JPS58162084A - Laser oscillator - Google Patents
Laser oscillatorInfo
- Publication number
- JPS58162084A JPS58162084A JP4456482A JP4456482A JPS58162084A JP S58162084 A JPS58162084 A JP S58162084A JP 4456482 A JP4456482 A JP 4456482A JP 4456482 A JP4456482 A JP 4456482A JP S58162084 A JPS58162084 A JP S58162084A
- Authority
- JP
- Japan
- Prior art keywords
- gas
- port
- supply port
- discharge
- tubes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
- H01S3/06—Construction or shape of active medium
- H01S3/07—Construction or shape of active medium consisting of a plurality of parts, e.g. segments
- H01S3/073—Gas lasers comprising separate discharge sections in one cavity, e.g. hybrid lasers
- H01S3/076—Folded-path lasers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/02—Constructional details
- H01S3/03—Constructional details of gas laser discharge tubes
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Optics & Photonics (AREA)
- Lasers (AREA)
Abstract
Description
【発明の詳細な説明】
本発明はレーザ発振装置に係り１％に並置され次複数の
放電管を有するレーザ発振装置に関するものである。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a laser oscillation device, and relates to a laser oscillation device having a plurality of discharge tubes arranged side by side.
レーザ発振装置は周知のように王としてレーザ放電管（
以下、放電管と称す）、この放電管に接続さＡ７ｔガス
冷却管、このカス冷却管に連結して設けらｎ、放電管お
よびガス冷却管内にガス媒体を循環させるブロア等から
構成場れている。このようなレーザ発振装置の従来例か
第１図および第２図に示されている。同図に示されてい
るように。As is well known, the king of laser oscillation devices is the laser discharge tube (
The field consists of an A7t gas cooling tube connected to this discharge tube (hereinafter referred to as a discharge tube), an A7t gas cooling tube connected to this waste cooling tube, and a blower that circulates a gas medium within the discharge tube and gas cooling tube. There is. A conventional example of such a laser oscillation device is shown in FIGS. 1 and 2. As shown in the same figure.
少なくともＪＲＩ放電管１ｍと第２放電管１ｂとが並列
に配置され、これらの放電管Ｈａ、Ｉｂにはガス供給口
２ｍ、２ｂおよびガス流出口３ｍ。At least 1 m of JRI discharge tubes and a second discharge tube 1b are arranged in parallel, and these discharge tubes Ha, Ib have gas supply ports 2m, 2b and gas outlet ports 3m.
３ｂを介してガス媒体４を循環させるブロア５が設けら
れている。すなわち第１放電管１ａには、１個のカス供
給口２１と２個のガス流出口３１とが、ＩＩ２放電管１
ｂにも同様、 １４Ｉ４ｈのガス供給口２ｂと２個の
ガスＲｔＢ口３ｂとが設けられている。A blower 5 is provided which circulates the gas medium 4 via 3b. That is, the first discharge tube 1a has one waste supply port 21 and two gas outlet ports 31, and the II2 discharge tube 1
Similarly, a 14I4h gas supply port 2b and two gas RtB ports 3b are provided in the gas RtB port 3b.
そして図中左側のブロア５より送られ之ガス媒体４は１
図中に実線の矢印で示さｎているように第１放電′＃１
ａの中央部に設けらｎｉガス供給口２ａより左右にわか
れて第１放電管ｌａ内を通り１その両端に夫々設けられ
次ガス流出口３ａより夫夫図中左側のブロア５および図
中右側のブロア５に戻ってくる。こｎと同じように図中
右側のブロア５より送らｎたガス媒体４は１図中に実線
の矢印で示さｒているように第２放電管１ｂの中央部の
カス供給口２ｂより左右にわかｎて第２放電管ｌｂ内を
通り、その両端に夫々設けられたガス流出口３ｂより図
中左側のブロア５および図中右側のブロア５に戻ってく
る。戻ってき友ガス媒体４は再び第１放電管１１％第２
放電管１ｂに送られ循環するが、このように従来のレー
ザ発振装置では、両数電管１ａ、ｌｂ内へのガス媒体４
の備積にブロア５を２台、ガス媒体４を冷却するｌＩＰ
交換器６を２台必要とするなど、ガス媒体４の循環にネ
＜゛の部品を必要としてい友。１次２台のブロア５によ
りカス媒体４を供給循環しているので、夫夫のブロア５
の送風量を同じにすることが難しく。The gas medium 4 sent from the blower 5 on the left side of the figure is 1
As indicated by the solid arrow in the figure, the first discharge '#1
The blower 5 on the left side in the figure and the right side in the figure Come back to Blower 5. In the same way, the gas medium 4 sent from the blower 5 on the right side of the figure is distributed to the left and right from the waste supply port 2b in the center of the second discharge tube 1b, as shown by the solid arrow in the figure. Then, the gas passes through the second discharge tube lb and returns to the blower 5 on the left side in the figure and the blower 5 on the right side in the figure from the gas outlet ports 3b provided at both ends thereof. Returning friend gas medium 4 again the first discharge tube 11% second
The gas medium 4 is sent to the discharge tubes 1b and circulated, but in this conventional laser oscillation device, the gas medium 4 is fed into the discharge tubes 1a and 1b.
Two blowers 5 are installed in the lIP to cool the gas medium 4.
The gas medium 4 circulation requires several parts, such as the need for two exchangers 6. Since the waste medium 4 is supplied and circulated by the two primary blowers 5, the husband's blower 5
It is difficult to maintain the same amount of air flow.
このため両数電管１ａ、ｌｂで送風量の違いによるアー
ク放電の発生する懸念があっ友。なお同図において９は
、図中に点線で示しであるようなレーザ九を折返す折返
し鏡、１０は反射させる反射鏡、１１はと９出す出力鏡
である。For this reason, there is a concern that arc discharge may occur due to the difference in air flow between the two electric tubes 1a and 1b. In the same figure, 9 is a folding mirror that folds back the laser 9 as shown by the dotted line in the figure, 10 is a reflecting mirror that reflects it, and 11 is an output mirror that outputs the laser beam 9.
本発明は以上の点に鑑みなされたものであり。The present invention has been made in view of the above points.
その目的とするところは、構造が簡単で放電の安定し皮
レーザ発振装置を提供するにある。The purpose is to provide a laser oscillation device with a simple structure and stable discharge.
すなわち本発明は、並列に配置した複数の放電管と、こ
れらの放電管の両端に夫々設けｔガス供給口およびガス
流出口と、放電管の両端に設け、かつガス供給口および
ガス流出口を夫々一括連通する共通管と、こｎら共通管
のガス供給口側およびガス流出口側に夫々設けた一括ガ
ス供給口および一括ガス流出口とで形成し友ことを％黴
とするものである。That is, the present invention has a plurality of discharge tubes arranged in parallel, a gas supply port and a gas outlet provided at both ends of these discharge tubes, and a gas supply port and a gas outlet provided at both ends of the discharge tube. It is formed by a common pipe that communicates with each other, and a collective gas supply port and a collective gas outlet provided on the gas supply port side and the gas outlet side of these common pipes, respectively. .
以下１図示し友実施例に基づいて本発明を説明する。第
３図および第４図には本発明の一実施例が示されている
。なお従来と同じ部品には同じ符号を付したので説明は
省略する。本実施例では並列に配置した＊＊のＩＩＩ放
亀管１ ａ、ｊ８２放亀管１ｂおよびｇａ放電管１ｃと
、こｎらの放電管１１、ｌｂ、ｌｃの両端に夫々設けた
カス供給口２Ｃおよびガス流出口３ｃと、放電管１ｍ、
ｌｂ。The present invention will be explained below based on one illustrated embodiment. An embodiment of the present invention is shown in FIGS. 3 and 4. Note that parts that are the same as those in the conventional model are given the same reference numerals, and therefore their explanations will be omitted. In this embodiment, the III discharge tubes 1a, J82 discharge tubes 1b and GA discharge tubes 1c arranged in parallel, and the waste supply ports provided at both ends of these discharge tubes 11, lb and lc, respectively. 2C and gas outlet 3c, discharge tube 1m,
lb.
ＩＣの両端に設け、ガス供給口２ｃおよびガス流出口３
Ｃを夫々一括遅逸する共通管１２と、これら共通管１２
のガス供給口２ｃ１４１１およびガス流出口３Ｃ％に夫
々設けた一括ガス供給口２および一括ガス流出口３とで
レーザ発振装置を形成した。A gas supply port 2c and a gas outlet 3 are provided at both ends of the IC.
Common pipes 12 that collectively delay C, and these common pipes 12
A laser oscillation device was formed by the bulk gas supply port 2 and the bulk gas outlet 3 provided at the gas supply port 2c1411 and the gas outlet 3C%, respectively.
このように端部のガス供給ロ２Ｃ１ガス流出口３Ｃに夫
々連通する共通管１２を、こｎら放電管ｌａ、ｌｂ、ｌ
ｃの両端部に配置し、この共通管１２のガス供給口２Ｃ
側には一括ガス供給ロ２％ガス流出口３Ｃ側には一括ガ
ス流出口３を設けてガス媒体４を循環させるようにした
ので“１図中実線の矢印で示しであるように一括ガス供
給口２より共通管１２に流入したガス媒体４は、ここか
られかれて並列に夫々のガス供給口２Ｃから夫々の放電
管１ａ、１ｂ、ｌｃ内を通り、他方端に設けである夫々
のガス流出口３Ｃから共通管１２、一括ガス流出口３を
通って流出するようになる。このように第１．第２．第
３放電管１ａ、ｌｂ。In this way, the common tubes 12 communicating with the gas supply hole 2C1 and the gas outlet 3C at the end are connected to the discharge tubes la, lb, l.
gas supply ports 2C of this common pipe 12.
A bulk gas supply port 3 is provided on the side, and a bulk gas outlet 3 is provided on the C side to circulate the gas medium 4. The gas medium 4 that has flowed into the common tube 12 from the port 2 is passed through the respective discharge tubes 1a, 1b, lc in parallel from the respective gas supply ports 2C to the respective gases provided at the other end. The gas flows out from the outlet 3C through the common tube 12 and the bulk gas outlet 3. In this way, the first, second, and third discharge tubes 1a, lb.
ＩＣと放電管１ａ、ｌｂ、ｌｃが多数並置されていても
、ガス媒体４をごｎら放電管１ｍ、ｌｂ。Even if a large number of ICs and discharge tubes 1a, 1b, and lc are arranged side by side, the gas medium 4 and the discharge tubes 1m, 1b.
１ｃの一方の端部から一括流入させ、他方の端部から一
括流出・循環させるようにし友ので、これらガス媒体４
の循環には１台の熱交換器６ａ、１台のブロア５ａてよ
くなる。すなわちガス媒体４はブロア５ｍから一括ガス
供給口２、共通管１２、カス供給口２Ｃ，各放電管１ａ
、ｒｉｂ、ｌｃ、ガス流出口３ｃ、共通管１２．一括ガ
ス流出口３゜熱交換ｔｊ１６ｍを経てブロア５ｍへと循
環する。従って従来に比べてこれら熱交換器５ａ、ブロ
ア５ａは共に１台でよくなって台数が低減でき、ガス媒
体４の循環に必要な部品を低減して構造を簡単にするこ
とかできると共に、１台のブロア５ｍで送風するので、
各放電管１ｍ、ｌｂ、ｌｃには同じ送風量を供給できる
・ようになり、従来のような送風量の違いによるアーク
放電発生の懸念をなくすことができ、安定し友ダロー放
電を得ることかできる。These gas medium 4
For circulation, only one heat exchanger 6a and one blower 5a are required. That is, the gas medium 4 is supplied from the blower 5m to the bulk gas supply port 2, the common tube 12, the waste supply port 2C, and each discharge tube 1a.
, rib, lc, gas outlet 3c, common pipe 12. The bulk gas is circulated through a 3° heat exchanger tj16m to a blower 5m. Therefore, compared to the past, only one heat exchanger 5a and one blower 5a are required, reducing the number of units, reducing the number of parts necessary for the circulation of the gas medium 4, and simplifying the structure. Since the air is blown with a 5m stand blower,
It is now possible to supply the same amount of air to each discharge tube (1m, lb, lc), eliminating the concern of arc discharge caused by differences in air amount, which was the case in the past, and achieving a stable, friendly discharge. can.
なお各放電管１ｍ、ｌｂ、ｌｃ内へのガス媒体４の供給
量の調節は、各放電管１ａ、ｌｂ、ｌｃのカス供給口２
ｃに未々設けたオリフィス１３によって調節すること０
ができる。The amount of gas medium 4 supplied into each discharge tube 1m, lb, lc can be adjusted by using the waste supply port 2 of each discharge tube 1a, lb, lc.
It can be adjusted by the orifice 13 provided in c.
I can do it.
上端のように本発明は、ガス媒体を並列に配置し九儂数
の放電管に一括して供給・循環させるようにしたので、
一括して供給・循環できるようになって、１台の熱交換
器、１台のブロアでよくなリ、構造が簡単で放電の安定
し皮し−ザ発撮装置を得ることができる。As shown at the top, the present invention arranges the gas medium in parallel and supplies and circulates it to nine discharge tubes at once.
Since it is possible to supply and circulate all at once, a single heat exchanger and a single blower are required, and a simple structure and stable discharge can be obtained.
＃！１図は従来のレーザ発振装置の縦断＠面図。
第２図は従来のレーザ発振装置のガス供給口近傍の斜視
図、第３図は本発明のレーザ発振装置の一実施例の縦断
清面図、第４図は本発明のレーザ発振装置の一実施例の
ガス供給日清の共通管近傍の斜視図である。
１ト・・ｊｌｌｌｌ放電管、ｌｂ・・・第２放電管、１
ｃ・・・第３放電管、２・・・一括ガス供給口、２ｃ・
・・ガス供給口％ ３・・・一括ガス流出口％３Ｃ・・
・ガス流出口。
＄１月
第２圀
第３０#! Figure 1 is a vertical cross-sectional view of a conventional laser oscillation device. FIG. 2 is a perspective view of the vicinity of the gas supply port of a conventional laser oscillation device, FIG. 3 is a vertical cross-sectional view of an embodiment of the laser oscillation device of the present invention, and FIG. 4 is a perspective view of the laser oscillation device of the present invention. FIG. 2 is a perspective view of the vicinity of the common pipe of the gas supply Nissin in the example. 1t...jllll discharge tube, lb...second discharge tube, 1
c...Third discharge tube, 2...Bulk gas supply port, 2c...
...Gas supply port% 3...Bulk gas outlet%3C...
・Gas outlet. $January 2nd area 30th
Claims (1)
管の両端に夫々設けたガス供給口およびガス流ｉ−口と
、前記放電管の両端に設け、かつ前記ガス供給口および
ガス流出口を夫々一括連逸する共通管と、これら共通管
の前記ガス供給口側および前にガス流出口側に夫々設は
次一括ガス供給口および一括ガス流出口とで形成し友こ
とｔ特徴とするレーザ発振装置。1. Arranged in parallel 72: A plurality of discharge tubes, a gas supply port and a gas flow port provided at both ends of the discharge tubes, and a gas supply port and a gas flow port provided at both ends of the discharge tubes, respectively. It is characterized by forming a common pipe which connects the outflow ports all at once, and a collective gas supply port and a collective gas outflow port respectively provided on the gas supply port side and the gas outflow port side in front of these common pipes. Laser oscillation device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4456482A JPS58162084A (en) | 1982-03-23 | 1982-03-23 | Laser oscillator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4456482A JPS58162084A (en) | 1982-03-23 | 1982-03-23 | Laser oscillator |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS58162084A true JPS58162084A (en) | 1983-09-26 |
Family
ID=12694986
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4456482A Pending JPS58162084A (en) | 1982-03-23 | 1982-03-23 | Laser oscillator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58162084A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6112089A (en) * | 1984-06-16 | 1986-01-20 | トルンプフ・ゲーエムベーハー・ウント・コンパニー | Folded optical beam carbon dioxide gas laser |
-
1982
- 1982-03-23 JP JP4456482A patent/JPS58162084A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6112089A (en) * | 1984-06-16 | 1986-01-20 | トルンプフ・ゲーエムベーハー・ウント・コンパニー | Folded optical beam carbon dioxide gas laser |
| JPS6379387A (en) * | 1984-06-16 | 1988-04-09 | トルンプフ・ゲーエムベーハー・ウント・コンパニー | Carbon dioxide laser |
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