JPS5818083U - piezoelectric vibrator pump - Google Patents
piezoelectric vibrator pumpInfo
- Publication number
- JPS5818083U JPS5818083U JP1981113602U JP11360281U JPS5818083U JP S5818083 U JPS5818083 U JP S5818083U JP 1981113602 U JP1981113602 U JP 1981113602U JP 11360281 U JP11360281 U JP 11360281U JP S5818083 U JPS5818083 U JP S5818083U
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric
- piezoelectric vibrator
- pair
- pump
- vibrator pump
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Reciprocating Pumps (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図ａは従来の圧電振動子ポンプの断面図、第１図す
は従来の圧電振動子ポンプの平面図、第２図は従来の圧
電振動子の詳細を示す斜視図、第３図ａはこの考案の圧
電振動子ポンプの一実施例の構成を示す断面図、第３図
すはこの考案の圧電振動子ポンプの平面図、第４図はこ
の考案の圧電振動子ポンプに使用される圧電振動子の詳
細を示す斜視図である。
１・・・圧電振動子、１ａ・・・圧電素子、１ｂ・・・
金属板、ＩＣ−・・スリット、１ｄ・・・シールド、２
・・・リード線、３・・・本体壁、４・・・逆止弁、５
・・・ポンプ室、６・・・吸入口、７・・・吐出口。な
お、図中同一符号は同一または相当部分を示す。Figure 1a is a sectional view of a conventional piezoelectric vibrator pump, Figure 1 is a plan view of a conventional piezoelectric vibrator pump, Figure 2 is a perspective view showing details of a conventional piezoelectric vibrator, and Figure 3a is a cross-sectional view of a conventional piezoelectric vibrator pump. Figure 3 is a plan view of the piezoelectric vibrator pump of this invention, and Figure 4 is a cross-sectional view showing the configuration of an embodiment of the piezoelectric vibrator pump of this invention. FIG. 3 is a perspective view showing details of a piezoelectric vibrator. 1... Piezoelectric vibrator, 1a... Piezoelectric element, 1b...
Metal plate, IC-...slit, 1d...shield, 2
...Lead wire, 3...Body wall, 4...Check valve, 5
... Pump chamber, 6... Suction port, 7... Discharge port. Note that the same reference numerals in the figures indicate the same or corresponding parts.
Claims (1)
に囲まれた部分に交流電圧が印加される圧電素子を貼り
付けて片持梁の集合体で構成され所定の間隔をもって対
向して配設された１対の圧電振動子、この１対の圧電振
動子の外周縁を保持して１対の圧電振動子とともにポン
プ室を形成する本体壁を備えてなる圧電振動子ポンプ。Multiple slits are provided in a metal plate, and piezoelectric elements to which an alternating current voltage is applied are attached to the area surrounded by each slit, and the piezoelectric element is made up of an assembly of cantilever beams, which are placed facing each other at a predetermined distance. A piezoelectric vibrator pump comprising a pair of piezoelectric vibrators and a body wall that holds the outer periphery of the pair of piezoelectric vibrators and forms a pump chamber together with the pair of piezoelectric vibrators.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1981113602U JPS5818083U (en) | 1981-07-30 | 1981-07-30 | piezoelectric vibrator pump |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1981113602U JPS5818083U (en) | 1981-07-30 | 1981-07-30 | piezoelectric vibrator pump |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5818083U true JPS5818083U (en) | 1983-02-03 |
| JPS6135747Y2 JPS6135747Y2 (en) | 1986-10-17 |
Family
ID=29907898
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1981113602U Granted JPS5818083U (en) | 1981-07-30 | 1981-07-30 | piezoelectric vibrator pump |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5818083U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6017279A (en) * | 1983-07-11 | 1985-01-29 | Tamagawa Seiki Kk | Gas pump using electrostriction vibrator |
| JPH0237187A (en) * | 1988-07-27 | 1990-02-07 | Nippon Keiki Seisakusho:Kk | Piezoelectric pump |
| JP2010249658A (en) * | 2009-04-15 | 2010-11-04 | Tokkyokiki Corp | Piezoelectric acceleration sensor |
-
1981
- 1981-07-30 JP JP1981113602U patent/JPS5818083U/en active Granted
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6017279A (en) * | 1983-07-11 | 1985-01-29 | Tamagawa Seiki Kk | Gas pump using electrostriction vibrator |
| JPH0237187A (en) * | 1988-07-27 | 1990-02-07 | Nippon Keiki Seisakusho:Kk | Piezoelectric pump |
| JP2010249658A (en) * | 2009-04-15 | 2010-11-04 | Tokkyokiki Corp | Piezoelectric acceleration sensor |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6135747Y2 (en) | 1986-10-17 |
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