JPS5815130A - Infrared detector - Google Patents
Infrared detectorInfo
- Publication number
- JPS5815130A JPS5815130A JP56113536A JP11353681A JPS5815130A JP S5815130 A JPS5815130 A JP S5815130A JP 56113536 A JP56113536 A JP 56113536A JP 11353681 A JP11353681 A JP 11353681A JP S5815130 A JPS5815130 A JP S5815130A
- Authority
- JP
- Japan
- Prior art keywords
- vessel
- sealed
- main body
- covering
- epoxy group
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 claims abstract description 11
- 229910052738 indium Inorganic materials 0.000 claims abstract description 10
- 238000001514 detection method Methods 0.000 claims abstract description 9
- 230000006698 induction Effects 0.000 claims abstract description 4
- 239000003822 epoxy resin Substances 0.000 claims description 8
- 229920000647 polyepoxide Polymers 0.000 claims description 8
- 229910052751 metal Inorganic materials 0.000 claims description 4
- 239000002184 metal Substances 0.000 claims description 4
- 238000001816 cooling Methods 0.000 abstract description 4
- 229910000889 permalloy Inorganic materials 0.000 abstract description 3
- 125000003700 epoxy group Chemical group 0.000 abstract 3
- 239000011347 resin Substances 0.000 abstract 3
- 229920005989 resin Polymers 0.000 abstract 3
- 239000007767 bonding agent Substances 0.000 abstract 1
- 230000007774 longterm Effects 0.000 abstract 1
- 239000004065 semiconductor Substances 0.000 description 9
- 238000007789 sealing Methods 0.000 description 6
- 239000000853 adhesive Substances 0.000 description 4
- 230000001070 adhesive effect Effects 0.000 description 4
- 239000011521 glass Substances 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- WPYVAWXEWQSOGY-UHFFFAOYSA-N indium antimonide Chemical compound [Sb]#[In] WPYVAWXEWQSOGY-UHFFFAOYSA-N 0.000 description 2
- PRPINYUDVPFIRX-UHFFFAOYSA-N 1-naphthaleneacetic acid Chemical compound C1=CC=C2C(CC(=O)O)=CC=CC2=C1 PRPINYUDVPFIRX-UHFFFAOYSA-N 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910000881 Cu alloy Inorganic materials 0.000 description 1
- 108010083687 Ion Pumps Proteins 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 238000002788 crimping Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/02—Constructional details
- G01J5/06—Arrangements for eliminating effects of disturbing radiation; Arrangements for compensating changes in sensitivity
- G01J5/061—Arrangements for eliminating effects of disturbing radiation; Arrangements for compensating changes in sensitivity by controlling the temperature of the apparatus or parts thereof, e.g. using cooling means or thermostats
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Radiation Pyrometers (AREA)
Abstract
Description
【発明の詳細な説明】
この発明は冷却を会費とする赤外線検出器の改良に関す
る−のである。DETAILED DESCRIPTION OF THE INVENTION This invention relates to an improvement in an infrared detector that requires cooling.
密閉容器の内部に装荷されて外部から冷却され低温中で
使用される例えばＩｎＳｂ等半導体赤外線検出素子を用
いた赤外線検出器が知られている。このような半導体赤
外線検出器は倒れも摂氏零下数十層又はそれ以下に冷却
された状態で所定の特性を発揮するものである。第１図
にこのような赤外線検出器の一例について断面を示す。2. Description of the Related Art Infrared detectors using semiconductor infrared detection elements such as InSb are known, which are loaded inside a closed container, cooled from the outside, and used at low temperatures. Such a semiconductor infrared detector exhibits predetermined characteristics even when it is cooled to several tens of degrees below zero Celsius or lower. FIG. 1 shows a cross section of an example of such an infrared detector.
この断面で逆Ｕ字状空間（ＩＧを擁している赤外線検出
器の容器（１）は例えばガラス製の本体壁面（２）と、
サファイア製蓋体（３）から成って真空容器を構成して
いる。本体壁面（２Ｊ Ｒ１逆Ｕ字状空間の脚緘を逆υ
字体外仙で区切る壁面Ｑυ、内側で区切る壁面（２）及
び下方端で区切る壁面（ハ）と、天井域を逆Ｕ字状空間
で区切る天井壁面（２）に便宜上分つことが出来る。蓋
体（３１は、本体壁面の天井壁面（至）と対応して天井
域空間をＶ切るよう罠１脚域外側壁面Ｑυの上方端１０
Ｋ例えばインジウム（４）で圧着され、逆Ｕ字状空間ｔ
−刺止している。本体の天井壁面内部には例えばインジ
ウムアンチモン赤外線検出素子（５）がエポキシ系樹脂
によシとシ付けられている。素子（５）の接続線（６１
）。In this cross section, the infrared detector container (1) containing the inverted U-shaped space (IG) has a main body wall (2) made of glass, for example,
A vacuum container is composed of a sapphire lid (3). Main body wall (2J R1 inverted U-shaped space leg slits
For convenience, it can be divided into a wall surface Qυ divided by the outside of the font, a wall surface (2) divided by the inside, a wall surface (c) divided by the lower end, and a ceiling wall surface (2) divided by an inverted U-shaped space. The lid body (31 is the upper end 10 of the outer wall surface Qυ of the trap leg area so as to cut the ceiling area space in a V manner corresponding to the ceiling wall surface (to) of the main body wall surface.
K is crimped with indium (4), for example, and an inverted U-shaped space t
-It is stuck. For example, an indium antimony infrared detection element (5) is attached to the inside of the ceiling wall of the main body using epoxy resin. Connection wire (61) of element (5)
).
（６２）は、逆Ｕ字状空間の脚域を通シ、本体下方端で
壁面（ハ）を貫通する各リード線（７１）、（７２）に
それぞれ導電接続されている。(62) are conductively connected to respective lead wires (71) and (72) passing through the leg area of the inverted U-shaped space and penetrating the wall surface (c) at the lower end of the main body.
この第１図の断面図で逆Ｕ字状空間を呈している容器内
部空間は実際には筒状の空間をなしていて、内側の壁面
（社）、（２）が区切る領域ｋｉ素子（５１の冷却用域
（８） Ｋ Ｔｏてられ、こ＼に例えば液体窒素をミニ
クーラーによシ導入して冷却する。The internal space of the container, which appears to be an inverted U-shaped space in the cross-sectional view of FIG. For example, liquid nitrogen is introduced into the cooling area (8) using a mini-cooler to cool the area.
このように構成された検出器は、真空容器をガラス製と
しているため機械的強ｆｊｌＫ制約があシ、本体壁面Ｑ
９の上方端面にインジウムを用ｉて蓋体（３）’を圧着
して容器を刺止する際充分大きな圧力をかけることがで
きない。このため刺止部分が低温になるとき相尚大きな
リークを生じることがある。Since the detector constructed in this way has a vacuum container made of glass, there is a mechanical strength fjlK restriction, and the main body wall surface Q
When using indium on the upper end surface of the container 9 to press the lid (3)' to secure the container, it is not possible to apply a sufficiently large pressure. For this reason, even larger leaks may occur when the pricked portion becomes cold.
この発明は上記の欠点を除去するためインジウムによる
剤止域管含む容器外側にエポキシ系樹脂を塗布して封止
域を完全に被覆し、さらに被覆されたエポキシ系樹脂全
体を覆うように例えばステンレス、銅又はパーマロイで
あってよｉ非磁性体金属ｎｏ薄い筒状キャップをかぶせ
ることによシ、塗布したエポキシ系樹脂の被覆を均一性
良好にする。このように構成することによって、インジ
ウムによる封止域の良好なシールド保護を行なうことが
でき、長時間にわたって良好な密閉状！１を維持できる
高信頼性赤外線検出器を提供出来る、以下この発明の実
施例について図面を用いて説明する。第２図断面図にこ
の例の半導体赤外線検出器を示す。図で第１図と抽き出
し＠ＶＣ付された番号を等しくしている個所は、同義の
個所である。In order to eliminate the above-mentioned drawbacks, this invention coats an epoxy resin on the outside of the container including the sealing area tube made of indium to completely cover the sealing area, and further covers the entire coated epoxy resin. By covering the cap with a thin cylindrical cap made of non-magnetic metal such as copper or permalloy, the coating of the applied epoxy resin can be coated with good uniformity. With this configuration, it is possible to provide good shielding protection for the sealing area with indium, and it is possible to maintain a good sealing state for a long time! Embodiments of the present invention, which can provide a highly reliable infrared detector capable of maintaining 1, will be described below with reference to the drawings. The sectional view in FIG. 2 shows this example of a semiconductor infrared detector. In the figure, the parts with the same numbers as those in FIG. 1 and marked with extraction @VC have the same meaning.
従って本体の逆Ｕ字体内側天井壁面０滲の円曲に半導体
検出素子（５）を増付け、゛この半導体検出素子を接続
線（６１）、（６２）を介して本体下方端を貫通する各
リード線（７１）、（７２） Ｋ電気的忙接続し、本体
の置載外壁壁面Ｑυの上方端面にインジウム（４）を用
いて、蓋体（３）を圧着して容器（１）を封止するまで
は第１図例と変らない。この例の特徴はこのあと容器（
１）の封止域を含む一部表面にエポキシ系樹脂を用いた
接着剤（９）を塗布し、さらに例えばパーマロイ等非磁
性金属製キャップ舖を前記接着剤（９）の土からかぶせ
るようにする。約５０℃でこれを乾燥した後、容器（１
）の内部を例えばイオンポンプを用いて充分真空にレチ
ツプオフすることにより半導体赤外線検出器が完成する
。このようにして封止された赤外線検出器はインジウム
による刺止域がエポキシ系樹脂で完全に＠ｌｊされ、気
密を充分Ｋｉ’ｉ保でき、これによシ封止域全体のシー
ルドを一層確実にてきることになる。又低温度のリーク
を低減でき容器の気密状態を長期にわたって良好に維持
でき、信頼性の高い封止が期待できる。さらにキャップ
（Ｑは外部からの誘導ノズルを防止し、半導体赤外線検
出素子への影響を低減でき、この素子本来の赤外線検出
特性を充分に発揮させる効果をもたらす。さらに＠６の
ガラスが補強されることから、チップオフ螢の赤外線検
出器の取扱い等による破損管防止できる利点管併せる。Therefore, a semiconductor detection element (5) is added to the circular curve of the ceiling wall inside the inverted U shape of the main body. Connect the lead wires (71) and (72) K electrically, and seal the container (1) by crimping the lid (3) using indium (4) on the upper end surface of the outer wall surface Qυ on which the main body is placed. Until it stops, it is no different from the example in Figure 1. The characteristic of this example is that the container (
Apply an adhesive (9) using epoxy resin to a part of the surface including the sealing area of 1), and then cover the adhesive (9) with a cap made of non-magnetic metal such as permalloy. do. After drying it at about 50°C, put it in a container (1
) is sufficiently vacuumed using, for example, an ion pump, to complete a semiconductor infrared detector. In the infrared detector sealed in this way, the indium puncture area is completely covered with epoxy resin, making it possible to maintain sufficient airtightness, which further ensures the shielding of the entire sealed area. I'll be coming to see you soon. In addition, low-temperature leakage can be reduced, the airtight state of the container can be maintained well over a long period of time, and highly reliable sealing can be expected. Furthermore, the cap (Q) prevents the induction nozzle from outside and reduces the influence on the semiconductor infrared detection element, which has the effect of fully demonstrating the inherent infrared detection characteristics of this element.Furthermore, the glass of @6 is reinforced. Therefore, the tip-off of the infrared detector has the advantage of preventing tube damage due to handling, etc.
このようにこの発明によればインジウムによる封止域を
接着剤で気！！に被覆することによシ刺止域の良好なシ
ールドを行なうことができ、長期にわた〉密閉状態を良
好に維持できる。さらにキャップによシ検出器自体への
外部誘導ノズルの影響を防止し、半導体赤外線検出素子
の特性を向上させ、さらに破損事故に対する強度を増大
させ信頼性の高い赤外線検出器を提供することができる
、In this way, according to this invention, the area sealed by indium can be sealed with adhesive! ! By covering the area, the puncture area can be well shielded, and the sealed state can be maintained well for a long period of time. Furthermore, the cap prevents the influence of the external induction nozzle on the detector itself, improves the characteristics of the semiconductor infrared detection element, and further increases the resistance against breakage accidents, providing a highly reliable infrared detector. ,
第１図は従来の半導体赤外線検出器の一例を示す縦断面
図、１Ｉｉ２図はこの発明の実施例半導体赤外線検出器
を示す縦断面図である。
（１ｍ・・・赤外線検出器の容器
（２）、０１）、に）、（ハ）、（財）・・・本体壁面
（３）・・・蓋体 （４）・・・インジウム
（５）・・・赤外線検出素子 （６１）、（６２）・
・・接続線（７１）、（７２）・・・リード！Ｉ （８
）・・・冷却用域（９）・・・接着剤
ａの・・・非磁性卒金属１ｉｌｔｓキャップ代理人 弁
理士 井 上 −男FIG. 1 is a longitudinal sectional view showing an example of a conventional semiconductor infrared detector, and FIG. 1Ii2 is a longitudinal sectional view showing an embodiment of the semiconductor infrared detector of the present invention. (1m...infrared detector container (2), 01), (c), (goods)...body wall (3)...lid (4)...indium (5) ...Infrared detection element (61), (62)・
...Connection wires (71), (72)...Leads! I (8
)...Cooling area (9)...Adhesive a...Non-magnetic graduated metal 1ilts cap agent Patent attorney Inoue -Male
Claims (1)
開口端縁と、この開口端縁管閉塞する蓋体とをインジウ
ムを用いて真空封止し、この封止域表面を含め九一部容
器表面をエポキシ系樹脂で被覆し、このエポキシ系樹脂
層外＠に非磁性体金属筒を備え、外部誘導ノズルを防止
し高強度にし九ことを特徴とする赤外線検出器。The opening edge of the main body of the container, which is equipped with an infrared detection element that operates in a cooled state, and the lid that closes this opening edge tube are vacuum-sealed using indium, and nine parts of the container including the surface of this sealed area are sealed. An infrared detector characterized in that the surface is coated with an epoxy resin and a non-magnetic metal tube is provided outside the epoxy resin layer to prevent external induction nozzles and to provide high strength.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56113536A JPS5815130A (en) | 1981-07-22 | 1981-07-22 | Infrared detector |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56113536A JPS5815130A (en) | 1981-07-22 | 1981-07-22 | Infrared detector |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5815130A true JPS5815130A (en) | 1983-01-28 |
Family
ID=14614803
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP56113536A Pending JPS5815130A (en) | 1981-07-22 | 1981-07-22 | Infrared detector |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5815130A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63126522A (en) * | 1986-11-03 | 1988-05-30 | エア・プロダクツ・アンド・ケミカルズ・インコーポレイテツド | Method of separating component of gas fluid |
-
1981
- 1981-07-22 JP JP56113536A patent/JPS5815130A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63126522A (en) * | 1986-11-03 | 1988-05-30 | エア・プロダクツ・アンド・ケミカルズ・インコーポレイテツド | Method of separating component of gas fluid |
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