JPS58166247A - Gas-and temperature-sensitive element - Google Patents
Gas-and temperature-sensitive elementInfo
- Publication number
- JPS58166247A JPS58166247A JP4858382A JP4858382A JPS58166247A JP S58166247 A JPS58166247 A JP S58166247A JP 4858382 A JP4858382 A JP 4858382A JP 4858382 A JP4858382 A JP 4858382A JP S58166247 A JPS58166247 A JP S58166247A
- Authority
- JP
- Japan
- Prior art keywords
- gas
- temperature
- electrode
- sensitive
- electrodes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
- G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
Abstract
Description
【発明の詳細な説明】 この発明は、ガスおよび温度を検出する素子。[Detailed description of the invention] This invention relates to an element that detects gas and temperature.
すなわち感ガス感温素子に関するものである。That is, it relates to a gas temperature sensing element.
従来、温度を検出する素子としては、サーミスタ、熱電
対などの感温素子があった。Conventionally, temperature sensing elements such as thermistors and thermocouples have been used as elements for detecting temperature.
また、ガスを検出する素子としては、ガスの化学吸着に
よる電気電導度の変化を利用したもの９例えば８ｎＯｚ
、ＺｎＯ等の多孔質セラミック半導体があった。In addition, as an element for detecting gas, one that utilizes changes in electrical conductivity due to chemical adsorption of gas9, for example, 8nOz
, ZnO, and other porous ceramic semiconductors.
しかし、従来は、ある雰囲気の中のガスおよび温度を検
知するのに、上述した温度検出素子とガス検出孝子の２
つをそれぞれ別個に使用していた。そのため、取付スペ
ースがかなり広くな夛、また高価になるなどの欠点があ
った。However, in the past, in order to detect gas and temperature in a certain atmosphere, two methods were used: the above-mentioned temperature detection element and gas detection element.
Each was used separately. Therefore, there were drawbacks such as the installation space being quite large and the cost being high.
この発明は、前述のように従来は２つの素子を用いてい
たのを改善して、１つの素子でガスおよび温度を検出で
きるように、従来のガス検出すなわち感ガス材料と温度
検出すなわち感温材料とを一体化して、２つの素子を用
いるのに・比べ、設置スペースが小さくてすみ、かつ取
付けが簡易にでき、安価な感ガス感温素子を提供するこ
とを目的としている。As mentioned above, this invention improves the conventional method of using two elements, and allows gas and temperature to be detected with one element. The object of the present invention is to provide a gas-sensitive temperature-sensitive element that requires less installation space, is easier to install, and is less expensive than when two elements are used.
以下、この発明の実施例を図について説明する。Embodiments of the present invention will be described below with reference to the drawings.
第１図（Ａ） 、 （Ｂ）はこの発明の一実施例を示す
。FIGS. 1A and 1B show an embodiment of the present invention.
これらの図において、（１）は感ガス材料からなる素子
基板であり、高温でも安定な多孔質セラミックス、例え
ば８ｎ０２系、ＺｎＯ系などが好ましい。これら１２０
０〜４００μ程度の厚みに焼結体から切シ出し、研磨し
たものか、グリーンシートを焼成したものなどが素子基
板として用いられる。第１図（ム）に示すように、前記
素子基板（１）の表面に、ＲｕＯ２ぺ一、スト、金ペー
ストなどからなる多孔質面電極（２ａ ） Ｉ （２ｂ
） （第２゜第３電極）をある間隔で互に分離させて設
ける。In these figures, (1) is an element substrate made of a gas-sensitive material, preferably porous ceramics that are stable even at high temperatures, such as 8n02 series or ZnO series. These 120
A material cut from a sintered body to a thickness of approximately 0 to 400 microns and polished, or a material obtained by firing a green sheet is used as the element substrate. As shown in FIG. 1(m), porous surface electrodes (2a) made of RuO2 paste, gold paste, etc. are formed on the surface of the element substrate (1).
) (second and third electrodes) are separated from each other at a certain interval.
なお、前記両電極（ｚａ） ｍ ＜２ｂ）間の間隔は後
述する感温材料の抵抗値によって、任意に変えるものと
する。第１図（Ｂ）に示すように、前記素子基板（１１
の裏面には、これのほぼ全面に多孔質面電極（２（り
（第１電極）を設ける。または表面と同様に分離しても
よい、（３）は素子基板１１１表面の多孔質面電極（２
１１） ＄ ＜２ｂ）間に、これらの電極（２ａ） ＃
（２ｂ） Ｋ一部を重ねて、スクリーン印刷。Note that the distance between the two electrodes (za) m <2b) may be arbitrarily changed depending on the resistance value of the temperature-sensitive material, which will be described later. As shown in FIG. 1(B), the element substrate (11
A porous surface electrode (2) is placed on the back side of the
(first electrode) is provided. Alternatively, the porous surface electrode (2) on the surface of the element substrate 111 may be separated in the same way as the surface.
11) Between $<2b) these electrodes (2a) #
(2b) Overlap part of K and screen print.
蒸着などＫよって設けられる感温材料である。It is a temperature-sensitive material provided by K such as vapor deposition.
この感温材料ｅ）としては、遷移金属の酸化物が好まし
い。また、 （４）、 （５）、 （６）は電極（２ａ
） ＊（２ｂ） 、 （ｗｅ） Ｋそれぞれ接続したリ
ード線である。電極を多孔質にする理由は、素子基板（
１１の面に設けられた電極を通してガスが感ガス材料に
到達しやすくするためである。The temperature-sensitive material e) is preferably a transition metal oxide. In addition, (4), (5), and (6) are electrodes (2a
) *(2b) and (we) K are the connected lead wires. The reason for making the electrode porous is that the element substrate (
This is to make it easier for gas to reach the gas-sensitive material through the electrode provided on the surface of 11.
したがって電極は多孔質以外に開孔、スリットを多数設
けた構造のものでもよい。Therefore, the electrode may have a structure in which many openings or slits are provided instead of being porous.
前述のように構成した感ガス感温素子で、ガスを検出す
る場合には、リード線（４）と（５）とを短絡させ、電
極（ｚａ） ｗ ＜ｚｂ）を同電位にし、これと電極（
２Ｃ）との間の電気抵抗を測定する。なお。When detecting gas with the gas-sensitive temperature-sensitive element configured as described above, the lead wires (4) and (5) are short-circuited, the electrodes (za) w < zb) are brought to the same potential, and electrode(
2C).Measure the electrical resistance between In addition.
リード線（４）と（５）とは短絡させなくてもよいが。The lead wires (4) and (5) do not need to be short-circuited.
この場合には電気抵抗値が高くなる。又裏面も分離電極
にする場合は９表面、裏面の分離電極をそれぞれ短絡し
９両者の間の抵抗を測定するのが好ましい。ガスを検出
するときＫは、感ガス感温素子をその周辺に設けたヒー
タ（−示せず）Ｋより２００〜４００ ’Ｏの温度に保
持し、リード＃ｊ（４１と１６）の間の電気抵抗を測定
する。感ガス材料として８ｎＯｚ、ＺｎＯを用いたもの
では。In this case, the electrical resistance value becomes high. If the back side is also used as a separate electrode, it is preferable to short-circuit the separate electrodes on the front and back sides and measure the resistance between them. When detecting gas, K is maintained at a temperature of 200 to 400'O by a heater (not shown) K provided around the gas-sensitive temperature-sensitive element, and electricity is applied between leads #j (41 and 16). Measure resistance. In the case of using 8nOz and ZnO as gas-sensitive materials.
リード線（４）と（６）との間の電気抵抗は１例えにプ
ロパンガス３０００ ｐｐｍでプロパンガスカナい場合
のそれぞれ１／１０〜１／１Ｇ０． １１５〜１／１０
になる。For example, the electrical resistance between lead wires (4) and (6) is 1/10 to 1/1 G0. 115~1/10
become.
温度検出する場合Ｋ１１−１．ガス検出のときに使用し
た加熱用ヒータは通電を中断して、感ガス感温素子が測
定される周囲の温度に一致するようにし、電極（ｚａ）
ｔ ＜２ｂ）間すなわちリード線（４１，（５１間の
電気抵抗を測定する。感温材料としてＮ１−０ｕ系酸化
物を用いたときの電気抵抗は。When detecting temperature K11-1. The heater used during gas detection is de-energized so that the temperature of the gas-sensitive thermosensing element matches the ambient temperature to be measured, and the electrode (za)
t<2b), that is, between the lead wires (41 and (51).The electrical resistance is measured when N1-0u based oxide is used as the temperature-sensitive material.
電極間隔３００μでＱ ’ｆｌ〜２００’（１の間で１
０３〜１ｇ程度変化する。Q 'fl~200' (1 between 1 and 300μ between electrodes)
It changes by about 0.3 to 1 g.
なお、感温材料（３）は、電極（２ａ）と電極（２ｂ）
上に設けたが、素子基板（１）上に設け、その上に電極
（２ａ）と電極（２ｂ）を設けてもよい。このとき素子
基板（１）Ｋは、感温材料（３）を電極（２ａ）と電極
（２ｂ）の一部に接触する大きさに制限して設け、素子
基板（１）へのガスの到達を容易にする。In addition, the temperature-sensitive material (3) is an electrode (2a) and an electrode (2b).
Although it is provided on the element substrate (1), the electrode (2a) and the electrode (2b) may be provided on the element substrate (1). At this time, the element substrate (1) K is provided with the temperature-sensitive material (3) limited in size so that it contacts a part of the electrode (2a) and the electrode (2b), so that the gas reaches the element substrate (1). Make it easier.
又、この発明において感温材料で素子基板を構成し、感
ガス材料を分離させ友電極を挾んで般社ても前述した実
施例のものと同様な作用が得られる。Further, in the present invention, the same effect as that of the above-described embodiment can be obtained even if the element substrate is made of a temperature-sensitive material, the gas-sensitive material is separated, and the friend electrode is sandwiched between the elements.
第２図はこの発明の他の実施例を示す。この実施例の感
ガス感温素子は、感温材料または感ガス材料の一部から
なる筒状の素子基板（１）の外周面に多孔質面電極（ｚ
ａ） 、 （２ｂ）が互に分離して設けられ、前記素子
基板（１１の内周面に多孔質面電極（２ｃ）が設けられ
、互に分離した前記電極（ａ） ＃ （２１））間ＫＦ
ｉ、これらに一部を重ね合せて感温材料または感ガス材
料の他方（３）が設けられている。なお第２図中、 （
４１、（５１、（６）はリード線である。そして、この
実施例でも第１図（ム）。FIG. 2 shows another embodiment of the invention. The gas-sensitive temperature-sensitive element of this example has a porous surface electrode (z
a) and (2b) are provided separately from each other, a porous surface electrode (2c) is provided on the inner peripheral surface of the element substrate (11, and the electrodes (a) # (21) are separated from each other). Between KF
i. The other temperature-sensitive material or gas-sensitive material (3) is provided partially overlapping these materials. In addition, in Figure 2, (
41, (51, (6) are lead wires. Also in this embodiment, FIG. 1(m)).
（ＢＩＫ示す実施例のものと同様な作用が得られる。(A similar effect to that of the example shown in BIK can be obtained.
以上説明しえように、この発明によれば、温度およびガ
スの検出を１つの感ガス感温素子で行なうことができ、
しかも従来から用いられている安定性が高くしかも安価
な材料を用いることができるため、２つの素子を用いる
のに比べ。As explained above, according to the present invention, temperature and gas can be detected with one gas-sensitive temperature-sensitive element.
Furthermore, since it is possible to use conventionally used materials that are highly stable and inexpensive, compared to using two elements.
設賞スペースが小さく”てすみ、取付けが簡奥にでき、
高い信頼性をもつ安価な感ガス感温素子を提供できると
いう効果がある。The award space is small, and installation is easy and deep.
This has the effect of providing a highly reliable and inexpensive gas temperature sensing element.
第１図（ム） ｅ （Ｂ）はこの発明の一実施例による
感ガス感温素子を示す表面側、裏面側斜視図、第２図は
この発明の他の実施例による感ガス感温素子を示す斜視
図である。
（旧・・素子基板＠ （２ａ） ｅ （２ｂ） ＃
（２Ｃ）””多孔質面電極、すなわち第２．第３．第１
電極、（３１・・・感ガスまたは感温材料、 ＋４１
、 （５１、（６）・・・リード線。
なお９図中同一符号は同一または相当部分を示す。
代理人 葛 野 信 −
％＋＋ｎ
第２図FIG. 1(B) is a front side and back side perspective view showing a gas-sensitive thermosensitive element according to an embodiment of the present invention, and FIG. 2 is a perspective view of a gas-sensitive temperature-sensitive element according to another embodiment of the present invention. FIG. (Old...Element board @ (2a) e (2b) #
(2C) ""Porous surface electrode, i.e. the second. Third. 1st
Electrode, (31... gas-sensitive or temperature-sensitive material, +41
, (51, (6)... Lead wire. The same symbols in Figure 9 indicate the same or corresponding parts. Agent Shin Kuzuno - %++n Figure 2
Claims (1)
板、この基板の一面に設けた第１電極、この基板の他面
に間隔を置いて設けた第２および第３電極、これら第２
および第３電極と接触させて上記素子基板に設けた感温
また打感ガス材料の他方を備えた感ガス感温素子。 （２） 電極は多孔質面電極である特許請求の範囲第
１項記載の感ガス感温素子。 （３）特許請求の範囲第１項または第２項記載のものに
おいて、第２および第３電極上に感温または感ガス材料
の他方を設けた感ガス感温素子。[Claims] is> An element substrate made of 10,000 thermosensitive or gas-sensitive materials, a first electrode provided on one surface of this substrate, and second and third electrodes provided at intervals on the other surface of this substrate. electrode, these second
and a gas temperature sensing element comprising the other of the temperature sensing and impact gas materials provided on the element substrate in contact with a third electrode. (2) The gas temperature-sensitive element according to claim 1, wherein the electrode is a porous surface electrode. (3) A gas-sensitive temperature-sensitive element according to claim 1 or 2, wherein the other of the temperature-sensitive or gas-sensitive material is provided on the second and third electrodes.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4858382A JPS58166247A (en) | 1982-03-26 | 1982-03-26 | Gas-and temperature-sensitive element |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4858382A JPS58166247A (en) | 1982-03-26 | 1982-03-26 | Gas-and temperature-sensitive element |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS58166247A true JPS58166247A (en) | 1983-10-01 |
Family
ID=12807416
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4858382A Pending JPS58166247A (en) | 1982-03-26 | 1982-03-26 | Gas-and temperature-sensitive element |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58166247A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103033538A (en) * | 2012-12-20 | 2013-04-10 | 中国科学院微电子研究所 | Preparation method for flexible substrate-based sensitive film for detecting gas at normal temperature |
-
1982
- 1982-03-26 JP JP4858382A patent/JPS58166247A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103033538A (en) * | 2012-12-20 | 2013-04-10 | 中国科学院微电子研究所 | Preparation method for flexible substrate-based sensitive film for detecting gas at normal temperature |
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