JPS58187139U - Mound crushing device - Google Patents

Mound crushing device

Info

Publication number
JPS58187139U
JPS58187139U JP8437082U JP8437082U JPS58187139U JP S58187139 U JPS58187139 U JP S58187139U JP 8437082 U JP8437082 U JP 8437082U JP 8437082 U JP8437082 U JP 8437082U JP S58187139 U JPS58187139 U JP S58187139U
Authority
JP
Japan
Prior art keywords
mound
crush
crushing device
crush plate
holder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8437082U
Other languages
Japanese (ja)
Inventor
井口　順二
肇 小杉
Original Assignee
日本電気株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日本電気株式会社 filed Critical 日本電気株式会社
Priority to JP8437082U priority Critical patent/JPS58187139U/en
Publication of JPS58187139U publication Critical patent/JPS58187139U/en
Pending legal-status Critical Current

Links

Landscapes

  • Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of drawings]

第１図ａは従来のマウンド　クラッシュ装置の正面図、
第１図すは平面図、第２図ａは本考案によるマウンド　
クラッシュ装置の正面図、第２図すは側面図、第３図ａ
はクラッシュ板清掃部の詳細を示す正面図、第３図すは
側面図である。 １・・・ホルダ、９・・・ブラシ、１０・・・搬送台。 （（ＩＪ ′ｖｖ （Ｕ〕 １６　　Ｌ　　　　　　　　　　　ｊFigure 1a is a front view of a conventional mound crushing device;
Figure 1 is a plan view, Figure 2 a is a mound according to the present invention.
Front view of the crush device, Figure 2A is a side view, Figure 3A
3 is a front view showing details of the crush plate cleaning section, and FIG. 3 is a side view. 1...Holder, 9...Brush, 10...Transportation platform. ((IJ ′vv (U) 16 L j

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 半導体ウエノ・−上に形成された突起物をクラッシュ板
で潰すマウンド　クラッシュ装置において、ホルダーに
吸着保持させるクラッシュ板をホルダー内外に搬入搬出
する搬送台を備え、該搬送台の搬出位置に、クラッシュ
板を清掃するブラシを設置したことをｉ徴とするマウン
ド　クラッシュ装置。Semiconductor wafer - A mound for crushing protrusions formed on a crush plate with a crush plate A crush device is equipped with a conveyor table for carrying the crush plate, which is suctioned and held by the holder, into and out of the holder, and the crush plate is placed at the unloading position of the conveyor table. The mound crush device is characterized by the installation of a brush for cleaning the mound.
JP8437082U 1982-06-07 1982-06-07 Mound crushing device Pending JPS58187139U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8437082U JPS58187139U (en) 1982-06-07 1982-06-07 Mound crushing device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8437082U JPS58187139U (en) 1982-06-07 1982-06-07 Mound crushing device

Publications (1)

Publication Number Publication Date
JPS58187139U true JPS58187139U (en) 1983-12-12

Family

ID=30093321

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8437082U Pending JPS58187139U (en) 1982-06-07 1982-06-07 Mound crushing device

Country Status (1)

Country Link
JP (1) JPS58187139U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61128530A (en) * 1984-11-28 1986-06-16 Canon Inc Epitaxial spike crushing device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61128530A (en) * 1984-11-28 1986-06-16 Canon Inc Epitaxial spike crushing device

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