JPS58206926A - Mass flowmeter - Google Patents
Mass flowmeterInfo
- Publication number
- JPS58206926A JPS58206926A JP7403982A JP7403982A JPS58206926A JP S58206926 A JPS58206926 A JP S58206926A JP 7403982 A JP7403982 A JP 7403982A JP 7403982 A JP7403982 A JP 7403982A JP S58206926 A JPS58206926 A JP S58206926A
- Authority
- JP
- Japan
- Prior art keywords
- pipe
- piezo
- duct
- electric
- vibration
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/76—Devices for measuring mass flow of a fluid or a fluent solid material
- G01F1/78—Direct mass flowmeters
- G01F1/80—Direct mass flowmeters operating by measuring pressure, force, momentum, or frequency of a fluid flow to which a rotational movement has been imparted
- G01F1/84—Coriolis or gyroscopic mass flowmeters
- G01F1/8409—Coriolis or gyroscopic mass flowmeters constructional details
- G01F1/8413—Coriolis or gyroscopic mass flowmeters constructional details means for influencing the flowmeter's motional or vibrational behaviour, e.g., conduit support or fixing means, or conduit attachments
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/76—Devices for measuring mass flow of a fluid or a fluent solid material
- G01F1/78—Direct mass flowmeters
- G01F1/80—Direct mass flowmeters operating by measuring pressure, force, momentum, or frequency of a fluid flow to which a rotational movement has been imparted
- G01F1/84—Coriolis or gyroscopic mass flowmeters
- G01F1/845—Coriolis or gyroscopic mass flowmeters arrangements of measuring means, e.g., of measuring conduits
- G01F1/8468—Coriolis or gyroscopic mass flowmeters arrangements of measuring means, e.g., of measuring conduits vibrating measuring conduits
- G01F1/849—Coriolis or gyroscopic mass flowmeters arrangements of measuring means, e.g., of measuring conduits vibrating measuring conduits having straight measuring conduits
Landscapes
- Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Volume Flow (AREA)
Abstract
Description
【発明の詳細な説明】
本発明は、コリオリの力を利用した質量流量計の改良に
関するものである。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to an improvement in a mass flow meter that utilizes the Coriolis force.
１８１図はコリオリ流量計の動作原理を説明するだめの
構成説明図である。１は測定流体の流れる０字管で、七
の先端中央部ＶＣは永久磁石２が固定され、０字管１の
両端はベース３に固定されている。４は０字管１に対向
して設置された電磁駆動・検出用コイル、５はこの電磁
駆動・検出用コイルをその先端において支持する支持ビ
ームで、他端はベース５に固定されている。０字管１と
支持ビーム５とは互に音叉構造を形成している。即ち、
０字管１とビーム５は丁度音叉の歯が振動するように、
互いに相対向して振動し、かつ音叉のようにベース５０
部分が扱動の節点となｐ振動エネルギーを失うことが少
ない構成となっている。６１゜６２はＵ字管１０両脚の
変位全検出するための変位検出器である◎
駆動コイル４とこれに対抗する０字管１に固定された永
久磁石２０間に動く電磁力で、０字管１をその固有振動
数で励振すると（縦振動（対称たわみ振動）：第２−（
４）のＭｌ 、 Ｍ２ 、Ｍｉｓは各瞬間のパターンを
示す）、Ｕ字管１内を流れる流体にコリオリの力が発生
する。このコリオリカの大きさは、Ｕ字管１内を流れる
流体の質量とその速度に比例し、力の方向は流体の運動
方向と０字管１を励振する角速度のベクトル積の方向に
一致する。また０字管１の入力側と出力側では流体の方
向が逆になるので、両脚側のコリオリカによって、０字
管１にねじ）（非対称たわみ）のトルクが発生する。FIG. 181 is a structural explanatory diagram for explaining the operating principle of a Coriolis flowmeter. Reference numeral 1 denotes a 0-shaped tube through which the measurement fluid flows, a permanent magnet 2 is fixed to the center portion VC of the tip 7, and both ends of the 0-shaped tube 1 are fixed to a base 3. Reference numeral 4 denotes an electromagnetic drive/detection coil installed opposite to the O-shaped tube 1, 5 is a support beam that supports the electromagnetic drive/detection coil at its tip, and the other end is fixed to the base 5. The 0-shaped tube 1 and the support beam 5 mutually form a tuning fork structure. That is,
The 0-shaped tube 1 and the beam 5 vibrate just like the teeth of a tuning fork.
The base 50 vibrates opposite to each other and acts like a tuning fork.
The structure is such that the parts serve as nodal points of handling motion and there is little loss of p-vibration energy. 61 and 62 are displacement detectors for detecting the entire displacement of both legs of the U-shaped tube 10. The electromagnetic force that moves between the drive coil 4 and the permanent magnet 20 fixed to the opposing O-shaped tube 1 causes the zero-shaped When tube 1 is excited at its natural frequency (longitudinal vibration (symmetrical flexural vibration): 2nd - (
4) Ml, M2, and Mis indicate the patterns at each instant), Coriolis force is generated in the fluid flowing inside the U-shaped tube 1. The magnitude of this Coriolis is proportional to the mass of the fluid flowing in the U-shaped tube 1 and its velocity, and the direction of the force corresponds to the direction of the vector product of the fluid motion direction and the angular velocity that excites the O-shaped tube 1. Furthermore, since the direction of the fluid is reversed on the input side and output side of the 0-shaped tube 1, a screw (asymmetrical deflection) torque is generated in the 0-shaped tube 1 due to the Coriolis on both leg sides.
このトルクは、励振周波数と同一な周波数で変化し、そ
の振幅値は流体の質量流量に比例する。第２図（６）は
このねじりトルクによって表われる振動モード（コリオ
リ振動モード）を示し、Ｍ４． ＭＳ。This torque varies with the same frequency as the excitation frequency, and its amplitude value is proportional to the mass flow rate of the fluid. FIG. 2 (6) shows the vibration mode (Coriolis vibration mode) caused by this torsional torque, and M4. M.S.
Ｍ６は各瞬間の振動パターンを示す。したがって、との
ねじシ振動（非対称たわみ振動）トルクの振幅を、変位
検出器６１．４２によって、例えばパルス幅などの形で
検出すれば、質量流量を知ることができる。M6 shows the vibration pattern at each moment. Therefore, by detecting the amplitude of the screw vibration (asymmetrical flexural vibration) torque with the displacement detector 61.42 in the form of a pulse width, for example, the mass flow rate can be determined.
上記の様な原理を用いた質量流置引は従来から公知であ
る（例えば特開昭５４−５２５７０号）が、この場合に
下記の様な問題点がある。即ち、従来管路を励振する手
段として電磁駆動方式が一般的に用いられているが、構
成が複雑で比較的大きな電力を消費し、発熱などの問題
もあった。Mass flow displacement using the above-mentioned principle has been known for some time (for example, Japanese Patent Application Laid-Open No. 54-52570), but this method has the following problems. That is, although an electromagnetic drive system has been generally used as a means to excite a conduit, it has a complicated structure, consumes a relatively large amount of power, and has problems such as heat generation.
本発明は上記の欠点を解消するためになされたもので、
構成が簡単で電力消費の少ない振動式のｉＭ ｍ ｋ
Ｍ計を実現することを目的とする。The present invention has been made to solve the above-mentioned drawbacks.
Vibrating iMk with easy configuration and low power consumption
The purpose is to realize M meter.
本発明によれば、管路に取りつけた圧電素子で励振を行
なうことにより上記の目的を達成することができる。According to the present invention, the above object can be achieved by exciting a piezoelectric element attached to a conduit.
以下図面にもとすいて本発明を説明する。The present invention will be explained below with reference to the drawings.
第３図は、本発明の一実施例を示す要部構成平面図であ
る・１は測定流体を流す管路、３はこの管路１をその両
端で固定するペース、７は前配管路１の表面に取りつけ
られ、これを励振する駆動用圧電素子、６３と６４は前
記管路１０表面に取りつけられ、その振動を検出する検
出用圧電素子、８はこの圧電素子６５の出力信号ｅ２と
圧電素子６４の出力信号ｃ３とを入力とし、両信号間の
位相差を検出する位相差検出回路である。FIG. 3 is a plan view showing the main parts of an embodiment of the present invention. Reference numeral 1 indicates a pipe line through which the fluid to be measured flows, 3 indicates a pace for fixing the pipe line 1 at both ends thereof, and 7 indicates a front pipe line 1. drive piezoelectric elements 63 and 64 are attached to the surface of the conduit 10 and detect the vibrations thereof; 8 is a detection piezoelectric element that is attached to the surface of the pipe 10 and detects the vibration; This is a phase difference detection circuit which receives the output signal c3 of the element 64 as an input and detects the phase difference between both signals.
仁の実施例は０字管の代わりに直管を用いて質量ｆＬｔ
引を構成したものである。交流電圧ｃ１を駆動用圧電素
子７に加えると、電歪効果によって圧電素子７が゛歪み
、これが管路１に伝わって管＃ｌ＆１は励振される。こ
のときに直管１が各瞬間に表わす対称たわみ振動パター
ンを第４図のＭ７．ＭＳに示す。この図のＭ？、ＭＩＯ
は直管１中を流れる流体に働くコリオリカにより表われ
る非対称たわみ振動のパターンである。実際にはこの２
種の振動パターンが重畳した形で振動する。圧電素子６
５．６４からの出力信号ｅ２＋ 、ｅ５は位相差検出回
路８に加えられ、位相差出力・。を得ている。この位相
差出力！（１は質量流量に比例するので上記の構成によ
り質量流量を得ることができる。Jin's embodiment uses a straight pipe instead of a 0-shaped pipe to reduce the mass fLt.
This is a set of quotations. When an alternating current voltage c1 is applied to the driving piezoelectric element 7, the piezoelectric element 7 is distorted due to the electrostrictive effect, and this is transmitted to the pipe line 1, so that the pipe #l&1 is excited. At this time, the symmetrical deflection vibration pattern that the straight pipe 1 exhibits at each moment is M7 in FIG. Shown in MS. M in this figure? , MIO
is a pattern of asymmetrical flexural vibrations caused by Coriolika acting on the fluid flowing through the straight pipe 1. Actually these 2
The seeds vibrate in a superimposed vibration pattern. Piezoelectric element 6
The output signals e2+ and e5 from 5.64 are applied to the phase difference detection circuit 8, which outputs the phase difference. I am getting . This phase difference output! (Since 1 is proportional to the mass flow rate, the mass flow rate can be obtained by the above configuration.
また、圧電素子を用いたため駆動部分の構成が簡単にな
るだけでなく駆動回路も簡単な構成となる。更に電力消
費も電磁駆動方式などと比較して小さくなる。Furthermore, since the piezoelectric element is used, not only the structure of the driving part becomes simple, but also the structure of the drive circuit becomes simple. Furthermore, power consumption is also lower compared to electromagnetic drive systems.
第５図は本発明の第二の実施例を示す要部構成平面図で
、第一の実施例との相違は２つの駆動用圧電素子７１．
７２を管路の両端近辺に取りつけて、同一駆動電圧ｃ１
で励振させたところにある。FIG. 5 is a plan view showing a main part configuration of a second embodiment of the present invention, which differs from the first embodiment in two driving piezoelectric elements 71.
72 near both ends of the conduit, and the same driving voltage c1
This is where it is excited.
このように構成することによシ、励振による振動モード
中に偶数次高調波を含まないようにすることができ、振
動の安定性が向上する。With this configuration, it is possible to prevent even-order harmonics from being included in the vibration mode due to excitation, and the stability of vibration is improved.
また駆動用圧電素子７１．７２及び検出用圧電素子６５
、６４を左右対称の位置に取シつけたことによシ、駆！
１１用圧電素子７１．７２から主に管路部分を直接伝わ
ってノイズとなる弾性波成分は２つの検出用圧電素子６
５．６４に同じように加わるので、位相差検出回路８に
おいて互いにキャンセルでき、位相差出力の安定性を内
子させる。In addition, drive piezoelectric elements 71 and 72 and detection piezoelectric elements 65
, 64 was installed in a symmetrical position.
The elastic wave components that mainly propagate directly through the conduit section from the piezoelectric elements 71 and 72 for noise and become noise are transferred to the two piezoelectric elements 6 for detection.
5.64 in the same way, they can cancel each other out in the phase difference detection circuit 8, thereby improving the stability of the phase difference output.
第６図は本発明の第三の実施例を示す要部構成平面図で
、第二の実施例との相違は検出用圧電素子６５．６６を
追加して検出用圧電素子６５．６４と管路中心軸に関し
て対称の位置に取りつけた点にある。FIG. 6 is a plan view showing the main part configuration of the third embodiment of the present invention, and the difference from the second embodiment is that piezoelectric detection elements 65 and 66 are added, and the piezoelectric detection elements 65 and 64 and tubes are It is located at a symmetrical position with respect to the central axis of the road.
互いに管路１をはさ６−関係にある検出用圧電素子６３
と６５．６４と６６の出力の差（１！２−ｅ４及びｅ５
− ｅ５ ）を引算Ｂ ａ＋、 ８２において求めるこ
とによシ、流体による内圧変動やポンプ等により管路を
伝わる弾性波などの同相ノイズを除去し、逆相成分であ
る信号成分について出力を２倍に増やすことができるＯ
′！ｇ７図は本発明の第四の実施例を示す要部構成・肌
平面図で、第８図はＡ〜五線に沿う断面図である。Detection piezoelectric elements 63 in a relationship with each other across the pipe line 1
and 65. The difference between the outputs of 64 and 66 (1!2 - e4 and e5
- e5) by subtracting B a+, 82, removes in-phase noise such as internal pressure fluctuations due to fluid and elastic waves transmitted through pipes due to pumps, etc., and outputs 2 for signal components that are anti-phase components. O' that can be doubled! Fig. g7 is a plan view showing the main part structure and skin of the fourth embodiment of the present invention, and Fig. 8 is a sectional view taken along the line A to staff.
第二の実施例との相違は、検出用圧電素子６７、６８を
駆動用圧電素子と検出用圧電素子の中間の管路表面に取
りつけた点にある。即ち、検出用圧電素のみが含まれる
ので、これを引算器８１．８２において検出用圧電素子
６５．６４の出力ｅ２＋ １１５からそれぞれ差し引く
ことによシ、同相ノイズを除去した検出出力を得ること
ができる。The difference from the second embodiment is that detection piezoelectric elements 67 and 68 are attached to the pipe surface between the drive piezoelectric element and the detection piezoelectric element. That is, since only the piezoelectric element for detection is included, by subtracting this from the output e2+115 of the piezoelectric element for detection 65, 64 in the subtracters 81 and 82, respectively, a detection output with common mode noise removed can be obtained. I can do it.
なお上記各実施例は管路形状が直管の場合であるが、こ
れに限らず、第１図のＵ字管やその他の形状の管路にも
同様に適用できる。Although each of the above-mentioned embodiments deals with the case where the conduit shape is a straight pipe, the present invention is not limited to this, and can be similarly applied to the U-shaped pipe shown in FIG. 1 and other shapes of conduits.
以上述べたように、本発明によれば構成が簡単で電力消
費の少ない質ｐ流量計を実現できる。As described above, according to the present invention, it is possible to realize a high-quality flowmeter with a simple configuration and low power consumption.
第１図はコリオリ流量計の動作原理図、第２図（Ａ）
（Ｂ）は第１図の動作説明図、第５図は本発明の一実施
例の要部構成平面図、第４図は第３図の動作説明図、第
５図は本発明の第二の実施例の要部構成平面図、第６図
は本発明の第三の実施例の要部構成平面図、第７図は本
発明の第四の実施例の要♂
部構成平面図、第８は第７図におけるＡ−＾断面図であ
る。
１・・・管路、７．７１．７２・・・駆動用圧電素子、
Ａｓ、４４゜６５、６６、６７．６８・・・検出用圧電
素子、ｅ２＋ ６３＋ ６４＋ ６５＋６６、 ｅ７・
・・検出用圧電素子の出力信号。
代理人 弁理士 小 洪 ｆｆｌ 助＼°゛・
パ（
１
宅 １ 哨
第 ｚｃＩ
（Ａ〕
（Ｂ）
気 Ｊ 劉
篤 ４ ｑFigure 1 is a diagram of the operating principle of a Coriolis flowmeter, Figure 2 (A)
(B) is an explanatory diagram of the operation of FIG. 1, FIG. 5 is a plan view of the main part configuration of an embodiment of the present invention, FIG. 4 is an explanatory diagram of the operation of FIG. 3, and FIG. 5 is a diagram of the second embodiment of the present invention. FIG. 6 is a plan view of the main part structure of the third embodiment of the present invention, and FIG. 7 is a plan view of the main part structure of the fourth embodiment of the present invention. 8 is a sectional view taken along line A-^ in FIG. 1... Pipeline, 7.71.72... Drive piezoelectric element,
As, 44°65, 66, 67.68...Piezoelectric element for detection, e2+ 63+ 64+ 65+66, e7・
...Output signal of piezoelectric element for detection. Agent Patent Attorney Ko Hung ffl ＼°゛・
Pa (1 house 1 guard zcI (A) (B) Qi J Liu Atsushi 4 q
Claims (1)
管路を励振する駆動手段と、この管路の振動を検出する
振動検出手段とを備え、前記駆動手段として前記管路に
取９つゆだ圧電素子を用いたことを特徴とする質量ｉｉ
ｉ計。 （２）振動検出手段として管路に増りっけた圧電素子を
用いた特許請求の範囲８８１項記載の質量流量計。 （５） 振動検出手段として管路の軸方向に沿った同
一位置の外周上に取りつけた２個の圧電素子を用いると
ともに１これら２個の圧電素子の出力信号からの差信号
を利用する特許請求の範囲＠２］ｊＮ記載の質ｍ流量計
。[Scope of Claims] A weight R1l meter configured to deform and vibrate a pipe line, comprising a drive means for exciting the pipe line, and a vibration detection means for detecting vibration of the pipe line, and as the drive means, the A mass ii characterized in that a piezoelectric element is used in the conduit.
i total. (2) A mass flowmeter according to claim 881, which uses a piezoelectric element installed in the pipe as the vibration detection means. (5) A patent claim that uses two piezoelectric elements mounted on the outer periphery of the same position along the axial direction of the pipe as a vibration detection means, and uses a difference signal between the output signals of these two piezoelectric elements. range @2]jN quality m flowmeter.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7403982A JPS58206926A (en) | 1982-04-30 | 1982-04-30 | Mass flowmeter |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7403982A JPS58206926A (en) | 1982-04-30 | 1982-04-30 | Mass flowmeter |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS58206926A true JPS58206926A (en) | 1983-12-02 |
Family
ID=13535617
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7403982A Pending JPS58206926A (en) | 1982-04-30 | 1982-04-30 | Mass flowmeter |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58206926A (en) |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0316908A2 (en) * | 1987-11-20 | 1989-05-24 | Endress + Hauser Flowtec AG | Process for the measurement of mass flow rate using the Coriolis principle and mass flow rate measuring apparatus using the Coriolis principle |
| EP0329700A1 (en) * | 1986-10-28 | 1989-08-30 | Foxboro Co | Coriolis-type mass flowmeter. |
| US5321991A (en) * | 1991-08-01 | 1994-06-21 | Micro Motion Incorporated | Coriolis effect mass flowmeter |
| US5343764A (en) * | 1986-10-28 | 1994-09-06 | The Foxboro Company | Coriolis-type mass flowmeter |
| JP2008064494A (en) * | 2006-09-05 | 2008-03-21 | Tsurumi Seiki:Kk | Water leak determination device and method, and pressure wave sensor |
| JP2008268227A (en) * | 1998-12-08 | 2008-11-06 | Emerson Electric Co | Coriolis mass flow sensor |
| JP2009300462A (en) * | 2000-08-18 | 2009-12-24 | Emerson Electric Co | Coriolis mass flow sensor |
| WO2024096040A1 (en) * | 2022-11-04 | 2024-05-10 | 株式会社AlphiTechnology | Coriolis mass flowmeter |
-
1982
- 1982-04-30 JP JP7403982A patent/JPS58206926A/en active Pending
Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0329700A1 (en) * | 1986-10-28 | 1989-08-30 | Foxboro Co | Coriolis-type mass flowmeter. |
| US5343764A (en) * | 1986-10-28 | 1994-09-06 | The Foxboro Company | Coriolis-type mass flowmeter |
| EP0329700B1 (en) * | 1986-10-28 | 1996-06-12 | The Foxboro Company | Coriolis-type mass flowmeter |
| EP0316908A2 (en) * | 1987-11-20 | 1989-05-24 | Endress + Hauser Flowtec AG | Process for the measurement of mass flow rate using the Coriolis principle and mass flow rate measuring apparatus using the Coriolis principle |
| US4949583A (en) * | 1987-11-20 | 1990-08-21 | Flowtec Ag | Method of mass flow measurement by the coriolis principle and mass flow meter operating by the coriolis principle |
| US5321991A (en) * | 1991-08-01 | 1994-06-21 | Micro Motion Incorporated | Coriolis effect mass flowmeter |
| JP2008268227A (en) * | 1998-12-08 | 2008-11-06 | Emerson Electric Co | Coriolis mass flow sensor |
| JP2009300462A (en) * | 2000-08-18 | 2009-12-24 | Emerson Electric Co | Coriolis mass flow sensor |
| EP1182433B1 (en) * | 2000-08-18 | 2019-01-23 | Emerson Electric Co. | Coriolis mass flow sensor |
| JP2008064494A (en) * | 2006-09-05 | 2008-03-21 | Tsurumi Seiki:Kk | Water leak determination device and method, and pressure wave sensor |
| WO2024096040A1 (en) * | 2022-11-04 | 2024-05-10 | 株式会社AlphiTechnology | Coriolis mass flowmeter |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US4934195A (en) | Coriolis mass flowmeter | |
| US6401548B1 (en) | Coriolis mass flow/density sensor | |
| JP2654341B2 (en) | Mass flow meter based on Coriolis principle | |
| KR100453257B1 (en) | Method and apparatus for a coriolis flowmeter having its flow calibration factor independent of material density | |
| JP3476781B2 (en) | Coriolis mass flow / density sensor with only one curved measuring tube | |
| JPS58206926A (en) | Mass flowmeter | |
| JP2850556B2 (en) | Coriolis mass flowmeter | |
| JP2012510072A (en) | Method and apparatus for vibrating a flow tube of a vibratory flow meter | |
| JP4015852B2 (en) | Method and apparatus for Coriolis flowmeter with balance bar to increase accuracy | |
| JPS58178217A (en) | Mass flowmeter | |
| JPS61283827A (en) | Mass flowmeter | |
| JPS58153121A (en) | Mass flowmeter | |
| JPS58117416A (en) | Flowmeter | |
| JPS58123429A (en) | Mass flowmeter | |
| JPH03199922A (en) | Coriolis mass flowmeter | |
| RU2037782C1 (en) | Method and device for measuring mass flow rate of fluid | |
| JP2014006230A (en) | Coriolis flowmeter | |
| JPS58120122A (en) | Mass flowmeter | |
| JP2000046617A (en) | Coriolis mass flowmeter | |
| JP6161644B2 (en) | Method and apparatus for vibrating a flow tube of a vibratory flow meter | |
| JPH08122120A (en) | Coriolis mass flowmeter | |
| JP2012026775A (en) | Coriolis-type mass flowmeter | |
| JPH05164588A (en) | Coriolis massflow meter | |
| JPS6148722A (en) | Mass flow meter | |
| JPH05157605A (en) | Coriolis mass flowmeter |