JPS58187139U - Mound crushing device - Google Patents
Mound crushing deviceInfo
- Publication number
- JPS58187139U JPS58187139U JP8437082U JP8437082U JPS58187139U JP S58187139 U JPS58187139 U JP S58187139U JP 8437082 U JP8437082 U JP 8437082U JP 8437082 U JP8437082 U JP 8437082U JP S58187139 U JPS58187139 U JP S58187139U
- Authority
- JP
- Japan
- Prior art keywords
- mound
- crush
- crushing device
- crush plate
- holder
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第1図aは従来のマウンド クラッシュ装置の正面図、
第1図すは平面図、第2図aは本考案によるマウンド
クラッシュ装置の正面図、第2図すは側面図、第3図a
はクラッシュ板清掃部の詳細を示す正面図、第3図すは
側面図である。
1・・・ホルダ、9・・・ブラシ、10・・・搬送台。
((IJ
′vv
(U〕
16 L jFigure 1a is a front view of a conventional mound crushing device;
Figure 1 is a plan view, Figure 2 a is a mound according to the present invention.
Front view of the crush device, Figure 2A is a side view, Figure 3A
3 is a front view showing details of the crush plate cleaning section, and FIG. 3 is a side view. 1...Holder, 9...Brush, 10...Transportation platform. ((IJ ′vv (U) 16 L j
Claims (1)
で潰すマウンド クラッシュ装置において、ホルダーに
吸着保持させるクラッシュ板をホルダー内外に搬入搬出
する搬送台を備え、該搬送台の搬出位置に、クラッシュ
板を清掃するブラシを設置したことをi徴とするマウン
ド クラッシュ装置。Semiconductor wafer - A mound for crushing protrusions formed on a crush plate with a crush plate A crush device is equipped with a conveyor table for carrying the crush plate, which is suctioned and held by the holder, into and out of the holder, and the crush plate is placed at the unloading position of the conveyor table. The mound crush device is characterized by the installation of a brush for cleaning the mound.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8437082U JPS58187139U (en) | 1982-06-07 | 1982-06-07 | Mound crushing device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8437082U JPS58187139U (en) | 1982-06-07 | 1982-06-07 | Mound crushing device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS58187139U true JPS58187139U (en) | 1983-12-12 |
Family
ID=30093321
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8437082U Pending JPS58187139U (en) | 1982-06-07 | 1982-06-07 | Mound crushing device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS58187139U (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61128530A (en) * | 1984-11-28 | 1986-06-16 | Canon Inc | Epitaxial spike crushing device |
-
1982
- 1982-06-07 JP JP8437082U patent/JPS58187139U/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61128530A (en) * | 1984-11-28 | 1986-06-16 | Canon Inc | Epitaxial spike crushing device |
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