JPS58158028A - Production of magnetic recording medium - Google Patents
Production of magnetic recording mediumInfo
- Publication number
- JPS58158028A JPS58158028A JP57041275A JP4127582A JPS58158028A JP S58158028 A JPS58158028 A JP S58158028A JP 57041275 A JP57041275 A JP 57041275A JP 4127582 A JP4127582 A JP 4127582A JP S58158028 A JPS58158028 A JP S58158028A
- Authority
- JP
- Japan
- Prior art keywords
- film
- permalloy
- recording
- medium
- recording medium
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 5
- 229910000889 permalloy Inorganic materials 0.000 claims abstract description 21
- 230000005415 magnetization Effects 0.000 claims abstract description 11
- 239000000758 substrate Substances 0.000 claims abstract description 8
- 238000001771 vacuum deposition Methods 0.000 claims abstract description 4
- 239000010408 film Substances 0.000 claims description 61
- 238000007738 vacuum evaporation Methods 0.000 claims description 6
- 238000000034 method Methods 0.000 claims description 5
- 239000010409 thin film Substances 0.000 claims description 3
- 238000000151 deposition Methods 0.000 abstract description 12
- 230000008021 deposition Effects 0.000 abstract description 12
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 abstract description 6
- 239000001301 oxygen Substances 0.000 abstract description 6
- 229910052760 oxygen Inorganic materials 0.000 abstract description 6
- 239000010410 layer Substances 0.000 description 13
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 229910052786 argon Inorganic materials 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 2
- 230000008020 evaporation Effects 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 2
- 239000000696 magnetic material Substances 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 239000002356 single layer Substances 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 239000002355 dual-layer Substances 0.000 description 1
- 238000000407 epitaxy Methods 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 239000002861 polymer material Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/62—Record carriers characterised by the selection of the material
- G11B5/64—Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent
- G11B5/66—Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent the record carriers consisting of several layers
- G11B5/672—Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent the record carriers consisting of several layers having different compositions in a plurality of magnetic layers, e.g. layer compositions having differing elemental components or differing proportions of elements
Landscapes
- Magnetic Record Carriers (AREA)
- Manufacturing Of Magnetic Record Carriers (AREA)
- Thin Magnetic Films (AREA)
Abstract
Description
【発明の詳細な説明】
本発明は垂直記録方式に適した磁気記録媒体の製造方法
に関する。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a method for manufacturing a magnetic recording medium suitable for perpendicular recording.
短波長記録特性の優れた磁気記録方式として、垂直記録
方式がある。この方式においては媒体の膜面に垂直方向
が磁化容易軸である垂直記録媒体が必要となる。このよ
うな媒体に信号を記録すると残留磁化は媒体の膜面に垂
直方向を向き、従って信号が短波長になる程媒体内反磁
界は減少し、優れた再生出力が得られる。垂直記録媒体
は高分子材料あるいは非磁性金属等の非磁性材料から成
る基板上に、ｃｏとＯｒを主成分とし垂直方向に磁化容
易軸を有する磁性層（以下この磁性層を■−Ｏｒ垂直磁
化膜と呼ぶ。）をスパッタリング法あるいは真空蒸着法
により形成したものである。しかし非磁性基板上に直接
にの−（４直磁化膜を形成した垂直記録媒体（以下この
媒体を単層膜媒体と呼ぶ）は、信号を記録再生する際の
効率が低い。これを改善するために２層膜媒体が開発さ
れている。A perpendicular recording method is a magnetic recording method with excellent short wavelength recording characteristics. This method requires a perpendicular recording medium whose axis of easy magnetization is perpendicular to the film surface of the medium. When a signal is recorded on such a medium, the residual magnetization is oriented perpendicularly to the film surface of the medium, and therefore, the shorter the signal wavelength, the smaller the demagnetizing field within the medium, and the better the reproduced output. Perpendicular recording media have a magnetic layer (hereinafter referred to as ■-Or perpendicular magnetization) on a substrate made of a non-magnetic material such as a polymeric material or a non-magnetic metal. ) is formed by sputtering or vacuum evaporation. However, perpendicular recording media (hereinafter referred to as single-layer media) in which four directly magnetized films are formed directly on a non-magnetic substrate have low efficiency when recording and reproducing signals. A two-layer film medium has been developed for this purpose.
これは高分子材料あるいは非磁性金属等の非磁性材料か
ら成る基板とＣｏ−０ｒ垂直磁化膜との間に、膜面内に
磁化容易軸を有するパーマロイ薄膜より成る磁性層を設
けたものである。この様な構造を。This is a device in which a magnetic layer made of a permalloy thin film having an axis of easy magnetization in the plane of the film is provided between a substrate made of a non-magnetic material such as a polymer material or a non-magnetic metal and a Co-0r perpendicularly magnetized film. . A structure like this.
有する２層膜媒体を用いれば、単層膜媒体に比べ記録効
率及び再生効率が改善され、特に、公知の補助磁極励磁
型垂直ヘッドにより信号を記録再生する際の効率改善が
顕著である。By using a dual-layer film medium, recording efficiency and reproduction efficiency are improved compared to a single-layer film medium, and the efficiency improvement is particularly remarkable when recording and reproducing signals using a known auxiliary pole-excited vertical head.
■−Ｏｒ垂直磁化膜を得るためには稠密大方構造のＣ軸
を膜面に垂直方向に配向させることが必要であるが、２
層膜媒体の場合には■−ＣｒｌｌｌＥのＣ軸配向性がパ
ーマロイ膜の配向性に影響される。この原因としては［
有］−Ｏｒ膜形成時のエピタキシーの効果が考えられ、
パーマロイ膜上にＣ軸配向性の良い［有］−α膜を得る
ためには、パーマロイの（１１１）面が膜面に平行にな
るように結晶を成長させなければならない。真空蒸着法
によりパーマロイ膜を形成する場合には、上記の要求を
満たすために、膜の析出速度と真空蒸着装置内部の酸素
分圧との比Ｘを限定する必要があることが実験により明
らかになった。■In order to obtain a -Or perpendicularly magnetized film, it is necessary to orient the C axis of the dense bulk structure in the direction perpendicular to the film surface.
In the case of a layered film medium, the C-axis orientation of -CrllE is influenced by the orientation of the permalloy film. The reason for this is [
The effect of epitaxy during formation of -Or film is considered,
In order to obtain a [with]-α film with good C-axis orientation on a permalloy film, a crystal must be grown so that the (111) plane of permalloy is parallel to the film surface. Experiments have revealed that when forming permalloy films by vacuum evaporation, it is necessary to limit the ratio X between the film deposition rate and the oxygen partial pressure inside the vacuum evaporation apparatus in order to meet the above requirements. became.
本発明は上記Ｘを限定することにより、真空蒸着法で配
向性の良いパーマロイ膜を形成し、もって記録、再生効
率の優れた磁気記録媒体を製造する方法を提供するもの
である。The present invention provides a method of manufacturing a magnetic recording medium with excellent recording and reproducing efficiency by forming a permalloy film with good orientation by a vacuum evaporation method by limiting the above-mentioned X.
以下具体的に本発明の説明を行う。The present invention will be specifically explained below.
パーマロイ膜を真空蒸着法にて形成する場合には、膜の
析出速度、残留ガスの種類及び量が、膜の特性に大きく
影響を及ぼす。実験の結果、パーマロイ膜の平均の析出
速度と真空蒸着装置内部のヤヵＧＥＥよ。オエヤ２８、
。、Ｚ 以上にす秒・Ｔｏｒｒ
ることにより、（１１１）面が膜面に平行に配向したパ
ーマロイ膜が得られ、その結果、特性の優れた２層膜媒
体が得られることが明らかになった。以下にこのことを
説明する。When a permalloy film is formed by vacuum evaporation, the deposition rate of the film and the type and amount of residual gas greatly affect the properties of the film. The experimental results show the average deposition rate of the permalloy film and the internal GEE of the vacuum evaporation equipment. Oeya 28,
. It was revealed that a permalloy film in which the (111) plane is oriented parallel to the film surface can be obtained by increasing the temperature to more than , Z seconds Torr, and as a result, a two-layer film medium with excellent properties can be obtained. . This will be explained below.
２層膜媒体においてはＣｏ−０ｒ膜の（００２）面に関
するロッキングカーブの半値幅Δθ５゜を１８度以下に
しないと、信号を記録再生する際の特性が悪い。In a two-layer film medium, unless the half-width Δθ5° of the rocking curve with respect to the (002) plane of the Co-0r film is set to 18 degrees or less, the characteristics when recording and reproducing signals will be poor.
第１図に１例を示す。なおΔθ５ｏは（００２）面の配
向の分散を表現していると考えられ、この値が小さい程
配向性が良い。第１図の縦軸は２層膜媒体に波長０．５
μｍの信号を記録再生した際の出力の相対値を示し、横
軸はＣｏ−０ｒ膜のΔθ５ｏを示す。また記録及び再生
用ヘッドとしては補助磁極励磁型垂直ヘッドを使用し、
２層膜媒体におけるパーマロイ膜及び■−Ｏｒ膜の厚み
をいずれも０．２μｍとした。An example is shown in FIG. Note that Δθ5o is considered to express the dispersion of the orientation of the (002) plane, and the smaller this value is, the better the orientation is. The vertical axis in Figure 1 is the wavelength of 0.5 for the two-layer film medium.
The relative value of the output when recording and reproducing a μm signal is shown, and the horizontal axis shows Δθ5o of the Co-0r film. In addition, an auxiliary magnetic pole excitation type vertical head is used as the recording and reproducing head.
The thicknesses of the permalloy film and the ■-Or film in the two-layer film medium were both 0.2 μm.
Δθ団が１８度以上になると出力が急激に劣化する。When the Δθ group exceeds 18 degrees, the output deteriorates rapidly.
この原因はΔθ５ｏが１８度以下では■−Ｏｒ膜の残留
磁化は膜面に垂直方向を向いているが、１８度以上にな
ると膜面内を向いてしまうためではないかと思われる。The reason for this seems to be that when Δθ5o is less than 18 degrees, the residual magnetization of the ■-Or film is oriented perpendicular to the film plane, but when it is 18 degrees or more, it is oriented in the film plane.
実験の結果、２層膜媒体においてΔθ５ｏが１８度以下
のＧｏ−Ｏｒ垂直磁化膜を得るためには、真空蓋以上に
して膜を形成すれば良いことが明らかになった。As a result of experiments, it has become clear that in order to obtain a Go-Or perpendicular magnetization film with Δθ5o of 18 degrees or less in a two-layer film medium, it is sufficient to form the film with a vacuum lid or higher.
クライオポンプにて蒸着装置内部を５ Ｘ １０ ’Ｔ
ｈｒｒの真空度にしてから、アルゴン、窒素及び酸素を
蒸着装置内部に導入し、パーマロイを蒸着して特性を調
べると、膜の析出速度及び酸素が影響を及ぼすことが明
らかになった。アルゴン及び窒素は、２Ｘ１０ ’ Ｔ
ｏｒｒまで導入して検討したが、■−ヶ膜に及ぼす影響
は見られなかった。The inside of the evaporation device was heated to 5 x 10'T using a cryopump.
Argon, nitrogen, and oxygen were introduced into the evaporation apparatus after the vacuum level was set to hrr, and permalloy was evaporated and its characteristics were investigated. It became clear that the deposition rate of the film and oxygen had an effect. Argon and nitrogen 2X10'T
Although the introduction of up to orr was investigated, no effect on the membrane was observed.
膜の析出速度と酸素分圧は、いずれもパーマロイ膜の特
性に影響を及ぼすが、それぞれが独立ではなく、これら
の比Ｘの形で影響していた。第２図に２層膜媒体におけ
るＣｏ−Ｏｒ膜の（ＯＯ２）面に関するΔθ５ｏとパー
マロイ膜蒸着時のＸとの関係を示す。曲線１，２，３及
び４はそれぞれ蒸着時の基板温度が２０，１５０，２５
０及び３ｏｏ℃の場合の関係を示す。なおパーマロイ膜
、Ｃｏ−０ｒ膜ともに膜厚は０．２μｍであり、Ｃｏ−
０ｒ膜は真空蒸着法にて、Ｔｏｏｏム／秒の析出速度で
形成した。パーマロイ膜蒸着時の基板温度が２５０℃の
時に、最も小さいΔθ５ｏの値が得られた。第２図より
パーマロイ膜蒸着時の基板温度が２５０℃の場合に、Ｘ
を２ Ｘ １ ｃＪ−Ｌ−以上にすることにより、１８
度秒・Ｔｏｒｒ
以下のΔθ５ｏの値を有するＣｏ −Ｏｒ膜が得られる
ことがわかる。２５０’Ｃ以外の場合には、Δθ５ｏが
１８度以下になるようなＸの値は、２５０℃の場合より
も大きくなる。従って２層膜媒体において、Δθ。The deposition rate and oxygen partial pressure of the film both affect the properties of the permalloy film, but each does not affect them independently, but in the form of their ratio X. FIG. 2 shows the relationship between Δθ5o regarding the (OO2) plane of the Co--Or film in a two-layer film medium and X at the time of permalloy film deposition. Curves 1, 2, 3, and 4 are for substrate temperatures of 20, 150, and 25, respectively, during deposition.
The relationship for the cases of 0 and 30°C is shown. The film thickness of both the permalloy film and the Co-0r film is 0.2 μm, and the Co-
The 0r film was formed by a vacuum evaporation method at a deposition rate of 100 mm/sec. The smallest value of Δθ5o was obtained when the substrate temperature during permalloy film deposition was 250°C. From Figure 2, when the substrate temperature during permalloy film deposition is 250°C,
By making 2 X 1 cJ-L- or more, 18
It can be seen that a Co-Or film having a value of Δθ5o of less than degrees seconds·Torr can be obtained. In cases other than 250'C, the value of X that makes Δθ5o 18 degrees or less is larger than that in the case of 250°C. Therefore, in a two-layer film medium, Δθ.
が１８度以下のＣｏ−０ｒ垂直磁化膜を得るためには、
パーマロイ膜蒸着時のＸの値を２×１０７−−１−秒・
Ｔｏｒｒ
以上にすることが必要である。In order to obtain a Co-0r perpendicular magnetization film in which the angle is 18 degrees or less,
The value of X during permalloy film deposition was set to 2×107−1− seconds・
It is necessary to set it to Torr or higher.
以上のように本発明によれば記録、再生効率などの特性
の優れた２層膜媒体が容易に得られる。As described above, according to the present invention, a two-layer film medium with excellent characteristics such as recording and reproducing efficiency can be easily obtained.
第１図は２層膜媒体に信号を記録し再生した場合の、出
力のΔθ関依存性を示す図、第２図は２層膜媒体におけ
る■−Ｏｒ膜のΔθ５ｏとパーマロイ膜蒸着時のＸとの
関係を示す図である。
代理人の氏名 弁理士 中 尾 敏 男 ほか１名第１
図
昶、５ｏ（１）
第２図
７−（ｆシ）Figure 1 shows the dependence of the output on Δθ when a signal is recorded and reproduced on a two-layer film medium, and Figure 2 shows the Δθ5o of the ■-Or film in the two-layer film medium and the X when permalloy film is deposited. FIG. Name of agent: Patent attorney Toshio Nakao and 1 other person No. 1
Fig. 5o (1) Fig. 2 7-(f)
Claims (1)
さらにその上に膜面に垂直方向に磁化容易軸を有し伽と
Ｏｒを主成分とする磁性層が形成されて成る磁気記録媒
体の製造方法において、上記パーマロイ薄膜を真空蒸着
法により形成する際に、特徴とする磁気記録媒体の製造
方法。A permalloy thin film is formed on the substrate by vacuum evaporation,
In a method for manufacturing a magnetic recording medium, in which a magnetic layer having an axis of easy magnetization perpendicular to the film surface and containing C and Or as main components is further formed thereon, the permalloy thin film is formed by a vacuum evaporation method. A method of manufacturing a magnetic recording medium characterized by:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57041275A JPS58158028A (en) | 1982-03-15 | 1982-03-15 | Production of magnetic recording medium |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57041275A JPS58158028A (en) | 1982-03-15 | 1982-03-15 | Production of magnetic recording medium |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS58158028A true JPS58158028A (en) | 1983-09-20 |
Family
ID=12603888
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP57041275A Pending JPS58158028A (en) | 1982-03-15 | 1982-03-15 | Production of magnetic recording medium |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58158028A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60129921A (en) * | 1983-12-16 | 1985-07-11 | Matsushita Electric Ind Co Ltd | Magnetic recording medium |
| JPS60254423A (en) * | 1984-05-31 | 1985-12-16 | Sony Corp | Production of vertically magnetizable recording medium |
| JPS6151814A (en) * | 1984-08-22 | 1986-03-14 | Teijin Ltd | Permalloy thin film and vertical magnetic recording medium |
-
1982
- 1982-03-15 JP JP57041275A patent/JPS58158028A/en active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60129921A (en) * | 1983-12-16 | 1985-07-11 | Matsushita Electric Ind Co Ltd | Magnetic recording medium |
| JPS60254423A (en) * | 1984-05-31 | 1985-12-16 | Sony Corp | Production of vertically magnetizable recording medium |
| JPH0550054B2 (en) * | 1984-05-31 | 1993-07-28 | Sony Corp | |
| JPS6151814A (en) * | 1984-08-22 | 1986-03-14 | Teijin Ltd | Permalloy thin film and vertical magnetic recording medium |
| JPH0430731B2 (en) * | 1984-08-22 | 1992-05-22 |
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