JPS58195864U - Capacitive humidity sensor - Google Patents

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of drawings]

第１図は電気容量型湿度センサの原理的な説明図、第２
図は従来の電気容量型湿度センサの断面図、第３図以下
は本考案に係る電気容量型湿度センサの実施例を示し、
第３図はその平面図、第４図は第３図のＩＶ−ＩＶ線に
沿った断面図、第５図は第３図の■−■沿った断面図、
第６図は電気的な等価回路図、第７図は他の実施例の平
面図、第８図は第７図の■−■線に沿った断面図である
。 符号１０は支持基板、１１は表電極、１２は裏電極、１
３は高分子膜、１４は外面電極、１４ａ。 １４ｂはリード部である。Figure 1 is an explanatory diagram of the principle of a capacitive humidity sensor, Figure 2
The figure is a cross-sectional view of a conventional capacitive humidity sensor, and Figure 3 and below show embodiments of the capacitive humidity sensor according to the present invention.
Fig. 3 is a plan view thereof, Fig. 4 is a sectional view taken along line IV-IV in Fig. 3, Fig. 5 is a sectional view taken along ■-■ in Fig. 3,
FIG. 6 is an electrical equivalent circuit diagram, FIG. 7 is a plan view of another embodiment, and FIG. 8 is a cross-sectional view taken along the line ■--■ in FIG. 7. 10 is a support substrate, 11 is a front electrode, 12 is a back electrode, 1
3 is a polymer membrane, 14 is an external electrode, and 14a. 14b is a lead portion.

Claims (1)

【実用新案登録請求の範囲】 １　絶縁性平板から成る支持体と、該支持体の両面にそ
れぞれ独立的に設けた表電極及び裏電極と、該裏電極及
び表電極を覆い、湿度により誘電率が変化する一定の厚
みを有する高分子膜と、前記外面電極及び表電極の上層
に前記高分子膜を介して被装した水蒸気透過性を有する
外面電極とから成ることを特徴とする電気容量型湿度セ
ンサ。 ２　前記外面電極は支持体の両面を一体的に覆うように
した実用新案登録請求の範囲第１項記載の電気容量型湿
度センサ。 ３　前記外面電極は支持体の両面に独立的に設けた実用
新案登録請求の範囲第１項記載の電気容量型湿度センサ
。[Claims for Utility Model Registration] 1. A support consisting of an insulating flat plate, a front electrode and a back electrode provided independently on both sides of the support, and covering the back electrode and front electrode, the dielectric constant of which is changed by humidity. A capacitive type characterized by comprising a polymer membrane having a constant thickness that varies, and an outer electrode having water vapor permeability and covering the upper layer of the outer electrode and the front electrode with the polymer membrane interposed therebetween. Humidity sensor. 2. The capacitive humidity sensor according to claim 1, wherein the external electrode integrally covers both sides of the support. 3. The capacitive humidity sensor according to claim 1, wherein the external electrodes are independently provided on both sides of the support.