JPS5842943A - Differential capacity type pressure and differential pressure gauge - Google Patents
Differential capacity type pressure and differential pressure gaugeInfo
- Publication number
- JPS5842943A JPS5842943A JP14062681A JP14062681A JPS5842943A JP S5842943 A JPS5842943 A JP S5842943A JP 14062681 A JP14062681 A JP 14062681A JP 14062681 A JP14062681 A JP 14062681A JP S5842943 A JPS5842943 A JP S5842943A
- Authority
- JP
- Japan
- Prior art keywords
- pressure
- main body
- differential
- hole
- electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0033—Transmitting or indicating the displacement of bellows by electric, electromechanical, magnetic, or electromagnetic means
- G01L9/0038—Transmitting or indicating the displacement of bellows by electric, electromechanical, magnetic, or electromagnetic means using variations in capacitance
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- General Physics & Mathematics (AREA)
- Measuring Fluid Pressure (AREA)
Abstract
Description
【発明の詳細な説明】
この発明は差動容量式圧力・差圧計に関するものである
。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a differential capacity type pressure/differential pressure gauge.
従来、差動容量式圧力・差圧計として、次のようなもの
が知られている。すなわち、本体が２つの金属部分に分
けられ、これら金属部分の各々に絶縁物を介し金属被膜
が形成され、これらの金属被膜とともにコンデンサ板を
形成する感知ダイアフラムが上記２つの金属部分くよっ
て挾持され、上記本体両側に受圧素子が設けられてなシ
、これら受圧素子に加見られる圧力によって上記感知ダ
イアフラムが変位し、上記金属被膜との間に形成される
容量が変化し、この容量変化から圧力に応じ良電気信号
を得るようにした構造のものである。Conventionally, the following types of differential capacity type pressure/differential pressure gauges are known. That is, the main body is divided into two metal parts, a metal coating is formed on each of these metal parts via an insulator, and a sensing diaphragm that forms a capacitor plate together with these metal coatings is sandwiched between the two metal parts. , pressure sensing elements are not provided on both sides of the main body, the sensing diaphragm is displaced by the pressure applied to these pressure sensing elements, the capacitance formed between it and the metal coating changes, and from this capacitance change the pressure is The structure is such that a good electrical signal can be obtained depending on the situation.
とζろで、上記の差動容量式圧力・差圧計は感知ダイア
フラムにフラットダイアフラムを使用し、これを２つの
金属部分によって挾持した構造になっているため、本体
と感知ダイアプラムとの膨張率の差による熱歪を受は島
＜、また圧力検出部全体を取付１ランジで締め付けたと
きに機械的歪を受けるなどの欠点があった。さらに、本
体を一つの金緘部分に分割し、この間に感知ダイアフラ
ムを挾んで溶接するものであるため製作コストが嵩むと
いう欠点もあった。The above differential capacitance type pressure/differential pressure gauge uses a flat diaphragm as the sensing diaphragm, and has a structure in which this is sandwiched between two metal parts, so the expansion rate between the main body and the sensing diaphragm is There were also drawbacks such as the thermal strain caused by the difference being received, and mechanical strain being applied when the entire pressure detection section was tightened with one mounting flange. Furthermore, since the main body is divided into one metal part and the sensing diaphragm is sandwiched and welded between the parts, there is a drawback that the manufacturing cost increases.
そこで本出願人社本願に先立ち第１図に示す、上記欠点
を改良した差動容量式圧力・差圧針を発明した（％願昭
１ｌ−ＪＪｊ６７号）。この発明の構成上の特徴は本体
感知室内にコンデンサ板を形成する片持梁状に支持され
た移動電極を配置するとともに、この感知室から本体両
側あるい社本体の片側に至る貫通孔を設け、本体両側面
あるいは片側面に設けられた受圧ダイアフラムと上記移
動電極とをロッドで結合し、さらに上記移動電極を挾ん
でコンデンサ板を形成する片持梁状に支持され九固定電
極を配設したことＫある。図中、符号１は金属部材によ
って形成された円筒状の本体である。この本体ＩＫはそ
の外表面よシ中心部に至る孔（以下、感知室と称す）２
が形成されている。さらに本体１両側部には内面が波形
に形成された凹部３．４が形成され、この凹部３．４を
覆うように受圧ダイアフラム５．６が取シ付けられてい
る。また本体ＩＫは上記凹部３．４の中心から上記感知
室２に至る貫通孔７．８が穿設されてい今。上記感知室
２の上部にはこの感知室２のめくら蓋を兼ねる管９が圧
入されている。この管９には感知室２内に垂下するコン
デンサ板（以下、移動電極と称す）１Ｇと、この移動電
極１０を一定間隔を置いて挾むように相対向配置されて
いるコンデンサ板Ｃ以下、固定電極と称す）１１．１２
とがガラスなどからなる支持材１３によシ固定されてい
る。なお、上記移動電極１０および固定電極１１．１２
は、全体が金属でも、ガラス、セラミックスなどの絶縁
材の表面に金属を蒸着した本のでもよい。上記支持材１
３′中の移動電極１０および固定電極１１．１２には、
各々リード線１０ａ、ｌ１ｍ、１２ｍが接続され、本体
１と絶縁され外部へ導出されている。また、上記移動電
極１０は固定電極１１す１２よシ長く形成されておシ、
仁の移動電極１０の先端部と上記受圧ダイアフラム５，
６とはレッド１４．１５によって連結されている。なお
、図中符号１６は感知室２、貫通孔７、・８内に封入さ
れているシリ；−ソオイルなどの非圧縮性液体よシなる
封液である。 ・このように、上記構造の差動容量式圧
力・差圧針は、２つの画定電極ならびにこれら固定電極
の間に位置する。移動電極が片持梁状に支持されてい、
るため、熱による歪の影響が小さく、温度特性が・優れ
ている。また−取付フランジを締めｐけたとき本体が歪
んで５も、電極が片持梁状に支持されている上、各々の
固定部が近接している丸め、歪による電極間隙の変化が
少ないなどの利点がある。Therefore, prior to this application, the present applicant invented a differential capacity type pressure/differential pressure needle that improved the above-mentioned drawbacks, as shown in FIG. 1 (% Application No. 11-JJJ67). The structural feature of this invention is that a movable electrode supported in the form of a cantilever forming a capacitor plate is arranged in the sensing chamber of the main body, and a through hole is provided from this sensing chamber to both sides of the main body or one side of the main body. A pressure receiving diaphragm provided on both sides or one side of the main body and the above-mentioned movable electrode are connected by a rod, and furthermore, nine fixed electrodes supported in a cantilever shape that sandwich the above-mentioned movable electrode to form a capacitor plate are disposed. There is a thing called K. In the figure, reference numeral 1 denotes a cylindrical main body formed of a metal member. This main body IK has a hole (hereinafter referred to as a sensing chamber) 2 extending from its outer surface to the center.
is formed. Furthermore, a recess 3.4 having a corrugated inner surface is formed on both sides of the main body 1, and a pressure receiving diaphragm 5.6 is attached to cover the recess 3.4. Further, the main body IK is provided with a through hole 7.8 extending from the center of the recess 3.4 to the sensing chamber 2. A tube 9, which also serves as a blind lid for the sensing chamber 2, is press-fitted into the upper part of the sensing chamber 2. This tube 9 includes a capacitor plate (hereinafter referred to as a moving electrode) 1G hanging down in the sensing chamber 2, a capacitor plate C and a fixed electrode arranged opposite to each other so as to sandwich the moving electrode 10 at a constant interval. ) 11.12
and are fixed to a support member 13 made of glass or the like. Note that the moving electrode 10 and fixed electrodes 11 and 12
The book may be made entirely of metal or may be made of an insulating material such as glass or ceramics with metal deposited on the surface. The above support material 1
The moving electrode 10 and the fixed electrode 11.12 in 3' include
Lead wires 10a, l1m, and 12m are connected to each lead wire, insulated from the main body 1, and led out to the outside. Further, the movable electrode 10 is formed longer than the fixed electrodes 11 and 12.
The tip of the moving electrode 10 and the pressure receiving diaphragm 5,
6 is connected by red 14.15. In addition, the reference numeral 16 in the figure is a sealing liquid such as an incompressible liquid such as solid oil sealed in the sensing chamber 2 and the through holes 7 and 8. - Thus, the differential capacitive pressure needle of the above structure is located between the two defining electrodes as well as these fixed electrodes. A moving electrode is supported in a cantilevered manner,
Therefore, the influence of distortion due to heat is small and the temperature characteristics are excellent. In addition, the main body may be distorted when the mounting flange is tightened, but the electrodes are supported in a cantilevered manner, each fixed part is rounded close to each other, and there is little change in the electrode gap due to distortion. There are advantages.
さらに、本体が一体構造となっているため製造コストを
安くで、きる。Furthermore, since the main body has an integrated structure, manufacturing costs can be kept low.
とζろが１、上記構造の差動・容量式圧力・差圧−計は
、差圧針および比較的低い測定圧を検出する圧力針とし
て使うことはできるものの、高い圧力を側る場合、レッ
ド１４．１５に加わる力が著しく大きくなシ、移動電極
１０が大きく変形し、その結果、移動電極１０およびそ
の近傍において不正変形が生じ、測定誤差を生じた〕、
測定圧力と出力信号との線形性が低下してしまうという
欠点がある。1.Although the differential/capacitance type pressure/differential pressure gauge with the above structure can be used as a differential pressure needle and a pressure needle to detect relatively low measured pressure, when dealing with high pressure, the red 14. The force applied to 15 was extremely large, and the movable electrode 10 was greatly deformed, resulting in improper deformation in the movable electrode 10 and its vicinity, resulting in a measurement error],
This method has the disadvantage that the linearity between the measured pressure and the output signal deteriorates.
この発明は上記事情に鎌みてなされたもので、その目的
は熱や外力による歪の影響を受けることが少なく、高い
測定圧も検出するととのできる差動容量式圧力・差圧計
を提供する、ことにあシ、移動電極および固定電極を片
持梁状罠支轡するとと−もに測定用受圧素子として測定
ベローズを使い、仁の、測定べ四−ズと上記移動電極を
連結し、高い、圧力に対１、て、も固定用受圧素子が耐
えることができるよう圧したものである。This invention was made in consideration of the above circumstances, and its purpose is to provide a differential capacitance type pressure/differential pressure gauge that is less susceptible to distortion due to heat or external force and is capable of detecting high measurement pressures. In particular, the movable electrode and the fixed electrode are cantilever-shaped and a measuring bellows is used as a pressure-receiving element for measurement. , the pressure is set so that the fixing pressure receiving element can withstand the pressure.
１以下、この考寒を図面を参照して説明する。。第一図
はこの考案Ｏ第１の実施例を示すもので、第１図と同一
符号は同一構成ｗ章を示し、その説明４ は省略する。1. Below, this consideration will be explained with reference to the drawings. . FIG. 1 shows a first embodiment of this invention. The same reference numerals as in FIG.
図中、符号２０．２．１は前記感知室２から本体１の両
側部に開口する貫通孔である。In the figure, reference numeral 20.2.1 is a through hole opening from the sensing chamber 2 to both sides of the main body 1.
貫通孔２０は貫通孔２１よシ大径に形成されておシ、と
の！通孔２０内には測定ベローズ２２が設けられて−る
。−この測定べａ−ズ２２はべｐ−ズ本体２２ａ１連結
命ツド２２ｂおよび圧力導入管２２ｃとから構成されて
いる−上記連結ロツド２２ｂＦｉａ記移動電極１０の先
端部に連結されておシ、上記圧力導入管２２ｃは貫通孔
２０の開口部を覆うよう圧して本体１に溶接などによシ
固定されている。本体１の上記貫通孔２１が開口する部
分には凹部２３が形成され、との凹部２３を覆うように
してシールダイヤフラム（受圧素子）２４が取９つけら
れている。The through hole 20 is formed to have a larger diameter than the through hole 21! A measuring bellows 22 is provided in the through hole 20. - This measurement bead 22 is composed of a bead main body 22a1, a connecting rod 22b, and a pressure introduction pipe 22c. The pressure introduction pipe 22c is fixed to the main body 1 by welding or the like with pressure so as to cover the opening of the through hole 20. A recess 23 is formed in the portion of the main body 1 where the through hole 21 opens, and a seal diaphragm (pressure receiving element) 24 is attached to cover the recess 23.
しかして、上記構造の差動容量式圧力・差圧計は、例え
ば大気圧を基準圧として高い測定圧を測る圧力計として
使用することができる。つまシ、上記圧力導入管２２ｃ
からベローズ本体２２ ａＫ大気圧が導入され、測定圧
はシールダイヤフラム２４を介して封液１６に伝えられ
る。測定圧は封液１６を介して測定ベローズ２２に加え
られ、圧力を加えられた測定ベローズ２２は変形され、
それに伴なって移動電極１１が変位される。その結果、
移動電極１１と固定電［ｔｌｌ、１２間の容量が差動的
に変化される。この容量変化が電気信号に変換され、測
定出力として検出される。Therefore, the differential capacity type pressure/differential pressure gauge having the above structure can be used as a pressure gauge that measures a high measurement pressure using, for example, atmospheric pressure as a reference pressure. Tsumashi, the pressure introduction pipe 22c
Atmospheric pressure is introduced from the bellows body 22 aK, and the measured pressure is transmitted to the sealing liquid 16 via the seal diaphragm 24. Measuring pressure is applied to the measuring bellows 22 via the sealing liquid 16, and the measuring bellows 22 under pressure is deformed,
The moving electrode 11 is accordingly displaced. the result,
The capacitance between the moving electrode 11 and the fixed voltage [tll, 12] is differentially changed. This capacitance change is converted into an electrical signal and detected as a measurement output.
このように移動電極１０および固定電極１１゜１２を片
持梁状に支持するとともに、測定用受圧素子として圧力
に対する変位量が少ない測定べｐ−スズ２２使い、この
測定ベローズ２２と移動電極１０とを連結したので、高
い測定圧、を測っても電極部分に不正変形が生じること
がなく、このため測定誤差を生じたシ、測定圧力と出力
信号との線形性が損なわれるとともなく、充分に高い圧
力も測定することが、できる。なお、測定ベローズ２２
を小さくすればさらに高い圧力を測定することが可能と
なる。また、使用ダイヤプラムは一枚で済むのでコスト
の低減化を捌ることができる。In this way, the moving electrode 10 and the fixed electrodes 11 and 12 are supported in a cantilevered manner, and the measurement bellows 22 and the moving electrode 10 are used as a pressure receiving element for measurement. Since the electrodes are connected to each other, even if high measurement pressures are measured, there will be no improper deformation of the electrode part, which will cause measurement errors, and the linearity between the measurement pressure and output signal will be impaired. It is also possible to measure high pressures. In addition, the measurement bellows 22
By reducing , it becomes possible to measure even higher pressures. Further, since only one diaphragm is required, costs can be reduced.
第３図嬬この発明の第一の実施例を示すもので、第１図
および第一図と同一符号は同一構成要素を示し、その説
明は省略する。図中符号３０は貫通孔２０の開口部を中
心にして本体１に形成された凹部であシ、こ、の凹部３
０を覆うようにしてダイヤフラム３１が本体１に取り付
けられている。符号３２は上記ダイヤ−ラム３１および
凹部３０に囲まれた空間と測定ベローズ２２中に封入さ
れている封液である。FIG. 3 shows a first embodiment of the present invention, and the same reference numerals as in FIG. 1 and FIG. 1 indicate the same constituent elements, and the explanation thereof will be omitted. Reference numeral 30 in the figure is a recess formed in the main body 1 centered around the opening of the through hole 20.
A diaphragm 31 is attached to the main body 1 so as to cover the main body 1. Reference numeral 32 denotes a sealing liquid sealed in the space surrounded by the diaphragm 31 and the recess 30 and in the measuring bellows 22.
上記のように本体１の測定ベローズ２２側にもダイヤフ
ラムを取シつけ、封液を封入しても、第７の実施例と同
様の作用効果を得るととができる。As described above, even if a diaphragm is attached to the measurement bellows 22 side of the main body 1 and a sealing liquid is sealed, the same effects as in the seventh embodiment can be obtained.
さらに、この構造のものは差圧針としても使用すること
ができる。Furthermore, this structure can also be used as a differential pressure needle.
第参図はこの発明の第３の実施例を示すもので、第７図
な埴し第３図と同一符号は同一構成要素を示し、その説
明は省略する。図中、符号４０は、前記貫通孔２０の反
対側へ形成さ′れた貫通孔である。この貫通孔４０は貫
通孔２０と同形同寸法に形成されておシ、この貫通孔４
０内には前記測定ベローズ２２と同形同寸法のベローズ
（受圧素子）４１が設けられている。このベローズ４１
は測定ベローズ２２と同様にその一端を本体ＩＫ他端を
移動電極１０に連結されている。符号４２は本体１の下
面に設けられている凹部であシ、との凹部４２を覆うよ
う圧してダイヤフラム４３が本体１に取シつけられてい
る。また、上記凹部４２の中心から感知室２内に向って
連結孔４４が穿設され、この連結孔４４およびダイヤフ
ラム４３と凹部４２に囲まれた空間には感知室２内と同
じ封液１６が封入されている。なお、符号４５はシール
ダイヤフラム２４と凹部２３とに囲まれ大空間およびぺ
ｐ−ズ４０中に封入されている封液である。FIG. 7 shows a third embodiment of the present invention, and the same reference numerals as in FIG. 3 indicate the same components, and the explanation thereof will be omitted. In the figure, reference numeral 40 indicates a through hole formed on the opposite side of the through hole 20. This through hole 40 is formed to have the same shape and size as the through hole 20.
A bellows (pressure receiving element) 41 having the same shape and dimensions as the measuring bellows 22 is provided inside the measuring bellows 22 . This bellows 41
Like the measuring bellows 22, one end thereof is connected to the main body IK, and the other end thereof is connected to the moving electrode 10. Reference numeral 42 designates a recess provided on the lower surface of the main body 1. A diaphragm 43 is attached to the main body 1 with pressure so as to cover the recess 42. Further, a connecting hole 44 is bored from the center of the recess 42 toward the inside of the sensing chamber 2, and the same sealing liquid 16 as inside the sensing chamber 2 is in the space surrounded by the connecting hole 44, the diaphragm 43, and the recess 42. It is enclosed. Incidentally, reference numeral 45 denotes a sealing liquid surrounded by the seal diaphragm 24 and the recess 23 and sealed in the large space and the pepper 40.
上記のように、本体の両側部にそれぞれ移動電極に連結
されたべｐ−ズを設け、これらベローズを覆うようにダ
イヤフラムを取シつけても、第１および第一の実施例と
同様の作用効果を得ることができる。なお、上記第３の
実施例におけるダイヤフラム４３は温度補償用に使われ
る本のである。As mentioned above, even if bellows connected to moving electrodes are provided on both sides of the main body and a diaphragm is installed to cover these bellows, the same effects as in the first and first embodiments can be obtained. can be obtained. The diaphragm 43 in the third embodiment is used for temperature compensation.
第５図はこの発明の第参の実施例を示すもので、第７図
ないし第参図と同一符号は同一構成要素を示し、その説
明は省略する。図中、符号５０は感知室であシ、この感
知室５０は前記実施例の感知室２よシ縦が深く形成され
ている。符号５１は移動電極、符号−５２，５３は各々
固定電極である。FIG. 5 shows a fourth embodiment of the present invention, and the same reference numerals as in FIGS. 7 to 7 indicate the same constituent elements, and the explanation thereof will be omitted. In the figure, reference numeral 50 indicates a sensing chamber, and this sensing chamber 50 is formed deeper in length than the sensing chamber 2 of the previous embodiment. The reference numeral 51 is a moving electrode, and the reference numerals -52 and 53 are fixed electrodes.
ここで、符号５１ｍ、５２ｍ、５３ｍは各々移動電極５
１、同定電極５２．５３に接続されているリード線であ
る。上記固定電極８２．５３の中央部には、移動電極５
１と測定ベローズ２２との連結を行なう連結材５４に触
れないように１孔５２ｂ、５３ｂが穿設されている。ま
た、上記移動電極５１は第６図に示すように１測定ベロ
ーズ２２との連結部分５５の中央部が逆回字状にくシ貫
か連結孔５６ｍには第５図に示す連結材５４が嵌合され
ている。このように移動電極５１を形成すると、この移
動電極５１は第７図に示すように平行に変位するように
なシ、固定電極５２．５３との間隙も平行にしておくこ
とができる。Here, symbols 51m, 52m, and 53m are the moving electrodes 5, respectively.
1. Lead wires connected to identification electrodes 52 and 53. A movable electrode 5 is located in the center of the fixed electrode 82.53.
The first holes 52b and 53b are bored so as not to touch the connecting member 54 that connects the measuring bellows 22 to the measuring bellows 22. As shown in FIG. 6, the movable electrode 51 has a connecting portion 55 connected to the one-measurement bellows 22 whose central portion is pierced in a reverse spiral shape, and a connecting member 54 shown in FIG. 5 is fitted into the connecting hole 56m. are combined. When the movable electrode 51 is formed in this manner, the movable electrode 51 can be displaced in parallel as shown in FIG. 7, and the gaps between the movable electrode 51 and the fixed electrodes 52 and 53 can also be made parallel.
上記のように、この発明に係る差動容量式圧力・差圧針
を構成すれば、第７および＠Ｊの実施例と同様の作用効
果が得られるばかシでなく、上記したように電極が片持
梁状に構成されているにもかかわらず、移動電極は平行
移動できるため、電極間の間隙を平行とす嶌ことができ
、部品製造、組立を簡易にすることがセ龜る。As described above, if the differential capacitance type pressure/differential pressure needle according to the present invention is constructed, the same effects as the seventh and @J embodiments can be obtained, and the electrodes can be separated as described above. Although the movable electrodes are configured in a beam shape, they can be moved in parallel, so the gaps between the electrodes can be made parallel, which facilitates the manufacture and assembly of parts.
以上説明したように、この発明に係る差動容量式圧力・
差圧針は、移動電極および固定電極を片持梁状に支持す
るとともに、測定用受圧素子として圧力に対する変位量
の少ないベローズを使い、このべ四−ズと移動電極とを
連結した構造なので、熱や外力による歪の影響を受ける
ことが少なく、高い測定圧も検出することができ、製造
コストも安価である。As explained above, the differential capacity type pressure sensor according to the present invention
The differential pressure needle supports a movable electrode and a fixed electrode in a cantilever shape, and uses a bellows with a small amount of displacement due to pressure as a pressure receiving element for measurement, and has a structure in which this bellows and the movable electrode are connected. It is less susceptible to distortion caused by external forces, can detect high measurement pressures, and is inexpensive to manufacture.
第１図は従来の差動容量式圧力・差圧針の構成図、ｔａ
Ｊ図はこの発明の第１の実施例を示す構成図、第３図は
この発明の第２の実施例を示す構成図、第１図はこの発
明の第３の実施例を示す構成図、第３図はこの発明の第
ダの実施例を示す構成図、第６図はこの発明の第ダの実
施例における移動電極の正面図、第７図線同側面図であ
る。
１・・・・・・本体、２．５０・・・・・・感知室、１
０．５１・・・・・・移動電極、１□１１．１２．５２
．５３・・・・・・固定電極、１６・・・・・リー液、
２０，２１．４０・・・・・・貫通孔、２２・・・・・
・測定″ベセーズ、２４・・・・・・シールダイヤプラ
ム（受圧素子）、４１・・・・・・べｐ−ズ（受圧素子
）。
第１図
第２図
１ｉ３図
第４図
１ｌＩＳ図
第６図 第７図Figure 1 is a configuration diagram of a conventional differential capacity pressure/differential pressure needle, ta
Figure J is a configuration diagram showing a first embodiment of this invention, Figure 3 is a configuration diagram showing a second embodiment of this invention, and Figure 1 is a configuration diagram showing a third embodiment of this invention. FIG. 3 is a configuration diagram showing a third embodiment of the present invention, FIG. 6 is a front view of a moving electrode in the second embodiment of the present invention, and FIG. 7 is a side view taken along the same line. 1...Main body, 2.50...Sensing chamber, 1
0.51...Moving electrode, 1□11.12.52
．． 53...Fixed electrode, 16...Lee liquid,
20, 21.40... through hole, 22...
・Measurement"Beseze, 24...Seal diaphragm (pressure receiving element), 41...Bep-zu (pressure receiving element). Figure 1 Figure 2 Figure 1i3 Figure 4 Figure 1lIS Figure Figure 6 Figure 7
Claims (1)
の感知室よシ上配本体の外部へ開口するλつの貫通孔と
、上記感知室内に設けられ、片持梁状に上記本体に支持
された移動電極と、この移動電極に対向して上記感知室
内に配置され、上記本体に片持梁状に支持された固定電
極と、上記２つの貫通孔の一方の貫通孔内に設けられ、
一端部が上記移動電極に固定され、他端部が上記本体に
固定されている測定ベローズと、上記一つの貫通孔の他
方の□貫通孔に、′この貫通孔の開口部を覆うようＫし
て設けられている受圧素子とを有してなシ、上記固定電
極に対する上記移動電極の変位に基づいて測定圧を検出
する差動容量式圧力・差圧計。A sensing chamber provided inside the main body and filled with a sealing liquid; λ through holes opening to the outside of the main body above the sensing chamber; a movable electrode supported by a main body; a fixed electrode disposed in the sensing chamber opposite to the movable electrode and supported in a cantilever shape by the main body; established,
A measurement bellows having one end fixed to the movable electrode and the other end fixed to the main body, and a □ through-hole in the other one of the above-mentioned one through-holes are fitted with a K so as to cover the opening of this through-hole. A differential capacitance type pressure/differential pressure gauge that detects a measured pressure based on the displacement of the movable electrode with respect to the fixed electrode.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14062681A JPS5842943A (en) | 1981-09-07 | 1981-09-07 | Differential capacity type pressure and differential pressure gauge |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14062681A JPS5842943A (en) | 1981-09-07 | 1981-09-07 | Differential capacity type pressure and differential pressure gauge |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5842943A true JPS5842943A (en) | 1983-03-12 |
Family
ID=15273071
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14062681A Pending JPS5842943A (en) | 1981-09-07 | 1981-09-07 | Differential capacity type pressure and differential pressure gauge |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5842943A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59175637A (en) * | 1983-03-18 | 1984-10-04 | Maeda Kogyo Kk | Unit hub for bicycle |
| JPS61147449A (en) * | 1984-12-18 | 1986-07-05 | Matsushita Electric Works Ltd | Variable color fluorescent lamp |
-
1981
- 1981-09-07 JP JP14062681A patent/JPS5842943A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59175637A (en) * | 1983-03-18 | 1984-10-04 | Maeda Kogyo Kk | Unit hub for bicycle |
| JPS6223173B2 (en) * | 1983-03-18 | 1987-05-21 | Maeda Ind | |
| JPS61147449A (en) * | 1984-12-18 | 1986-07-05 | Matsushita Electric Works Ltd | Variable color fluorescent lamp |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US6205861B1 (en) | Transducer having temperature compensation | |
| US5492016A (en) | Capacitive melt pressure measurement with center-mounted electrode post | |
| US4388668A (en) | Capacitive pressure transducer | |
| US4120206A (en) | Differential pressure sensor capsule with low acceleration sensitivity | |
| US6029525A (en) | Capacitive based pressure sensor design | |
| US4785669A (en) | Absolute capacitance manometers | |
| US4432238A (en) | Capacitive pressure transducer | |
| US4903532A (en) | Electrostatic capacity type pressure detector | |
| JPS6224120A (en) | Differential pressure transducer | |
| JPS5814610B2 (en) | Capacitor type sensing device | |
| JP3325879B2 (en) | Relative pressure sensor | |
| US4741214A (en) | Capacitive transducer with static compensation | |
| US3168718A (en) | Electric pressure transducer | |
| US4172387A (en) | Pressure responsive apparatus | |
| JP2004506890A (en) | Improved capacitance-based pressure sensor design | |
| JPH05248977A (en) | Pressure sensor | |
| JPS5842943A (en) | Differential capacity type pressure and differential pressure gauge | |
| JPS62204137A (en) | Pressure detector | |
| JPS5850300Y2 (en) | pressure transmitter | |
| JPS601402Y2 (en) | Capacitive differential pressure transmitter | |
| JPS6021784Y2 (en) | pressure sensor | |
| JPH0411141Y2 (en) | ||
| JPS5930446Y2 (en) | Differential pressure/pressure detector | |
| JPS6316992Y2 (en) | ||
| JPS5813728Y2 (en) | pressure transmitter |