JPS58216236A - Vacuum printing frame apparatus - Google Patents

Vacuum printing frame apparatus

Info

Publication number
JPS58216236A
JPS58216236A JP57100466A JP10046682A JPS58216236A JP S58216236 A JPS58216236 A JP S58216236A JP 57100466 A JP57100466 A JP 57100466A JP 10046682 A JP10046682 A JP 10046682A JP S58216236 A JPS58216236 A JP S58216236A
Authority
JP
Japan
Prior art keywords
frame
vacuum
chamber
transparent film
transparent
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP57100466A
Other languages
Japanese (ja)
Inventor
Kimio Kato
加藤　喜三雄
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
DOUJIYUN KOKI KK
Original Assignee
DOUJIYUN KOKI KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by DOUJIYUN KOKI KK filed Critical DOUJIYUN KOKI KK
Priority to JP57100466A priority Critical patent/JPS58216236A/en
Publication of JPS58216236A publication Critical patent/JPS58216236A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
    • G03B27/00—Photographic printing apparatus
    • G03B27/02—Exposure apparatus for contact printing
    • G03B27/14—Details
    • G03B27/18—Maintaining or producing contact pressure between original and light-sensitive material
    • G03B27/20—Maintaining or producing contact pressure between original and light-sensitive material by using a vacuum or fluid pressure

Landscapes

  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)

Abstract

PURPOSE:To bring perfectly a printing plate into contact with a photographic negative without any bubbles between them in a vacuum printing frame apparatus, by forming the 1st and 2nd closed rooms with two sheets of transparent film members, and by making the rooms vacuum independently. CONSTITUTION:In a vacuum printing frame apparatus, in which a printing plate 51 and a photographing negative 52 are placed of a placing member 60, the 1st and 2nd vacuum rooms A and B are formed with transparent film members 20 and 30. When the degree of vacuum of the vacuum room A is increased with a pump P1 after the degree of vacuum of the vacuum room B is increased with a pump P2 and the transparent films 20 and 30 are deformed into drum shapes, the transparent films 20 and 30 are attracted toward the negative 52. As a result, the top surface T presses the negative 52, and the negative 52 is brought perfectly into contacts with the printing plate 51.

Description

【発明の詳細な説明】 この発明は真空焼枠装置に関するものであり、より具体
的には機械要素部品または電子部品等を蝕刻により製造
する場合の製造行程で行なわれる前記の各部品基板に写
真原板を無機泡状に完全に密着させるための真空焼枠装
置に係る。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a vacuum baking frame apparatus, and more specifically, to a vacuum baking frame apparatus, and more specifically, to a vacuum baking frame apparatus, and more specifically, to a vacuum baking frame apparatus, it is possible to attach a photograph to each of the above-mentioned component boards during the manufacturing process when manufacturing mechanical components or electronic components by etching. This relates to a vacuum baking frame device for completely adhering an original plate to an inorganic foam.

更に詳細には、この発明は、歯車等の機械要素部品また
はプリント基板、ＬＳＩ、超ＬＳＩ等の集積回路および
これ等回路用基板の電子部品を写真腐触法（フォトエツ
チング）により製造する場合の中間行程として行なわれ
る前記の各部品を撮影した写真原板、例えばポリエステ
ル、ポリスチレン、ポリカーボネート等の写真フィルム
と、前記の各部品基板、例えばゲルマニウム、シリコン
、モリブデン、ステンレス、銅、ニッケル、クロム、パ
ーマロイまたはこれ等の合金あるいはフレキシブル配線
等の場合のポリエステル等の基板表面に感光材料を塗付
した焼付板とを無気泡状に完全に密着させるための真空
焼枠装置に関するものである。More specifically, the present invention is an intermediate method for manufacturing mechanical component parts such as gears, integrated circuits such as printed circuit boards, LSIs, VLSIs, and electronic components of circuit boards for these circuits by photoetching. A photographic original plate for photographing each of the above-mentioned parts, such as a photographic film of polyester, polystyrene, polycarbonate, etc., and a substrate for each of the above-mentioned parts, such as germanium, silicon, molybdenum, stainless steel, copper, nickel, chromium, permalloy, or the like. The present invention relates to a vacuum baking frame device for completely adhering a baking plate coated with a photosensitive material to the surface of a substrate made of alloys such as those mentioned above or polyester for flexible wiring, etc., in a bubble-free manner.

この発明の特徴を顕現させるために従来の真空焼枠装置
につき略述すれば次のとおりである。In order to bring out the features of the present invention, a conventional vacuum baking frame apparatus will be briefly described below.

第１図は従来の真空焼枠装置を示したもので、この真空
焼枠装置は閉断面枠１と透明な平板ガラス２とポリエス
テル等の可撓質の透明膜３とで密閉室Ａ′を形成しこの
密閉室Ａ′内をポンプＰ′を介して真空化することによ
って前記透明膜３を平板ガラス側に強制的に吸引し、平
板ガラス３上にかさね合せて載置されている焼付板４と
写真原板５とを無気泡状に完全密着させようとするもの
であった。FIG. 1 shows a conventional vacuum baking frame device. This vacuum baking frame device has a closed chamber A' with a closed section frame 1, a transparent flat glass 2, and a flexible transparent film 3 made of polyester or the like. By evacuating the sealed chamber A' through a pump P', the transparent film 3 is forcibly drawn toward the flat glass, and a baking plate is placed over the flat glass 3. 4 and the photographic original plate 5 in a completely bubble-free manner.

しかしながら従来装置の場合は、密閉室Ａ′内の真空化
に際して、同図鎖線で示すように透明膜３の最大変位が
焼付板４と枠１との中間部Ｂ′点で発生してしまい、こ
のため最も必要とする写真原板５に対する透明膜３の押
圧力が特に中心部で不充分となるばかりでなく、Ｂ′点
における排出空気路の狭あい化のために透明膜３と写真
原板５あるいは写真原板５と焼付板４間のそれぞれの気
泡排出に長時間を要するばかりでなく、均一な押圧力が
得られないものであった。このため従来例の場合は第２
図示のように、原板５が焼付板４に対して完全に密着し
ていないため、これを微視的に見た場合、しわの生じて
いる写真原板上の撮影線Ｆ１、Ｆ２、Ｆ３等の各像Ｆ１
ζＦ２’、Ｆ３’は焼付板４上で重なってしまい所定の
解像力をもった焼付が行なえず、所望の精度の製品が得
られないものであった。However, in the case of the conventional device, when the sealed chamber A' is evacuated, the maximum displacement of the transparent film 3 occurs at a point B' in the middle between the baking plate 4 and the frame 1, as shown by the chain line in the figure. For this reason, not only is the pressing force of the transparent film 3 against the photographic original plate 5, which is most needed, insufficient especially at the center, but also the pressure between the transparent film 3 and the photographic original plate is narrowed at point B'. Alternatively, not only does it take a long time to discharge air bubbles between the photographic original plate 5 and the printing plate 4, but also a uniform pressing force cannot be obtained. Therefore, in the case of the conventional example, the second
As shown in the figure, since the original plate 5 is not in complete contact with the printing plate 4, when viewed microscopically, the photographic lines F1, F2, F3, etc. on the photographic original plate with wrinkles appear. Each image F1
Since ζF2' and F3' overlap on the printing plate 4, printing with a predetermined resolution cannot be performed, and a product with desired precision cannot be obtained.

特に、プリント基板、ＬＳＩあるいは超ＬＳＩ０組込基
板等においては数百本／諭程度の解像模様を明瞭に焼付
けなければならないため、焼付板４と写真原板５間には
残留気泡を原因とする密着不良、不均整およびしわの発
生を完全に防止しなげればならないにもかかわらず、従
来装置にあってはこの目的を達成するための技術手段を
備えたものはなかった。In particular, in the case of printed circuit boards, LSI or ultra-LSI0 built-in boards, etc., it is necessary to clearly print a resolution pattern of several hundred lines per line, so that residual air bubbles may be present between the printing plate 4 and the photographic original plate 5. Despite the fact that poor adhesion, asymmetry and wrinkles must be completely prevented, no prior art devices have been equipped with the technical means to achieve this objective.

この発明の真空焼枠装置は、焼付板　と写真原板との完
全密着を達成するために、第１閉断面枠と焼付部材の載
置部材および第１透明膜部材とで形成される第１密閉室
と、第２閉断面枠と前記の第１透明膜部材および第２透
明膜部材とで形成される第２密閉室とで構成され、しか
も前記２個のそれぞれの密閉室は第１透明膜部材を共通
な仕切膜として形成されており、特に第１密閉室は咳膜
を介して密閉状態が開放されるように形成されている点
を特徴とするものである。In order to achieve complete adhesion between the printing plate and the photographic original plate, the vacuum printing frame device of the present invention provides a first sealed frame formed by a first closed cross-section frame, a printing member placement member, and a first transparent film member. and a second sealed chamber formed by a second closed cross-section frame, the first transparent membrane member, and the second transparent membrane member, and each of the two sealed chambers is formed by the first transparent membrane member. The members are formed as a common partition membrane, and the first sealed chamber is particularly characterized in that the sealed state is opened through the cough membrane.

この発明の具体的実施例が添付図面を参照にしながら以
下に説明される。Specific embodiments of the invention will be described below with reference to the accompanying drawings.

第３図はこの実施例の要部平面図を示したもので、図面
中の符号１０は開閉枠を、３０および２０は第２透明膜
部材および第２透明部材の下側に位置する第１透明膜部
材を、４０は第１および第２透明膜部材２０．３０の各
取付ビンを、またＰｌおよびＦ２は第１密閉室と第２密
閉室とに個別に連通ずる真空ポンプを表わすものである
。なお符号５０は平板ガラス上に載置された焼付板と写
真原板との重ね合せを状態を単一な焼付部材として示し
、また符号６０は焼付部材をのせる載置部材を示す。ま
た符号２４は第２閉断面枠に形成した前記取付ビン４０
の案内溝を表す。FIG. 3 shows a plan view of the main parts of this embodiment, in which reference numeral 10 indicates an opening/closing frame, 30 and 20 indicate a second transparent film member and a first transparent member located below the second transparent member. 40 represents the respective mounting bins of the first and second transparent membrane members 20.30, and Pl and F2 represent vacuum pumps that individually communicate with the first sealed chamber and the second sealed chamber. be. The reference numeral 50 indicates the superposition of the printing plate placed on the flat glass and the photographic original plate as a single printing member, and the reference numeral 60 indicates a mounting member on which the printing member is placed. Further, reference numeral 24 denotes the mounting bin 40 formed on the second closed cross-section frame.
represents the guide groove.

上記各部材の具体的構造と各部材間の相関関係を第４図
により説明すれば次のとおりである。The specific structure of each of the above-mentioned members and the correlation between the members will be explained below with reference to FIG.

開閉枠１０は第１および第２閉断面枠１１および１２で
形成されており、この画枠は蝶番１３によって開閉自在
に枢着されている。The opening/closing frame 10 is formed of first and second closed cross-section frames 11 and 12, and this picture frame is pivoted by a hinge 13 so that it can be opened and closed.

第１閉断面枠１１の下部には載置部材６０が固設されて
おり、この載置部材６０は基板６１とこの基板６１の中
央部に設けた透明な平板ガラス６２とで構成されており
、平板ガラス６２は基板６１の開口縁内にその周囲を密
閉状に包囲されて固定されている。また基板６１の上面
にはシール部材（トチ）６３が平板ガラス６２を囲繞す
るように設けられている。また基板６１の四隅部には脚
部材１４が立設されている。A mounting member 60 is fixed to the lower part of the first closed section frame 11, and this mounting member 60 is composed of a substrate 61 and a transparent flat glass 62 provided at the center of this substrate 61. The flat glass 62 is fixed within the opening edge of the substrate 61 so as to be hermetically surrounded. Further, a sealing member (horse chestnut) 63 is provided on the upper surface of the substrate 61 so as to surround the flat glass 62. Further, leg members 14 are erected at the four corners of the board 61.

第２閉断面枠１２には内方に曲折する係止片１Ｂが形成
されており、この係止片に一側端部を係合し、他端部を
第１閉断面枠１１の後部立設壁１５に係止するようにし
て室枠２１が着脱自在に取付けられている。この室枠２
１の上下面には第１および第２透明膜部部材２０および
３０がそれぞれの周縁部を複数本の取付ビン４０を介し
て中心方向への些少の移動を許容されるように取付けら
れ℃おり、取付ビン４０は、室枠２１に設けた中心方向
への案内孔２２に挿入されている案内杆２３に対して断
１十字型にねじ着されて固定されている。また取付ピン
４０は、室枠２１を上下方向に貫通し、案内孔２２と直
交する案内溝２４と、案内孔２２の底部に常時反撥力を
発生するように設置されているばね２５により常時外方
に押圧されている案内杆２３とによって移動方向と移動
量を規制されている。A locking piece 1B that bends inward is formed on the second closed cross-section frame 12, and one end thereof is engaged with this locking piece, and the other end is connected to the rear end of the first closed cross-section frame 11. A chamber frame 21 is detachably attached so as to be locked to the installed wall 15. This room frame 2
The first and second transparent membrane members 20 and 30 are attached to the upper and lower surfaces of the frame 1 so that their peripheral edges are allowed to move slightly toward the center via a plurality of attachment pins 40. The mounting pin 40 is screwed and fixed in a cross-shaped manner to a guide rod 23 inserted into a centerward guide hole 22 provided in the chamber frame 21. Furthermore, the mounting pin 40 is always kept out by a guide groove 24 that vertically passes through the chamber frame 21 and is orthogonal to the guide hole 22, and a spring 25 that is installed at the bottom of the guide hole 22 so as to always generate a repulsive force. The direction and amount of movement are regulated by the guide rod 23 that is pressed in the opposite direction.

第１遣明ハ菓部材２０はポリエステル等の可撓性の透明
膜１７の外方部を室枠と一体のシール材１９に密着し複
数個のはとめ状係合穴１８を外周部に設けた薄布として
形成されており、前記係合穴１８を取付ピン４０　の下
部端に係合することにより薄布の表面な室枠２１のシー
ル１８に＠接させると共に透明膜１７が所定の引張力に
よって外方に伸展するように張布されている。In the first transmission member 20, the outer part of a flexible transparent film 17 made of polyester or the like is tightly attached to a sealing material 19 that is integrated with the chamber frame, and a plurality of eyelet-shaped engagement holes 18 are provided in the outer peripheral part. By engaging the engagement hole 18 with the lower end of the mounting pin 40, the surface of the thin cloth is brought into contact with the seal 18 of the chamber frame 21, and the transparent film 17 is pulled under a predetermined tension. It is stretched so that it stretches outward under force.

第２透明膜部材３０はポリエステル等の可撓性の透明膜
２７の外方部を室枠と一体のシール材２９に密着し複数
個のはとめ係合穴２８を外周部に設けた薄布として形成
されており前記係合穴２８を取付ピン４０の上部端に係
合すること罠より、醸？１０表面を室枠２１のシール２
９に密接させると共に透明膜２了が所定の引張力によっ
て外方に伸展するように張布されている。The second transparent film member 30 is a thin cloth having a flexible transparent film 27 made of polyester, etc., whose outer part is tightly attached to a sealing material 29 that is integrated with the chamber frame, and a plurality of eyelet engagement holes 28 are provided on the outer periphery. The engagement hole 28 is formed as a trap to engage the upper end of the mounting pin 40. 10 surface to seal the chamber frame 21 2
9, and the transparent membrane 2 is stretched so as to be stretched outward by a predetermined tensile force.

焼付部材５０は焼付板５１と該板に重ね合せた写真原板
５２とからなり、平板ガラス６２のほぼ中央部に載置さ
れている。The printing member 50 consists of a printing plate 51 and a photographic original plate 52 superimposed on the printing plate 51, and is placed approximately in the center of the flat glass 62.

第１密閉室は第１閉断面枠１１とこの枠下部に固設した
載置部材６０および閉止時の第１透明膜部材２０とで形
成される閉断面空間によって形成されるが、この密閉室
内に設けたシール部材６３で仕切られた内部空間が第１
真空室人として機能するように形成されている。The first sealed chamber is formed by a closed section space formed by the first closed section frame 11, the mounting member 60 fixed to the lower part of this frame, and the first transparent film member 20 when closed. The inner space partitioned off by the seal member 63 provided in the first
It is configured to function as a vacuum chamber man.

第２密閉室は第２密閉枠１２と第１透明膜部材２０およ
び第２透明膜部材３０とで形成されるが、側端部を第２
密閉枠１２に係合した室枠２１によって仕切られた内部
空間が第２真空−Ｂとして機能するように形成されてい
る。The second sealed chamber is formed by the second sealed frame 12, the first transparent film member 20, and the second transparent film member 30, and the side end portion is
An internal space partitioned by a chamber frame 21 engaged with the sealing frame 12 is formed to function as a second vacuum-B.

第１および第２密閉室に形成されたそれぞれの真空室Ａ
およびＢに個別に連通する゛ホース７１．７２が開閉枠
１０外に延出されており、このホース７１．７２には符
号Ｐ１、Ｐ２で示す真空ポンプが接続されている。前記
の接続部構造が第５図に示されており、ホースＴ１は第
１真空室Ａに開口端を有し基板６１に設けた通孔７３と
接続されている。ホース７２は第２真空室Ｂに開口端を
有し、室枠２１に設けた通孔７４と連通し、室枠２１の
ガイドピンとしての機能を付与された接続管７５と接続
されている。Each vacuum chamber A formed in the first and second sealed chambers
and B, respectively, extend outside the opening/closing frame 10, and vacuum pumps indicated by symbols P1 and P2 are connected to these hoses 71 and 72. The above connection structure is shown in FIG. 5, where the hose T1 has an open end in the first vacuum chamber A and is connected to a through hole 73 provided in the substrate 61. The hose 72 has an open end in the second vacuum chamber B, communicates with a through hole 74 provided in the chamber frame 21, and is connected to a connecting pipe 75 that functions as a guide pin for the chamber frame 21.

この発明の真空焼枠装置は上記したように第１密閉室（
第１真空室）および第２密閉室（第２真空室）を個別に
形成したことを特徴とするものであり、この構成により
以下の特別の作用効果を生ずるものである。As described above, the vacuum baking frame apparatus of the present invention has a first sealed chamber (
This is characterized in that a first vacuum chamber) and a second sealed chamber (second vacuum chamber) are formed separately, and this configuration produces the following special effects.

この発明の作用を第６図、第７図、第８図および第９図
を用いて説明すれば次のとおりである。The operation of this invention will be explained below using FIGS. 6, 7, 8 and 9.

まず、第６図示のように、第２密閉室のポンプＰ２を作
動すれば該室内の第２真空室Ｂの真空度の増大と共に第
１および第２透明膜部材２０．３０はいずれも可撓性を
有しているためそれぞれの中点Ｃを最大変位量とする断
面鼓形に変形する。（鎖線図参照） 次いで、上記ポンプＰ２を所定圧またはこ（１１） の所定圧に多小の負圧を増減した真空圧を維持しながら
第１密閉室のポンプＰ１を作動すれば第１真空室内の空
気は徐々に稀薄となり、それぞれの真空圧Ｐ１、Ｐｌの
関係が、Ｐｌ）Ｐｌとなったときにはこの室内の空気は
ほとんど排除されると共に第１および第２透明膜部材２
０．３０は第７図示のように、写真原板５２方向に吸引
され、中点Ｃを最大変位点とする断面円弧形に変形し、
（ｐｌ−ｐ２）が所定の真空圧Ｐに達すると第１透明膜
部材２０の中点Ｃの円弧面の頂面Ｔが写真原板５２に点
液する。この結果円弧面の頂面Ｔは所定の接点圧をもっ
て写真原板５２表面を押圧し、接点下の写真原板５２と
焼付板５１間の密着を完全ならしめる。その上更に真空
圧Ｐが増大すれば第１透明膜部材２０は写真原板表面上
を前記接点を中心にして放射状に波及しながら順次接触
すると共に写真原板５２に所要の押圧力を加えながら写
真原板全体を無気泡状態で被覆することになる。（第８
図（１２） 参照）第１透明膜部材２０が充分に写真原板５２を被覆
し終った時点でポンプＰ２の作動を解除して第２真空室
Ｂを常圧に復元する。First, as shown in Figure 6, when the pump P2 in the second closed chamber is activated, the degree of vacuum in the second vacuum chamber B increases and both the first and second transparent membrane members 20 and 30 become flexible. Because of this, it deforms into an hourglass-shaped cross section with the maximum displacement at each midpoint C. (Refer to the chain diagram) Next, if the pump P1 in the first sealed chamber is operated while maintaining the vacuum pressure of the pump P2 at a predetermined pressure or by increasing or decreasing the negative pressure to the predetermined pressure (11), the first vacuum The air in the room gradually becomes diluted, and when the relationship between the respective vacuum pressures P1 and Pl becomes Pl)Pl, most of the air in the room is removed and the first and second transparent film members 2
0.30 is sucked in the direction of the photographic original plate 52, as shown in FIG.
When (pl-p2) reaches a predetermined vacuum pressure P, the top surface T of the circular arc surface at the midpoint C of the first transparent film member 20 drips onto the photographic original plate 52. As a result, the top surface T of the circular arc surface presses the surface of the photographic original plate 52 with a predetermined contact pressure, thereby perfecting the close contact between the photographic original plate 52 and the printing plate 51 under the contact point. Moreover, as the vacuum pressure P increases further, the first transparent film member 20 contacts the surface of the photographic original plate in a radial manner centering on the contact point, and applies a required pressing force to the photographic original plate 52 while applying a required pressing force to the photographic original plate. The entire area is covered in a bubble-free state. (8th
(See Figure (12)) When the first transparent film member 20 has sufficiently covered the photographic original plate 52, the operation of the pump P2 is canceled to restore the second vacuum chamber B to normal pressure.

（第９図参照）この段階で焼付板５１に対する写真原板
５２の密着が完全に行なわれ露光準備が完了する。(See FIG. 9) At this stage, the photographic original plate 52 is completely brought into close contact with the printing plate 51, and preparation for exposure is completed.

この発明の真空焼枠装置は上記作用を生じ、以下の特有
の効果を生ずるものである。これを個条書にして示せば
次のとおりである。The vacuum baking frame apparatus of the present invention produces the above-mentioned effects and produces the following unique effects. This can be broken down into individual articles as follows.

（１）第２真空室内を所定の負圧Ｐ２にしであるので、
第１透明膜部材２０は第１真空室内の負圧Ｐ１がＰｌ＞
Ｐｌになるまでは写真原板側に吸引されないので、この
間第１真空室内の空気を充分に排除できこの室内の空気
量を極めて稀薄にすることができる。(1) Since the second vacuum chamber is set to a predetermined negative pressure P2,
The first transparent film member 20 has a negative pressure P1 in the first vacuum chamber Pl>
Since it is not sucked toward the photographic original plate until it reaches Pl, the air in the first vacuum chamber can be sufficiently removed during this time, and the amount of air in this chamber can be made extremely thin.

（２）写真原板５２に対する第１透明膜部材２０の被覆
態様は、最初の点接触から順次放射方向に接触を波及さ
せるもので前記両部材間に残留気泡を生じさせる物理的
要因がない。(2) The manner in which the first transparent film member 20 covers the photographic original plate 52 is such that the contact spreads in the radial direction sequentially from the initial point contact, and there is no physical factor that would cause residual air bubbles between the two members.

（３）第１透明膜部羽２０が写真原板５２を充分に被覆
し終るまで物理的な障害を全く受けることなく第１真空
室内の真空化（稀薄化）を行うことができる。(3) The interior of the first vacuum chamber can be evacuated (diluted) without any physical hindrance until the first transparent film wing 20 has fully covered the photographic original plate 52.

（４）　　この結果従来性なっていた単一被覆部材（マ
イラー）のしわとり等の作業の必要がなく、作業能率を
向上させることができる。(4) As a result, there is no need for conventional work such as removing wrinkles from a single covering member (Mylar), and work efficiency can be improved.

この発明の他の実施例が第１０図を参照にしながら以下
に説明される。なお図面中の符号で先の実施例中と同一
符号は同一または同効部材を示すものである。Another embodiment of the invention will be described below with reference to FIG. Note that the same reference numerals in the drawings as those in the previous embodiments indicate the same members or members having the same effect.

同図から明らかなように、この実施例の場合は、第２密
閉室を形成するに際して第１透明膜部材２０を取付ける
第１室枠２１′と第２透明膜部材３０を取付ける第２室
枠２１“とがそれぞれ独立して作用できるように、第２
閉断面枠１２内に蝶番７０を介して分離自在に取付ける
ようにしたものである。As is clear from the figure, in the case of this embodiment, when forming the second sealed chamber, there is a first chamber frame 21' to which the first transparent membrane member 20 is attached, and a second chamber frame to which the second transparent membrane member 30 is attached. 21" so that they can each act independently.
It is designed to be detachably attached within the closed section frame 12 via a hinge 70.

この実施例の作用効果を第１１図および第１２図を用い
て説明すれば次のとおりである。The effects of this embodiment will be explained below with reference to FIGS. 11 and 12.

この実施例の場合も、既に説明した最初の実施例と同様
の作用を生ずるものであるが、その最終段階の第２真空
室Ｂを常圧に復元した場合第１１図示のように第２透明
膜部材３０に生ずる写真原板５２上のしわ３０′のため
に生起される露光障害を除去しようとするものである。This embodiment also produces the same effect as the first embodiment already explained, but when the second vacuum chamber B at the final stage is restored to normal pressure, the second transparent This is intended to eliminate exposure disturbances caused by wrinkles 30' on the photographic original 52 that occur in the film member 30.

即ち、所望製品の精度によっては前記しわ３０′が露光
線の入射角等に影響を及ぼすことがあるので、この場合
に対処するものとして、第１２図示のように、第２透明
膜部材３０のみを第１透明膜部材２０から離脱させて、
しわのない第１透明膜部材２０上に直接照射して焼付性
能を向上させようとするものである。That is, depending on the accuracy of the desired product, the wrinkles 30' may affect the angle of incidence of the exposure beam, etc. To deal with this case, as shown in FIG. 12, only the second transparent film member 30 is used. is separated from the first transparent film member 20,
The purpose is to directly irradiate the wrinkle-free first transparent film member 20 to improve the printing performance.

この発明の他の使用例が第１３図および第１４図に示さ
れており、図面中の符号はいずれも先のそれぞれの実施
例における符号と同一または同効部材を示すものである
。第１３（１５） 図示の場合は２枚の写真原板５２で 焼付板５１を挾持するようにした焼付 部材を平板ガラス６２に載置し、第１透明膜部材２０に
よって前記焼付部材を押圧するようにしたものである。Another example of the use of the present invention is shown in FIGS. 13 and 14, in which the reference numerals in the drawings are the same as or have the same effect as the reference numerals in each of the previous embodiments. 13th (15) In the case shown in the figure, a printing member with a printing plate 51 sandwiched between two photographic original plates 52 is placed on a flat glass 62, and the printing member is pressed by the first transparent film member 20. This is what I did.

この使用例の場合は焼付板５１０表裏両面に対して同時
に焼付できる利点を有するものである。This usage example has the advantage that both the front and back surfaces of the baking plate 510 can be printed simultaneously.

第１４図示の場合は平板ガラス６２上に写真原板５２を
載置し、この原板に重ね合せた焼付板５１を第１透明膜
部材２０で抑圧被覆するようにしたものである。この使
用例の場は平板ガラス面を露光源りに対向させなければ
焼付できないが、第１および第２透明膜部材２０．３０
として可撓性材料例えばゴム、合成ゴムまたはこれ等の
伸縮材料を継ぎこんだ不透明な伸縮性をもった薄布を使
用することができ、片面焼付用の単能装置として使用す
る場合には、第１および第２透明膜部材の材料の選択の
幅が大きい利点がある。In the case shown in FIG. 14, a photographic original plate 52 is placed on a flat glass plate 62, and a printing plate 51 superimposed on this original plate is suppressed and covered with a first transparent film member 20. In this usage example, printing is not possible unless the flat glass surface faces the exposure source, but the first and second transparent film members 20.30
A flexible material such as rubber, synthetic rubber or an opaque elastic fabric inlaid with elastic materials such as these can be used as a single-sided printing device. There is an advantage that there is a wide range of selection of materials for the first and second transparent film members.

この発明は上記各実施例および使用例に限（１６） 定されることなく、第１および第２閉断面粋の形状、構
造等はそれぞれの枠内に内包される真空室との関係から
、例えば室枠およびシール部材等の機能を包含させたも
のとすることができる。また第１および第２透明膜部材
の周縁部の取付装置とこの装置の規正手段、または各真
空室を形成するための室枠と上記各透明膜部材間とのシ
ール手段は目的に応じて任意に設計できるものである。The present invention is not limited to the above-mentioned embodiments and usage examples (16), but the shapes, structures, etc. of the first and second closed sections are determined based on the relationship with the vacuum chamber contained within each frame. For example, it may include functions such as a chamber frame and a seal member. Furthermore, the attachment device for the peripheral edges of the first and second transparent membrane members and the regulating means of this device, or the sealing means between the chamber frame for forming each vacuum chamber and each of the above-mentioned transparent membrane members are optional depending on the purpose. It can be designed to

更に、第１および第２透明膜部材または載置部材等は使
用態様によっては前者の場合は単に可撓性または伸縮性
を有するものであればよく、また者の場合は剛性を有す
るものであれば曲面形状のものでもよい等部材選択を任
意に行なえるものである。またポンプＰ１とポンプＰ２
との動作仕様は写真原板と焼付板間を完全に密着させる
最適の操作手段を任意に選択できるばかりでなく自動調
整手段を用いて自動的に行うことができる。Further, the first and second transparent membrane members or the mounting member, etc. may be simply flexible or stretchable depending on the manner of use; in the case of the former, they may be rigid. For example, the material can be selected arbitrarily, such as having a curved surface shape. Also, pump P1 and pump P2
Regarding the operation specifications, not only can the optimum operating means for bringing the photographic original plate and the printing plate into perfect contact with each other be arbitrarily selected, but also it can be performed automatically using an automatic adjustment means.

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は従来例を示す要部断面説明図、第２図は第１図
の一部拡大図、第３図はこの発明の実施例の主要部を示
す平面図、第４図は第３図Ｉ−Ｉ線断面拡大図第５図は
第３図■−ｎ線断面拡大図、第６図、第７図第８図およ
び第９図はこの発明の作用説明図、第１０図はこの発明
の他の実施例を示す要部断面図、第１１図および第１２
図は他の実施例の作用説明図、第１３図および第１４図
はこの発明の他の使用例を示す説明図。 図面中の符号は； １０：開閉枠、　　　１１：第１閉断面枠、１２：第２
閉断面枠、 １４：脚部材、　　　２に室枠、 ２１’（２１”）　：室枠、 ２〇−第１透明膜部材、 ３０：第２透明膜部材、 ５０：焼付部材、　　６０：載置部材、Ａ：第１真空室
、　　Ｂ：第２真空室 をそれぞれ示す。 ％許出願人　　　同潤光機株式会社 系１膳 １ 亮ろＩ 第２邑 第ヶ国 弔叫記Fig. 1 is a sectional explanatory view of the main part showing a conventional example, Fig. 2 is a partially enlarged view of Fig. 1, Fig. 3 is a plan view showing the main part of the embodiment of the present invention, and Fig. 4 is a Figure 5 is an enlarged cross-sectional view taken along the line I--I. Figure 5 is an enlarged cross-sectional view taken along line 3--n. Main part sectional views showing other embodiments of the invention, FIGS. 11 and 12
The figure is an explanatory diagram of the operation of another embodiment, and FIGS. 13 and 14 are explanatory diagrams showing other usage examples of the present invention. The symbols in the drawings are: 10: Open/close frame, 11: First closed section frame, 12: Second
Closed section frame, 14: leg member, 2: chamber frame, 21'(21''): chamber frame, 20-first transparent membrane member, 30: second transparent membrane member, 50: baking member, 60: mounting Parts, A: first vacuum chamber, B: second vacuum chamber, respectively. Percentage Applicant: Dojunkoki Co., Ltd. 1 set 1 Ryoro I 2nd Village 2nd Country Condolences

Claims (3)

【特許請求の範囲】[Claims] （１）載置部材を固着した第１閉断面枠と、室枠を着脱
自在に取付けた第２閉断面枠とを開閉自在に蝶着し、室
枠の上および下側に第２透明膜部材および第１透明膜部
材のそれぞれの周縁部を係合し第１閉断面枠と第１透明
膜部材および載置部材とで真空室を内包する第１密閉室
を形成し第２閉断面枠と第２透明膜部材および第１透明
部材とで他の真空室を内包する第２密閉室を形成し、各
真空室の真空化を独立して行えるように構成したことを
％徴とする真空焼枠装置。(1) A first closed cross-section frame to which a mounting member is fixed and a second closed cross-section frame to which a chamber frame is detachably attached are hinged so as to be openable and closable, and a second transparent film is attached to the upper and lower sides of the chamber frame. The member and the first transparent film member are engaged with their peripheral edges, and the first closed cross-section frame, the first transparent film member, and the mounting member form a first sealed chamber containing a vacuum chamber, and a second closed cross-section frame is formed. , the second transparent membrane member, and the first transparent member form a second sealed chamber containing another vacuum chamber, and each vacuum chamber is configured to be evacuated independently. Baking frame equipment. （２）載置部材を固着した第１閉断面枠と独立した２個
の室枠をそれぞれ着脱自在に取付けた第２閉断面枠とを
開閉自在に蝶着し、１つの室枠に第２透明膜部材の周縁
部を他の室枠に第１透明膜部材の周縁部を係合し、第１
閉断面枠と第１透明膜部材および載置部材とで真空室を
内包する第１密閉室を形成し、第２閉断面枠と第２透明
膜部材および第１透明部材とで他の真空室を内包する第
２密閉室を形成し、各真空室の真空化を独立して行なえ
るように構成したことを特徴とする真空焼枠装置。(2) A first closed cross-section frame to which the mounting member is fixed and a second closed cross-section frame to which two independent chamber frames are removably attached are hinged so that they can be opened and closed, and the second closed cross-section frame is attached to one chamber frame. The peripheral edge of the first transparent membrane member is engaged with another chamber frame, and the first
The closed cross-section frame, the first transparent film member, and the mounting member form a first sealed chamber containing a vacuum chamber, and the second closed cross-section frame, the second transparent film member, and the first transparent member form another vacuum chamber. 1. A vacuum baking frame apparatus, characterized in that a second sealed chamber containing a vacuum chamber is formed, and each vacuum chamber can be evacuated independently. （３）第１密閉室の載置部材上に載置されている焼付部
材を第１透明部材で押圧被覆するに際して、先ず第１透
明膜部材と第２透明膜部材で形成されている第２密閉室
内の真空室の真空化を行ない、前記両透明膜部材を断面
鼓形に変形し、次いで載置部材と第１透明膜部材で形成
されている第１密閉室内の真空室の真空化を行ない、こ
の真空化の増大と共に焼付部材を第１透明膜部材の円弧
面を中心にして放射状に抑圧被覆するようにしたことを
特徴とする真空焼枠内の焼付部材の被覆法。(3) When pressing and covering the baking member placed on the mounting member in the first sealed chamber with the first transparent member, first the second transparent film member formed of the first transparent film member and the second transparent film member is The vacuum chamber in the sealed chamber is evacuated to transform both the transparent membrane members into a drum-shaped cross section, and then the vacuum chamber in the first sealed chamber formed by the mounting member and the first transparent membrane member is evacuated. A method for coating a baking member in a vacuum printing frame, characterized in that the printing member is suppressed and coated radially centering on the arcuate surface of the first transparent film member as the vacuum increases.
JP57100466A 1982-06-11 1982-06-11 Vacuum printing frame apparatus Pending JPS58216236A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57100466A JPS58216236A (en) 1982-06-11 1982-06-11 Vacuum printing frame apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57100466A JPS58216236A (en) 1982-06-11 1982-06-11 Vacuum printing frame apparatus

Publications (1)

Publication Number Publication Date
JPS58216236A true JPS58216236A (en) 1983-12-15

Family

ID=14274679

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57100466A Pending JPS58216236A (en) 1982-06-11 1982-06-11 Vacuum printing frame apparatus

Country Status (1)

Country Link
JP (1) JPS58216236A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0221621A2 (en) * 1985-10-31 1987-05-13 Parker (Uk) Limited Vacuum contact system
GB2245143A (en) * 1990-06-13 1992-01-02 Yurika Incorporation Aloe leaf products and their preparation
EP2048238A2 (en) 2007-10-12 2009-04-15 Thiomed Method for preparing a plant extract

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52112405A (en) * 1976-03-18 1977-09-20 Dainippon Screen Mfg Method of and apparatus for closely contacting printing form and plate material on printing machine

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52112405A (en) * 1976-03-18 1977-09-20 Dainippon Screen Mfg Method of and apparatus for closely contacting printing form and plate material on printing machine

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0221621A2 (en) * 1985-10-31 1987-05-13 Parker (Uk) Limited Vacuum contact system
GB2245143A (en) * 1990-06-13 1992-01-02 Yurika Incorporation Aloe leaf products and their preparation
GB2245143B (en) * 1990-06-13 1994-05-18 Yurika Incorporation Aloe leaf products and their preparation
EP2048238A2 (en) 2007-10-12 2009-04-15 Thiomed Method for preparing a plant extract

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