JPS5817545A - Information recording and reproducing device - Google Patents

Abstract

PURPOSE:To obtain erasable recording and reproduction by utilizing the phase shift between crystalline silicon in a silicon layer and amorphous silicon. CONSTITUTION:This recording medium is obtained by forming a layer of crystal silicon 12 as a recording medium on a circular substrate 11 of glass or silicon. When the crystalline silicon 12 is irradiated with beams such as an electron beam or ion beam, the irradiated part of the crystalline silicon is subjected to phase change into amorphous silicon 13. When polarized light is scanned, an information signal is read because of a difference in refractive index. When the amorphous silicon is irradiated wth laser light to obtain thermal energy, the amorphous silicon is subjected to phase change into the crystalline silicon reversely, erasing recording contents.

Description

【発明の詳細な説明】 本発明は、情報が記録媒体の結晶変化として記録され且
つ再生される情報記録再生装置、即ち記録媒体に関する
。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to an information recording/reproducing apparatus, that is, a recording medium, in which information is recorded and reproduced as a crystal change of the recording medium.

第１−ａｌｌに、従来からある米学式情報Ｍ順装置の一
例を示す。第１図において、光−１（１１えばネオン、
牛導体レーザなど）から出走光のビームはコリメータ２
で適蟲なビーム径に富れ、手透明鏡ｓｌ経てレンズ４に
よ多円板状Ｏ記鍮媒体Ｓ上に収束される。記録媒体５は
毫−／ＩＫよ＊ｔｇ１転されてｊＩＰＬ記鎌媒記録上に
収束されたビームはそζで反射され、反射光がレンズ４
及び半透明鏡３を経て光検出器１に入射し、反射率の違
いにより情報が絖販られる。りｔｐ１記鎌記録５上には
、１１２図に示すような幾何学的形状変化を有するビッ
ト畠が配列されておや、このビット＄は例えば菖３図に
示すようにガラス基板９上にレジスト膜１０を塗布しこ
のレジスト膜１０に幾何学的形状変化をさせたものであ
）、ピット畠の有無によ）情報が表わされている。情報
の読出しにはピッ）Ｓｏｉ１分と記碌媒体ｓ上の他の部
分との反射率の違いが利用され、回転する記録媒体Ｓに
収束し九ビームを蟲てるとピットａが順次走査され、光
検出ＷｋＴで反射率の違いが検知されてピッ）１０有無
即ち情報信号が順次読出される。1-all shows an example of a conventional American academic style information M-order device. In FIG. 1, light-1 (for example, neon,
The beam of light emitted from the laser beam (copper conductor laser, etc.) is sent to collimator 2.
The beam has a suitable diameter and is focused onto a multi-disk shaped medium S by a lens 4 through a hand transparent mirror SL. The recording medium 5 is rotated from ζ to ζ, and the beam converged on the ζ is reflected by the lens 4, and the reflected light is reflected by the lens 4.
The light then passes through the semi-transparent mirror 3 and enters the photodetector 1, where information is sold based on the difference in reflectance. On the sickle record 5 recorded in tp1, bit fields having a geometrical shape change as shown in Fig. 112 are arranged.This bit field is arranged in resist on the glass substrate 9 as shown in Fig. 3, for example. The resist film 10 is coated with a resist film 10 to change its geometrical shape, and information is expressed by the presence or absence of pit fields. To read information, the difference in reflectance between the 1 minute Soi and other parts of the recording medium s is utilized, and when nine beams are focused on the rotating recording medium S, the pits a are sequentially scanned, The difference in reflectance is detected by the photodetector WkT, and the presence/absence of (beep) 10, that is, the information signal is sequentially read out.

しかし上述しえ如き従来の光学的記録媒体５においては
、レーザを用い良熱溶解によｐビット８を形成して情報
を記録しているので、多数−のビットを均一に形成する
ことは困難でＴｏｎ、ピット個々の形状が違った９また
ビットの深さが違っていえ・この丸め、ビット毎に反射
率が真って検出にバクツキ中変動が生じやすかった。更
に、記録媒体５にビットを設けるので、一旦情報を書込
むとその消去は不可能でＴｏｌ＋、記録の再生のみとな
って記録と再生を何度も繰返すことはできなかつ九〇 本発明は上記従来技術の欠点に鑑み、安定し九記銀と再
生＾び記録と再生の繰返しが可能な情報記録再生装置を
提供することを目的とする。その九め本発明では記―媒
体にシリコンを用い、シリランＯ結晶変化即ち結晶シリ
コンとアモルファスシリコン間Ｏ相変化を記録に利用す
る。以下、第４〜６１１について本発明の詳細な説明す
る・１ｇ４１１は本発明のＪｉｌＩｌｌを示すグラフで
６９、結晶シリコンとアモルファスシリコンｏ＋ｓ折率
胞を、偏光解析を用いて実験的に求めたものであ為。However, in the conventional optical recording medium 5 as described above, information is recorded by forming the p-bits 8 by thermal melting using a laser, so it is difficult to uniformly form a large number of bits. However, the shape of each pit was different, and the depth of the bit was also different.With this rounding, the reflectance of each bit was high, and detection was likely to fluctuate. Furthermore, since bits are provided in the recording medium 5, once information is written, it cannot be erased, and the recording can only be reproduced, and recording and reproduction cannot be repeated many times. In view of the shortcomings of the prior art, it is an object of the present invention to provide an information recording and reproducing device that is stable and capable of repeating recording and reproducing. Finally, in the present invention, silicon is used as the recording medium, and silyran O crystal change, ie, O phase change between crystalline silicon and amorphous silicon, is utilized for recording. Below, the present invention will be explained in detail for Nos. 4 to 611. 1g411 is a graph showing the JillIll of the present invention. 69 is a graph obtained experimentally using polarization analysis of crystalline silicon and amorphous silicon o+s refractive index cells. Because of that.

第４ＫＯ横軸は偏光解析に用％Ａえ光源０ｓ畏Ｕ）でｉ
る・第４１１Ｉよりわかるように、結晶シリコンとアモ
ルファスシリコンの屈折率には大龜表差異があるので、
この屈折率の違いを記録に用いることがで１為。例えば
、 （１）ｒＯＪ情報を結晶シリコン部、ｒｌＪ情報をアモ
ルファスシリコ７部として記録円板上に形成すれば、デ
ジタル情報Ｏ記鍮ができるφ情報の再生には偏光解析を
用いれば良い。The 4th KO horizontal axis is used for polarization analysis.
As can be seen from Section 411I, there is a large difference in the refractive index of crystalline silicon and amorphous silicon, so
This difference in refractive index can be used for recording. For example, (1) If the rOJ information is formed on the recording disk as a crystalline silicon part and the rlJ information is formed as an amorphous silicon part, polarization analysis may be used to reproduce the φ information that creates digital information.

（２）アナ■グ記銀を行う場合は、結晶シＶ；ンからア
モルファスシリコンへの相変化の度合を連続的に記録円
板上に記録し、偏光解析によ）屈折率の大ＩＩｉさを読
出せば良い・ 第５１１に本発明装置の一実施例を示し、ガラス中シｖ
ｘンの円形基板１１上に記録媒体として結晶シＶ＝ン１
２の層を形成しえもＯである・結晶シリコン１２に電子
ビームやイオンビームなどのビームを照射すると、結晶
シリコンの照射部分はア毫ル７アスシダコンへと相変化
すゐ。第！ｉｌＩ中の１ｓが照射され九部分即ちアモル
ファスシリ；ンでｉゐ・そζで、ζ０１ｌｌｌ置１４を
毫−メで一転１［−を丸状１″ｅ、シシ；ν層１２に電
子ビーム中イオｙビーム會照射し、デジタルｌｅ鍮Ｏ鳩
舎は情報０ｒＯＪと「１」Ｋ応じて照射Ｏ有無を制御す
為ζ＆に１１，１大アナーダＩ！鐘の場合は償奇Ｏレベ
ｋＩＣ応ｃ′ｃ厘射Ｏ強度を制御すみことによｐ１Ｊｔ
＃Ｌヤれ・情報を１ｅＩＩｋで自為、露・−はデジタル
Ｉ！鍮し丸鳩舎Ｏ様子會峰デル−に示し、ア峰ルアアＸ
Ｖ豐冨ンＩＩ分１ｓ−円馬状に配列１れてにる。(2) When performing analog recording, the degree of phase change from crystalline silicon to amorphous silicon is continuously recorded on a recording disk, and the degree of refractive index IIi is determined by polarization analysis. No. 511 shows an embodiment of the device of the present invention, in which the screen in the glass is read out.
As a recording medium, a crystal film V=n1 is placed on a circular substrate 11 of xn.
Even if a layer of 2 is formed, it is O. When the crystalline silicon 12 is irradiated with a beam such as an electron beam or an ion beam, the irradiated part of the crystalline silicon undergoes a phase change to A3 7 Ascidacon. No.! 1s in ilI is irradiated and 9 parts, i.e., amorphous silicon; Io Y beam meeting is irradiated, and the digital le brass O pigeon house controls the presence or absence of irradiation O according to the information 0rOJ and "1" K, so 11,1 large anada I! In the case of a bell, the compensation level kIC response c′c and the intensity of the radiation are controlled by p1Jt
＃Lyare・information in 1eIIk, Russia・- is digital I! Brass round pigeon coop O is shown in the meeting, Amine Ruaa
V Tofu II minute 1s - Arranged in a round horse shape.

ｃｏ！５に１！１１１ｔＬ禽本１１１１１０情報ｇ＊再
生装置１４會■＠畜せ、順次偏光で走査し属祈率Ｏ追−
を諷取って％／％＃ぜ情報償奇Ｏ諷出しとな為・な訃、
ア４にアアスｙ９ｗン蕩分１易は本装置１４０籠（褒一
層′″ｅ魯っても、偏光解析によ壷十分履析率の進−を
富Ｉｈ島Ｃ＆かで１為・ −１、ア４にアアスＶすａｙにレーずを照射して１工ネ
ルギー會与ＡＭとア峰ル７アスｌ／ＶＷンＩＩｌ！＃晶
Ｖ讐譚νへ遂に額蜜イヒす為ことを実験麹に確■し丸・
そζマ、曽晶ｗダ冒ン１！にイオンビーム等を照射しえ
１！＊＊拳Ｏ情報記鍮再生錬置１４は、レーず照射等Ｏ
熱旭瀧を行うことによ）食藝番為−はｗｉｉｔｓ分Ｏ配
鍮内審を消去で龜、新えな情＠６＊ＩＩＸｔｔ−１１１
０書替見がで龜為拳１ｋか、上遠しえＩ！嘴では配―媒
体七して基板１１上に結晶ｇ／ｌ：ｆｙ１２を威最畜破
え儒を魯が禽が、曹達・如（、熱ＪＩＩＩＫよゐア啼ル
７アス１／１ｍンｉＰｂ締晶ｙ９ｘｙへＯＳ変化及びイ
オシピーム等Ｏ厘射によ為曽晶ｓ／ｖコンかｂア４にツ
アスＶｗ冨ンへ０１ｍ変化という胃道１１１蜜化−ｉ為
ので、ｊｌｌｌ［１１上０Ｖｌｌコンを初期状態ではア
４にル７アスＶ讐１ンとして訃き、これをレーず照射で
曽蟲ＶｖｓｙＫ１１変化１せて情報をｌｅ鎌す為ことも
纏―行見為・ζＯ場鳩舎情報再生は先に燻べ九七岡榔で
ｉる・１１えイオノビーム中電子ビームを照射すればＩ
！！鎌を消去で自ることは嘗うｔでも１に％Ａ・ｔｏよ
うに、可逆１ｍｍ化をすることによｐ。co! 5 to 1! 111tL bird book 111110 information g * playback device 14 meeting ■@Serially scan with polarized light and track the belonging rate O
It's a parody of %/% #ze information redemption, and it's a joke,
A4 to A4, the indemnity is 140 baskets (reward layer'''e), and polarization analysis is enough to determine the progress of the analysis rate in the island of C&K. , I irradiated laser beams on A4 and A4, and conducted an experiment to give AM and Amine 7A1/VW21! Confirmation circle・
Well, Zeng Jing w da adventure 1! Irradiate ion beam etc. to 1! **Fist O information record Brass regeneration alchemy 14 is laser irradiation etc.
By performing the hot Asahidaki) food industry ban - erases the wits minutes O distribution internal hearing, new emotion @ 6 * IIXtt-111
0 rewritten viewing is 龜tameiken 1k, or the top is I! In the beak, the crystal g/l:fy12 is placed on the substrate 11 by the distribution medium 7, and the most brutal thing is Lu, the bird, Soda Ru (, heat JIIIK, the 7 ass 1/1 m iPb Due to the OS change and the O injection of Iosypem etc. to the tightening crystal y9xy, the gastric tract 111 of the gastric tract 111 m change to the 01m change to the tuas Vw to b a 4, so the jllll[11 upper 0Vlll control] In the initial state, it dies as A 4 Ru 7 As V enemy 1, and it is laser irradiated with Somushi V vsy K 11 change 1 and the information is le sickle, so it is also possible to regenerate the information. If you first irradiate the electron beam in the 11e ion beam with the smoked Kushichioka Sake, then the I
! ! The sickle can be erased by making it reversible to 1mm, like 1%A・to.

Ｉ！最→１１Ｉ生→消去→記鍮Ｏ繰遮しがｗ箇でｉ）、
本尭−ｔｌｆ＃ｆｌＨａ鍮再生羨置紘何−でも簡−と得
皇鉱層いるζ七−ＩＪ１１″ｅ龜為・１大、電子ビーム
中イオｙぜ−ム＊２０解像度のすぐれ大ビー１をＭ−て
記録て自るえめ、記録が極めて高密度にで−る利点があ
る・従来の光学式記録では直＠１ｊＯｔｓＯ円榎で１０
′ビツトの情報記ｌＩｋが隈界と畜れていえが、本発−
によればそれ以上の情報を記鎌で龜る可能性がある・ 以上詳細にＩｌ明し九が、本発−では結晶Ｖす；ンとア
毫ルアアスシ雫コンの可逆ｔｋ１１変化を記録ＫＭ−て
ｖｈ為たＪ６．記録と再生を繰返すことかで龜、７枚の
情＠ｌｅ―再生装置で何度も記＊、、再生が可能で極め
て経済的である・更に、曽晶シｖ：Ｉン及びア峰ル７ア
スＶｖゴνといつえ非常に安定し丸状■ｏｔのを記録Ｋ
Ｍいるので、再生におけるＡシツキ中変動も少なく、鮮
＊ｔｍ＊中エツー０ＩＩＰ１に一データを再生すること
かで自る。更に、記＃ｋＫ電子ビームヤイオンビームを
用いた鳩舎は従来Ｏ光学式に比べ高密度なＩｅ鎌が可能
となる・４　　ｍＮＯ簡単１ｋｌ！明 第１〜Ｓ園は従来技＃に４１ｋｌ）、第１−鉱党学約情
報読取義置ＯＩＩ威■、＊Ｚａａはその記―媒体Ｏ平１
ｇ１５ｗ％第３−は第２■Ｏ断面斜視園、第４〜・園は
本発１１に＠シ、第４園は鳳環説明Ｏダッ７、ｊＩｓ園
は本発明の情報記録再生装置の断ｒｎ、露・ｍはその平
ｔｌｉａである。I! Most → 11I student → erasure → recorded brass O repeated interruption is w part i),
Motoya - TLF #flHa Brass regeneration Enkihiro It is easy to obtain anything and the Ore layer is ζ7-IJ11''e 1 large, ion beam in the electron beam * 20 Excellent resolution Large beam 1 M-type recording has the advantage of being able to record at extremely high density. ・With conventional optical recording, it is possible to record directly at 1
``Bit's information record is terrible, but it's from the beginning.''
According to the above, it is possible to record more information with a sickle.In the above-mentioned details, we will record the reversible tk11 change of the crystal V and the water droplet KM- tevhtameta J6. By repeating recording and playback, it is possible to record and play the 7 pieces of information over and over again with a playback device, making it extremely economical. 7 As Vv Go ν, it is very stable and records a round ■ot.
Since there is M, there is little variation in A during playback, and it is possible to reproduce one data at the time of E20IIP1 during playback. In addition, pigeon lofts using #kK electron beams and ion beams can produce higher-density Ie sickles compared to conventional O optical systems.4 mNO easily 1kl! Mei 1st ~ S garden is 41kl in conventional technique #), 1st - Mining party science contract information reading system OII wei■, *Zaa is the record - medium Ohei 1
g15w% 3rd - is the 2nd ■ O cross-sectional perspective garden, 4th ~ - garden is the main departure 11 @shi, the 4th garden is the explanation of Otori Oda 7, and the jIs garden is the discontinuation of the information recording and reproducing device of the present invention. , dew m is its flat tlia.

■−や、 １１は基板、１２は結晶シリコン、１３はア毫ル７アス
シＶ；ンである。11 is a substrate, 12 is crystalline silicon, and 13 is an aluminum frame.

特許出願人　日本電信電話会社 代理人弁運士　　光石　士　ｊｌＣｍｉｌ１名）第４図 シ反　長−ｒａｔ 第５図 ４ 第６図Patent applicant: Nippon Telegraph and Telephone Company Agent Benunshi Mitsuishi JlCmil (1 person) Figure 4 long-rat Figure 5 4 Figure 6

Claims (2)

【特許請求の範囲】[Claims] （１）　　情報が記録され且つ再生される情報記−再生
装置ＫｓＰいて、この装置はｌｌｌ！ｖａにシリコン層
を有し、こＯシラ２フ層内で結晶シリコンからアモルフ
ァスシリコンへ或いはアモルファスシリコンから結晶シ
リコンへの相変化が行われ、こＯ相変化が記録、再生に
用いられることを特徴とする情報記−再生装置０(1) There is an information recording/reproducing device KsP in which information is recorded and reproduced, and this device is lll! It has a silicon layer in the va, and a phase change from crystalline silicon to amorphous silicon or from amorphous silicon to crystalline silicon takes place within the oscilloscope layer, and this oscilloscope phase change is used for recording and reproduction. Information record - playback device 0 （２）　　偏光解析によｐシリコンの相変化をｌ！龜る
ことで情報の再生が行われることを特徴とする特許請求
ＯＩｉ囲第１項記載の情報記録再生装置。(2) Determine the phase change of p-silicon by polarization analysis! The information recording and reproducing apparatus according to claim 1, characterized in that information is reproduced by slowing down.