が流れる
ととになるが、との沿面漏洩電流値は、通常1.X線を
放射させ今ためのビーム電流値が例えば観入の桁である
のに対して、3術低い声AII変で十分目的が果せるか
ら全く問題はない。In the above embodiment, a highly insulating layer was applied and metal particles were scattered, but the layer was made to have some conductivity so as to be able to reach the required high voltage and to prevent strong local charging. (For example, insulation - drag force tlG" ~ 10" 1Ω・1ulF)
Even if a material with a
It can be immersed in electricity. It should be noted that Ichitani, who implemented the present invention, found that while a high voltage is applied between the cathode and the cathode, if a leakage current flows on the inside of the CERASEC envelope 1, the creepage leakage current The value is usually 1. For example, the beam current value required to emit X-rays is on the order of magnitude, but there is no problem at all because the three techniques, low voice AII change, are sufficient to accomplish the purpose.
以上説−したように本発@によれば、セッセツタ外5I
IIx纏管の製造工11−e外囲器の取扱いが容易とな
り、かつ使用時に外囲器の内表面の5iiy耐電圧が向
上する効果が得られる。As explained above, according to the original @, 5I outside of Sessettuta
IIx Wrapper Manufacturer 11-e Handling of the envelope is facilitated, and the 5iiiy withstand voltage of the inner surface of the envelope is improved during use.
WjAIIの簡単なm@
第1図は従来のセラ建ツタ外囲器X纏管の例を示す閣、
第2閣は本発明の一実施例図である。WjAII's simple m@ Figure 1 shows an example of a conventional cellar-built ivy envelope
The second cabinet is a diagram of one embodiment of the present invention.
1−セラミック外囲器、z−*極、3−陰極端子、4−
・・陽極曽、トーー極端子、7−9極、8・・・ターゲ
ット、lO・・・ゆ5蘂、11・・・金属粒子群。1-ceramic envelope, z-* pole, 3-cathode terminal, 4-
. . . Anode pole, toe pole terminal, 7-9 pole, 8 . . . target, lO . . . 5 legs, 11 . . . metal particle group.
第 1 図 第 2 図Figure 1 Figure 2
Claims (1)
た陰極端子と、陽極筒が敗付けられた陽極端子を備えた
セラミック外囲器X線管において、セラ建ツク外相器の
内表面にゆう巣を施し、かつ、ゆ511の表面に微細金
属粒子な微小間隔で散在させるか、又はセラ建ツク外囲
器の内表面に低導電性ゆう集を施したことを特徴とする
セラミック外囲器X線管。1. In a ceramic envelope X-ray tube, which has a cathode terminal with a cathode installed and an anode terminal with an anode tube installed at both ends of the ceramic envelope, the inside of the ceramic external phase vessel is A ceramic characterized in that the surface is coated with a thin layer, and fine metal particles are scattered at minute intervals on the surface of the layer 511, or a low conductive layer is coated on the inner surface of the ceramic envelope. Envelope X-ray tube.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14099281A JPS5844662A (en) | 1981-09-09 | 1981-09-09 | X-ray tube with encircling ceramic case |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14099281A JPS5844662A (en) | 1981-09-09 | 1981-09-09 | X-ray tube with encircling ceramic case |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5844662A true JPS5844662A (en) | 1983-03-15 |
Family
ID=15281625
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14099281A Pending JPS5844662A (en) | 1981-09-09 | 1981-09-09 | X-ray tube with encircling ceramic case |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5844662A (en) |
Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009064710A (en) * | 2007-09-07 | 2009-03-26 | Hitachi Medical Corp | X-ray generating apparatus and x-ray ct apparatus |
JP2010027302A (en) * | 2008-07-16 | 2010-02-04 | Bruker Axs Kk | X-ray generator |
WO2012063379A1 (en) * | 2010-11-08 | 2012-05-18 | 株式会社ライフ技術研究所 | Field emission apparatus and hand-held nondestructive inspection apparatus |
JP2015015227A (en) * | 2013-06-05 | 2015-01-22 | キヤノン株式会社 | Radiation generating tube, and radiation generating device and radiographic system using the same |
EP3016129A1 (en) | 2014-10-29 | 2016-05-04 | Canon Kabushiki Kaisha | X-ray generating tube, x-ray generating apparatus, and radiography system |
EP3026690A1 (en) * | 2014-11-28 | 2016-06-01 | Canon Kabushiki Kaisha | X-ray generation tube, x-ray generation apparatus, and radiography system |
JP2018026355A (en) * | 2013-06-05 | 2018-02-15 | キヤノン株式会社 | X-ray generation tube, x-ray generation device using the same, and x-ray imaging system |
JP2019009141A (en) * | 2018-10-04 | 2019-01-17 | キヤノン株式会社 | X-ray generating tube, x-ray generating device, and x-ray imaging system |
CN110168695A (en) * | 2016-11-02 | 2019-08-23 | 塔莱斯公司 | Electrical insulator based on aluminium oxide ceramics, the method for manufacturing the insulator and the vacuum tube including the insulator |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS54102888A (en) * | 1978-01-30 | 1979-08-13 | Hitachi Ltd | Manufacture for x-ray tube |
-
1981
- 1981-09-09 JP JP14099281A patent/JPS5844662A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS54102888A (en) * | 1978-01-30 | 1979-08-13 | Hitachi Ltd | Manufacture for x-ray tube |
Cited By (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009064710A (en) * | 2007-09-07 | 2009-03-26 | Hitachi Medical Corp | X-ray generating apparatus and x-ray ct apparatus |
JP2010027302A (en) * | 2008-07-16 | 2010-02-04 | Bruker Axs Kk | X-ray generator |
WO2012063379A1 (en) * | 2010-11-08 | 2012-05-18 | 株式会社ライフ技術研究所 | Field emission apparatus and hand-held nondestructive inspection apparatus |
JP2018026355A (en) * | 2013-06-05 | 2018-02-15 | キヤノン株式会社 | X-ray generation tube, x-ray generation device using the same, and x-ray imaging system |
JP2015015227A (en) * | 2013-06-05 | 2015-01-22 | キヤノン株式会社 | Radiation generating tube, and radiation generating device and radiographic system using the same |
US10381190B2 (en) | 2014-10-29 | 2019-08-13 | Canon Kabushiki Kaisha | X-ray generating tube, X-ray generating apparatus, and radiography system |
JP2016085945A (en) * | 2014-10-29 | 2016-05-19 | キヤノン株式会社 | X-ray generation tube, x-ray generator and radiography system |
US9824848B2 (en) | 2014-10-29 | 2017-11-21 | Canon Kabushiki Kaisha | X-ray generating tube, X-ray generating apparatus, and radiography system |
CN105575747A (en) * | 2014-10-29 | 2016-05-11 | 佳能株式会社 | X-ray generating tube, X-ray generating apparatus, and radiography system |
EP3016129A1 (en) | 2014-10-29 | 2016-05-04 | Canon Kabushiki Kaisha | X-ray generating tube, x-ray generating apparatus, and radiography system |
EP3026690A1 (en) * | 2014-11-28 | 2016-06-01 | Canon Kabushiki Kaisha | X-ray generation tube, x-ray generation apparatus, and radiography system |
US9818571B2 (en) | 2014-11-28 | 2017-11-14 | Canon Kabushiki Kaisha | X-ray generation tube, X-ray generation apparatus, and radiography system |
CN110168695A (en) * | 2016-11-02 | 2019-08-23 | 塔莱斯公司 | Electrical insulator based on aluminium oxide ceramics, the method for manufacturing the insulator and the vacuum tube including the insulator |
CN110168695B (en) * | 2016-11-02 | 2021-10-15 | 塔莱斯公司 | Alumina ceramic-based electrical insulator, method for producing same, and vacuum tube |
US11538604B2 (en) | 2016-11-02 | 2022-12-27 | Thales | Alumina-ceramic-based electrical insulator, method for producing the insulator, and vacuum tube comprising the insulator |
JP2019009141A (en) * | 2018-10-04 | 2019-01-17 | キヤノン株式会社 | X-ray generating tube, x-ray generating device, and x-ray imaging system |
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