JPS58173438A - Measuring device for far field pattern of light emitting element - Google Patents
Measuring device for far field pattern of light emitting elementInfo
- Publication number
- JPS58173438A JPS58173438A JP5867482A JP5867482A JPS58173438A JP S58173438 A JPS58173438 A JP S58173438A JP 5867482 A JP5867482 A JP 5867482A JP 5867482 A JP5867482 A JP 5867482A JP S58173438 A JPS58173438 A JP S58173438A
- Authority
- JP
- Japan
- Prior art keywords
- far
- automatically
- light emitting
- light
- emitting element
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005259 measurement Methods 0.000 description 12
- 238000010586 diagram Methods 0.000 description 10
- 239000004065 semiconductor Substances 0.000 description 3
- 241001233037 catfish Species 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000000779 smoke Substances 0.000 description 1
- 239000013589 supplement Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J1/00—Photometry, e.g. photographic exposure meter
- G01J1/42—Photometry, e.g. photographic exposure meter using electric radiation detectors
- G01J1/4257—Photometry, e.g. photographic exposure meter using electric radiation detectors applied to monitoring the characteristics of a beam, e.g. laser beam, headlamp beam
Landscapes
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- General Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
Abstract
Description
【発明の詳細な説明】
この発明は、発光素子の遠視野像を自動的にピーク値を
一定にして描く発光素子の遠視野會測定装置ｉＩＫ関す
るものである。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a far-field field measuring device iIK for light-emitting elements that automatically draws a far-field image of a light-emitting element with a constant peak value.
例えば、半導体レーザやＬＥＤ等の発光素子は、これら
素子の特性の一つとして発光点から離れた所での光強度
の分布、すなわち遠視野像を測定することが必要である
。遠視野像測定の原理を第１図、第２図を用いて説明す
る。For example, one of the characteristics of light-emitting elements such as semiconductor lasers and LEDs is that it is necessary to measure the distribution of light intensity at a distance from the light-emitting point, that is, the far-field pattern. The principle of far-field image measurement will be explained using FIGS. 1 and 2.
第】図は発光素子と受光素子の位置関係を示す図であり
、第２図は遠視野像の測定結果例を示したものである。1 is a diagram showing the positional relationship between a light emitting element and a light receiving element, and FIG. 2 shows an example of a measurement result of a far field image.
第１図において、１は発光素子で、−例として半導体レ
ーザな示している。２は発光点である。In FIG. 1, numeral 1 indicates a light emitting element, and a semiconductor laser is shown as an example. 2 is a light emitting point.
３は前記発光点２を含む発光素子１の共振器端面である
。第１図に示すように、発光点２を原点Ｏとし共振器端
面３上にＸ軸、２軸、垂直にＹ軸の直交座標を設定する
。４は受光素子で、ＸＹ千画面上発光点２を中心に半径
Ｒの円周上を回転させることができる。まず、発光素子
１を上下面がＸＹ千面と平行になるように設置した後、
電流を流し一定出力で発振させ、受光素子４を０＝−９
０℃から＋９０℃まで回転して、発光点２の正面方向（
Ｙ軸方向）から角度θ離れた所での強度分布を第２図の
符号５で示すように描く。これはいわゆる発光素子１の
水平方向遠視野像である。3 is a resonator end face of the light emitting element 1 including the light emitting point 2. As shown in FIG. 1, the light emitting point 2 is set as the origin O, and orthogonal coordinates of the X axis, two axes, and the perpendicular Y axis are set on the resonator end face 3. Reference numeral 4 denotes a light receiving element, which can be rotated on the circumference of a radius R around the light emitting point 2 on the XY screen. First, after installing the light emitting element 1 so that the upper and lower surfaces are parallel to the XY thousand planes,
A current is applied to oscillate at a constant output, and the light receiving element 4 is set to 0=-9.
It rotates from 0℃ to +90℃, and the front direction of the light emitting point 2 (
The intensity distribution at an angle θ away from the Y-axis direction is drawn as shown by reference numeral 5 in FIG. This is a so-called horizontal far-field image of the light emitting element 1.
ここで、水平方向遠視野像５を上記説明のよ５に描くに
当たり１強度分布の最大値はグラフ上で一定値にしてお
くことが遠視野像の評価のために便利である。このため
、水平方向遠視野＊Ｓを描くには、あらかじめ受光素子
４を最大出力が生じる角度付近で回転し、最大出力点で
受光素子４の負荷抵抗を調整して、一定値になるよ５Ｋ
した優に描くようＫする。なお、発光素子１を設置した
試料台は図示を省略している。Here, when drawing the horizontal far-field image 5 as described above, it is convenient to set the maximum value of one intensity distribution to a constant value on the graph for evaluation of the far-field image. Therefore, in order to draw the horizontal far field*S, first rotate the light receiving element 4 near the angle where the maximum output occurs, and adjust the load resistance of the light receiving element 4 at the maximum output point until it reaches a constant value of 5K.
I asked Yu to draw it. Note that the sample stage on which the light emitting element 1 is installed is not shown.
水平方向遠視野ｇＩ５を描いた後１発光素子１をＹ軸を
中心に９０’ＣＢｉ転して、水平方向遠視野像５と同様
にして垂直方向遠視野像６を描いて測定は完了する。After drawing the horizontal far field gI5, one light emitting element 1 is rotated by 90'CBi around the Y axis, and a vertical far field image 6 is drawn in the same manner as the horizontal far field image 5, and the measurement is completed.
第５図はこの過程の一方向につき遠視野像を描く手段を
説明するためのブロック図である。FIG. 5 is a block diagram for explaining means for drawing a far-field image in one direction during this process.
第５図で、ａは最大出力Ａを求める手段で、偏角−５°
から＋５°まで受光素子４を回転し、この間の最大出力
Ａを求めるものである。ｂは最大出力Ａを規格化する手
段で、最大出力Ａの規格化値Ａ０に対し、補正倍率α＝
Ａ、／Ａを計算するものである。Ｃは遠視野像測定手
段で、−９００〜＋９０°受光素子４を回転させる。ｄ
は各測定点出力倍率補正手段で、測定値をすべてα倍す
る。ｅは遠視野像表示手段で、規格化値Ａ０を表示上＠
１″にして遠視野像を描くものである。各ブロックで示
されるａ〜ｅの手段の作業は、マイクロコンピュータお
よびこれに連動するパルスモータＴおよびＸＹレコーダ
やブラウン管を使用して自動的に行うことができる。In Figure 5, a is the means for determining the maximum output A, and the declination angle is -5°.
The light-receiving element 4 is rotated from 1 to +5 degrees, and the maximum output A during this period is determined. b is a means for normalizing the maximum output A, and for the normalized value A0 of the maximum output A, the correction magnification α=
A, /A is calculated. C is a far-field image measuring means that rotates the light-receiving element 4 by -900 to +90 degrees. d
is an output magnification correction means for each measurement point, and all measured values are multiplied by α. e is a far-field image display means, which displays the normalized value A0 @
1" to draw a far-field image. The operations of means a to e shown in each block are automatically performed using a microcomputer, a pulse motor T linked to it, an XY recorder, and a cathode ray tube. be able to.
以上が遠視野像測定の原理である。この発明は、この原
理に基づき自動的に遠視野像測定を行う装置に関するも
のである。その特徴とするところは、自動的に出力のピ
ーク点を求めてピーク値を規格化し、自動的に用紙やブ
ラウン管に描くことＫある。以下、図面によりこの発明
を説明する。なお、この発明の一実施例として、上記と
同様の測定を行う場合で説明する。The above is the principle of far-field image measurement. The present invention relates to a device that automatically measures a far-field image based on this principle. Its feature is that it automatically finds the peak point of the output, normalizes the peak value, and automatically draws it on paper or a cathode ray tube. The present invention will be explained below with reference to the drawings. Note that, as an embodiment of the present invention, a case will be described in which measurements similar to those described above are performed.
第３図はこの装置の試料および受光素子部付近の構成を
模式的に示す断面図である。この図において、１は試料
となる発光素子で、例えば半導体レーザが用いられる。FIG. 3 is a cross-sectional view schematically showing the structure of the sample and the light-receiving element of this apparatus. In this figure, 1 is a light emitting element serving as a sample, and for example, a semiconductor laser is used.
４は受光素子である。Ｔは精密角度制御を行うためのパ
ルスモータ、８．ｓはギヤーである。１０は前記ギヤー
ＩＫ＊り付けられた腕で、受光素子４が回転中心軸２か
ら距離Ｒの所に設置されている。4 is a light receiving element. T is a pulse motor for precise angle control; 8. s is a gear. Reference numeral 10 denotes an arm to which the gear IK* is attached, and the light receiving element 4 is installed at a distance R from the rotation center axis 2.
まず１発光素子１を水平方向遠視野像５（纂２図）が測
定できるように方向を合わせて設定し。First, one light-emitting element 1 is set in such a way that a horizontal far-field image 5 (Fig. 2) can be measured.
一定出力で発振させる。しかる後に、自動的にパルスモ
ータＴを、例えば０富−５℃〜＋５℃の範囲で回転し、
第４図（ａ）のように部分遠視野像１５内の最大出力を
求める（これは実際には描かれない）。第４図（ａ）
Ｋ示すように、この値をグラフ出力上でＡとすると、計
算機能が働き、ＡをＩＫ変換した後、パルスモータＴは
さらに自動的にθ＝−９０℃〜＋９０℃回転して、第４
図（ｂ ）のように水平方向遠視野像１５′を自動的に
用紙やブラウン管に描く。その後、発光素子１を９０℃
回転して（これも自動的に行う）、上記と同様にして自
動的に垂直方向遠視野ｇＩ（図示せず）が描かれる。Oscillate with constant output. After that, the pulse motor T is automatically rotated, for example, in the range of 0°C to +5°C,
The maximum output within the partial far-field image 15 is determined as shown in FIG. 4(a) (this is not actually drawn). Figure 4(a)
As shown in K, if this value is set to A on the graph output, the calculation function works and after converting A to IK, the pulse motor T further automatically rotates θ=-90°C to +90°C, and the fourth
As shown in Figure (b), a horizontal far-field image 15' is automatically drawn on paper or a cathode ray tube. After that, the light emitting element 1 was heated to 90°C.
Rotating (also done automatically), the vertical far field gI (not shown) is automatically drawn in the same manner as above.
なお、上記の実施例において、自動的に試料である発光
素子１に一定出力を出させるよ５Ｋしたり、水平、垂直
方向遠視野像の各−基準に対する良否判定を行わせるこ
とができる。また、上記では受光素子４は１個でこれを
回転して測定しているが、測定すべき角度範囲に複数の
受光素子４を並べ、これらの出力を取り出して測定する
こともできる。さらに、受光素子４を回転する代りｋ。In the above embodiment, it is possible to automatically make the light-emitting element 1 as a sample output a constant output at 5K, or to make a quality judgment with respect to each criterion of the horizontal and vertical far-field images. Further, in the above description, the measurement is performed by rotating one light receiving element 4, but it is also possible to line up a plurality of light receiving elements 4 in the angular range to be measured and extracting their outputs for measurement. Furthermore, instead of rotating the light receiving element 4, k.
発光素子１を回転してももちろんよい。Of course, the light emitting element 1 may also be rotated.
以上説明したよ５にこの発明は、自動的に遠視野像の最
大出力点付近を発光素子または受光素子を回転させて最
大出力を求めるようにし、この最大出力を一定値に規格
化してから、この規格化した一定値を用いて遠視野像を
描くようにしたので、全自動的に遠視野像を描くことが
でき、実用上極めて有用である利点がある。As explained above, the present invention automatically rotates the light-emitting element or the light-receiving element around the maximum output point of the far-field pattern to obtain the maximum output, normalizes this maximum output to a constant value, and then Since the far-field image is drawn using this standardized constant value, the far-field image can be drawn completely automatically, which has the advantage of being extremely useful in practice.
第１図は遠視野像測定原理を示す構成図、第２図は第１
図による測定結果を示す図、第３図はこの発明の一実施
例を示す要部の模式図、第４図（ａ）。
（ｂ）は自動ピーク調整を説明するための図、第５図は
一方向につき遠視野書を描く手段のプｐツク図である。
図中、１は発光素子、２は発光点、３は共振器端面、４
は受光素子、５は水平方向遠視野像、６は垂直方向遠視
野像、１はパルスモータ、６．ｓはギヤー、１０は腕、
１５は部分遠視野倫、ＩＳ′は水平方向遠視野像である
。なお１図中の同一符号は同一または相当部分を示す。
代理人 葛 野信 −（外１名）
第１１１
第２図
第３図
一２２１＝
第５図
丁を続補正阿（自発）
特許庁長官殿
１、’ＩＣ件の表示 ｆ？覇昭 ５７−８８８１
４号２、発明の名称 発光素子の遠＊Ｖｔ＊渕
定装置３、 補＋ｌ」Ｉ’るｈ
５、補正の対象
明細書の発明の詳細な説明の欄および図面６ 補正の内
容
（１）明細書第２員１８〜１９行にｒｌ？＝−９０°Ｃ
から＋９０°Ｃ」とあるのを、「θ＝−９０°から＋９
０’Ｊと補正する。
（２１同じく第３頁１３行および第５員１９行Ｋ［９０
°ＣＪとあるのを、それぞれ［９０°」と補正する。
（３）同じく第３員１６行〜第４Ｒ１７行の［第５図は
・・・・・・・・・・・・る。」の個所を、下記のよう
に補正する。
ｒ第５図はとの過根の一方向につき、遠視野像を描く手
段を説明するためのブロック図である。
第５図で、ａは最大出力Ａを求める手段で、正面（偏角
０１′）付近で受光素子４を回転し、この間の最大出力
Ａを求めるものである。ｂは最大出力Ａを規格化する手
段で、最大出力Ａをグラフ上一定値になるよう受光素子
４の負荷抵抗を変えるものである。Ｃは遠視野儂測定手
段および表示手段で、９０’〜＋９０’受光素子４を回
転しながらグラフ用紙に遠視野壕を表示する。
以上が遠視野像の原理である。この発明は、この原理に
基づき自動的忙遠視野像測定を行う装置に関するもので
ある′。その特徴とするところは、自動的に出力のピー
ク点を求めてピーク値を規格化し、自動的に用紙やクラ
ウン管に描くととＫある。これらは、マイクロコンピュ
ータおよびこれに連動するパノしスモーク等を使用して
行うことができる。」
（４）同じく第５０１１行に１θ鯰−５°Ｃ５〜＋５゜
Ｃ」とあるのを、［θ＝−５°〜＋５°」と補正する。
（５）同じく第ｓ頁１６〜１７行Ｋ［θ＝−９００Ｃ〜
＋９０°Ｃ１とあるのを、［θ＝−９０°〜＋９１）０
」と補正する。
（６）第５図を）ＩＪ紙のように補正する。
以上
第５ＩＩＩFigure 1 is a configuration diagram showing the principle of far-field image measurement, and Figure 2 is a diagram showing the principle of far-field image measurement.
FIG. 3 is a diagram illustrating the measurement results; FIG. 3 is a schematic diagram of a main part of an embodiment of the present invention; FIG. 4(a) is a diagram showing measurement results; (b) is a diagram for explaining automatic peak adjustment, and FIG. 5 is a diagram of means for drawing a far-field book in one direction. In the figure, 1 is a light emitting element, 2 is a light emitting point, 3 is a resonator end face, and 4 is a light emitting element.
1 is a light receiving element, 5 is a horizontal far-field image, 6 is a vertical far-field image, 1 is a pulse motor, 6. s is gear, 10 is arm,
15 is a partial far-field image, and IS' is a horizontal far-field image. Note that the same reference numerals in Figure 1 indicate the same or corresponding parts. Agent Nobu Kuzuno - (1 other person) No. 111 Figure 2 Figure 3 - 221 = Continued amendment to Figure 5 (on his own initiative) Mr. Commissioner of the Japan Patent Office 1, Indication of 'IC matter f? Hasho 57-8881
No. 4 No. 2, Title of the invention Distance *Vt * Edge determination device for light emitting element 3, Supplement + l'I'ruh 5, Detailed explanation column of the invention in the specification subject to amendment and drawing 6 Contents of amendment (1) rl on lines 18-19 of the second member of the statement? =-90°C
θ=-90° to +90°C”
Correct it to 0'J. (21 Similarly, page 3, line 13 and member 5, line 19 K [90
Correct "°CJ" to "90°" respectively. (3) Similarly, from line 16 of member 3 to line 4R17 [Figure 5 is......]. ” should be corrected as follows. FIG. 5 is a block diagram illustrating a means for drawing a far-field image in one direction of the root. In FIG. 5, a is a means for determining the maximum output A, which rotates the light receiving element 4 near the front (deflection angle 01') and determines the maximum output A during this period. b is a means for normalizing the maximum output A, which changes the load resistance of the light receiving element 4 so that the maximum output A becomes a constant value on the graph. C is a far-field self-measuring means and a display means, which displays a far-field trench on graph paper while rotating the light receiving element 4 from 90' to +90'. The above is the principle of a far-field image. The present invention relates to an apparatus for automatically measuring far-field images based on this principle. Its special feature is that it automatically determines the peak point of the output, normalizes the peak value, and automatically draws it on paper or a crown tube. These can be performed using a microcomputer and a pano smoke etc. that are linked to the microcomputer. (4) Similarly, in line 5011, 1θ catfish -5°C5 to +5°C” is corrected to [θ=-5° to +5°”. (5) Similarly, page s, lines 16-17 K [θ=-900C~
+90°C1, [θ=-90°~+91)0
” he corrected. (6) Correct Fig. 5 to look like IJ paper. Above, Part 5 III
Claims (1)
に設置された試料台と、前記試料台に対向して設置され
た単数または複数の受光素子を有し、前記受光素子また
は前記発光素子が前記中心点を通る軸を中心軸として回
転することにより、前記発光素子の遠視野像を描く測定
装置において、自動的に前記遠視野像の最大出力点付近
を前記受光素子または前記発光素子を回転させて前記最
大出力を求める手段と、この最大出力を一定値に規格化
する手段と、前記規格化した値を用いて前記遠視野像を
自動的に描く手段とを備えたことを特徴とする発光素子
の遠視野像測定装置。A sample stage installed so that the light emitting point of one or more light emitting elements is located at the center point, and one or more light receiving elements installed opposite to the sample stage, the light receiving element or the light emitting element In a measuring device that draws a far-field image of the light-emitting element by rotating around an axis that passes through the center point, the light-receiving element or the light-emitting element is automatically moved around the maximum output point of the far-field image. It is characterized by comprising: means for determining the maximum output by rotating it; means for normalizing the maximum output to a constant value; and means for automatically drawing the far-field image using the standardized value. A device for measuring far-field images of light-emitting devices.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5867482A JPS58173438A (en) | 1982-04-06 | 1982-04-06 | Measuring device for far field pattern of light emitting element |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5867482A JPS58173438A (en) | 1982-04-06 | 1982-04-06 | Measuring device for far field pattern of light emitting element |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS58173438A true JPS58173438A (en) | 1983-10-12 |
Family
ID=13091123
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5867482A Pending JPS58173438A (en) | 1982-04-06 | 1982-04-06 | Measuring device for far field pattern of light emitting element |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58173438A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006066745A (en) * | 2004-08-27 | 2006-03-09 | Ricoh Co Ltd | Method of measuring radiation optical axis deviation angle, and device thereof |
| CN101929889A (en) * | 2010-05-17 | 2010-12-29 | 西安炬光科技有限公司 | Semiconductor laser remote field testing method and device |
| CN104515595A (en) * | 2014-12-20 | 2015-04-15 | 西安炬光科技有限公司 | Testing device for far field intensity of semiconductor light source |
-
1982
- 1982-04-06 JP JP5867482A patent/JPS58173438A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006066745A (en) * | 2004-08-27 | 2006-03-09 | Ricoh Co Ltd | Method of measuring radiation optical axis deviation angle, and device thereof |
| CN101929889A (en) * | 2010-05-17 | 2010-12-29 | 西安炬光科技有限公司 | Semiconductor laser remote field testing method and device |
| CN104515595A (en) * | 2014-12-20 | 2015-04-15 | 西安炬光科技有限公司 | Testing device for far field intensity of semiconductor light source |
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