JPS58190047A - Preparation of resin mold type electronic parts - Google Patents

Preparation of resin mold type electronic parts

Info

Publication number
JPS58190047A
JPS58190047A JP7355082A JP7355082A JPS58190047A JP S58190047 A JPS58190047 A JP S58190047A JP 7355082 A JP7355082 A JP 7355082A JP 7355082 A JP7355082 A JP 7355082A JP S58190047 A JPS58190047 A JP S58190047A
Authority
JP
Japan
Prior art keywords
jig
resin
electrode
electronic parts
electronic component
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7355082A
Other languages
Japanese (ja)
Other versions
JPH0230578B2 (en
Inventor
Toshiaki Moriyama
敏明 森山
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Home Electronics Ltd
NEC Corp
Original Assignee
NEC Home Electronics Ltd
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Home Electronics Ltd, Nippon Electric Co Ltd filed Critical NEC Home Electronics Ltd
Priority to JP7355082A priority Critical patent/JPH0230578B2/en
Publication of JPS58190047A publication Critical patent/JPS58190047A/en
Publication of JPH0230578B2 publication Critical patent/JPH0230578B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C45/00Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor
    • B29C45/14Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor incorporating preformed parts or layers, e.g. injection moulding around inserts or for coating articles
    • B29C45/14639Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor incorporating preformed parts or layers, e.g. injection moulding around inserts or for coating articles for obtaining an insulating effect, e.g. for electrical components
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/4805Shape
    • H01L2224/4809Loop shape
    • H01L2224/48091Arched
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/481Disposition
    • H01L2224/48151Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/48221Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/48245Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
    • H01L2224/48247Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic connecting the wire to a bond pad of the item

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Mechanical Engineering (AREA)
  • Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)
  • Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)
  • Lead Frames For Integrated Circuits (AREA)

Abstract

PURPOSE:To manufacture a plurality of electronic parts at a time and curtail the manufacturing processes by filing a recess portion of jig with a resin material while the electronic parts are pressurizingly held with electrodes and by giving the sheath to the essential part including electronic parts. CONSTITUTION:The upper jig 8 is removed, movable jigs 9, 10 are moved by sliding to the right or left, and the one electrode 5 is loaded to an extruded portion 7b of the lower jig 7. The other electrode 5 is also loaded to an extruded portion 8b of the upper jig 8. In the state while a pellet 1 is pressurizingly held between electrodes 5, 5, a jig 6 is supplied to the resin injecting apparatus. This resin injecting apparatus causes a resin material 6 to pass a gate 7d from a runner 13 and enters into the space surrounded by the lower jig 7 and the upper jig 8. When the jig 6 is heated under such condition and the resin material 16 is hardened, a diode can be obtained. A resin mold type diode can be obtained by bending the leg 5b of electrode 5 of such diode along the external surface of resin mold portion 3.

Description

【発明の詳細な説明】 本発明は樹脂モールド型電子部品の製造方法に関する。[Detailed description of the invention] The present invention relates to a method for manufacturing resin molded electronic components.

最近、小形の電子回路装置を実現するために、リードレ
ス電子部品が実用されている。
Recently, leadless electronic components have been put into practical use in order to realize small-sized electronic circuit devices.

第1図はり一ドレス電子部品、例えばダイオードの一例
を示すもので、lは両面に電極を形成した電子部品本体
(ダイオードペレット)、2a、2bは−・対のリード
で、一方のり一ド2aにペレット1を載置固定している
。8はペレットlの上面電極と他のり一ド2bとを電気
的に接続する金属細線、4はペレットlを含む主要部分
を樹脂材で被覆した樹脂モール1部を示す。
Figure 1 shows an example of a beam-dressed electronic component, such as a diode, where l is an electronic component body (diode pellet) with electrodes formed on both sides, 2a and 2b are a pair of leads, one of which is glued 2a. Pellet 1 is placed and fixed on. Reference numeral 8 indicates a thin metal wire that electrically connects the upper surface electrode of the pellet 1 to the other glue 2b, and 4 indicates a portion of the resin molding 1 in which the main portion including the pellet 1 is coated with a resin material.

第2図はこのダイオードの製造に用いられるリードフレ
ームの一例を示すもので、リード2a、2bの端部を連
結片2C12Cで連結し、さらに連結片2C12Cの両
端部を連結片2dにて連結し一体化したもので、2eは
位置決め及び移送用のガイド穴を示す。
FIG. 2 shows an example of a lead frame used in manufacturing this diode, in which the ends of leads 2a and 2b are connected by a connecting piece 2C12C, and both ends of the connecting piece 2C12C are connected by a connecting piece 2d. In the integrated structure, 2e indicates a guide hole for positioning and transfer.

このダイオードはリードフレームのり一ド2a端部にペ
レットlを順次載置固定するマウント工程、ペレット1
の」−面電極とり一ド2bとを金属細線3にて接続する
ワイヤボンデインク工程、ペレット1を含む主要部分を
樹脂材にて被覆し外装する外装工程、タイバ2C12C
を切断除去し、個々のダイオードに分離する分離工程、
ダイオ−ドの電気的特性外観等を検査する工程等を経て
製造される。
This diode is manufactured through a mounting process in which pellets 1 are sequentially placed and fixed on the end of the lead frame glue 2a.
Wire bonding process of connecting the ``-plane electrode with one side 2b with a thin metal wire 3, Exterior process of covering the main part including the pellet 1 with a resin material, Tie bar 2C12C
a separation process in which the diodes are removed and separated into individual diodes;
It is manufactured through a process of inspecting the electrical characteristics, appearance, etc. of the diode.

ところで、このダイオードは一つのリードフレームに複
数組のダイオードを構成できるのであるが、複数のダイ
オードを一括して製造することができなかった。例えば
、ワイヤボンデインク工程では、リード間隔が狭いため
ワイヤボンダを複数配置することができなかった。
By the way, although a plurality of sets of diodes can be constructed on one lead frame, it has not been possible to manufacture a plurality of diodes all at once. For example, in the wire bonding process, it was not possible to arrange multiple wire bonders because the lead spacing was narrow.

また、製造工程が多いため、工程間の移し替え作業等も
煩雑であった。
Furthermore, since there are many manufacturing steps, transfer work between steps is also complicated.

本発明は上記間額点に鑑み提案されたもので、複数の電
子部品を一括製造でき、製造工程を短縮できる製造方法
を提供する。
The present invention has been proposed in view of the above-mentioned cost points, and provides a manufacturing method that can manufacture a plurality of electronic components at once and shorten the manufacturing process.

以下、本発明をダイオードの製造に適用し、第3図乃至
第11図より説明する。第3図は電極体5を示し、図示
例では角形の平板部5aのコーナ部より4つの脚片5b
を同一方向に起立している。
The present invention will be applied to the manufacture of diodes and will be explained below with reference to FIGS. 3 to 11. FIG. 3 shows the electrode body 5, and in the illustrated example, four leg pieces 5b are connected to the corners of a rectangular flat plate part 5a.
are standing in the same direction.

第4図及び第5図は本発明による製造に用いる治具6の
一例を示すもので、7は一方の電極体5を支持する下治
具で、脚片5bの端面を支持する段部7aと、段部より
突出し、側面が脚片5bの内面と接触し上面が平板部5
aと空隙をもって対向する突部7bと、突部7bの両側
より平行に延びる側壁部7C17Cとを有する。8は上
治具で、側壁部7C17Cを除き下治具7と−に下対称
形状を有する。また側壁7Cに樹脂を注入するゲート7
dを穿設している。9,10は下治具7と上治具8の間
に配置された可動治具で、水平方向にスライドし、下金
型7及びに金型8の突部7b、8b側壁部の脚片5b、
5bを押圧する突部9a、9b。
FIGS. 4 and 5 show an example of a jig 6 used for manufacturing according to the present invention, and 7 is a lower jig that supports one electrode body 5, and a stepped portion 7a that supports the end surface of the leg piece 5b. and protrudes from the stepped portion, the side surface contacts the inner surface of the leg piece 5b, and the upper surface contacts the flat plate portion 5.
It has a protrusion 7b facing a with a gap, and side wall parts 7C17C extending in parallel from both sides of the protrusion 7b. 8 is an upper jig which has a downwardly symmetrical shape with respect to the lower jig 7 except for the side wall portions 7C and 17C. Gate 7 for injecting resin into side wall 7C
d is drilled. Reference numerals 9 and 10 denote movable jigs arranged between the lower jig 7 and the upper jig 8, which slide horizontally and move the legs of the side walls of the lower mold 7 and the protrusions 7b and 8b of the mold 8. 5b,
Projections 9a and 9b that press 5b.

lOa、lObを設は突部9a、9b聞及び104.1
0b間に溝部9C110Cを設けている。
lOa and lOb are set between protrusions 9a and 9b and 104.1.
A groove portion 9C110C is provided between 0b.

以下、この動作を第6図乃〒第9図より説明する。This operation will be explained below with reference to FIGS. 6 to 9.

先ず第6図に示すように、−に治具8を取りはずし、可
動治具9.10を左右にスライドさせて、下治具7の突
部7bに一方の電極体5を装着する。
First, as shown in FIG. 6, the jig 8 is removed, the movable jig 9 and 10 are slid left and right, and one electrode body 5 is mounted on the protrusion 7b of the lower jig 7.

そして図示(7ないが、」二冶貝8の突部8bにも他方
の電極体5を装着する。
Then, the other electrode body 5 is also attached to the protrusion 8b of the second shell 8 (although not shown in the figure).

そl〜で次に第7図に示すように、可動治具9.10を
スライドさせて、下治具7の突部7bと可動治具9、l
Oの突部9i7,1072とで電極体5の脚片5bを圧
接固定し、さらに電極体5の平板部5a七にペレット1
を供給する。
Then, as shown in FIG.
The leg piece 5b of the electrode body 5 is fixed in pressure contact with the projections 9i7 and 1072 of the
supply.

そ17て第8図に示すように、下治具7、可動治具9、
]0で四重れた凹部内に上治具8の突部8bを挿入する
。この時、上治具8に装着された電極体5は」二治具8
で脚片5bが押圧された状態で、ペレッI−1に平板部
5aを圧接l−1可動冶具9.10の突部9b、10b
と上治具8の突部8bで脚片5bが挾持される。
17. As shown in FIG. 8, the lower jig 7, the movable jig 9,
] Insert the protrusion 8b of the upper jig 8 into the quadruple concave portion at 0. At this time, the electrode body 5 mounted on the upper jig 8 is
With the leg piece 5b being pressed, the flat plate part 5a is pressed against the pellet I-1 by the protrusions 9b and 10b of the movable jig 9.10.
The leg piece 5b is held by the protrusion 8b of the upper jig 8.

このようにして電極体5.5間にペレノl−iを圧接挾
持した状態で、第9図に示すように治具6を樹脂注入装
置に供給する。11は治具6を載置する底部、I2は底
部ll上で治具6を位置決めするための突壁、13は底
部ll上で位置決めされた治具6のゲート7dと対応し
−に面に開口したランナで、図示しないが樹脂材を供給
するlポット部に連通している。14は底部11に冶具
6を押圧する第1の押圧体、15は突壁12に治具6=
 5− を押圧する第2の抑圧体である。この樹脂注入装置によ
り樹脂材16がランナ18からゲート7dを通り下治具
7と上治具8で四重れた空間内に注入される。この状態
で冶具6を加熱して樹脂材16を硬化させると、第1θ
図に示すダイオードが得られる。このタイオードの電極
体5の脚片5bを第11図に示すように樹脂モールド部
3の外面に沿って屈曲成形することによって樹脂モール
ド型ダイオードを得る。
With Pereno l-i held in pressure contact between the electrode bodies 5.5 in this manner, the jig 6 is supplied to the resin injection device as shown in FIG. 11 is the bottom on which the jig 6 is placed, I2 is a projecting wall for positioning the jig 6 on the bottom ll, and 13 corresponds to the gate 7d of the jig 6 positioned on the bottom ll. It is an open runner and communicates with an l-pot section (not shown) for supplying resin material. 14 is a first pressing body that presses the jig 6 against the bottom portion 11; 15 is a jig 6 that presses the jig 6 on the projecting wall 12;
5- is the second suppressing body that presses down. This resin injection device injects the resin material 16 from the runner 18 through the gate 7d into the space quadrupled by the lower jig 7 and the upper jig 8. When the jig 6 is heated in this state to harden the resin material 16, the first θ
The diode shown in the figure is obtained. A resin molded diode is obtained by bending the leg pieces 5b of the electrode body 5 of this diode along the outer surface of the resin molded portion 3 as shown in FIG.

この製造方法によれば、電極体5の脚片5bをその軸方
向に押圧して平板部5aにてペレットlを弾性的に押圧
しているため、ボンデインクが不1要で治具6内で電極
体5.5とペレ’7’ l−1を複数組、組立てた状態
で直ちに一括して樹脂モールドできるから作業性が向」
ニする。
According to this manufacturing method, since the leg piece 5b of the electrode body 5 is pressed in the axial direction and the pellet 1 is elastically pressed by the flat plate part 5a, bonding ink is not required and the pellet 1 can be stored in the jig 6. Workability is improved because multiple sets of electrode body 5.5 and Pelle '7' l-1 can be resin molded all at once in the assembled state.
d.

またペレット1を破損することなく電極体5.5で圧接
挾持でき、電極体5の両面に樹脂材16を充填できるか
ら樹脂硬化後横脂材16が収縮し電極体5とペレ、1−
1の接触圧が低下するという問題もない。
Further, since the pellet 1 can be clamped by the electrode body 5.5 without being damaged, and the resin material 16 can be filled on both sides of the electrode body 5, the side resin material 16 shrinks after the resin hardens, and the electrode body 5 and the pellet 1-
There is also no problem that the contact pressure of No. 1 decreases.

 6 − 尚、本発明は−1−記実施例にのみ限定されることなく
、例えば、電極体5は単独のものを用いるだけでなく、
第12図に示すように脚片5bの端部を連結片】7で連
結し、複数の電極体5を一体化してもよく、これにより
作業性を一層向上できる。
6 - Note that the present invention is not limited only to the embodiments described in -1-, for example, the electrode body 5 may not only be used alone, but also
As shown in FIG. 12, the ends of the leg pieces 5b may be connected by a connecting piece 7 to integrate a plurality of electrode bodies 5, thereby further improving workability.

また電極体5の平板部5aに電子部品本体lを収容する
凹部や電極と接触する凸部を設けてもよい。
Further, the flat plate portion 5a of the electrode body 5 may be provided with a concave portion for accommodating the electronic component main body 1 and a convex portion that comes into contact with the electrode.

さらにダイオード゛だけでなく、抵抗やコンデンーリー
等他の電子部品の製造にも適用できる。
Furthermore, it can be applied not only to the manufacture of diodes, but also to the manufacture of other electronic components such as resistors and capacitors.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は電子部品の一例を示す側断面図、第2図は第1
図電子部品の製造に用いられるリードフレームの平面図
、第3図は電極体の一例を示す斜視図、第4図は本発明
による製造方法を説明するための治具の断面図、第5図
は第4図A−A面図、第6図乃至第9図は第4図治具の
各T程毎の断面図、第1O図は本発明により製造された
電、子部品の斜視図、第11図はリード成型した電子部
品の斜視図、第12図は電極体の他の例を示す斜視図で
ある。 ■・・・・・電子部品本体、 3−・・・・・樹脂モールF部、 5 ・・・電極体、 5a・ 平板部、 5b・・ 脚片、 6−・ ・・・  治具1. 1 6 −・・ ・  的1)1旨IA 。 第3図        、b 第6図 第7図
Figure 1 is a side sectional view showing an example of an electronic component, and Figure 2 is a side sectional view showing an example of an electronic component.
3 is a perspective view showing an example of an electrode body, FIG. 4 is a sectional view of a jig for explaining the manufacturing method according to the present invention, and FIG. 5 is a plan view of a lead frame used for manufacturing electronic components. is a plane view taken along the line A-A in FIG. 4, FIGS. 6 to 9 are cross-sectional views of the jig in FIG. FIG. 11 is a perspective view of an electronic component with lead molding, and FIG. 12 is a perspective view showing another example of an electrode body. ■...Electronic component body, 3-...Resin molding F part, 5...Electrode body, 5a/flat plate part, 5b...leg piece, 6-...Jig 1. 1 6 -... ・ Target 1) 1 IA. Figure 3, b Figure 6 Figure 7

Claims (1)

【特許請求の範囲】[Claims] 平板の端部より脚片を起立した一対の電極体と、両面に
電極を有する電子部品本体とを、四部を有する治具内に
脚片を反対方向に向けかつ平板部にて電子部品本体を挾
んで収容し、電子部品本体を電極体にて圧接した状態で
治具凹部内に樹脂材を充填し、電子部品本体を含む要部
を外装したことを特徴とする樹脂モールド型電子部品の
製造方法。
A pair of electrode bodies with legs erected from the ends of a flat plate and an electronic component main body having electrodes on both sides are placed in a jig having four parts with the legs facing in opposite directions and the electronic component main body with the flat plate part. Manufacture of a resin-molded electronic component, characterized in that the main parts including the electronic component body are packaged by sandwiching and housing the electronic component body, filling the recess of the jig with a resin material while pressing the electronic component body with an electrode body. Method.
JP7355082A 1982-04-30 1982-04-30 JUSHIMOORUDOGATADENSHIBUHINNOSEIZOHOHO Expired - Lifetime JPH0230578B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7355082A JPH0230578B2 (en) 1982-04-30 1982-04-30 JUSHIMOORUDOGATADENSHIBUHINNOSEIZOHOHO

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7355082A JPH0230578B2 (en) 1982-04-30 1982-04-30 JUSHIMOORUDOGATADENSHIBUHINNOSEIZOHOHO

Publications (2)

Publication Number Publication Date
JPS58190047A true JPS58190047A (en) 1983-11-05
JPH0230578B2 JPH0230578B2 (en) 1990-07-06

Family

ID=13521451

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7355082A Expired - Lifetime JPH0230578B2 (en) 1982-04-30 1982-04-30 JUSHIMOORUDOGATADENSHIBUHINNOSEIZOHOHO

Country Status (1)

Country Link
JP (1) JPH0230578B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5049526A (en) * 1989-06-07 1991-09-17 Motorola, Inc. Method for fabricating semiconductor device including package

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0545333U (en) * 1991-11-21 1993-06-18 エヌオーケー株式会社 Oil seal

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5049526A (en) * 1989-06-07 1991-09-17 Motorola, Inc. Method for fabricating semiconductor device including package

Also Published As

Publication number Publication date
JPH0230578B2 (en) 1990-07-06

Similar Documents

Publication Publication Date Title
US5139973A (en) Method for making a semiconductor package with the distance between a lead frame die pad and heat spreader determined by the thickness of an intermediary insulating sheet
US5091341A (en) Method of sealing semiconductor device with resin by pressing a lead frame to a heat sink using an upper mold pressure member
US5152057A (en) Molded integrated circuit package
US8596120B2 (en) Electronic sensor or sensor device, in particular an acceleration sensor, having a chip module mounted in a sensor housing
CN111587486A (en) Semiconductor device and method for manufacturing semiconductor device
US5445995A (en) Method for manufacturing plastic-encapsulated semiconductor devices with exposed metal heat sink
JP2560909Y2 (en) Composite semiconductor device
JPS58190047A (en) Preparation of resin mold type electronic parts
JP2921416B2 (en) Solid electrolytic capacitor and method of manufacturing the same
US20060075634A1 (en) Method for manufacturing electrical connectors for enhancing coplanarity
US5778520A (en) Method of making an assembly package in an air tight cavity and a product made by the method
KR930004237B1 (en) Semiconductor component manufacturing process, device and assembly station
JPH1075040A (en) Method for manufacturing resin-coated circuit board
JP2514818B2 (en) Resin sealing method for integrated circuit board
JPH0213462B2 (en)
JP2000012752A (en) Lead frame, semiconductor device using the same and manufacture of the semiconductor device
JPH10242344A (en) Semiconductor device for power
JP2001298032A (en) Semiconductor package and its manufacturing method
JP2759523B2 (en) Method for manufacturing semiconductor device
KR960003854B1 (en) Semiconductor device producing method
JP2001024012A (en) Mold type package and manufacturing method
JP2684446B2 (en) Injection molding method and apparatus for printed circuit board
JP2917556B2 (en) Method for producing insulator-sealed electronic component
KR100247160B1 (en) Package making use of metal powder ejection formed sintered body and its manufacturing method
JPH0625959Y2 (en) Semiconductor device