JPS58180910A - Pulse encoder - Google Patents
Pulse encoderInfo
- Publication number
- JPS58180910A JPS58180910A JP6391282A JP6391282A JPS58180910A JP S58180910 A JPS58180910 A JP S58180910A JP 6391282 A JP6391282 A JP 6391282A JP 6391282 A JP6391282 A JP 6391282A JP S58180910 A JPS58180910 A JP S58180910A
- Authority
- JP
- Japan
- Prior art keywords
- slit
- light
- disk
- disks
- slit forming
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003287 optical effect Effects 0.000 claims description 3
- 238000005259 measurement Methods 0.000 description 3
- 230000002093 peripheral effect Effects 0.000 description 3
- 238000000034 method Methods 0.000 description 2
- 238000007493 shaping process Methods 0.000 description 2
- 239000004925 Acrylic resin Substances 0.000 description 1
- 229920000178 Acrylic resin Polymers 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000009977 dual effect Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229920003229 poly(methyl methacrylate) Polymers 0.000 description 1
- 239000004926 polymethyl methacrylate Substances 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
- 239000012780 transparent material Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
- G01D5/3473—Circular or rotary encoders
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Linear Or Angular Velocity Measurement And Their Indicating Devices (AREA)
- Optical Transform (AREA)
Abstract
Description
【発明の詳細な説明】
この発明は、互いに同軸に回転自在に嵌合した複数の回
転軸の各回転角あるいは回転速度を検出するためのパル
スエンコーダに関スる。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a pulse encoder for detecting each rotation angle or rotation speed of a plurality of rotary shafts coaxially and rotatably fitted together.
従来、このような回転軸の回転角又は回転速度を検出す
る場合、例えば第１図に示すようにしていた。。Conventionally, when detecting the rotation angle or rotation speed of such a rotating shaft, the method shown in FIG. 1, for example, has been used. .
すなわち、同一の回転中心を持って回転自在に遊嵌した
二重回転軸を構成する外側回転軸１と内側回転軸２との
夫々の軸端部に歯車３，４を固着し、これらの歯車６，
４に夫々かみ合う歯車５゜６をエンコーダ７．８の駆動
軸９，１０に固着して、外側回転軸１及び内側回転軸２
の回転を夫々歯車６，５及び４，６を介してエンコーダ
７．８に伝えるようにしたものである。That is, the gears 3 and 4 are fixed to the shaft ends of the outer rotating shaft 1 and the inner rotating shaft 2, which constitute a double rotating shaft that has the same center of rotation and is rotatably loosely fitted. 6,
Gears 5.6 meshing with the encoders 4 and 4 are fixed to the drive shafts 9 and 10 of the encoder 7.8, and the outer rotary shaft 1 and the inner rotary shaft 2 are
The rotation is transmitted to the encoder 7.8 via gears 6, 5 and 4, 6, respectively.
しかしながら、このような従来の装置では、同軸の内、
外回転軸１，２で伝達される２つの回転を歯車を介して
夫々２つのエンコーダ７．８に入力する構造となってい
たため、次のような問題があった。However, in such conventional devices, among the coaxial
Since the structure was such that the two rotations transmitted by the outer rotating shafts 1 and 2 were input to the two encoders 7.8 through gears, the following problems occurred.
（イ） ２つのエンコーダを夫々側々に取付けねばなら
ず、それらの占めるスペースが大きい。(a) Two encoders must be installed on each side, and they occupy a large space.
（（ロ）歯車や歯車軸、ベアリング等の部品が必要なた
め、部品点数が増えてコスト高（二なる。((b) Because parts such as gears, gear shafts, and bearings are required, the number of parts increases and costs increase (Second).
←→ 歯車間にバックラッシュが生じ、測定精度が落ち
る。←→ Backlash occurs between gears, reducing measurement accuracy.
この発明は、上記の点（１鑑みてなされたもので、上述
のような互いに同一の回転中心を持って回転自在に遊嵌
した複数の回転軸の各回転角又は回転速度を検出するた
めのパルスエンコーダにおいて、軸方向の厚みを薄くす
ると共に、部品点数を減らし、しかも測定精度の低下を
生じないよう（ニすることを目的とする。This invention was made in view of the above point (1), and is a method for detecting each rotation angle or rotation speed of a plurality of rotation shafts that are loosely fitted to each other and have the same rotation center as described above. The purpose of the pulse encoder is to reduce the thickness in the axial direction, reduce the number of parts, and avoid deterioration in measurement accuracy.
そのため、この発明によるパルスエンコーダは、複数の
回転軸の各軸端部に夫々スリット円板を固定して互いに
平行に近接して配置し、この各スリット円板のスリット
形成部が互いに重ならないように各スリット形成部の径
を異ならせ、この各スリット形成部（＝対応して夫々発
光素子と受光素子とを配置すると共に、最も径の小さい
スリット形成部を有するスリット円板以外のスリット円
板の少なくともスリット形成部より軸心側にスリット形
成部と同心環状の光透過部を設け、他のスリット円板の
スリット形成部に対応して設けた発光素子からの光がこ
の光透過部を通して受光素子に受光され得るようにした
ものである。Therefore, in the pulse encoder according to the present invention, a slit disk is fixed to each shaft end of a plurality of rotating shafts and arranged close to each other in parallel, so that the slit forming portions of the slit disks do not overlap with each other. The diameter of each slit forming part is made different, and a light emitting element and a light receiving element are arranged correspondingly to each slit forming part (= a slit disk other than the slit disk having the smallest diameter slit forming part). A light-transmitting part concentric with the slit-forming part is provided at least on the axis side of the slit-forming part, and light from light-emitting elements provided corresponding to the slit-forming parts of other slit discs is received through this light-transmitting part. It is designed so that light can be received by the element.
以下添付図面の第２図及び第６図を参照して、この発明
の詳細な説明する。The present invention will be described in detail below with reference to FIGS. 2 and 6 of the accompanying drawings.
第２図は、この発明の一実施例を示す縦断面図、第６図
は、その分解斜視図であって、第１図に示した従来例の
場合と同じく、外側回転軸１と内側回転軸２とからなる
二重回転軸に、この発明によるパルスエンコーダを設け
た例である。FIG. 2 is a longitudinal cross-sectional view showing one embodiment of the present invention, and FIG. 6 is an exploded perspective view thereof, in which the outer rotating shaft 1 and the inner rotating shaft are similar to the conventional example shown in FIG. 1. This is an example in which a pulse encoder according to the present invention is provided on a double rotating shaft consisting of shaft 2.
両図中、１１はパルスエンコーダの本体を構成するハウ
ジングであり、図示しない装置固定部に取付けである。In both figures, 11 is a housing that constitutes the main body of the pulse encoder, and is attached to a device fixing part (not shown).
このハウジング１１は、中央（１貫通孔１１ａが穿設
された円板状の底部１１ｂと、この底部１１ｂの周辺に
一体に形成したリング状部１１Ｃとからなる。This housing 11 consists of a disk-shaped bottom portion 11b in which one through hole 11a is bored in the center, and a ring-shaped portion 11C integrally formed around the bottom portion 11b.
このハウジング１１の底部１１ｂの上面側には、受光用
スリットリング１２が嵌め込まれており、またリング状
部１１Ｃの上面には、受光用スリットリング１６が取り
付けである。 ただし、受光用スリットリング１２．１
３の裏側（二接近して、例えばフォトダイオード等の受
光素子１４．１５を設けるために、底部１１ｂとリング
状部１１Ｃには、スリットリング１２．１３の周縁部が
当接する面を除いて、１段低い面を形成してあり、それ
等の面上に夫々受光素子１４．１５を設けている。
−
なお、１４ａ、１５ａは受光素子１４．１５のプリント
基板である。A light-receiving slit ring 12 is fitted into the upper surface of the bottom portion 11b of the housing 11, and a light-receiving slit ring 16 is attached to the upper surface of the ring-shaped portion 11C. However, the light receiving slit ring 12.1
3 (in order to provide a light-receiving element 14.15 such as a photodiode in close proximity to each other, the bottom portion 11b and the ring-shaped portion 11C are provided with a surface other than the surface where the peripheral edge of the slit ring 12.13 contacts). A plane one step lower is formed, and light receiving elements 14 and 15 are provided on each of these planes.
- Note that 14a and 15a are printed circuit boards for the light receiving elements 14 and 15.
そして、このハウジング１１の貫通孔１１ａに、二重回
転軸を裏面から挿通し、外側回転軸１の軸端部Ｃニスリ
ット円板１６を固定する。 このスリット円板１６の位
置は、スリットリング１２に僅かのすき間をおいて相対
するように配置する。Then, the double rotating shaft is inserted into the through hole 11a of the housing 11 from the back side, and the shaft end C nislit disk 16 of the outer rotating shaft 1 is fixed. The slit disk 16 is positioned so as to face the slit ring 12 with a slight gap therebetween.
同様に、内側回転軸２の軸端部にスリット円板１７を固
定して、スリットリング１６の表側に対峙させ、スリッ
ト円板１６．１７を互いに平行に近接して配置する。Similarly, a slit disk 17 is fixed to the shaft end of the inner rotary shaft 2 so as to face the front side of the slit ring 16, and the slit disks 16 and 17 are arranged parallel to each other and close to each other.
スリット円板１７はスリット円板１６より径が大きく、
夫々スリット形成部１６ｄ、１７ｄを有する円板部１６
ａ、１７ａと、段付のボス部１６ｂ。The slit disk 17 has a larger diameter than the slit disk 16,
Disk portion 16 having slit forming portions 16d and 17d, respectively
a, 17a, and a stepped boss portion 16b.
１７ｂと、このボス部１６ｂ、１７ｂに円板部１６ａ、
１７ａを挿通して固定する上め輪１６Ｃ１１７Ｃとから
なる。17b, and the boss portions 16b, 17b have a disk portion 16a,
It consists of an upper ring 16C117C which inserts and fixes 17a.
円板部１６ａ、１７ａは、例えばアクリル樹脂又はガラ
ス等の光透過性を有する透明材料によって形成され、ス
リットリング１２．１３に対峙する周辺部のスリット形
成部１６ｄ、１７ｄは、夫々該周辺部に塗布した遮光材
を所定の等間隔放射状のスリットパターンでエツチング
することによって形成されている。The disk parts 16a and 17a are formed of a transparent material having light transmittance, such as acrylic resin or glass, and slit forming parts 16d and 17d in the peripheral part facing the slit ring 12.13 are formed in the peripheral part, respectively. It is formed by etching the applied light shielding material in a predetermined equally spaced radial slit pattern.
ただし、このスリット形成部１６ｄ、１７ｄは、互いに
重ならないよう（１径を異ならせである。However, the slit forming parts 16d and 17d are made so that they do not overlap each other (they have one diameter different from each other).
また、大径のスリット円板１７のスリット形成部１７ｄ
より軸心側には、スリット形成部１７ｄと同心環状の光
透過部である透明部１７ｅが形成されている。In addition, the slit forming portion 17d of the large diameter slit disk 17
A transparent portion 17e, which is a light transmitting portion concentric with the slit forming portion 17d, is formed closer to the axis.
一方、受光用スリットリング１２．１３に形成するスリ
ット形成部１２ａ、１６ａのスリットビツテは夫々対峙
するスリット円板１６．１７に形成したスリット形成部
１６ｄ、１７ｄのスリットピッチと等しい。On the other hand, the slit pitch of the slit forming portions 12a and 16a formed on the light receiving slit ring 12.13 is equal to the slit pitch of the slit forming portions 16d and 17d formed on the opposing slit disks 16.17, respectively.
なお、このスリット形成部１２ａ、１３ａは第６図に示
すよう（ニスリットリング１２．１＋の全周に設けずに
、夫々受光素子１４．１５と対向する一部分（二のみ設
けても良い。Note that, as shown in FIG. 6, the slit forming portions 12a and 13a may not be provided on the entire circumference of the slit ring 12.1+, but may be provided on only two portions facing the light receiving elements 14.15, respectively.
さらに、扇状の平面部１８ａを有する断面り字状のブラ
ケット１８を、平面部１８ａがスリット円板１７の板面
と平行（二なるように、ハウジング１１のリング状部１
１ｃの外周縁に取り付ける。Furthermore, a bracket 18 having a fan-shaped flat part 18a and a cross-sectional shape is attached to the ring-shaped part 1 of the housing 11 so that the flat part 18a is parallel to the plate surface of the slit disk 17.
Attach to the outer edge of 1c.
そして、このブラケット１８の平面部１８ａに、発光卓
゛イオード等による径方向に位置をずらせた２個づつの
発光素子１９．１９及び２０．２０を夫々受光素子１４
．Ｌ４及び１５．１５と対向させて配置する。Then, two light emitting elements 19, 19 and 20, 20, which are made of light emitting diode or the like and whose positions are shifted in the radial direction, are placed on the plane part 18a of this bracket 18, respectively, as the light receiving element 14.
．． It is placed opposite L4 and 15.15.
それによって、発光素子１９と受光素子１４との間の光
路内に、スリット円板１６とスリットリング１２の各ス
リット形成部１６ｄ、１２ａ及びスリット円板１７の透
明部１７ｅが介在し、発光素子２０と受光素子１５との
間の光路内に、スリット円板１７とスリットリング１６
の各スリット形成部１７ｄ、１３ａが介在することにな
る。As a result, the slit forming portions 16d and 12a of the slit disk 16 and the slit ring 12 and the transparent portion 17e of the slit disk 17 are interposed in the optical path between the light emitting element 19 and the light receiving element 14, and the light emitting element 20 A slit disk 17 and a slit ring 16 are placed in the optical path between the
The slit forming portions 17d and 13a are interposed therebetween.
このように構成すれば内側回転軸２が回転すると、スリ
ット円板１７が回転するため、発光素子２０からの光線
は、スリット円板１７のスリット形成部１７ｄとスリッ
トリング１３のスリット形成部１３ａとが相対運動する
ことにより断続され、それによって受光素子１５から内
側回転軸２の回転速度に応じた周波数の電気信号が出力
される。With this configuration, when the inner rotating shaft 2 rotates, the slit disk 17 rotates, so that the light beam from the light emitting element 20 is transmitted to the slit forming portion 17d of the slit disk 17 and the slit forming portion 13a of the slit ring 13. The light receiving element 15 outputs an electric signal with a frequency corresponding to the rotational speed of the inner rotating shaft 2.
その電気信号を波形整形することによって内側回転軸２
の回転角又は回転速度検出用のパルス信号を得ることが
できる。By shaping the waveform of the electrical signal, the inner rotating shaft 2
A pulse signal for detecting the rotation angle or rotation speed can be obtained.
一方、外側回転軸１が回転すると、スリット円板１６が
回転するため、発光素子１９からの光線は、スリット円
板１７の内側の透明部１７ｅを通過し、スリット円板１
６のスリット形成部ｔ６ｄとスリットリング１２のスリ
ット形成部１２ａとの間で断続され、それによって受光
素子１４から外側回転軸１の回転速度（１応じた周波数
の電気信号が出力される。 その電気信号を波形整形す
ることによって、外側回転軸１の回転角又は回転速度検
出用のパルス信号を得ることができる。On the other hand, when the outer rotating shaft 1 rotates, the slit disk 16 rotates, so the light beam from the light emitting element 19 passes through the transparent part 17e inside the slit disk 17, and the slit disk 1
6 and the slit forming portion 12a of the slit ring 12, and as a result, the light receiving element 14 outputs an electrical signal with a frequency corresponding to the rotational speed (1) of the outer rotating shaft 1. By waveform shaping the signal, a pulse signal for detecting the rotation angle or rotation speed of the outer rotating shaft 1 can be obtained.
ところで、スリットリング１２．１３は、スリットピッ
チを小さくして高精度の検出を行う場合には必要である
が、スリットピッチが大きく、スリット円板の１回転で
発生させるパルス数が少ない場合Ｃ二はなくてもよい。By the way, the slit rings 12 and 13 are necessary when performing high-precision detection with a small slit pitch, but when the slit pitch is large and the number of pulses generated per rotation of the slit disk is small, C-2 is necessary. It doesn't have to be there.
また、上記実施例において、実際にはスリット形成部１
６ｄ、１７ｄを夫々内側と外側に２分割し、２分割した
各スリット形成部のスリットの位相を９０°異ならせて
、回転方向弁別用として９０゜位相の異なるパルス信号
を各２個づつ受光素子１４゜１４及び１５．１５から得
るようにしているが、回転方向を弁別する必要がない場
合は、各スリット円板（二対応する発光素子と受光素子
は１個づつでよい。Furthermore, in the above embodiment, the slit forming portion 1 is actually
6d and 17d are each divided into two parts, inside and outside, and the phases of the slits of each divided slit forming part are made to differ by 90 degrees, and two pulse signals each having a phase difference of 90 degrees are sent to two light-receiving elements for rotational direction discrimination. 14°14 and 15.15, but if there is no need to discriminate the rotational direction, one light emitting element and one light receiving element may be required for each slit disk (2).
なお、上記の実施例では二重回転軸の場合の例を示した
が、三重以上の回転軸であっても同様≦二構成できる。In addition, although the above-mentioned embodiment showed an example in the case of a double rotating shaft, even if there are three or more rotating shafts, the same ≦2 configuration is possible.
また、各回転軸に固定するスリット円板の径を異ならせ
ずに同径にしても、その各スリット形成部の径を異なら
せて互いに重ならないようにすればよい。Further, even if the diameters of the slit disks fixed to the respective rotating shafts are not different but are made the same diameter, the diameters of the respective slit forming portions may be made different so that they do not overlap with each other.
さらに、Ｆ記実施例では光透過式にした例について述べ
たが、発光素子と受光素子とを対応するスリット円板に
対して同じ側に設け、そのスリット円板のスリット形成
部の裏面を鏡面にして反射式パルスエンコーダにするこ
ともできる。Furthermore, in Example F, an example of a light transmitting type was described, but the light emitting element and the light receiving element are provided on the same side with respect to the corresponding slit disk, and the back surface of the slit forming part of the slit disk is mirror-finished. It can also be used as a reflective pulse encoder.
以上説明してきたように、この発明によれば、複数の発
光素子又は受光素子を同一平面上に配列することが可能
になり、軸方向の厚みを薄くしてコンパクトな形状にま
とめることができるばかりでなく、多重軸の各軸の回転
を歯車等を介して伝達する必要がなくなり、測定精度の
低下を生じることがないうえに、部品点数を減らすこと
ができるので低コスト化し得る。As explained above, according to the present invention, it is possible to arrange a plurality of light emitting elements or light receiving elements on the same plane, and it is possible to reduce the thickness in the axial direction and organize them into a compact shape. In addition, there is no need to transmit the rotation of each axis of the multiple axes via gears, etc., so there is no reduction in measurement accuracy, and the number of parts can be reduced, resulting in lower costs.
第１図は従来の二重回転軸とパルスエンコーダとの結合
例を示す構成図、第２図及び第３図はこの発明の一実施
例を示す縦断面図及び分解斜視図である。
１・・・外側回転軸 ２・・・内側回転軸１２．１
３・・・スリットリング
１４．１５・・・受光素子
１６．１７・・・スリット円板 １７ｅ・・・透明部
１６ｄ、１７ｄ・・・スリット形成部
１９．２０・・・発光素子FIG. 1 is a configuration diagram showing an example of a conventional combination of a dual rotary shaft and a pulse encoder, and FIGS. 2 and 3 are a longitudinal sectional view and an exploded perspective view showing an embodiment of the present invention. 1...Outer rotating shaft 2...Inner rotating shaft 12.1
3... Slit ring 14.15... Light receiving element 16.17... Slit disk 17e... Transparent parts 16d, 17d... Slit forming part 19.20... Light emitting element
Claims (1)
複数の回転軸の各軸端部に夫々固定したスリット円板と
、この各スリット円板のスリット形成部に対応して設け
た発光素子と受光素子とからなるパルスエンコーダであ
って、前記各スリット円板を互いに平行に近接して配置
し、その各スリット形成部が互いに重ならないように各
スリット形成部の径を異ならせ、最も径の小さいスリッ
ト形成部を有するスリット円板以外のスリット円板の少
くともスリット形成部より軸心側にスリット形成部と同
心環状の光透過部を設け、該光透過部を他のスリット円
板のスリット形成部に対応して設けた前記発光素子と受
光素子との間の光路内に介在させたことを特徴とするパ
ルスエンコータ。1. A slit disk fixed to each shaft end of a plurality of rotating shafts that have the same center of rotation and are loosely fitted in the rotation axis, and a light emitting device provided corresponding to the slit forming portion of each slit disk. A pulse encoder comprising an element and a light-receiving element, wherein the slit disks are arranged parallel to each other and close to each other, and the diameters of the slit-forming parts are different so that the slit-forming parts do not overlap each other, A slit disc other than a slit disc having a slit-forming part with a small diameter is provided with an annular light-transmitting part concentric with the slit-forming part at least on the axis side of the slit-forming part, and the light-transmitting part is connected to other slit discs. A pulse encoder, characterized in that the pulse encoder is interposed in an optical path between the light emitting element and the light receiving element, which are provided corresponding to the slit forming portion.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6391282A JPS58180910A (en) | 1982-04-19 | 1982-04-19 | Pulse encoder |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6391282A JPS58180910A (en) | 1982-04-19 | 1982-04-19 | Pulse encoder |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS58180910A true JPS58180910A (en) | 1983-10-22 |
Family
ID=13243014
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6391282A Pending JPS58180910A (en) | 1982-04-19 | 1982-04-19 | Pulse encoder |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58180910A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2016166879A (en) * | 2010-10-12 | 2016-09-15 | 株式会社ニコン | Encoder, driving device and robotic device |
-
1982
- 1982-04-19 JP JP6391282A patent/JPS58180910A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2016166879A (en) * | 2010-10-12 | 2016-09-15 | 株式会社ニコン | Encoder, driving device and robotic device |
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