JPS58180008A - Magnetic recording medium - Google Patents
Magnetic recording mediumInfo
- Publication number
- JPS58180008A JPS58180008A JP6284282A JP6284282A JPS58180008A JP S58180008 A JPS58180008 A JP S58180008A JP 6284282 A JP6284282 A JP 6284282A JP 6284282 A JP6284282 A JP 6284282A JP S58180008 A JPS58180008 A JP S58180008A
- Authority
- JP
- Japan
- Prior art keywords
- magnetic
- magnetic recording
- recording medium
- film
- vacuum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/84—Processes or apparatus specially adapted for manufacturing record carriers
- G11B5/85—Coating a support with a magnetic layer by vapour deposition
Landscapes
- Magnetic Record Carriers (AREA)
- Thin Magnetic Films (AREA)
- Compositions Of Macromolecular Compounds (AREA)
- Physical Vapour Deposition (AREA)
Abstract
Description
【発明の詳細な説明】
本発明は磁気記録媒体、特に鉄ｒｅを主成分とする強磁
性金属薄膜を有して成る磁気記録媒体虻係わる。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a magnetic recording medium, and particularly to a magnetic recording medium comprising a ferromagnetic metal thin film containing iron as a main component.
強磁性金属薄膜を磁性層とする、いわゆる金属薄膜型の
磁気記録媒体は、磁性粉を結合剤に分散した磁性塗料を
非磁性支持体上に塗布する、いわゆる塗布型の磁気記録
媒体に比して、高い残留磁束密度Ｂｒ、高い抗磁力Ｈｃ
が得られ、短波長記録、したがって高密度記録を行うこ
とができることから、脚光を浴びるに至っている。So-called metal thin film magnetic recording media, which have a magnetic layer made of a ferromagnetic metal thin film, are different from so-called coated magnetic recording media, in which a magnetic paint in which magnetic powder is dispersed in a binder is coated on a non-magnetic support. , high residual magnetic flux density Br, high coercive force Hc
It has been attracting attention because it enables short-wavelength recording and therefore high-density recording.
ところが、この糧金属薄膜型の磁気記録媒体は、金属自
体が、磁気ヘッド、案内ドラム、案内ローラ等Ｋ［接摺
接するために１この金属磁性薄膜力を傷つき易く、耐久
性に劣るという欠点がある。However, this metal thin film type magnetic recording medium has the disadvantage that the metal itself is easily damaged by the magnetic head, guide drum, guide roller, etc. due to the sliding contact with the metal magnetic thin film, resulting in poor durability. be.
この金属薄膜型の磁気記録媒体において、上述した耐久
性の問題を解決すべく種々の工夫がなされている。例え
ば金属硫性薄膜の表面を少しく酸化させたり、表面に高
分子被膜を形成するなどの構造が提案されている。しか
し、これらの構造では、スペーシングロスを増加させた
り、磁性金属自体が持つ特性、すなわち、例えば残留磁
束密度Ｂｒを低下させてしまうなど、金属薄膜ＩＩｉ磁
気記碌媒体の本来の特徴を低下させてしまうというもの
であった。In this metal thin film type magnetic recording medium, various efforts have been made to solve the above-mentioned durability problem. For example, structures have been proposed in which the surface of a metal sulfuric thin film is slightly oxidized or a polymer film is formed on the surface. However, these structures degrade the original characteristics of the metal thin film IIi magnetic storage medium, such as increasing spacing loss and decreasing the properties of the magnetic metal itself, such as the residual magnetic flux density Br. The idea was that it would end up happening.
本発明は、この種、金属薄膜蓋の磁気記録媒体にνいて
、その本来の特徴、すなわち、すぐれた磁気的特性を保
ちつつ、走行性、耐久性等の機械的特性の向上をはかる
ものである。The present invention is directed to this type of magnetic recording medium with a metal thin film lid, and aims to improve mechanical properties such as runnability and durability while maintaining its original characteristics, that is, excellent magnetic properties. be.
すなわち、本発明においては、鉄Ｆｅを、所定の条件下
で蒸着すると、その蒸着膜ＶＣＦｅＢＮ相（α−１’ｅ
、Ｎ）が生じてくること、そして、このＦｅ＠Ｎ相は、
体心立方格子構造の変形（ｂ、ｃ、ｔ、）で、Ｆｅ相と
、Ｆｅ ４Ｎ相との関に位置する準安定相で、このＦｅ
ＢＮ相はＦｅ相の約３０％増の飽和磁化Ｍｓを有し、且
つこれが窒化物であるが故に硬度が高く、摩擦係数が小
さく、これがため、走行性及び耐摩耗性にすぐれている
ものであることを究明し、この究明に基いて、磁気的特
性及び機械的特性にすぐれた磁気記録媒体を構成するも
のである。That is, in the present invention, when iron (Fe) is deposited under predetermined conditions, the deposited film has a VCFeBN phase (α-1'e
, N) are generated, and this Fe@N phase is
Due to the deformation of the body-centered cubic lattice structure (b, c, t,), this Fe phase is a metastable phase located in the relationship between the Fe phase and the Fe 4N phase.
The BN phase has a saturation magnetization Ms approximately 30% higher than that of the Fe phase, and because it is a nitride, it has high hardness and a small friction coefficient, and therefore has excellent running properties and wear resistance. We have investigated certain things, and based on this investigation, we have constructed a magnetic recording medium with excellent magnetic and mechanical properties.
表ＩＫ、上述の各相における。ｍｉｉでの飽和磁化Ｍｓ
を示す。Table IK, in each phase mentioned above. Saturation magnetization Ms in mii
shows.
このようＫ ＦｅＢＮは、すぐれた磁気的特性を示すが
上述したように、このＦｅＢＮは、準安定相であるため
に、これを生成することは困−であった。Although KFeBN exhibits excellent magnetic properties, as described above, it is difficult to produce this FeBN because it is in a metastable phase.
本発明においては非磁性支持体上に、特別の条件下、す
なわち、鉄Ｆ＠を主体とする金属を、特Ｋ ５ Ｘ １
０ 〜１０トルの比較的低い真空中で、蒸着して非磁性
支持体上に、ＦｅＢＮ相を有する強磁性金属薄膜を形成
する。この場合、Ｆ匂Ｎは、磁性金属薄膜の全体に亘っ
て存在さぜるに限られるものではなく、強磁性金属薄膜
の表面部分に存在させれば良いものであり、とのＦｅＢ
Ｎは、この金属薄膜の全体積の２０％以上とする。この
ように、Ｆ匂Ｎを２０％以上とするのは、このＦ匂Ｎの
存在によって磁気的及び機械的特性の変化が顕著に生じ
てくるのが、２０％以上の範囲であることを認めたこと
による。In the present invention, a metal mainly composed of iron F@ is deposited on a non-magnetic support under special conditions.
A ferromagnetic metal thin film with a FeBN phase is formed on a non-magnetic support by vapor deposition in a relatively low vacuum of 0 to 10 Torr. In this case, FeB is not limited to being present over the entire magnetic metal thin film, but may be present on the surface of the ferromagnetic metal thin film.
N is made to be 20% or more of the total volume of this metal thin film. In this way, the reason why F-N is set at 20% or more is to recognize that the presence of F-N causes significant changes in magnetic and mechanical properties in the range of 20% or more. It depends on what happened.
また、上述した蒸着は、強磁性金属薄ＷＸ＃ＩＣ高い抗
磁力を得るべく、いわゆる斜め蒸着による。Further, the above-described vapor deposition is performed by so-called oblique vapor deposition in order to obtain a high coercive force of the ferromagnetic metal thin WX#IC.
尚、上述したように％Ｆｅを含む金属を、５×２
１０ 〜１０トルで蒸着すると、これが空気を含む雰囲
気であっても、或いはＮ２ガスであっても、（
生成された蒸着ＫＫＦｅｍＮが生じてくる。As mentioned above, when a metal containing %Fe is evaporated at 5 x 2 10 to 10 torr, even if this is an atmosphere containing air or N2 gas, (the evaporated KKFemN produced is It's coming.
実施例１
ポリエチレンテレフタレートフィルムより成る非磁性支
持体上に、１０）ルの真空度でＰａを、非磁性支持体の
被蒸着面に対して６０”の入射角をもって斜めに蒸着し
て磁性金属薄膜を形成して磁気記録媒体を得た。Example 1 On a non-magnetic support made of polyethylene terephthalate film, Pa was evaporated obliquely at an incident angle of 60'' with respect to the surface of the non-magnetic support at a vacuum degree of 10 mm to form a magnetic metal thin film. A magnetic recording medium was obtained.
′実施例２
実施例１と同様の方法によって磁気記録媒体を得るも、
その蒸着に際しての真空度をｓ ｘ ｉｏ−”トルに変
更した。'Example 2 A magnetic recording medium was obtained by the same method as in Example 1, but
The degree of vacuum during the vapor deposition was changed to s x io-''torr.
実施例３
実施例１と同様の方法によって磁気記録媒体を得るも、
その蒸着に際しての真空度を２ Ｘ １Ｇ−’トルに変
更した。Example 3 A magnetic recording medium was obtained by the same method as in Example 1, but
The degree of vacuum during the deposition was changed to 2 x 1 G-' Torr.
実施例４
実施例１と同様の方法によって磁気記録媒体を得るも、
その蒸着に際しての真空度をｓ ｘ ｔｏ−”トルに変
更した。Example 4 A magnetic recording medium was obtained by the same method as in Example 1, but
The degree of vacuum during the vapor deposition was changed to s x to -'' torr.
実施例５
実施例１と同様の方法によって磁気記録媒体を得るも、
その蒸着に際しての真空度と、被蒸着内への入射角を夫
々５Ｘ１０ ）ルと、２０＠とに変更した。Example 5 A magnetic recording medium was obtained by the same method as in Example 1, but
The degree of vacuum during the deposition and the angle of incidence into the interior of the deposition target were changed to 5×10 ) and 20@, respectively.
実施例６
実施例１と同様の方法によって磁気記録媒体を得るも、
その蒸着に＠しての真空度と、被蒸着面への入射角を夫
々５Ｘ１０）ルと、４０＠とに変更した。Example 6 A magnetic recording medium was obtained by the same method as in Example 1, but
The degree of vacuum during the vapor deposition and the angle of incidence on the surface to be vaporized were changed to 5×10) and 40°, respectively.
実施例７
実施例１と同様の方法によって磁気記録媒体を得るも、
その蒸着に際しての真９度と、被蒸着面への入射角を夫
々５Ｘ１０）ルと、８０＠とに変更した。Example 7 A magnetic recording medium was obtained by the same method as in Example 1, but
During the vapor deposition, the true 9 degrees and the angle of incidence on the surface to be vapor deposited were changed to 5×10) and 80 degrees, respectively.
更に１本発明との特性を比較するための比較例を数例あ
げる。Furthermore, some comparative examples will be given to compare the characteristics with the present invention.
比較例１
ポリエチレンテレフタレートフィルムより成る非磁性支
持体上に、１０ ）ルの真空度でコバルトＣＯを、非
磁性支持体の被蒸着面九対して６０’の入射角をもって
斜めに蒸着して磁性金属薄膜を形成し【磁気記録媒体を
得た。Comparative Example 1 On a non-magnetic support made of a polyethylene terephthalate film, cobalt CO was vapor-deposited obliquely at an incident angle of 60' with respect to the surface to be evaporated of the non-magnetic support at a vacuum degree of 10 mm to form a magnetic metal. A thin film was formed and a magnetic recording medium was obtained.
比較例２
比較例１と同様の方法によって磁気記録媒体を得るも、
その蒸着金属薄膜の表面を酸化した。Comparative Example 2 Although a magnetic recording medium was obtained by the same method as Comparative Example 1,
The surface of the deposited metal thin film was oxidized.
比較例３
比較例１と同様の方法によって磁気記録媒体を得るも、
その蒸着金属薄膜の表面に高分子被膜を形成した。Comparative Example 3 Although a magnetic recording medium was obtained by the same method as Comparative Example 1,
A polymer film was formed on the surface of the vapor-deposited metal thin film.
比較例４
＊ｍ例１と同様の方法によって磁気記録媒体を得るも、
その蒸着に際しての真空度を通常の高真空度１０トルと
した。Comparative Example 4 *A magnetic recording medium was obtained by the same method as Example 1, but
The degree of vacuum during the vapor deposition was set to a normal high vacuum degree of 10 torr.
上述した各比較例１〜４の各磁気配録媒体と、本発明の
実施例１〜７の各磁気記録媒体の磁気的特性、すなわち
残留磁束密度Ｂｒ （ガウス）、抗磁力Ｈｅと、再生出
力と耐久性との各測定結果を図面中の異図に示す、この
場合、その再生出力は、記録磁気ヘッドとしてセンダス
トコアヘッドを用いて波長の１．０μｍ信号を記帰し、
再生磁気ヘッドとしてフェライトコアヘッドを用いて比
較例１Ｋおける出力を基準としたものである。また耐久
性については、ビデオテープレコーダ忙おいて３゜回の
走行をなした後における傷の存在を観察したもので、Ｘ
印は傷が存在した場合、Ｏ印は傷の存在がＶめられなか
った場合、Δ印は傷の存在が殆んど認められなかった場
合である。Magnetic properties of each of the magnetic recording media of Comparative Examples 1 to 4 and each of Examples 1 to 7 of the present invention, that is, residual magnetic flux density Br (Gauss), coercive force He, and reproduction output The measurement results for durability and durability are shown in different figures in the drawing. In this case, the reproduction output is recorded at a wavelength of 1.0 μm using a Sendust core head as the recording magnetic head.
The output is based on the output in Comparative Example 1K using a ferrite core head as a reproducing magnetic head. Regarding durability, we observed the presence of scratches after running the video tape recorder 3 times.
The mark indicates the presence of a flaw, the O mark indicates the presence of no flaw, and the Δ mark indicates the presence of almost no flaw.
尚、ここにＦｅ、Ｆｅ４Ｎ、ＦｅＢＮは電子線回折と飽
和磁化の温度変化によってこれの存在を特定した。The presence of Fe, Fe4N, and FeBN was identified by electron beam diffraction and temperature changes in saturation magnetization.
この測定結果から明らかなように、本発明による磁気記
録媒体は、各比較例、すなわち従来の金属薄Ｍ型磁気記
録媒体に比し、機械的特性はもとより、磁気的にもすぐ
れた特性を有するものであり、しかもその製造において
も従来の蒸着法による手間と何ら変るところがないばか
りか、むしろ高い真空度を必要としないことから、作業
性の向上、装置の簡易化がはかられ、その工業的に利す
るところも大である。As is clear from the measurement results, the magnetic recording medium according to the present invention has excellent not only mechanical properties but also magnetic properties as compared to each comparative example, that is, the conventional thin metal M-type magnetic recording medium. Furthermore, the manufacturing process is no different from the conventional vapor deposition method, and in fact does not require a high degree of vacuum, which improves workability and simplifies the equipment, making it easier to manufacture. There are also great financial benefits.
また、上述の実施例では、蒸着金属がＦｅ単体である場
合についてであるが、Ｆｅを主体とするＣｏ。Furthermore, in the above-mentioned embodiments, the vapor deposited metal is Fe alone, but Co mainly consists of Fe.
Ｎｉの何れか一方１、求いはその双方の合金を用いる場
合に本発明を適用することもできる。The present invention can also be applied to the case where an alloy of either one or both of Ni is used.
図は、本発明による各実施例とこれと対比される比較例
との磁気的及び機械的特性の測定結果を示す異図である
。The figure is a different diagram showing the measurement results of magnetic and mechanical properties of each example according to the present invention and a comparative example compared thereto.
Claims (1)
、５×ｌθ 〜１０ ）ルの真空中で蒸着されて、強
磁性金属薄膜が形成され、鋏強磁性金属薄膜の全体積の
２０％以上がＦｅｇＮ相によって占められて成る磁気記
録媒体。A ferromagnetic metal mainly composed of Fe is deposited on a non-magnetic support in a vacuum of 5×lθ ~10) to form a ferromagnetic metal thin film, and the total area of the ferromagnetic metal thin film is A magnetic recording medium in which 20% or more is occupied by the FegN phase.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6284282A JPS58180008A (en) | 1982-04-15 | 1982-04-15 | Magnetic recording medium |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6284282A JPS58180008A (en) | 1982-04-15 | 1982-04-15 | Magnetic recording medium |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58180008A true JPS58180008A (en) | 1983-10-21 |
| JPH056327B2 JPH056327B2 (en) | 1993-01-26 |
Family
ID=13211960
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6284282A Granted JPS58180008A (en) | 1982-04-15 | 1982-04-15 | Magnetic recording medium |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58180008A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59228705A (en) * | 1983-06-10 | 1984-12-22 | Hitachi Ltd | Vertical magnetic recording medium and manufacture of the same |
| JPS6025012A (en) * | 1983-07-20 | 1985-02-07 | Konishiroku Photo Ind Co Ltd | Magnetic head |
| JPS60236113A (en) * | 1984-05-08 | 1985-11-22 | Dainippon Printing Co Ltd | Magnetic recording material and its production |
-
1982
- 1982-04-15 JP JP6284282A patent/JPS58180008A/en active Granted
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59228705A (en) * | 1983-06-10 | 1984-12-22 | Hitachi Ltd | Vertical magnetic recording medium and manufacture of the same |
| JPS6025012A (en) * | 1983-07-20 | 1985-02-07 | Konishiroku Photo Ind Co Ltd | Magnetic head |
| JPH0352641B2 (en) * | 1983-07-20 | 1991-08-12 | Konishiroku Photo Ind | |
| JPS60236113A (en) * | 1984-05-08 | 1985-11-22 | Dainippon Printing Co Ltd | Magnetic recording material and its production |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH056327B2 (en) | 1993-01-26 |
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