JPS5819501A - Method and device for detecting touching signal - Google Patents
Method and device for detecting touching signalInfo
- Publication number
- JPS5819501A JPS5819501A JP11822581A JP11822581A JPS5819501A JP S5819501 A JPS5819501 A JP S5819501A JP 11822581 A JP11822581 A JP 11822581A JP 11822581 A JP11822581 A JP 11822581A JP S5819501 A JPS5819501 A JP S5819501A
- Authority
- JP
- Japan
- Prior art keywords
- contact
- displacement
- measured
- displacement amount
- relative displacement
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/002—Constructional details of contacts for gauges actuating one or more contacts
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
Abstract
Description
【発明の詳細な説明】 本発明は、タッチ信号検出方法及び装置に係り。[Detailed description of the invention] The present invention relates to a touch signal detection method and apparatus.
特に、３次元測定機或いは位置測定機に用いるに好適亀
、被測定物との接触による。接触子の接触子保持部に対
する変位をとらえて、接触子と被測定物との接触を検知
するようにしたタッチ信考検′出方法及び装置の改良に
関する。In particular, it is suitable for use in three-dimensional measuring machines or position measuring machines, due to the contact with the object to be measured. The present invention relates to an improvement in a touch belief detection method and device that detects contact between a contact and an object to be measured by detecting displacement of a contact with respect to a contact holding part.
一般に％測定基盤上に載置された被測定物の大きさ及び
形状を測定する３次元測定機或いは、工作機械の刃物台
と被加工物との相対的な位置を測定する位置−電機が知
られており、これらの測定機Ｋｊｌ−いては、被測定物
に対して任意の方向に移動可能な移動台に、被測定物と
の接触による接触子の接触子保持部に対する３次元的な
変位をとらえて、ＩＩ触子と被測定物との接触を検知す
るタッチ信勺プ璽−プを装着し、このタッチ信号プＷ
−プにより被測定物との接触が検知された時の位置信号
量測定値とすることにより、正確ｔｋｌＩＩｌ定値を得
るようＫされている。このタッチ信号プ胃−プ紘 ＊Ｓ
Ｗ定物置物ＩＬＫ係合及び離脱させながら１つの一定点
から次の一定点へと迅速に移動させ得るようになってい
るが１通常、接触子と被測定物とが係合した瞬間に直ち
にプローブの動きを停止することができないので、プロ
ーブが限られた量だけ係合点からオーパーラｙし得るよ
うに、接触子を機構学的位置決め装置によって接触子保
持部に取付け、接触子が接触・子保持部に対して相対的
に限られた範囲で移動す為のを許容し得るようになって
いる。又、プローブが被測定物から離れ九時に、接触子
゛を、その初期位置、即ち静止位置へと復帰する丸めの
復元機構が設けられており、前記のオーバーランはこの
復元機構の作用に抗して起こるようにされている。In general, a three-dimensional measuring machine that measures the size and shape of a workpiece placed on a measurement base, or a position that measures the relative position between the tool rest of a machine tool and the workpiece. These measuring machines have a movable stage that can be moved in any direction with respect to the object to be measured, and the three-dimensional displacement of the contact with respect to the contact holding part due to contact with the object to be measured is measured. A touch signal probe is attached to detect the contact between the II probe and the object to be measured.
By using the position signal amount measurement value when contact with the object to be measured is detected by the - loop, an accurate tklIIl constant value is obtained. This touch signal is blown out *S
W Fixed object ILK can be quickly moved from one fixed point to the next fixed point while engaging and disengaging.1 Normally, the moment the contact and the object to be measured are engaged, Since it is not possible to stop the movement of the probe, the contact is attached to the contact holder by a mechanical positioning device so that the probe can be over-lined from the point of engagement by a limited amount, so that the contact It is designed to allow movement within a limited range relative to the holding part. Further, a rounding restoring mechanism is provided that returns the contact to its initial position, that is, the resting position, when the probe leaves the object to be measured at 9 o'clock, and the overrun described above resists the action of this restoring mechanism. It's supposed to happen.
このようなタッチ信号プローブにおいては、接触子と被
測定物とのＩＩｒｍを正確に検出できると共に、被測定
物に！！ｉ接する接触子が損傷を受けることのない構造
とすることが必要でありＪ（１）接触子が被測定物と接
触していない状態において社、接触子と接触子保持部及
び移動台との相対位置関係が常に一定となること、（２
）比較的慣性の大きい移動台に装着される場合や、移動
台が高速で移行這転含れる場合ＫＦｉ、接触時ＫＩＮ触
子が接触子保持部に対して傾自或い鉱移動して、タッチ
信号プローブのオーバーラン時Ｋｊｉ−ける接触子に加
わる過大な負荷・を吸収できるよう１位置決め装置によ
り許容される振触子の変位量が大きいこと、（３）接触
子が被−置物に係合した瞬間に発生する接触信号の応答
性が優れていること、（４）被測定物に係合した時ＫＩ
Ｉ触子に働く力が十分に小さいこと、（Ｓ）プローブ移
動台がプローブを加速又紘減速するＩＩＫ接触子又社プ
ローブの他の構成部材に作用する慣性力により、疑似信
号が発生しないこと４、等が要求される。In such a touch signal probe, it is possible to accurately detect the IIrm between the contact and the object to be measured, and it is possible to accurately detect the IIrm between the contact and the object to be measured. ! It is necessary to have a structure that will not damage the contacts in contact with each other. The relative positional relationship is always constant (2
) When mounted on a moving platform with relatively large inertia, or when the moving platform involves moving and rolling at high speed, the KIN contactor tilts or moves relative to the contactor holding part when it makes contact. In order to absorb the excessive load applied to the contact when the touch signal probe overruns, (1) the amount of displacement of the transducer allowed by the positioning device is large; (3) the amount of displacement of the transducer that is allowed by the positioning device is large; The responsiveness of the contact signal generated at the moment of engagement with the object to be measured is excellent; (4) KI when engaged with the object to be measured;
(S) The force acting on the I contactor is sufficiently small, and (S) the probe moving table accelerates or decelerates the probe. The inertial force acting on other components of the IIK contactor probe does not generate false signals. 4, etc. are required.
前記のような目的を達成するタッチ信号プａ −プとし
て１例えば特開１８４Ｇ−９４３７０４＃に示される如
く％２個の球軸受を接近配置してＶ壽を形成し、このｖ
＊を円周上に１！０１［間隔で３個配散し、各ＶＩＩＩ
Ｋ、中央部が接触子の非接触側端部に固定された円盤状
の部材から放射状に延長され大輪をそれぞれ収容させる
ようにして、前記各球軸受と各軸との係合の有無から接
触子と被測定物の接触を感知するようにした測定探子が
提案されて−る。As a touch signal amplifier to achieve the above-mentioned purpose, for example, as shown in Japanese Patent Application Laid-open No. 184G-943704, two ball bearings are arranged close together to form a V-circle.
Distribute 3 * on the circumference at 1!01 [intervals, each VIII
K. The central part is radially extended from a disc-shaped member fixed to the non-contact side end of the contact and accommodates each large ring, and contact is determined from the presence or absence of engagement between each ball bearing and each shaft. A measurement probe that senses contact between a probe and an object to be measured has been proposed.
しかしながら、このような、電気接点のオンオフを利用
したデジタル型のタッチ信号プローブ或いは、応力感応
素子等を利用しえアナログ型のタッチ信号プローブのい
ずれにおいても、接触子が被測定物と接触し、接触子が
接触子保持部に対して所定量変位し九時点で電気接点が
オンオフされたり、或いは、アナｐグ信号が所定レベル
を越え４Ｔて
上口時点において、接触子と被測定物との接触を検知す
るようにされていたため、接触子と被測定物が当接した
瞬間からタッチ信号が発生する間に若干の時間遅れが避
けられないものであった。この時間遅れは、特に、１μ
議オーダの精密を要求される３次元測定機等の精密測定
機では無視できない量となっている。又、前記の検出時
間遅れは、接触子を、その初期位置、即ち静止位置へと
！ｏｌ！帰するための復元機構の構造から、ＩＩ触子の
運動方向によって異なるものとなり、従って、タッチ信
号のタッチ方向による誤差が避けられないものであった
。However, in both digital touch signal probes that use on/off of electrical contacts and analog touch signal probes that use stress-sensitive elements, the contact element comes into contact with the object to be measured, When the contact is displaced by a predetermined amount with respect to the contact holding part and the electrical contact is turned on and off at 9 points, or when the analog signal exceeds a predetermined level and reaches 4T, the connection between the contact and the object to be measured is detected. Since contact is detected, a slight time delay is unavoidable between the moment when the contact and the object to be measured come into contact with each other and the time when a touch signal is generated. This time delay is, in particular, 1μ
This is a non-negligible amount for precision measuring machines such as three-dimensional measuring machines that require precision on order. Also, the above-mentioned detection time delay causes the contact to return to its initial position, i.e., to its rest position! ol! Due to the structure of the restoring mechanism for returning the touch signal, the movement direction of the II touch varies depending on the direction of movement, and therefore, errors in the touch signal due to the touch direction are unavoidable.
本発明は、前記従来の欠点を琳消するべくなされたもの
で、接触子が被測定物と当接した瞬間を。The present invention was made to eliminate the above-mentioned drawbacks of the conventional technology, and the present invention is designed to eliminate the above-mentioned drawbacks of the conventional technology.
接触子のタッチ方向に拘らず正確に知ることができるタ
ッチ信号検出方法及び装置を提供することを目的とする
。It is an object of the present invention to provide a touch signal detection method and device that can accurately detect a touch signal regardless of the direction in which a contact is touched.
本発明は、被測定物との接触による。接触子の接触子保
持部に対する変位をとらえて、接触子と被−置物との接
触を検知するようにしたタッチ信号検出方法において、
接触子の接触子保持部に対する変位量が、予め設定され
た２以上のレベルに到達したことを検知し、これから接
触子変位量の経過軌跡を求め、この経過軌跡から接触子
が被測定物と！！！接した瞬間を知るようにして、前記
目的を達成したものである。The present invention relies on contact with an object to be measured. In a touch signal detection method, the contact between a contact and a placed object is detected by detecting the displacement of the contact with respect to the contact holding part,
It is detected that the amount of displacement of the contact with respect to the contact holding part has reached a preset level of 2 or more, the trajectory of the amount of contact displacement is calculated from this, and from this trajectory it is determined that the contact is the object to be measured. ! ! ! The purpose is achieved by letting you know the moment of contact.
又、前記接触子変位量の経過軌跡を、接触子保持部と＄
１１１定物との相対変位量に対して求めるようにしたも
のである。In addition, the trajectory of the contact displacement amount can be compared to the contact holding part and $
The amount of displacement relative to the 111 constant object is determined.
或％Ａは、前記接触子変位量の経過軌跡を、時間に対し
て求めるようＫしたものである。A certain %A is obtained by determining the trajectory of the contact displacement amount with respect to time.
本発明は、又、被測定物との接触による、接触子の接触
子保持部に対する変位をとらえて、接触子と被測定物と
の接触を検知するようにしたタッチ信号検出装置におい
て、接触子の接触子保持部に対する変位量を検出する変
位量検出器と、・接触子保持部と被測定物との相対変位
量を検−する相対変位量検出器と、前記変位量検出器出
力の接触子変位量信号が、予め設定され九２以上のレベ
ルにそれぞれ到達した瞬間に、前記相対変位量検出器出
力の相対変位量をそれぞれ読み出して、前記レベルに対
応させて記憶するメモリと、該メモリに記憶され九デー
タを利用して、接触子変位量信号の、接触子保持部と被
測定物との相対変位量に対する経過軌跡を求め、この経
過軌跡の延長線と非接触時の接触子変位量信号のレベル
との交点から、接触子が被測定物と当接した瞬間の相対
変位量を求めて出力する演算装置と、を備えることによ
り前記目的を達成したものである。The present invention also provides a touch signal detection device that detects contact between a contact and an object to be measured by detecting displacement of the contact with respect to the contact holding portion due to contact with the object. a displacement detector that detects the amount of displacement relative to the contact holding part; a relative displacement detector that detects the relative displacement between the contact holding part and the object to be measured; and a contact of the output of the displacement detector. a memory for reading each relative displacement amount of the output of the relative displacement amount detector at the moment when the child displacement amount signal reaches a preset level of 92 or more, and storing the relative displacement amount in correspondence with the level; Using the nine data stored in The above object is achieved by including an arithmetic device that calculates and outputs the amount of relative displacement at the moment when the contact makes contact with the object to be measured from the intersection point with the level of the quantity signal.
本発明は、更に、同じくタッチ信号検出装置において、
接触子の接触子保持部に対する変位量を検出する変位量
検出器と、接触子保持部と被測定物との相対変位量を検
出する相対変位量検出器と。The present invention further provides a touch signal detection device, further comprising:
A displacement amount detector that detects the amount of displacement of the contact with respect to the contact holding portion; and a relative displacement amount detector that detects the amount of relative displacement between the contact holding portion and the object to be measured.
前記相対変位量検出器出力の相対変位量を時間に対応さ
せて記憶するメ毫りと、前記変位量検出器出力の接触子
変位量信号が、予め設定され九２以上のレベルにそれぞ
れ到達した時刻′を検知し、これから前記メモリに記憶
されたデータを利用して、接触子変位量信号の時間に対
する経過軌跡を求め、この経過軌跡の延長線と非接触時
の接触子変位量信号のレベルとの交点から、！ｉ！触子
が被測定物とｍ螢した瞬間の時間を知り、前記メモリに
記憶されたデータから、接触子が被測定物と当接した瞬
間の時刻に対応する相対変位量を求めて出力する演算装
置と、を備えることにより前記目的を達成し良ものであ
る。A message for storing the relative displacement amount of the relative displacement amount detector output in correspondence with time, and a contact displacement amount signal of the displacement amount detector output reach a preset level of 92 or higher, respectively. Detect the time ', use the data stored in the memory to find the trajectory of the contact displacement signal over time, and calculate the extension of this trajectory and the level of the contact displacement signal in the non-contact state. From the intersection with ! i! Calculation that determines the time at the moment when the contactor makes contact with the object to be measured, and from the data stored in the memory, calculates and outputs the amount of relative displacement corresponding to the time at the moment when the contactor makes contact with the object to be measured. The above object can be achieved by providing the apparatus.
以下本発明の詳細な説明する。今、第１図に示す如く、
接触子保持部１０に保持された接触子１２が被測定物８
に当接する場合を考えると、この時の、接触子保持部１
０と被測定物８の相対変位量Ｘ或いは時間ｔと、接触子
１２の接触子保持部１０に対する変位量Ｖの関係は、第
２図に示す如くとなる。従って、！Ｉ触子の接触子保持
部に対する変位量Ｖが非接触時のレベルＶ、から、予め
設定された第１のレベルｖ１と第２のレベルＶ、Ｋｌｌ
達した瞬間の、相対変位量Ｘｔ 、Ｘ＊或いは時刻ｔ１
、を會を検出すれば、これらのデータから第２図に示す
ような接触子変位量Ｖの相対変位量Ｘ或いは時間ｔに対
する経過軌跡Ａｔ求めることができ、この経過軌跡ムか
ら、接触子１２が被測定物８と当接し九瞬関の相対変位
量Ｘ０或いは時刻ｔｏ ｔ’知ることができる。従って
、前記相対変位量Ｘ。ｆ：そのまま用いることにより、
或いは、予め相対変位量Ｘを時間に対応させて記憶させ
て置き、時刻ｔｏ Ｋおける相対変位量Ｘｏｔ後から読
み出すことにより、接触子１２が被測定物８と！！ｉ＠
した瞬間の相対変位量Ｘ、を知るＬとができるものであ
る。The present invention will be explained in detail below. Now, as shown in Figure 1,
The contact 12 held by the contact holding part 10 is the object to be measured 8
Considering the case where contactor holding part 1
The relationship between the relative displacement amount X of the object to be measured 8 or the time t and the displacement amount V of the contactor 12 with respect to the contactor holding portion 10 is as shown in FIG. Therefore,! The amount of displacement V of the I contactor with respect to the contactor holding portion is determined from the level V at the time of non-contact, to the preset first level v1 and second level V, Kll.
Relative displacement amount Xt, X* or time t1 at the moment of reaching
, it is possible to obtain the relative displacement amount X of the contact displacement amount V or the progress trajectory At with respect to time t as shown in FIG. 2 from these data, and from this progress trajectory m, the contactor 12 When it comes into contact with the object to be measured 8, the relative displacement amount X0 or the time to t' of the nine instantaneous gate can be known. Therefore, the relative displacement amount X. f: By using it as is,
Alternatively, by storing the relative displacement amount X in advance in correspondence with time and reading it out after the relative displacement amount Xot at time to K, the contact 12 can be connected to the object to be measured 8! ! i@
It is possible to know the amount of relative displacement, X, at the moment when L.
なお前記説明においては、接触子変位量の経過軌跡を、
２点の位置から求めるようにしていたが、接触子変位量
の経過軌跡を３点以上の位置から求めるようにし・て、
タッチ信号の検出精駁を更に高めることも可能である。In the above explanation, the trajectory of the contact displacement amount is expressed as
Previously, it was calculated from the positions of two points, but now the trajectory of the contact displacement amount can be calculated from the positions of three or more points.
It is also possible to further improve the accuracy of touch signal detection.
以下図面を参照して、本発明の実施例を詳細に説明する
。Embodiments of the present invention will be described in detail below with reference to the drawings.
本発明の第１実施例は、第３図に示すような。A first embodiment of the present invention is as shown in FIG.
頂部１４ｄが接触子１２の非接触側端部に固着され、各
面１４ａ％１４ｂ、１４ｏＫそれぞれ３個、２儒、１個
の略半球形状の凸部１４・、１４ｆ。The top portion 14d is fixed to the non-contact side end portion of the contactor 12, and each surface 14a, 14b, 14oK has three, two and one approximately hemispherical convex portions 14, 14f.
ｉ４ｇ％１４ｈ、１４１．１４ｊが形成された略三角錐
状の外面形状を有する可動体１４と、接触子保持部を構
成する、前記可動体１４を収容し、前記可動体１４との
対向面の１面１６１は３点で、他のｌ１１ｆ１６ｂは２
点で、残Ｑ ｆ） １ 面１６ ｃ ’／ｄ、 １点で
、前記可動体１４の対向面１４＆〜１４ａと接触するよ
うにされた。略裁頭３角錐状の内面形状を有するケーシ
ング１６と、前記可動体１４の底面１４にと受蓋１８間
に挿入され、前記可動体１４を前記ケーシング１６と接
触する方向に付勢して、接触子１２が被測定物に接触し
ていない時は、前記６点の接触箇所のすべてが接触した
状態ｔ＃持する、屈曲可能な巻きばね２０からなる付勢
手段とを有し、前記可動体１４の、例えば底面１４にの
傾きをとらえて、接触子１２と被測定物との接触を検知
するようにされたタッチ信号プローブを備えたタッチ信
号検出装置において、第４図に示す如く、前記可動体１
４の底面１４にの傾きから、接触子１２の、ｍ触子保持
部、即ちケーシング１６に対する変位置Ｖを検出する変
位量検出器２２と、ケーシング１６と被測定物との、Ｘ
方向、Ｙ方向、２方向の相対変位量ＸＸ％ｘｙ、ｘ。i4g%14h, 141.14j are formed on the movable body 14, which has a substantially triangular pyramidal outer surface shape, and a contact holding portion that accommodates the movable body 14 and that faces the movable body 14. 1 side 161 has 3 points, other l11f16b has 2 points
At one point, the remaining Qf) 1 surface 16c'/d was brought into contact with the facing surface 14&~14a of the movable body 14 at one point. It is inserted between a casing 16 having an inner surface shape of a substantially truncated triangular pyramid shape, the bottom surface 14 of the movable body 14, and the receiving cover 18, and urges the movable body 14 in a direction to contact the casing 16, When the contactor 12 is not in contact with the object to be measured, the movable In a touch signal detection device equipped with a touch signal probe configured to sense the inclination of the body 14, for example, the bottom surface 14, and detect the contact between the contact 12 and the object to be measured, as shown in FIG. The movable body 1
A displacement detector 22 detects the displacement position V of the contactor 12 with respect to the m-touch holding portion, that is, the casing 16, from the inclination of the bottom surface 14 of the
direction, Y direction, relative displacement amount in two directions XX%xy, x.
をそれぞれ検出する相対変位量検出器２４ａ。Relative displacement amount detector 24a detects each.
２４ｂ、２４ｏと、接触子変位量信号ＶのレベルＶ１、
Ｖｌ を予め設定するレベル設定器２６と、該レベル
設定器２６出力のレベルｖ１、Ｖｌ と前記変位量検
出器２２出力の相対変位量信号ｖｔ−比較し。24b, 24o, and the level V1 of the contactor displacement amount signal V.
A level setter 26 that presets Vl is used to compare the level v1 of the output of the level setter 26, Vl and the relative displacement signal vt of the output of the displacement detector 22.
両者が一致した瞬間に、それぞれ出力を発生する比較器
２８ｔ！、、該比較器２８出力に応じて、前記変位量検
出器２２出力の接触子変位量信号Ｖが予め設定されたレ
ベルＶＢ 、Ｖｌ Ｋそれぞれ到達した瞬間に前記相対
変位量検出器２４ｍ、２４ｂ。The comparator 28t! generates an output at the moment when both match! ,, the relative displacement amount detectors 24m, 24b at the moment when the contactor displacement amount signal V output from the displacement amount detector 22 reaches a preset level VB, VlK, respectively, according to the output of the comparator 28.
２４ｅ出力の相対変位量Ｘ１、Ｌ をそれぞれ読み出
す変位読取回路３０と、腋変位読取回路３０中力に応じ
て方向を判別する方向判別器３２と、前記比較器２８出
力に応じて前記方向判別器３２出力の相対変位量ｘＩ％
Ｘｓを、前記レベルｖ１、ｖ雪に対応させて記憶するメ
モリ３４と、該メモリ３４に記憶されたデータを利用し
て、＊触子変位量信勺ＶＯ，ケーシンダ１６と被測定物
との相対変位置ＸＫ対する経過軌跡を求め、この経過軌
跡の延長線と非接触時の接触子変位量信号のレベルＶ、
との交点から、＊触子１２が被測定物と当接した瞬間の
相対変位量Ｘ、を求めて出力する演算装置３６とを備え
たものである。24e, a displacement reading circuit 30 that reads the relative displacement amounts X1 and L of the output, a direction discriminator 32 that discriminates the direction according to the force in the armpit displacement reading circuit 30, and a direction discriminator 32 that discriminates the direction according to the output of the comparator 28. 32 output relative displacement x I%
Using a memory 34 that stores Xs in correspondence with the levels v1 and v snow, and the data stored in the memory 34, The elapsed trajectory for the displacement position XK is determined, and the extension line of this elapsed trajectory and the level V of the contact displacement amount signal when not in contact,
The device is equipped with an arithmetic device 36 that calculates and outputs the relative displacement amount X at the moment when the contactor 12 contacts the object to be measured from the intersection with the object to be measured.
前記変位量検出器２２は、接触子１２のケーシング１６
に対する変位量に比例した電気信号を発生するものとさ
れ１例えば、差動トランス、感圧素子、歪みゲージ、反
射建う−、圧電素子などが用いられている。The displacement amount detector 22 is connected to the casing 16 of the contactor 12.
For example, differential transformers, pressure-sensitive elements, strain gauges, reflectors, piezoelectric elements, etc. are used to generate electrical signals proportional to the amount of displacement.
又、前記相対変位量検出器２４ｍ、２４ｂ。Further, the relative displacement amount detectors 24m and 24b.
２４ｅとして社、従来と同様の、光電式、或いは電磁式
等のりニアエンコーダ或いはロータリーエンコーダ等が
用いられ七いる。As the encoder 24e, a photoelectric or electromagnetic linear encoder or rotary encoder, etc., similar to the conventional one, is used.
前記レベルｖ０は、例えば、ノイズの影響が無視できる
場合には、零レベルとされている。The level v0 is set to a zero level, for example, when the influence of noise can be ignored.
以下作用を説−する。まず接触子１２が被測定物と接触
していない定常状態においては１巻きばれ２０により可
動体１４がケーシング１６と接触する方向に付勢されて
おり、６点の接触箇所のすべてが接触した状態となって
いるため、！Ｉ触子ｌ！は、２方向及びＸＹ方向に同時
に位置決めされている。プローブ移動台等の移動に伴っ
てケーシング１６が移動され、接触子１２の先端が被測
定物＃ｃＩｌ達すると ＊きばね２０に抗して接触子ｌ
雪及び可動体！４が３次元方向に変位する。この変位量
は変位量検出器２２により検出されており、その接触子
変位量信号Ｖのレベルが予め設定されえ２つのレベルｖ
ｌ １１ Ｖｔ Ｋそれぞれ到達した瞬間に、前記相
対変位量検出器２４ｍ、２４ｂｓ２４ｅ出力の相対変位
量ＸｈＸｔがそれぞれ読み出され【、前記接触子変位量
信号Ｖのレベルｖ１、Ｗｅ に対応させて、メモリ３４
に記憶される。演算装置３６は、前記メモリ３４に記憶
されたデータを利用して、前記第２図に示したような、
接触子変位量信号Ｖのケーシング１６と被測定物との相
対変位量ＸｆＬ対する経過軌跡ムを求め、この経過軌跡
Ａの延長線と非接触時の接触子変位量信号のレベルＶ、
との交点から、接触子１２が被測定物と轟接した瞬間の
相対変位量Ｘｓ を求めて出力する。The action will be explained below. First, in a steady state where the contactor 12 is not in contact with the object to be measured, the movable body 14 is urged in the direction of contacting the casing 16 by the single winding 20, and all six contact points are in contact. Because it is! I tentacle! are positioned simultaneously in two directions and in the XY direction. The casing 16 is moved with the movement of the probe moving table, etc., and when the tip of the contact 12 reaches the object #cIl, the contact 12 moves against the spring 20.
Snow and moving objects! 4 is displaced in a three-dimensional direction. This amount of displacement is detected by a displacement amount detector 22, and the level of the contact displacement amount signal V can be set in advance to two levels v.
At the moment when the relative displacement amount XhXt of the relative displacement amount detectors 24m and 24bs24e is reached, the relative displacement amount Xh 34
is memorized. The arithmetic unit 36 utilizes the data stored in the memory 34 to perform the following operations as shown in FIG.
The course of the contact displacement signal V with respect to the relative displacement XfL between the casing 16 and the object to be measured is calculated, and the extension line of this course A and the level V of the contactor displacement signal in the non-contact state are calculated.
The amount of relative displacement Xs at the moment when the contactor 12 makes contact with the object to be measured is calculated from the intersection with the object to be measured and output.
本実施例においては、接触子変位量Ｖの経過軌跡を、接
触子保持部であるケーシングと被測定物との相対変位量
に対して求めるようにしているので、比較的少な−メモ
リ容量で、ＩＩ触子が被測定物と轟接しえ瞬間の相対変
位量Ｘ０を知ることができる。In this embodiment, since the trajectory of the contact displacement amount V is determined with respect to the relative displacement amount between the casing, which is the contact holding part, and the object to be measured, the memory capacity is relatively small. It is possible to know the amount of relative displacement X0 at the moment when the II contactor makes contact with the object to be measured.
本発明の第２実總例を８１５図に示す０本実施例は、前
記第ｉｌｌ總例と５同様のタッチ信号プ日−プを備えた
タッチ信号検出装置において、前記第１夷總例と同様の
変位量検出器２２、相対変位量検出器２４ ａ ｑ−２
４ｂ ％２４ ａ 、レベル設定器２６及び比較器素８
と、比較器２８の出力に拘らず、常時、相対変位量検出
器２４ａ％２４ｂ、２４ｅの出力ｘ、 、 Ｘ７ 、ｚ
ｚから相対変位量Ｘを読み取る変位読取回路４０と、該
変位読取回路４０出力に応じて方向を判別する方向判別
器４２と、り■ツク回路４４と、前記相対変位量検出６
２４ａ。A second practical example of the present invention is shown in FIG. Similar displacement amount detector 22, relative displacement amount detector 24 a q-2
4b%24a, level setter 26 and comparator element 8
And, regardless of the output of the comparator 28, the outputs of the relative displacement amount detectors 24a% 24b, 24e are always x, , X7, z
a displacement reading circuit 40 that reads the relative displacement amount X from z; a direction discriminator 42 that determines the direction according to the output of the displacement reading circuit 40;
24a.
２４ｂ、２４ｅ出力の相対変位量Ｘを、前記り冒ツク回
路４４出力の時間ｔに対応させて記憶するメモリ４６と
、前記比較器２８出力に応じて、前記変位量検出器２２
出力の接触子変位量信号Ｖが予め設定された２つのレベ
ルｖ１、ｖｆＫそれぞれ到達した時刻ｔ１％１１を検出
し、ｅれから前記メモリ４６に記憶されたデータを利用
して、前出第２図に示したような、接触子変位量信号Ｖ
の時間ｔに対する経過軌跡Ａを求め、この経過軌跡Ａの
延長線セ非接触時の接触子変位量信号のレベルＶ。A memory 46 stores the relative displacement amount X of the outputs 24b and 24e in correspondence with the time t of the output of the search circuit 44, and the displacement detector 22 stores the relative displacement amount
The time t1%11 at which the output contactor displacement amount signal V reaches two preset levels v1 and vfK, respectively, is detected, and from then on, using the data stored in the memory 46, the second Contact displacement amount signal V as shown in the figure
The elapsed trajectory A with respect to time t is determined, and the extension line of this elapsed trajectory A is the level V of the contact displacement amount signal during non-contact.
との交点から、接触子１２が被測定物と！１！！した瞬
間の時刻ｔ＠を知り、前記メ毫り４６に記憶されたデー
タから、接触子が被測定物と轟接した瞬間の時刻ｔ、に
対応する相対変位量Ｘ、・′を求めて出力する演算装置
４８とを備え九ものである。From the intersection with the object to be measured, the contact 12 and! 1! ! Knowing the time t@ at the moment when the contact is brought into contact with the object to be measured, from the data stored in the message 46, the relative displacement amount X, . It is equipped with an arithmetic unit 48 that performs the following operations.
本実施例の作用は、接触子変位置Ｖの経過軌跡が、接触
子保持部と被測定物の相対変位置ＸＫ対してでなく１時
間ｔＫ対して求めるようにした点を除けば、前記第１実
施例と同様であるので、説明拡省略する。The effect of this embodiment is that the trajectory of the contact displacement position V is determined not with respect to the relative displacement position XK of the contact holding part and the object to be measured but with respect to one hour tK. Since this is the same as the first embodiment, detailed explanation will be omitted.
なお前記実施例においては、いずれも、本発明が、第３
図に示したようなタッチ信号プローブを備え光タッチ信
号検出装置に適用されていたが、本発明の適用範囲はこ
れに限定されず１例えば第６図及び第７Ｅに示すような
、２個の球軸受５０、ｓ２を接近配置してＶａｔ形成し
、このＶ溝を円周上ＩＣ１２０［間隔で３個配設し、各
Ｖ溝に、中央部が接触子１２の非接触側端部に固定され
た円盤状の部材ｓ４から放射状に延長された軸５４ｊＬ
をそれぞれ収容させるようにして、前記円盤状の部材５
４の傾きから接触子１２と被測定物との接触を感知する
ようにしたタッチ信号プローブを備えたタッチ信号検出
装置にも同様に適用可能である。菖６図において、５６
は復′元用の巻きばねであゐ、或いは、第８図に示すよ
うな％接触子１２の非接触側端部に玉軸受６０を配設し
、巻きばね６２により該玉軸受６０と接触する方向に付
勢さ九九円盤状の部材６４の傾きを、皺円盤状の部材６
４の上面に固定され九反射ンラー６６の反射光線の位置
の襞化から検出して、接触子１２と被測定物の接触を感
知するようにしたタッチ信号プ四−プを備えたタッチ信
号検出装置にも同様に適用可能である。第８図において
、６８は光源、７０は受光素子である。Note that in all of the above embodiments, the present invention
Although the present invention has been applied to an optical touch signal detection device equipped with a touch signal probe as shown in the figure, the scope of application of the present invention is not limited thereto. The ball bearings 50 and s2 are arranged close together to form a Vat, and these V grooves are arranged on the circumference of the IC120 [3 pieces are arranged at intervals, and the center part is fixed to the non-contact side end of the contactor 12 in each V groove. A shaft 54jL extending radially from the disc-shaped member s4
The disk-shaped member 5
The present invention is similarly applicable to a touch signal detection device equipped with a touch signal probe that detects contact between the contactor 12 and the object to be measured based on the inclination of the probe 4. In Iris 6 diagram, 56
is a coiled spring for restoring, or a ball bearing 60 is disposed at the non-contact side end of the contactor 12 as shown in FIG. The tilt of the multiplication disk-shaped member 64 is biased in the direction of the wrinkled disk-shaped member 6.
A touch signal detection device is provided with a touch signal probe fixed to the upper surface of the contact probe 4, which detects the contact between the contact 12 and the object to be measured by detecting the folds in the position of the reflected light beam of the nine-reflection roller 66. It is also applicable to devices as well. In FIG. 8, 68 is a light source, and 70 is a light receiving element.
又、前記実施例は、いずれも、本発明を３次元方向の接
触を検知する光めのタッチ信号検出に適用し九ものであ
り、復元機構に起因するタッチ信号検出遅れの方向性も
、経過軌跡を求めるＩＩＫＩＩ収されてしまうものであ
るが１本発明の適用範囲はこれに限定されず、一方向或
いは二方向の接触状態を検出するタッチ信号検出にも同
様に適用できゐことは明らかである。Furthermore, in all of the above embodiments, the present invention is applied to optical touch signal detection for detecting contact in three-dimensional directions, and the directionality of the touch signal detection delay due to the restoring mechanism also changes over time. However, the scope of application of the present invention is not limited to this, and it is clear that it can be similarly applied to touch signal detection that detects contact states in one direction or two directions. be.
以上説明したと訃り、本発明によれば、接触子が被測定
物と当接した瞬間を正確に知ることができ、しか４、タ
ッチ信号検出の際の方向性も肩消されるという優れ九効
果を有する。However, according to the present invention, it is possible to accurately know the moment when the contact comes into contact with the object to be measured. have an effect.
諺ｌ閣は、本発明に係るタッチ信号検出方法の原理を説
明するための、接触子が被測定物に接触し光状態を示す
正面図、第２図は、同じく、接触子変位量の経過軌跡を
示す線図、第３図は、末完＠に係るタッチ信号検出方法
が適用されるタッチ＠勺プ四−ブの一＠Ｏ構成を示す斜
視図、第４図は、本発明に係るタッチ信号検出装置の第
１１ｉ！施例の構成を示すブロック線図、第５図は、同
じく第２８１７１例の構成を示すブロック線図、嬉６図
は、本発明に係るタッチ信号検出方法が適用されるタッ
チ信号プ■−プの他の例の構成を示す断面図、第７図は
、同じく平面図、第８図は１本発明に係ゐタッチ信号検
出方法が適用されるタッチ信号プー−プの更に＠の例の
構成を示す断面図である。
８−・被測定物、１０・・・接触子保持部、１２−・接
触子、！！１・−１！位量検出器、２４ｍ、２４ｂ。
雪４・・・・相対変位量検出器、２６・・・レベル設定
器、！畠−・比験・、３０．４０−・・変位読ＩＩＬ回
路、３！！！、４１−・方向判別１１１． ３４． ４
８−・・メ％ＩＪ。
３６．４８・・・演算装量、４４・・・クロック回路。
代理人 高 矢 論
（糎か１名）
Ｃ
ｔ、 ｔ、 ｔ２
ｏｘ ｔFigure 2 is a front view showing the light state when the contact is in contact with the object to be measured, for explaining the principle of the touch signal detection method according to the present invention. A line diagram showing the locus, FIG. 3 is a perspective view showing the configuration of a touch signal detection method according to the final step, and FIG. 11th i of touch signal detection device! FIG. 5 is a block diagram showing the configuration of the 28171st example, and FIG. 6 is a block diagram showing the configuration of the 28171st example. 7 is a plan view, and FIG. 8 is a sectional view showing the configuration of another example of the touch signal pool to which the touch signal detection method according to the present invention is applied. FIG. 8--Object to be measured, 10--Contact holder, 12--Contact,! ! 1・-1! Position detector, 24m, 24b. Snow 4...Relative displacement detector, 26...Level setter,! Hatake - Comparison - 30.40 - Displacement reading IIL circuit, 3! ! ! , 41-・Direction determination 111. 34. 4
8-...Me%IJ. 36.48... Arithmetic unit, 44... Clock circuit. Agent Takayaron (Ashi or 1 person) C t, t, t2 ox t
Claims (1)
持部に対する変位をとらえて、１１！触子と被測定物と
の接触を検知するようにしたタッチ信号検出方法におい
て、接触子の接触子保持部に対する変位量が、予め設定
され喪２以上のレベルに到達したことを検知し、これか
ら接触子変位量の経過軌跡を求め、この経過軌跡から接
触子が被測定、物と尚接しえ瞬間を知るようにしえとと
を特徴とするタッチ信号検出方法。 （２）前記接触子変位量の経過軌跡を、＊触子保持部と
被測定物との相対変位量に対して求めるようにした特許
請求の範−第１）ＪＫ記載のタッチ信号検出方法。 （３）前記接触子変位量の経過軌跡を、゛時間に対して
求めるようにした特許請求の範囲第１項に記載のタッチ
信号検出方法。 （４） 被−置物との接触による、接触子の接触子保
持部に対する変位をとらえて、接触子と被測定物との接
触を検知するようにしたタッチ信号検出装置において、
ＩＩ触子の接触子保持部に対する変位量を検出する変位
量検出器と、＊触子保持−と被測定物との相対・変位量
を検出する相対変位量検出器と、前記変位量検出器出力
の接触子変位量信号が、予め設定され九２以上のレベル
にそれぞれ到達した一関に、へ前−記相対変位量検出器
出力の相、対変位量をそれぞれ読み出して１、前記レベ
ルに対応させて°記憶するメ毫りと、該メモリに記憶さ
れたデータｔ１ｉ！ｌ用して、接触子変位量信号の、Ｉ
Ｉ触子保持部と被測定、物との相対変位量に対する経過
軌跡を求め、この経過軌跡や延長線と非接触時の一接触
子変位量信漫のレベルとの交点から、−触、子が被測定
物とｍ接した瞬間の相対変位量を求めて出力する演！装
置と、を備えたことを特徴とするタッチ信号検出装置。 （６） 被測定物との接触による。Ｉ！触子の接触子
保持部１対する変位をとらえて、接触子と被測定物との
接触を検知するようにしたタッチ信号検出装量において
、接触子の接触子保持部に対する変位量を検出する変位
量検出器と、ＩＩ触子保持部と被測定物との相対変位量
検出器円度対変位量検出器と、前記相対変位量検出器出
力の相対変位量を時間に対応させて記憶するメモリと、
前記変位量検出器出力の接触子変位量信号が予め設定さ
れた２以上のレベルにそれぞれ到達した時刻を検知し、
とれから前記メモリに記憶されたデータを利用して、接
触子変位量信号の時間に対する経過軌跡を求め、この経
過軌跡の延長線と非接触時の接触子変位量信号のレベル
との交点から、接触子が被測定物と当接した瞬間の時刻
を知り、前記メモリに記憶されたデータから、接触子が
被測定物と当接した瞬間の時刻罠対応する相対変位量を
求めて出力する演算装置と、を備見えことを特徴とする
タッチ信号検出装置。[Claims] (1) By capturing the displacement of the % contact with respect to the contact holding part due to contact with the object to be measured, 11! In a touch signal detection method that detects contact between a contact and an object to be measured, it is detected that the amount of displacement of the contact with respect to the contact holding part has reached a preset level of 2 or higher, and A touch signal detection method characterized in that the trajectory of the displacement of the contact element is determined, and the moment when the contact element is in contact with the object to be measured is determined from this trajectory. (2) The touch signal detection method according to claim 1) JK, wherein the trajectory of the contact displacement amount is determined with respect to the relative displacement amount between the contact holding part and the object to be measured. (3) The touch signal detection method according to claim 1, wherein the trajectory of the contact displacement amount is determined with respect to time. (4) In a touch signal detection device that detects the contact between the contact and the object to be measured by detecting the displacement of the contact with respect to the contact holding part due to the contact with the object,
A displacement amount detector that detects the amount of displacement of the II contactor with respect to the contactor holding portion, a relative displacement amount detector that detects the relative displacement amount between the *toucher holder and the object to be measured, and the displacement amount detector. When the output contactor displacement signal reaches a preset level of 92 or above, read out the phase and relative displacement of the output of the relative displacement detector, respectively, and read out the phase and relative displacement of the output of the relative displacement detector to correspond to the level. The data stored in the memory t1i! I of the contact displacement amount signal using l
Find the trajectory of the relative displacement between the I-touch holding part and the object to be measured, and from the intersection of this trajectory or extension line with the level of confidence in the displacement of one contact during non-contact, -touch, A performance that calculates and outputs the amount of relative displacement at the moment when m comes into contact with the measured object! A touch signal detection device comprising: (6) Due to contact with the object to be measured. I! In a touch signal detection device that detects the contact between a contact and an object to be measured by detecting the displacement of the contact with respect to the contact holding part 1, the displacement of the contact with respect to the contact holding part 1 is detected. an amount detector, a relative displacement amount detector between the II probe holder and the object to be measured, a circularity versus displacement amount detector, and a memory for storing the relative displacement amount of the relative displacement amount detector output in correspondence with time. and,
detecting the time when the contact displacement amount signal output from the displacement amount detector reaches two or more preset levels;
Then, using the data stored in the memory, find the trajectory of the contact displacement amount signal over time, and from the intersection of the extension line of this trajectory and the level of the contact displacement amount signal during non-contact, A calculation that determines the time at the moment when the contact makes contact with the object to be measured, and from the data stored in the memory, calculates and outputs the amount of relative displacement corresponding to the time trap at the moment when the contact makes contact with the object to be measured. A touch signal detection device comprising: a touch signal detection device;
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11822581A JPS5819501A (en) | 1981-07-28 | 1981-07-28 | Method and device for detecting touching signal |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11822581A JPS5819501A (en) | 1981-07-28 | 1981-07-28 | Method and device for detecting touching signal |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5819501A true JPS5819501A (en) | 1983-02-04 |
Family
ID=14731314
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11822581A Pending JPS5819501A (en) | 1981-07-28 | 1981-07-28 | Method and device for detecting touching signal |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5819501A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02209281A (en) * | 1989-02-10 | 1990-08-20 | Oki Electric Ind Co Ltd | Automatic printing head gap adjusting mechanism |
| JPH05285564A (en) * | 1992-04-08 | 1993-11-02 | Amada Metrecs Co Ltd | Die for punch press |
| JP2009036632A (en) * | 2007-08-01 | 2009-02-19 | Mitsutoyo Corp | Method and device for detecting measurement position of resonance sensor |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS51149050A (en) * | 1975-05-13 | 1976-12-21 | Rolls Royce | Measuring device |
-
1981
- 1981-07-28 JP JP11822581A patent/JPS5819501A/en active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS51149050A (en) * | 1975-05-13 | 1976-12-21 | Rolls Royce | Measuring device |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02209281A (en) * | 1989-02-10 | 1990-08-20 | Oki Electric Ind Co Ltd | Automatic printing head gap adjusting mechanism |
| JPH05285564A (en) * | 1992-04-08 | 1993-11-02 | Amada Metrecs Co Ltd | Die for punch press |
| JP2009036632A (en) * | 2007-08-01 | 2009-02-19 | Mitsutoyo Corp | Method and device for detecting measurement position of resonance sensor |
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