JPS5833704Y2 - Semiconductor wafer supply equipment - Google Patents
Semiconductor wafer supply equipmentInfo
- Publication number
- JPS5833704Y2 JPS5833704Y2 JP2078979U JP2078979U JPS5833704Y2 JP S5833704 Y2 JPS5833704 Y2 JP S5833704Y2 JP 2078979 U JP2078979 U JP 2078979U JP 2078979 U JP2078979 U JP 2078979U JP S5833704 Y2 JPS5833704 Y2 JP S5833704Y2
- Authority
- JP
- Japan
- Prior art keywords
- feed screw
- semiconductor wafer
- wafer supply
- detectors
- supply device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Transmission Devices (AREA)
Description
【考案の詳細な説明】
本考案は専用マガジンに収納された半導体ウェハ(以下
ウェハと呼ぶ)を、送りネジにより載置台上のマガジン
ごと上下移送することにより、供給或いは収納を行なう
装置に関するものである。[Detailed description of the invention] This invention relates to a device that supplies or stores semiconductor wafers (hereinafter referred to as wafers) housed in a dedicated magazine by vertically transporting the entire magazine on a mounting table using a feed screw. be.
従来、送りネジにより、マガジンを上下移送し、ウェハ
の供給、収納を行なう装置には、第1図の部分断面図に
示すようなものが知られている。2. Description of the Related Art Conventionally, a device as shown in a partial cross-sectional view of FIG. 1 is known as a device that feeds and stores wafers by vertically transporting a magazine using a feed screw.
即ち第1図に示すものは、送りネジ1が上下の支え板2
,3によりベアリング11を介して保持され、載置台4
は送りネジ1に螺合され、駆動モータ9、歯車10を介
し送りネジ1を回転することにより載置台4は上下に移
送され、載置台4上のマガジン5内に収納されているウ
ェハ6を何らかの方法(図示せず)により他装置へ供給
し或いは他装置から空のマガジン5へ収納するものであ
るが、載置台4の上限或いは下限停止位置は、ウェハ6
のスムースな供給、収納を行なう為に微少な調整を必要
とされる。That is, in the case shown in FIG. 1, the feed screw 1 is attached to the upper and lower support plates 2.
, 3 via bearings 11, and the mounting table 4
is screwed onto a feed screw 1, and by rotating the feed screw 1 via a drive motor 9 and a gear 10, the mounting table 4 is moved up and down, and the wafers 6 stored in the magazine 5 on the mounting table 4 are transferred. Although the wafer is supplied to another device by some method (not shown) or is stored from another device into an empty magazine 5, the upper or lower limit stop position of the mounting table 4 is set at the wafer 6.
Minor adjustments are required to ensure smooth supply and storage.
従来は第1図に示す上限或いは下限の検出器7,8を取
付けである上下取付板7a、8aを各々上下に調整する
必要があった。Conventionally, it has been necessary to vertically adjust upper and lower mounting plates 7a and 8a to which the upper and lower limit detectors 7 and 8 shown in FIG. 1 are mounted, respectively.
第1図かられかるように、上下限の検出器7,8は、各
々送りネジ1の支え板2,3に取付けられている為、非
常に狭い場所での調整を強いられ、更に、同時に上下限
の調整が出来なかった。As can be seen from Fig. 1, the upper and lower limit detectors 7 and 8 are attached to the support plates 2 and 3 of the feed screw 1, respectively, so they are forced to adjust in a very narrow space, and furthermore, they are forced to adjust at the same time. It was not possible to adjust the upper and lower limits.
また、機構上載置台4を上下に移送しながらの調整も安
全上行なうことが出来ず、この調整には非常に時間を要
し、作業も困難で要求される微少な調整が出来なかった
。Further, it is not possible to make adjustments while moving the mounting table 4 up and down due to the mechanism, for safety reasons, and this adjustment takes a very long time and is difficult to perform, making it impossible to make the required minute adjustments.
本考案は前記問題点を解決し、ウェハの供給、収納を安
定した状態で実施できる装置を提供するものである。The present invention solves the above problems and provides an apparatus capable of supplying and storing wafers in a stable manner.
次に本考案を図面を用いて説明する。Next, the present invention will be explained using the drawings.
第2図は、本考案にかかる装置の一実施例を示す部分断
面図、第3図はその一部を示す詳細図である。FIG. 2 is a partial sectional view showing one embodiment of the device according to the present invention, and FIG. 3 is a detailed view showing a part thereof.
第2,3図において、送りネジ1は上下の支え板2,3
ヘベアリング11を介して保持され、更に載置台4は送
りネジ1に螺合し、駆動モータ9により歯車10を介し
て送りネジ1を回転することにより、上下に移送される
。In Figures 2 and 3, the feed screw 1 is connected to the upper and lower support plates 2 and 3.
The mounting table 4 is held via a bearing 11, and is further screwed onto a feed screw 1, and is moved up and down by rotating the feed screw 1 via a gear 10 by a drive motor 9.
送りネジ1の近傍には、2本の回転調整軸12を平行に
かつ近接させて上下の支え板2,3に軸支して垂直に立
て、調整軸12の一方は路上半分に送りネジ部12aを
、又他方は略下半分に送りネジ部12 aを設け、それ
ぞれの調整軸12の送りネジ部12 aの残部は案内部
となる。Near the feed screw 1, two rotation adjustment shafts 12 are placed parallel and close to each other and supported vertically on upper and lower support plates 2 and 3, and one of the adjustment shafts 12 has a feed screw portion in half of the road. 12a, and the other is provided with a feed screw portion 12a approximately in the lower half, and the remainder of the feed screw portion 12a of each adjustment shaft 12 serves as a guide portion.
この画調整軸12に跨って上限検出器7及び下限検出器
8を通すことによって、上下の検出器7゜8はそれぞれ
送りネジ部12 aと案内部12bとに係合し、画調整
軸12の上方に上限検出器7が、又下方に下限検出器が
取付けられた構造となる。By passing the upper limit detector 7 and the lower limit detector 8 across the image adjustment shaft 12, the upper and lower detectors 7.8 engage with the feed screw portion 12a and the guide portion 12b, respectively, and the image adjustment shaft 12 The upper limit detector 7 is installed above and the lower limit detector is installed below.
このようにして取付けられた上下限検出器7,8の調整
においては、軸12を上部より回転することにより、軸
12に取付けられた検出器7,8がネジ部12 aの回
転につれて僅かスライドして上下動する。In adjusting the upper and lower limit detectors 7 and 8 attached in this way, by rotating the shaft 12 from above, the detectors 7 and 8 attached to the shaft 12 will slightly slide as the threaded portion 12a rotates. and move up and down.
更に載置台4の上下限位置の調整は、外部より上下の検
出器7,8を上述の如く操作することにより、載置台4
を上下移送させながら行なう。Further, the upper and lower limit positions of the mounting table 4 can be adjusted by operating the upper and lower detectors 7 and 8 from outside as described above.
This is done while moving it up and down.
この操作は安全に、且つネジ送りの為微少なスライド調
整が容易に行なえるものである。This operation is safe and allows minute slide adjustments to be easily made for screw feeding.
以上説明したように、本考案による装置はウェハの供給
、収納において、載置台の上下移送における上下限停止
位置設定を容易に且つ正確に行なえるものである。As described above, the apparatus according to the present invention can easily and accurately set the upper and lower limit stop positions during the vertical movement of the mounting table when supplying and storing wafers.
第1図は従来のウェハ供給装置を示す部分断面図、第2
図は本考案にかかるウェハー供給装置の一実施例を示す
部分断面図、第3図は本考案による装置の一部を示す詳
細図である。
1・・・・・・送りネジ、2・・・・・・上部支え板、
3・・・・・・下部支え板、4・・・・・・載置台、5
・・・・・・マガジン、6・・・・・・ウェハ、7・・
・・・・上限検出器、7a・・・・・・上部取付板、8
・・・・・・下限検出器、8a・・・・・・下部取付板
、9・・・・・・駆動モータ、10・・・・・・歯車、
11・・・・・・ベアリング、12・・・・・・調整軸
、12a・・・・・・ネジ部、12 b・・・・・・案
内部。Fig. 1 is a partial sectional view showing a conventional wafer supply device;
The figure is a partial cross-sectional view showing an embodiment of the wafer supply device according to the present invention, and FIG. 3 is a detailed view showing a part of the device according to the present invention. 1... Feed screw, 2... Upper support plate,
3... Lower support plate, 4... Placement stand, 5
...Magazine, 6...Wafer, 7...
... Upper limit detector, 7a ... Upper mounting plate, 8
...lower limit detector, 8a ... lower mounting plate, 9 ... drive motor, 10 ... gear,
11...Bearing, 12...Adjustment shaft, 12a...Screw part, 12b...Guiding part.
Claims (1)
納するマガジンを装着して上下する載置台の上限下限停
止位置を設定する検出器を上下2個所に備えた半導体ウ
ェハ供給装置において、前記送りネジの近傍に2本の調
整回転軸を平行かつ近接させて垂直に軸支し、一方は路
上半分に又他方は格下半分に送りネジ部を設けそれぞれ
の残部はそのまま案内部とし、該両軸に跨って上限検出
器及び下限検出器を通すことによって上下検出器はそれ
ぞれ送りネジ部と案内部に係合され、画調整軸の端部を
回転操作して上下検出器の位置をスライド調整する機構
を備えたことを特徴とする半導体ウェハ供給装置。In the semiconductor wafer supply device, the semiconductor wafer supply device is equipped with detectors at two locations, upper and lower, for setting upper and lower limit stop positions of a mounting table that is mounted with a magazine that is screwed onto a vertically supported feed screw and that stores semiconductor wafers, and that moves up and down. Two adjustment rotation shafts are vertically supported in parallel and close to each other near the feed screw, one has a feed screw part in the road half, and the other has a feed screw part in the lower half, and the rest of each is used as a guide part. By passing the upper limit detector and lower limit detector across the shaft, the upper and lower detectors are engaged with the feed screw part and the guide part, respectively, and the positions of the upper and lower detectors are slid and adjusted by rotating the end of the image adjustment shaft. A semiconductor wafer supply device characterized by being equipped with a mechanism for.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2078979U JPS5833704Y2 (en) | 1979-02-20 | 1979-02-20 | Semiconductor wafer supply equipment |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2078979U JPS5833704Y2 (en) | 1979-02-20 | 1979-02-20 | Semiconductor wafer supply equipment |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS55122354U JPS55122354U (en) | 1980-08-30 |
JPS5833704Y2 true JPS5833704Y2 (en) | 1983-07-28 |
Family
ID=28852429
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2078979U Expired JPS5833704Y2 (en) | 1979-02-20 | 1979-02-20 | Semiconductor wafer supply equipment |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5833704Y2 (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
AT507158B1 (en) * | 2008-07-02 | 2010-05-15 | Juergen Zimmermann | SETTING DEVICE FOR POSITIONING A LOAD |
-
1979
- 1979-02-20 JP JP2078979U patent/JPS5833704Y2/en not_active Expired
Also Published As
Publication number | Publication date |
---|---|
JPS55122354U (en) | 1980-08-30 |
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