JPS5815346U - wafer rotation device - Google Patents

wafer rotation device

Info

Publication number
JPS5815346U
JPS5815346U JP10858781U JP10858781U JPS5815346U JP S5815346 U JPS5815346 U JP S5815346U JP 10858781 U JP10858781 U JP 10858781U JP 10858781 U JP10858781 U JP 10858781U JP S5815346 U JPS5815346 U JP S5815346U
Authority
JP
Japan
Prior art keywords
rotating shaft
wafer
holder
rotation device
suction surface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10858781U
Other languages
Japanese (ja)
Other versions
JPS629716Y2 (en
Inventor
圭一 柴田
Original Assignee
株式会社東芝
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社東芝 filed Critical 株式会社東芝
Priority to JP10858781U priority Critical patent/JPS5815346U/en
Publication of JPS5815346U publication Critical patent/JPS5815346U/en
Application granted granted Critical
Publication of JPS629716Y2 publication Critical patent/JPS629716Y2/ja
Granted legal-status Critical Current

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Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は従来のウェハ回転装置の要部断面図、第２図は
本考案のウェハ回転装置の要部断面図である。 ３：保持体、７：回転軸、９：吸着面、１０：排気孔、
１２，１２：加振機構。FIG. 1 is a sectional view of a main part of a conventional wafer rotation device, and FIG. 2 is a sectional view of a main part of a wafer rotation device of the present invention. 3: Holder, 7: Rotating shaft, 9: Adsorption surface, 10: Exhaust hole,
12, 12: Vibration mechanism.

Claims (1)

【実用新案登録請求の範囲】 下記構成を具備することを特徴とするウェハ回転装置。 （イ）一端部の端面がウェハを吸着保持する平面状の吸
着面に形成されかつ上記吸着面にて開口する排気孔が穿
設された回転軸。 （ロ）上記回転軸を軸支する保持体。 （ハ）上記回転軸の他端部に連結され上記回転軸を回転
させる回転駆動機構。 に）上記保持体に付設され上記保持体を介して上記吸着
面に吸着保持されたウェハに振動を付加する加振機構。[Claims for Utility Model Registration] A wafer rotation device characterized by having the following configuration. (a) A rotating shaft whose end face at one end is formed as a planar suction surface for suctioning and holding a wafer, and in which an exhaust hole is provided that opens at the suction surface. (b) A holder that supports the above rotating shaft. (c) A rotational drive mechanism that is connected to the other end of the rotating shaft and rotates the rotating shaft. B) A vibration mechanism that is attached to the holder and applies vibration to the wafer suctioned and held on the suction surface via the holder.
JP10858781U 1981-07-23 1981-07-23 wafer rotation device Granted JPS5815346U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10858781U JPS5815346U (en) 1981-07-23 1981-07-23 wafer rotation device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10858781U JPS5815346U (en) 1981-07-23 1981-07-23 wafer rotation device

Publications (2)

Publication Number Publication Date
JPS5815346U true JPS5815346U (en) 1983-01-31
JPS629716Y2 JPS629716Y2 (en) 1987-03-06

Family

ID=29902986

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10858781U Granted JPS5815346U (en) 1981-07-23 1981-07-23 wafer rotation device

Country Status (1)

Country Link
JP (1) JPS5815346U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62125780U (en) * 1986-01-30 1987-08-10

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5759438U (en) * 1980-09-26 1982-04-08

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5759438B2 (en) * 1972-06-16 1982-12-14 Hitachi Ltd

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5759438U (en) * 1980-09-26 1982-04-08

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62125780U (en) * 1986-01-30 1987-08-10
JPH043992Y2 (en) * 1986-01-30 1992-02-06

Also Published As

Publication number Publication date
JPS629716Y2 (en) 1987-03-06

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