JPS5833704Y2 - Semiconductor wafer supply equipment - Google Patents

Description

【考案の詳細な説明】 本考案は専用マガジンに収納された半導体ウェハ（以下
ウェハと呼ぶ）を、送りネジにより載置台上のマガジン
ごと上下移送することにより、供給或いは収納を行なう
装置に関するものである。[Detailed description of the invention] This invention relates to a device that supplies or stores semiconductor wafers (hereinafter referred to as wafers) housed in a dedicated magazine by vertically transporting the entire magazine on a mounting table using a feed screw. be.

従来、送りネジにより、マガジンを上下移送し、ウェハ
の供給、収納を行なう装置には、第１図の部分断面図に
示すようなものが知られている。2. Description of the Related Art Conventionally, a device as shown in a partial cross-sectional view of FIG. 1 is known as a device that feeds and stores wafers by vertically transporting a magazine using a feed screw.

即ち第１図に示すものは、送りネジ１が上下の支え板２
，３によりベアリング１１を介して保持され、載置台４
は送りネジ１に螺合され、駆動モータ９、歯車１０を介
し送りネジ１を回転することにより載置台４は上下に移
送され、載置台４上のマガジン５内に収納されているウ
ェハ６を何らかの方法（図示せず）により他装置へ供給
し或いは他装置から空のマガジン５へ収納するものであ
るが、載置台４の上限或いは下限停止位置は、ウェハ６
のスムースな供給、収納を行なう為に微少な調整を必要
とされる。That is, in the case shown in FIG. 1, the feed screw 1 is attached to the upper and lower support plates 2.
, 3 via bearings 11, and the mounting table 4
is screwed onto a feed screw 1, and by rotating the feed screw 1 via a drive motor 9 and a gear 10, the mounting table 4 is moved up and down, and the wafers 6 stored in the magazine 5 on the mounting table 4 are transferred. Although the wafer is supplied to another device by some method (not shown) or is stored from another device into an empty magazine 5, the upper or lower limit stop position of the mounting table 4 is set at the wafer 6.
Minor adjustments are required to ensure smooth supply and storage.

従来は第１図に示す上限或いは下限の検出器７，８を取
付けである上下取付板７ａ、８ａを各々上下に調整する
必要があった。Conventionally, it has been necessary to vertically adjust upper and lower mounting plates 7a and 8a to which the upper and lower limit detectors 7 and 8 shown in FIG. 1 are mounted, respectively.

第１図かられかるように、上下限の検出器７，８は、各
々送りネジ１の支え板２，３に取付けられている為、非
常に狭い場所での調整を強いられ、更に、同時に上下限
の調整が出来なかった。As can be seen from Fig. 1, the upper and lower limit detectors 7 and 8 are attached to the support plates 2 and 3 of the feed screw 1, respectively, so they are forced to adjust in a very narrow space, and furthermore, they are forced to adjust at the same time. It was not possible to adjust the upper and lower limits.

また、機構上載置台４を上下に移送しながらの調整も安
全上行なうことが出来ず、この調整には非常に時間を要
し、作業も困難で要求される微少な調整が出来なかった
。Further, it is not possible to make adjustments while moving the mounting table 4 up and down due to the mechanism, for safety reasons, and this adjustment takes a very long time and is difficult to perform, making it impossible to make the required minute adjustments.

本考案は前記問題点を解決し、ウェハの供給、収納を安
定した状態で実施できる装置を提供するものである。The present invention solves the above problems and provides an apparatus capable of supplying and storing wafers in a stable manner.

次に本考案を図面を用いて説明する。Next, the present invention will be explained using the drawings.

第２図は、本考案にかかる装置の一実施例を示す部分断
面図、第３図はその一部を示す詳細図である。FIG. 2 is a partial sectional view showing one embodiment of the device according to the present invention, and FIG. 3 is a detailed view showing a part thereof.

第２，３図において、送りネジ１は上下の支え板２，３
ヘベアリング１１を介して保持され、更に載置台４は送
りネジ１に螺合し、駆動モータ９により歯車１０を介し
て送りネジ１を回転することにより、上下に移送される
。In Figures 2 and 3, the feed screw 1 is connected to the upper and lower support plates 2 and 3.
The mounting table 4 is held via a bearing 11, and is further screwed onto a feed screw 1, and is moved up and down by rotating the feed screw 1 via a gear 10 by a drive motor 9.

送りネジ１の近傍には、２本の回転調整軸１２を平行に
かつ近接させて上下の支え板２，３に軸支して垂直に立
て、調整軸１２の一方は路上半分に送りネジ部１２ａを
、又他方は略下半分に送りネジ部１２ ａを設け、それ
ぞれの調整軸１２の送りネジ部１２ ａの残部は案内部
となる。Near the feed screw 1, two rotation adjustment shafts 12 are placed parallel and close to each other and supported vertically on upper and lower support plates 2 and 3, and one of the adjustment shafts 12 has a feed screw portion in half of the road. 12a, and the other is provided with a feed screw portion 12a approximately in the lower half, and the remainder of the feed screw portion 12a of each adjustment shaft 12 serves as a guide portion.

この画調整軸１２に跨って上限検出器７及び下限検出器
８を通すことによって、上下の検出器７゜８はそれぞれ
送りネジ部１２ ａと案内部１２ｂとに係合し、画調整
軸１２の上方に上限検出器７が、又下方に下限検出器が
取付けられた構造となる。By passing the upper limit detector 7 and the lower limit detector 8 across the image adjustment shaft 12, the upper and lower detectors 7.8 engage with the feed screw portion 12a and the guide portion 12b, respectively, and the image adjustment shaft 12 The upper limit detector 7 is installed above and the lower limit detector is installed below.

このようにして取付けられた上下限検出器７，８の調整
においては、軸１２を上部より回転することにより、軸
１２に取付けられた検出器７，８がネジ部１２ ａの回
転につれて僅かスライドして上下動する。In adjusting the upper and lower limit detectors 7 and 8 attached in this way, by rotating the shaft 12 from above, the detectors 7 and 8 attached to the shaft 12 will slightly slide as the threaded portion 12a rotates. and move up and down.

更に載置台４の上下限位置の調整は、外部より上下の検
出器７，８を上述の如く操作することにより、載置台４
を上下移送させながら行なう。Further, the upper and lower limit positions of the mounting table 4 can be adjusted by operating the upper and lower detectors 7 and 8 from outside as described above.
This is done while moving it up and down.

この操作は安全に、且つネジ送りの為微少なスライド調
整が容易に行なえるものである。This operation is safe and allows minute slide adjustments to be easily made for screw feeding.

以上説明したように、本考案による装置はウェハの供給
、収納において、載置台の上下移送における上下限停止
位置設定を容易に且つ正確に行なえるものである。As described above, the apparatus according to the present invention can easily and accurately set the upper and lower limit stop positions during the vertical movement of the mounting table when supplying and storing wafers.

【図面の簡単な説明】[Brief explanation of drawings]

第１図は従来のウェハ供給装置を示す部分断面図、第２
図は本考案にかかるウェハー供給装置の一実施例を示す
部分断面図、第３図は本考案による装置の一部を示す詳
細図である。 １・・・・・・送りネジ、２・・・・・・上部支え板、
３・・・・・・下部支え板、４・・・・・・載置台、５
・・・・・・マガジン、６・・・・・・ウェハ、７・・
・・・・上限検出器、７ａ・・・・・・上部取付板、８
・・・・・・下限検出器、８ａ・・・・・・下部取付板
、９・・・・・・駆動モータ、１０・・・・・・歯車、
１１・・・・・・ベアリング、１２・・・・・・調整軸
、１２ａ・・・・・・ネジ部、１２ ｂ・・・・・・案
内部。Fig. 1 is a partial sectional view showing a conventional wafer supply device;
The figure is a partial cross-sectional view showing an embodiment of the wafer supply device according to the present invention, and FIG. 3 is a detailed view showing a part of the device according to the present invention. 1... Feed screw, 2... Upper support plate,
3... Lower support plate, 4... Placement stand, 5
...Magazine, 6...Wafer, 7...
... Upper limit detector, 7a ... Upper mounting plate, 8
...lower limit detector, 8a ... lower mounting plate, 9 ... drive motor, 10 ... gear,
11...Bearing, 12...Adjustment shaft, 12a...Screw part, 12b...Guiding part.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 垂直に軸支された送りネジに螺合され半導体ウェハを収
納するマガジンを装着して上下する載置台の上限下限停
止位置を設定する検出器を上下２個所に備えた半導体ウ
ェハ供給装置において、前記送りネジの近傍に２本の調
整回転軸を平行かつ近接させて垂直に軸支し、一方は路
上半分に又他方は格下半分に送りネジ部を設けそれぞれ
の残部はそのまま案内部とし、該両軸に跨って上限検出
器及び下限検出器を通すことによって上下検出器はそれ
ぞれ送りネジ部と案内部に係合され、画調整軸の端部を
回転操作して上下検出器の位置をスライド調整する機構
を備えたことを特徴とする半導体ウェハ供給装置。In the semiconductor wafer supply device, the semiconductor wafer supply device is equipped with detectors at two locations, upper and lower, for setting upper and lower limit stop positions of a mounting table that is mounted with a magazine that is screwed onto a vertically supported feed screw and that stores semiconductor wafers, and that moves up and down. Two adjustment rotation shafts are vertically supported in parallel and close to each other near the feed screw, one has a feed screw part in the road half, and the other has a feed screw part in the lower half, and the rest of each is used as a guide part. By passing the upper limit detector and lower limit detector across the shaft, the upper and lower detectors are engaged with the feed screw part and the guide part, respectively, and the positions of the upper and lower detectors are slid and adjusted by rotating the end of the image adjustment shaft. A semiconductor wafer supply device characterized by being equipped with a mechanism for.