JPS5842002A - Multilayered dielectric filter device - Google Patents

Multilayered dielectric filter device

Info

Publication number
JPS5842002A
JPS5842002A JP14017681A JP14017681A JPS5842002A JP S5842002 A JPS5842002 A JP S5842002A JP 14017681 A JP14017681 A JP 14017681A JP 14017681 A JP14017681 A JP 14017681A JP S5842002 A JPS5842002 A JP S5842002A
Authority
JP
Japan
Prior art keywords
multilayer
support plate
film
filter device
electric
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14017681A
Other languages
Japanese (ja)
Inventor
Junichiro Minowa
箕輪 純一郎
Yoji Fujii
藤井 洋二
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Telegraph and Telephone Corp
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP14017681A priority Critical patent/JPS5842002A/en
Publication of JPS5842002A publication Critical patent/JPS5842002A/en
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00Optical elements other than lenses
    • G02B5/20Filters
    • G02B5/28Interference filters
    • G02B5/285Interference filters comprising deposited thin solid films

Abstract

PURPOSE:To prevent the influence of the reflected light between dielectric film surfaces and to obtain the good band stop characteristics, by arranging plural multilayered dielectric films so that they are inclined to planes orthogonal to the optical axis and adjacent films have specular symmetry. CONSTITUTION:In the filter device where multilayered dielectric films A1-An formed on light-transmissive supporting material Bij(i=1-n-1 and j=2-n) are fixed with an adhesive 6 by adhesion, these films are so arranged that their surfaces P1-Pn are inclined at an angle +theta and an angle -theta alternately to planes orthogonal to an optical axis O and adjacent surfaces have specular symmetry. Since the influence of the reflected light between adjacent dielectric film surfaces is prevented, the good band stop characteristics is obtained.

Description

【発明の詳細な説明】 本尭明は、複数の多層lII電体膜が光軸上番ζ臘次配
されてなる構成を有する多層誘電体膜フィルタ装置に関
する。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a multilayer dielectric film filter device having a configuration in which a plurality of multilayer III electric films are arranged in a number ζ order on the optical axis.

斯池多Fa銹電体膜フィルタ装置として従来。Traditionally used as a Shiiketa Fa electroelectric membrane filter device.

第1図に示す如き構成のものが提案されている。A configuration as shown in FIG. 1 has been proposed.

即ち互に特性の同じ複数例えば2枚の多層−電体MA、
及びム、が光軸O上にそれと直交する面と平行な順次の
11iiP1及びP、上に配され、面して多層#電体d
A、及びA2が透光性支持体BIfと共に、多層#4体
膜A、及びA2を透光性支持体B12に密接せしめた関
係で一体化されている。
That is, a plurality of, for example, two multilayer electric material MAs having the same characteristics,
and M are disposed on the optical axis O on successive 11iiP1 and P parallel to the plane orthogonal thereto, facing the multilayer #electric body d.
A and A2 are integrated with the transparent support BIf in a relationship that brings the multilayer #4 body film A and A2 into close contact with the transparent support B12.

この場合透光性支持体B1.が互に平行に相対向してい
る主f7J1及び2を、有する透光性支持板G12でな
る。又多層aIl1体膜ム、及びA2tls夫々互に平
行に相対向している主wJ3及び4を有する透光性支持
板H1及びF2の主Ifi3及び4の何れ必一方に例え
ば蒸着により被着形成されて。
In this case, the transparent support B1. consists of a translucent support plate G12 having main f7J1 and f7J2 facing each other in parallel. In addition, a multilayer aIl1 body film and A2tls are formed by depositing, for example, on any one of the main Ifi 3 and 4 of the translucent support plates H1 and F2, which have main wJ3 and 4 facing each other in parallel. hand.

透光性支持&H1と、多層誘電体膜A、とで多FiIm
電体膜フィルタF、が、又透光性支持板H2と多層−電
体膜A2  とで多jII#電体楓フィ#りF2  が
構成されている・而して夢層#電体膜フィルタF、及び
F2がそn等の多層#電体属人。
Multi-FiIm with transparent support &H1 and multilayer dielectric film A
The electric film filter F is constituted by the transparent support plate H2 and the multilayer electric film A2, and thus the dream layer electric film filter F, and F2 are multilayer electric body members.

及びム2 を透光性支持板012儒としてその相対向す
る主面1及び2に接着剤6を用いて接着固定されている
A translucent support plate 012 and 2 are adhesively fixed to the opposing main surfaces 1 and 2 using an adhesive 6.

以上が従来提案されている多層誘電体膜フィルタ装置の
構成であるが、斯−構成によれば。
The above is the configuration of the conventionally proposed multilayer dielectric film filter device, and according to this configuration.

多層−電体膜フィルタF、及びF、が光軸0上に順次配
されている構成を有するのて、多層#電体膜フィルタF
、及び?、が共に第2図にで曲線1に示す如き帯域阻止
特性を有する場合、*置全体として所期デシベル加算さ
れた82図にて―mbに示す如き、若し多層誘電体膜フ
ィルタF、又は?、のみを使用した場合に比し改善され
た帯域阻止特性が得られるものである。
Since the multilayer electrical film filters F and F are arranged sequentially on the optical axis 0, the multilayer electrical film filter F
,as well as? , both have band rejection characteristics as shown in curve 1 in FIG. ? , it is possible to obtain improved band rejection characteristics compared to the case where only , is used.

又嬉1図に示す従来の多層−電体膜フィルタ装置の場合
、全体が一体化されているので、使用に便なものである
Furthermore, in the case of the conventional multilayer electric membrane filter device shown in Figure 1, the whole device is integrated, so it is convenient to use.

然し乍ら嬉1114(示す従来の多層酵電体膜フィルタ
装置の場合、多層−電体膜A、及びム2が。
However, in the case of the conventional multilayer electrolyte membrane filter device shown in Figure 1114, the multilayer electrolyte membranes A and M2 are.

光軸と直交する互に平行な@P、及びP、上に配されて
いるので、多層誘電体膜ム、及び人、での一方の反射光
の影響を他方が受け、この為多層銹電体膜ム、及びム2
が個々の所期の帯域阻止特性を以って作用せず、依って
装置全体として所期の帯域阻止特性が得られないという
欠点を有していた。又これを回避するには、多層−電体
膜ム、及びA2間の間隔lを十分大とすわば良いが、斯
くする場合装置が全体として大型になるという欠点を有
していた・このようなことは。
Since they are arranged on mutually parallel @P and P that are perpendicular to the optical axis, the reflected light from one side is affected by the multilayer dielectric film and the other person, and therefore the multilayer electric field body membrane mu and mu 2
However, each device does not function with the desired band-stopping characteristics, and therefore the device as a whole has the disadvantage that the desired band-stopping characteristics cannot be obtained. In order to avoid this, it is possible to make the distance l between the multilayer electric film and A2 sufficiently large, but this has the disadvantage that the device becomes larger as a whole. The thing is.

第1図に於ては多層誘電体膜がム、及びA、と2枚であ
る場合につき述べたが、多層−°電体膜の枚数を十分大
とし、より良好な帯域阻止特性を得んとすれば、尚更で
あった。
In Figure 1, we have described the case where there are two multilayer dielectric films, M and A, but it is possible to obtain better band rejection characteristics by making the number of multilayer dielectric films sufficiently large. If so, even more so.

依って本発明は、上述せる欠点のない新規な多層誘電体
膜フィルタ装置を提案せんとする亀ので、以下述べる所
より明らかとなるであろう。
Therefore, the present invention is an attempt to propose a novel multilayer dielectric film filter device free from the above-mentioned drawbacks, which will become clear from the description below.

嬉3図及び第4図は本発明による多層a電体膜フィルタ
装置の実施例を示し、互に同じ帯域阻止特性を有する複
数n個の多層m1ec体膜ム、。
FIGS. 3 and 4 show an embodiment of a multilayer a-electroelectric film filter device according to the present invention, in which a plurality of n multilayer a-electromechanical membranes each have the same band rejection characteristics.

A2.・−・・・・・・札が、光軸0上にそれと直交す
る面に対して所定の角度−だけ傾斜している順次のra
p  p−、、、、、、p、  上に配されている。
A2.・・・・・・・Sequential ra where the tag is tilted by a predetermined angle − on the optical axis 0 with respect to the plane perpendicular to it.
p p-, , , , p, are arranged on top.

−2 この場合−F、、 P、、 P、  −、−、、−が光
軸0と直交するmE対して角度0だけ傾斜している方向
トwa IfP2 e F4 s F4  ”””・カ
光軸oと直交している面に対して角変−だけ傾斜してい
る方向″とが互に逆関係を有する。
-2 In this case, the direction in which -F,, P,, P, -, -,, - is inclined by an angle of 0 with respect to mE, which is orthogonal to the optical axis 0. ``directions that are inclined at an angle of - with respect to a plane perpendicular to the axis o'' have an inverse relationship to each other.

又多層誘電体膜ム1.ム2 = = ・−A、が、透光
性支持体BS2 m ”21 e −−”−B(n−1
)nと共に。
Also, multilayer dielectric film 1. m2 = = ・-A, but the transparent support BS2 m "21 e --"-B(n-1
) with n.

多層鱒電体膜ム1及びム2.ム2及びムs ”” ””
 −’・ム(II−1)及び札 と透光性支持体”12
mB2B−・−”’ B(n−1)B IIc密接せし
めた関係で一体化さnでいる。この場合透光性支持体B
i(i−N) (但しCI(1+1)と、互に上述せる
角[#の2倍2#だ妙傾斜して対向している主面fs及
びf4を有す多層−電体膜ム(μ、)が伺えは蒸着によ
り被着形成されて、透光性支持板Ci (i+1 )と
多層篩電体属人(sat)  とで多層1電体膜71ル
タF(i+1)が構成されている。而して多Sat体膜
フィルタF(:+r ) が、その多層I電体属人0や
、)ヲ透剤6を用いて接着固定されている。尚多層銹電
体膜ム、は透光性支持板C1(i+1)と同様の透光性
支持板C0を上に被着形成されて、多層−電体膜フィル
タF、が構成され、而してその多ms電体膜フィルタF
、がその多層紡電体膜A、を透光性支持板り、2@とじ
てその主面f、上に接層剤を用いて接着固定されている
・又多層sg+を体膜”tn’、透光性支持板Di(i
や1.と同様の透光性支持板Dn(n+1)がその主1
ii f4’を多層鰐電体膜ム。側として接着剤6を用
いて接着固定されている。
Multilayer trout electric film M1 and M2. Mu2 and Mus ”” ””
-'・Mu (II-1) and tag and translucent support "12
mB2B-・-"' B(n-1)B IIcIntegrated in close relationship.In this case, the transparent support B
i(i-N) (however, CI(1+1) and a multilayer electric body film having main surfaces fs and f4 facing each other with a slight inclination of two times 2# of the angle [#] mentioned above. μ, ) are formed by vapor deposition, and a multilayer single-electrode film 71 F(i+1) is composed of the transparent support plate Ci (i+1) and the multilayer sieve electrolyte (sat). The multi-Sat film filter F(:+r) is adhesively fixed using the multi-layer I-electric film filter F(:+r) and the transparent material 6. In addition, the multilayer electric film filter F is formed by depositing a transparent support plate C0 similar to the transparent support plate C1 (i+1) on top of the transparent support plate C1 (i+1). Multi-ms electric membrane filter F
, the multilayer electrospinning body membrane A, is attached to the translucent support plate 2@ and its main surface f is adhesively fixed on the main surface f using a layering agent, and the multilayer sg+ is attached to the body membrane "tn' , transparent support plate Di(i
Ya1. A transparent support plate Dn (n+1) similar to
ii f4' is a multilayer crocodile electric film. The sides are adhesively fixed using an adhesive 6.

又第4図の場合、透光性支持板C1(i□、の主面f1
  に多層911体膜A+ (sat )が被着形成さ
れて、透光性支持板C4(iや、)と多層#電体−ムム
とで多層−電体膜フィルタ均 が構成されている・画し
て多層鍔電体膜フィルタ杓 が、その多層誘電体膜ムi
 を透光性支持板D(Mヤ、)i備として、透光性支持
板D(i−*)j及びDI(i+1)の主面f!  に
接着剤6を用いて接着固定されている。
In addition, in the case of FIG. 4, the main surface f1 of the transparent support plate C1 (i□)
A multilayer 911 body film A+ (sat) is deposited on the substrate, and a multilayer electric body film filter uniform is constituted by the translucent support plate C4 (i, ) and the multilayer #electric body. The multilayer dielectric film filter has a multilayer dielectric film.
Let the translucent support plate D(Mya,)i be the main surface f of the translucent support plate D(i-*)j and DI(i+1). It is adhesively fixed using adhesive 6.

崗多層−電体膜A、−ζ、透光性支持板り、■、)と同
様の透光性支持板D01がその主WJf、  を多層酵
電体膜ム、側として接着剤を用いて接着固定されている
・又多層1電体膜へは透光性支持板C4(i+1)と同
様の透光性支持板C1゜ヤ、)上に被着形成されて、多
層−一体膜フィルタFnが構成され、而してその多層#
詰膜フィルタFfiがその多層誘電体膜へ を透光性支
持板c(n−1)n側としてその主面f4  上に接着
剤を用いて接着固定されている。
A translucent support plate D01 similar to the multilayer electrolyte membrane A, -ζ, translucent support plate (■,) is attached as its main WJf, using adhesive as the side of the multilayer electrolyte membrane. A multilayer monolithic film filter Fn is fixed with adhesive and is formed on a transparent support plate C1, which is similar to the transparent support plate C4 (i+1). is constructed, and its multilayer #
The membrane filter Ffi is fixed to the multilayer dielectric film on the main surface f4 of the transparent support plate c(n-1) using an adhesive.

以上が本発明による多層誘電体WXフィルタ装置の実施
例の構成であるが、斯る構成によれば。
The above is the configuration of the embodiment of the multilayer dielectric WX filter device according to the present invention.

複数膳枚の多層酵電体膜ム1 # A2 ”’−・−”
 Am が光軸0上に順次記事れている構成を有するの
で。
Multiple plates of multilayer enzyme electrolyte membrane 1 #A2 ”'-・-”
Since it has a configuration in which Am is sequentially written on the optical axis 0.

多層1電体膜フィル−F、、F、・・・・−−−−Pn
 が共に第5図にて曲Jimに示す如き帯域阻止特性を
有する場合、装置全体として所−デジベル加算されたg
s図にて曲@bに示す如き、若し多層−電体練フィルタ
F、〜Fn中の1つのみを使用した場合に比し改l!さ
れた帯域阻止時”性が得られるものである。
Multilayer monoelectric film film-F,,F,...---Pn
If both have band rejection characteristics as shown in the song Jim in FIG.
Compared to the case where only one of the multilayer electric training filters F, ~Fn is used, as shown in the song @b in the s diagram, there is a change in l! This provides excellent band-stop performance.

又第5図及び第4図に示す本発明による多層#電体膜フ
ィルタ装置の場合J全体が一体化されているので、使用
に便なものである。
In addition, in the case of the multilayer electric membrane filter device according to the present invention shown in FIGS. 5 and 4, the entire J is integrated, so it is convenient to use.

更−こ第5図及び第4図に示す本発明による多層酵電体
膜フィルタ装置の場合、多層誘電体膜ム1.ム2・・・
・・・・・・ム1 中、多層誘電体膜ム1.A。
Furthermore, in the case of the multilayer enzyme-electric membrane filter device according to the present invention shown in FIGS. 5 and 4, the multilayer dielectric membrane 1. Mu2...
・・・・・・M1 Inside, multilayer dielectric film M1. A.

ム5 ・−・・・・・・が光軸Oと直交する面に対して
角度−だけ傾斜している一PI I Pl # PS 
 ”’・・・・・・上に配され、又多層誘電体膜A3.
ム4.A6 ・・・−・・・・が光軸0と直交する面に
対して角度θだけ。
1 PI I Pl # PS where the beam 5 ...... is inclined by an angle - with respect to the plane orthogonal to the optical axis O
”'... is disposed on top of the multilayer dielectric film A3.
M4. A6 ...-... is only an angle θ with respect to the plane perpendicular to the optical axis 0.

面P2. P、、 P、  ・・・−・・−とは逆方向
に傾斜しているtTiP、 、 P4. P、  −・
・・・・・上に配されているので、相隣る多層誘電体膜
ムi及びA(i+ 1 )での一方の反射光の影響を他
方が受けることが、縞1図の従来の場合に比し大きく緩
和され、この為多一層鍔電体膜A1.ム2・−・・・・
・・九  の個々が所期の帯域阻止特性を以って作用し
、依って装置全体として゛−域阻止特性が得られるもの
である・尚斯る特性は、上述せる角度−をα5゜以上と
する場合、顕著であった。又角度−をα5°より大とす
るに応じて上述せる特徴が良に発揮された・尚角度−は
偏波特性等を考慮すると810°程度が限度となろう。
Surface P2. tTiP, which is inclined in the opposite direction to P,, P, . . . , P4. P, -・
In the conventional case of the stripe 1 diagram, the reflected light from one of the adjacent multilayer dielectric films i and A(i+1) affects the other. It is greatly relaxed compared to the multi-layer electric body film A1. M2・-・・・・・・
... Each of the above acts with the desired band-stopping characteristics, so that the device as a whole can obtain the band-stopping characteristics.Such characteristics are achieved when the above-mentioned angle is set at α5° or more. In this case, it was remarkable. Furthermore, the above-mentioned characteristics were better exhibited as the angle was made larger than α5°.However, the angle would be limited to about 810° when polarization characteristics and the like are taken into consideration.

尚更に第5図及び第4図に示す本発明による多層−電体
aフィルタ装置によれ紅、上述せる特徴を有するが為、
透光性支持体Bi (1+1 )の平均厚さを2−程度
、従って相隣る多層防電体膜ムム及びム(i+1 )間
の平均間隔を2■程度とし。
Furthermore, since the multilayer electric filter device according to the present invention shown in FIGS. 5 and 4 has the above-mentioned characteristics,
The average thickness of the light-transmitting support Bi (1+1) is about 2-2, and therefore the average distance between adjacent multilayer electrically shielding films Mumu and Mu (i+1) is about 2■.

11M1図の従来の場合に比し格段的に小とすることが
出来、依って装置を全体として第1図の従来の場合に比
し格段的に小にし得る等の大なる4I像を有するもので
ある・ 次V−嬉6図及び第7図を伴なって本発明による多層銹
電体膜フィルタ装置の他の実施例を述べるに、115図
及び第4図との対応部分には同一符号を附して詳細説明
はこれを省略するも。
It has a large 4I image, which can be made much smaller than the conventional case shown in Fig. 11M1, and therefore the device as a whole can be made much smaller than the conventional case shown in Fig. 1. Other embodiments of the multilayer electric membrane filter device according to the present invention will be described with reference to Figures 6 and 7 below. Corresponding parts with Figures 115 and 4 are designated by the same reference numerals. The detailed explanation will be omitted.

次の事項を除いて第5図及び第4図の場合と同様の構成
を有する。
It has the same configuration as the case of FIG. 5 and FIG. 4 except for the following items.

即ち、透光性支持体Bi(i+t)が、透光性支持板D
I(i+t)と同様に、互に上述せる角度−の2倍2−
だけ傾斜して対向している主面f5及びf4  を有す
る透光性支持体嶌・   でなる。“鳳(i+1 ) 又71116図の場合、透光性支持板”i (i+1 
)  の主1iif5又$1 f、 ニ多層s電体膜ム
(i+1)  ”’被着形成されて、透光性支持体E・
   と多jll#電寡(i+1 ) 体膜A(1+1)  とで多層誘電体膜フィルタ’(1
+1)が構成されている・而して多層−電体膜フィルタ
’(i+1)  が、その多層誘電体膜ム(i+1 )
  を透光性支持板”(i+、)(i+2)側として透
光性支持板”(i+*)(i+2)の主面f5又はf6
に接着剤6を用いて接着固定されている・尚多層−電体
膜A。
That is, the transparent support Bi(i+t) is the transparent support plate D
Similarly to I(i+t), twice the angle - mentioned above 2-
The transparent supporting body has main surfaces f5 and f4 which are inclined and face each other. "Otori (i+1)" In the case of figure 71116, the transparent support plate "i (i+1
), the main layer 1iif5 or $1f, two multilayer s electric material film (i+1)'' is deposited and formed on the transparent support E.
Multilayer dielectric film filter'(1
+1) is constituted by the multilayer dielectric film filter '(i+1).
The main surface f5 or f6 of the transparent support plate ``(i+*)(i+2)'' is set as the side of the transparent support plate ``(i+,)(i+2)''
・Multi-layer electric body film A which is adhesively fixed using adhesive 6.

は透光性支持板”i (s+1 )  と同様の透光性
支持板B、、上に被着形成されて、多層#電体膜フィル
タF、が構成され、而してその多*#IIE体績フイA
fりF、が透光性支持板”12に接着剤6を用いて固定
されている・又多層−電体膜九 に。
is formed on a transparent support plate B, which is similar to the transparent support plate "i (s+1)," to constitute a multilayer #electric film filter F, and the multilayer *#IIE Performance fee A
F is fixed to a translucent support plate 12 using an adhesive 6, and a multilayer electric film 9 is attached.

透光性支持板”i (i+oと同様の透光性支持板Bn
(a+1)が同様に接着剤を用いて固定されている。
Translucent support plate "i" (translucent support plate Bn similar to i + o
(a+1) is similarly fixed using adhesive.

更に第7図の場合、透光性支持板Bi(1+1)の主面
f5又はf4に多層−電体膜A、  が被着形成されて
、透光性支持板も(神、)と多層誘電体膜ム1 とで多
層−電体膜フィルタF、  が構成されている・而して
多層−電体MIフィル#y、が。
Furthermore, in the case of FIG. 7, a multilayer dielectric film A is deposited on the main surface f5 or f4 of the transparent support plate Bi(1+1), and the transparent support plate is also coated with the multilayer dielectric film A. The body membrane M1 constitutes a multilayer electric membrane filter F, and thus a multilayer electric body MI filter #y.

その多層誘電体膜ムi を透−光性支持板g(、ヤ、)
i側として透光性支持11”(1−1)rに接着剤6を
用いて固定されている。尚多層−電体膜ム、に透光性支
持板Bi(i+1)と同様の透光性支持板101が接着
剤6を用いて固定されている。又多層−電体膜ム、は透
光性支持板FSi(i。、)と同様の透光性支持”II
(in+1)上に被着形成されて、多層−電体膜フィル
タFわが構成され、而してその多層−電体膜フィルタI
pHがその多層防電体膜A4  を透光性支持板B(、
−1)nIlとして接着剤を用いて接着固定されている
The multilayer dielectric film i is attached to a translucent support plate g (, ya,).
It is fixed to the transparent support plate 11'' (1-1)r on the i side using an adhesive 6.The multilayer electric film is also fixed to the transparent support plate Bi(i+1) with the same transparent material as the transparent support plate Bi(i+1). A transparent support plate 101 is fixed using an adhesive 6.The multilayer electric film is also a transparent support plate 101 similar to the transparent support plate FSi(i.,).
(in+1) to form a multilayer electric film filter F, and the multilayer electric film filter I
The pH of the multilayer electrically shielding film A4 is
-1) Adhesively fixed using an adhesive as nIl.

以上が本発明による多層SW体編フィルタ装置の他の実
施例の構成であるが、斯る構成によれば、それが上述せ
る事項を除い″′5縛第5図及び第45AJJ場合と一
様であるので、詳lIP説明はこれを省略するも813
図及び5第4図の場合と同様の優れた特徴を有すると恭
に、透光性支持板町(ムや、)が、透光性支持板、町0
1.)のみで構成されているので、第6図及び第4図の
場合に比し全体として構成が極めて簡島である等の特徴
を有するものである。
The above is the structure of another embodiment of the multilayer SW body filter device according to the present invention. Therefore, the detailed IP explanation will be omitted.813
Figures 5 and 5 have the same excellent features as the case of Figure 4.
1. ), the structure as a whole is extremely simple compared to the cases shown in FIGS. 6 and 4.

向上述に於ては本発明の僅かの例を示したに留まり1本
発明の精神を脱することなしに櫨々の変型変更をなし得
るであろう。
In the description of improvements, only a few examples of the present invention are shown, and many modifications and changes may be made without departing from the spirit of the present invention.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は従来の多層I電体膜フィルタ装置を示す路線的
@面図、I!2図はその帯域阻止特性を示す図、第3図
及び第4図は本発明による多層#電体膜フィルタ装置の
実施例を示す路線的側面図bgs図はそれ等の帯域阻止
特性を示す図、m6図及びta7図は本発明による多層
誘電体膜フイルタ装置の他の実施例を示す路線的側面図
である。 図中−A1 、 A2. A3  ・・・・・・・・・
−は多層−電体膜。 P、、B2.P、・・・−・i・は面S B129 B
25 # B34・・・・・・・・・は透光性支持体%
C,,,C□、C,4,、・・・・””e  B121
  B211  B34  ”・・””’#  ”tz
*  ”2sIE、4・・・・・・・・・は透光性支持
板を夫々示す。 出願人 日本電信電話公社 /(J−p)’4−奪yが−
FIG. 1 is a schematic diagram showing a conventional multilayer I-electric membrane filter device, I! 2 is a diagram showing the band rejection characteristics thereof, and FIGS. 3 and 4 are schematic side views showing embodiments of the multilayer electric film filter device according to the present invention. BGS diagram is a diagram showing the band rejection characteristics thereof. , m6 and ta7 are line side views showing other embodiments of the multilayer dielectric film filter device according to the present invention. In the figure - A1, A2. A3 ・・・・・・・・・
- is a multilayer electric film. P,,B2. P,...-i. is surface S B129 B
25 #B34...... is transparent support%
C,,,C□,C,4,...""e B121
B211 B34 ”・””’# ”tz
* "2sIE, 4...... each indicates a translucent support plate. Applicant: Nippon Telegraph and Telephone Public Corporation/(J-p)'4-Y-

Claims (1)

【特許請求の範囲】 t 複数の多層酵電体膜ム、、 A2. A、  −−
−−・・・−が、光軸上にそれと直交する面に対して所
定の角度丈は傾斜している順次のmPl、P2゜P、−
、、−、′・・・上に配され、上、配向P1.P、、P
。 ・・・−・・・・が上記光軸と直交する面に対して所定
の角度だけ傾斜している方向と、上記tl P2 eP
4.P、・・・・・・・−が上記光軸と直交する面に対
して所定の角度だけ傾斜している方向とが互に逆関係を
有し、上記多層−電体膜A1.ム2゜ム3”””””が
、a光性支持体B12 # B25 #B54・−−・
・・と共に、上記多層騎電体gA、及びA2.ム2及び
ムS、ムS及びム4  ”” −””を上記透光性支持
体8121 B21 I B54 ””” ””密接せ
し吟た関係で一体化されてなる事を特徴とする多層−電
体膜フィルタ装置・ 2、特許請求の範囲嬉1項所載の多層n電体膜フイ#り
装置に於て、上記透光性支持板町(1+1) (但し1
5m1,2,5−−−)が亙に平行に対向しているIl
l及び第2の工面を有する透光性支持板CI(l+1)
と、互に上記所定−一92倍だけ傾斜して対向している
第3及び11114のニーを有する透光性支持板Di 
(l+1)とでなり、上記透光性支持板Ci(1+t 
)の1lt1及びII2のニーの何れか一方に上記多層
誘電体膜ム(++1)  又はム1tIs被着形成され
てなる事を特徴とする多層霞電体膜フイヘタ装置。  
。 !L411許請求の範!8第1項所載の多層−電体膜フ
イルタ装置に於て、透光性支持体Bi(神、)(但しi
ml、2,5−−−−−)が互に上記所定の角度の2倍
だけ傾斜して対向しているB5及びB6の正画を有する
透光性支持体町(1+1)でなり、該透光性支持板の第
5及び86の工面の何れか一方に上記多層1iilt体
膜A(i+t)又はAl  が被着されてなる事を特徴
とする多層−電体膜フイルタ装置。
[Claims] t. A plurality of multilayer enzyme electrolyte membranes, A2. A, --
--...- are sequential mPl, P2゜P, - which are inclined at a predetermined angular length with respect to the plane orthogonal to the optical axis.
, , -,' . . . disposed on top, orientation P1. P,,P
. . . . is inclined at a predetermined angle with respect to the plane orthogonal to the optical axis, and the tl P2 eP
4. The directions in which P, . M2゜m3""""" is a photosensitive support B12 #B25 #B54・---・
. . , the multilayer electrical body gA, and A2. A multilayer characterized in that Mu2 and MuS, MuS and Mu4 ""-"" are integrated in a close relationship with the transparent support 8121 B21 I B54 """"" - Electrical film filter device 2. In the multilayer n-electrical film filter device recited in claim 1, the above-mentioned light-transmitting support plate (1+1) (However, 1
5m1,2,5---) are facing parallel to each other
Translucent support plate CI (l+1) with l and second work surface
and a translucent support plate Di having third and 11114 knees facing each other at an inclination of -192 times the above predetermined amount.
(l+1), and the above transparent support plate Ci(1+t
1. A multilayer haze electric film filler device characterized in that the multilayer dielectric film M(++1) or M1tIs is deposited on either one of the knees of 1lt1 and II2 of 1.).
. ! L411 permission claim range! 8. In the multilayer electric membrane filter device described in Paragraph 1, the light-transmitting support Bi (with the exception of i
ml, 2,5----) is a transparent support (1+1) having positive images of B5 and B6 facing each other at an angle twice the predetermined angle, and A multilayer electric film filter device, characterized in that the multilayer IIIIT film A(i+t) or Al is deposited on either the 5th or 86th work surface of a light-transmitting support plate.
JP14017681A 1981-09-05 1981-09-05 Multilayered dielectric filter device Pending JPS5842002A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14017681A JPS5842002A (en) 1981-09-05 1981-09-05 Multilayered dielectric filter device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14017681A JPS5842002A (en) 1981-09-05 1981-09-05 Multilayered dielectric filter device

Publications (1)

Publication Number Publication Date
JPS5842002A true JPS5842002A (en) 1983-03-11

Family

ID=15262650

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14017681A Pending JPS5842002A (en) 1981-09-05 1981-09-05 Multilayered dielectric filter device

Country Status (1)

Country Link
JP (1) JPS5842002A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0466403A1 (en) * 1990-07-06 1992-01-15 Optical Coating Laboratory, Inc. Leakage-corrected linear variable filter
US6873464B1 (en) * 1999-12-09 2005-03-29 Femtolasers Produktions Gmbh Multilayer mirror
JPWO2006088155A1 (en) * 2005-02-18 2008-07-03 株式会社村田製作所 Dielectric multilayer periodic structure
JP2018534622A (en) * 2015-11-03 2018-11-22 マテリオン コーポレイション Filter array having focused light with reduced stray light

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0466403A1 (en) * 1990-07-06 1992-01-15 Optical Coating Laboratory, Inc. Leakage-corrected linear variable filter
US6873464B1 (en) * 1999-12-09 2005-03-29 Femtolasers Produktions Gmbh Multilayer mirror
JPWO2006088155A1 (en) * 2005-02-18 2008-07-03 株式会社村田製作所 Dielectric multilayer periodic structure
JP2018534622A (en) * 2015-11-03 2018-11-22 マテリオン コーポレイション Filter array having focused light with reduced stray light

Similar Documents

Publication Publication Date Title
TWI236547B (en) Optical multilayer-film filter, method for fabricating optical multilayer-film filter, optical low-pass filter, and electronic apparatus
JP4161387B2 (en) Multilayer antireflection film
JPH0337233B2 (en)
JPS5842002A (en) Multilayered dielectric filter device
TW400441B (en) Filter device for use with light and method making the same
US5140464A (en) Interference film filter for copying machine
US5619382A (en) Reflection type imaging optical system
JPH0535403B2 (en)
JP2006119665A (en) Optical member
US6229651B1 (en) Optical element and its manufacturing process
JP3710664B2 (en) Polarizing filter
JPH02228608A (en) Grid polarizer
JPH10133253A (en) Light quantity stopping device
KR940010589B1 (en) Optical filter
JPH07168009A (en) Beam splitter and light branching circuit
US6587268B1 (en) Optical element and projection system
JP2016177067A (en) Optical filter and optical device
JP2741731B2 (en) Polarizer
JPH03206606A (en) Laminated capacitor
WO2005010594A1 (en) Optical filter, imager, and method for manufacturing optical filter
JP2661970B2 (en) Manufacturing method of multilayer electrode
JPH0712970Y2 (en) Optical isolator
CA1168348A (en) Ultrasonic transducer element
JPS6343450Y2 (en)
JP2004045452A (en) Optical multilayer film and optical device