JPS58150804A - Optical position detector - Google Patents
Optical position detectorInfo
- Publication number
- JPS58150804A JPS58150804A JP3330782A JP3330782A JPS58150804A JP S58150804 A JPS58150804 A JP S58150804A JP 3330782 A JP3330782 A JP 3330782A JP 3330782 A JP3330782 A JP 3330782A JP S58150804 A JPS58150804 A JP S58150804A
- Authority
- JP
- Japan
- Prior art keywords
- image sensor
- pattern
- scale plate
- light
- optical position
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000003287 optical effect Effects 0.000 title claims description 12
- 238000001514 detection method Methods 0.000 claims description 7
- 238000005259 measurement Methods 0.000 abstract description 4
- 238000010586 diagram Methods 0.000 description 4
- 230000005540 biological transmission Effects 0.000 description 3
- 238000007781 pre-processing Methods 0.000 description 2
- 241000668842 Lepidosaphes gloverii Species 0.000 description 1
- 238000005286 illumination Methods 0.000 description 1
- 230000005389 magnetism Effects 0.000 description 1
- 238000007493 shaping process Methods 0.000 description 1
- 230000008054 signal transmission Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/36—Forming the light into pulses
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Transmission And Conversion Of Sensor Element Output (AREA)
- Optical Transform (AREA)
Abstract
Description
【発明の詳細な説明】
本発明は、パターンの列を有する目盛板と、多数個の受
光素子から成るイメージセンサを利用し、これらの相対
的な位置又は移動量を検出する光学的位置検出装置に関
するものである。DETAILED DESCRIPTION OF THE INVENTION The present invention provides an optical position detection device that detects the relative position or amount of movement of a scale plate having a row of patterns and an image sensor consisting of a large number of light receiving elements. It is related to.
従来から移動距離により長さ等の測定を行なう装置は多
数知られているが、簡便にしかも精度良くなし得るもの
は極めて少ない０例えば磁気な利用した磁気式リニアス
ケールも実用化されているが、使用場合によっては利用
することができない場合がある。Many devices have been known that measure length and other things based on distance traveled, but there are very few that can do this simply and with high precision.For example, magnetic linear scales that use magnetism have been put into practical use, but Depending on the use case, it may not be possible to use it.
本発明の目的は、例えばＣＣＤ （Ｃｈａｒｇｅ Ｃｏ
ｕｐｌｅＤｅｖｉｃｅ電荷結合素子）等の受光素子を利
用して、位置や移動量を光学的に簡便に精度良く検出し
得る光学的位置検出装置を提供することにあり、その要
旨は、多数個の受光素子が配列された光電式のイメージ
センサと、任意の形状を有し光学的に識別し得るパター
ンが、列状にかつイメージセンサの有効長以下の任意の
間隔で配列された目盛板と、前記目盛板のパターンをイ
メージセンサに投影するための光源と、前記目盛板のパ
ターンの形状と間隔の組合せに対応するイメージセンサ
からの信号を受けて、予め記憶しであるパターンの形状
及び（又は）間隔を基にイメージセンサの位置を算出す
る演算回路とから構成され、目盛板のパターン列方向と
イメージセンサの受光素子の配列方向とが相対的に平行
移動可能とし、イメージセンサの目盛板に対する相対的
な位置又は移動量を検出することを特徴とするものであ
る。The object of the present invention is to use, for example, a CCD (Charge Co.
The object of the present invention is to provide an optical position detection device that can optically easily and accurately detect the position and amount of movement by using a photodetector such as a charge-coupled device (upleDevice). a photoelectric image sensor in which a photoelectric image sensor is arranged; a scale plate in which optically distinguishable patterns having arbitrary shapes are arranged in rows at arbitrary intervals less than or equal to the effective length of the image sensor; A light source for projecting the pattern on the plate onto an image sensor and a signal from the image sensor corresponding to the combination of the shape and spacing of the pattern on the scale plate, and the shape and/or spacing of the pattern that is stored in advance. It is composed of an arithmetic circuit that calculates the position of the image sensor based on It is characterized by detecting a position or amount of movement.
以下に本発明を図示の実施例に基づいて詳細に説明する
。The present invention will be explained in detail below based on illustrated embodiments.
ここで本発明の目盛板にいう任意の形状のパターンとは
、各パターンの高さ、巾などの寸法より成る形状が全て
等しい場合、または２種以上の異なる形状より成る場合
を含み、任意の間隔とは、パターンとパターンとの間隔
が全て等しい場合、または２種以上の異なる距離より成
る場合を舎むものとする。Here, the pattern of any shape referred to in the scale plate of the present invention includes cases where the shapes of each pattern are all the same in terms of dimensions such as height and width, or cases where the patterns are made of two or more different shapes, The term "interval" refers to the case where the distances between patterns are all equal, or the distances are two or more different distances.
８８１図及び第２図は本発明で使用するＣＣＤから成る
イメージセンサ１を示し、第１図の場合は巾Ｗ（給ｍ）
、縦ｗ’ （ｐｍ）の同じ大きさのｎ個の受光素子２
が一次元的に多数個配列されており、第２図では同様な
受光素子２が二次元的に横にｎ個、縦にｎ′個配列され
ている。これらの受光素子２は個々に独立した光感知素
子であり、イメージセンサｌの有効な長さは、第１図の
イメージセンサｌでは横方向にＬＯ＝ｎ・Ｗであり、第
２図のイメージセンサ１では横方向にＬＯ＝ ｎ・Ｗ、
縦方向にＬＯ′＝ｎ′ ・Ｗ′である。881 and 2 show an image sensor 1 composed of a CCD used in the present invention, and in the case of FIG. 1, the width W (width m)
, n light receiving elements 2 of the same size with vertical w' (pm)
A large number of light receiving elements 2 are arranged one-dimensionally, and in FIG. 2, similar light-receiving elements 2 are arranged two-dimensionally by n pieces horizontally and n' pieces vertically. These light-receiving elements 2 are individually independent light-sensing elements, and the effective length of the image sensor l is LO=n·W in the lateral direction for the image sensor l in FIG. 1, and the image sensor l in FIG. In sensor 1, LO=n・W in the lateral direction,
In the vertical direction, LO'=n'·W'.
第３図はイメージセンサ１と組合せて使用する目盛板３
を示しており、この目盛板３には、受光素子２の大きさ
よりも広い任意の巾−１のパターン４１が、各パターン
４の中心と中心とが任意の間隔Ｌｉ（ｐｍ）で配列され
ている。これらのパターン４１は、第３図の実施例にお
いてはその高さ同志が異なっているものとする。この目
盛板３を光透過型として使用する場合には、パターン４
は光を透過するスリットであることを要するが、光反射
型として用いる場合には、パターン４は他の部分と光反
射率が異なるようにしておけばよい。Figure 3 shows a scale plate 3 used in combination with the image sensor 1.
On this scale plate 3, patterns 41 having an arbitrary width -1 wider than the size of the light receiving element 2 are arranged with an arbitrary interval Li (pm) between the centers of each pattern 4. There is. In the embodiment shown in FIG. 3, these patterns 41 are assumed to have different heights. When using this scale plate 3 as a light transmission type, the pattern 4
The pattern 4 needs to be a slit that transmits light, but when used as a light reflection type, the pattern 4 may have a light reflectance different from that of other parts.
これらのイメージセンサ１と目盛板３とは、例えば第４
図に示すように配置されて光透過型として、または第５
図に示すように配置されて光反射型として測定に使用さ
れる。何れの場合においても、イメージセンサｌと光源
５とは、接続部材６により一体的に固定され、目盛板３
上のパターン４１の列方向に対して平行にかつ相対的に
移動し得るようになっている。なお、パターン４の配列
方向に長い光源５を使用すれば、光源５はイメージセン
サｌと共に移動しなくともよい。These image sensor 1 and scale plate 3 are, for example, the fourth
It can be placed as shown in the figure and used as a light transmission type
It is arranged as shown in the figure and used for measurement as a light reflection type. In either case, the image sensor l and the light source 5 are integrally fixed by a connecting member 6, and the scale plate 3
It can move parallel to and relative to the column direction of the upper pattern 41. Note that if the light source 5 is long in the direction in which the patterns 4 are arranged, the light source 5 does not have to move together with the image sensor l.
第４図の光透過型の光学系においては、光源５から照射
された照明光ρは、第６図のブロック図に示すようにパ
ターン４を有する目盛板３を透過して、イメージセンサ
ｌに目盛板３のパターン４を投影することになる。そし
てこのイメージセンサ１の各受光素子２から個々に出力
される出力信号は、演算回路１０に入力するようになっ
ている。演算回路ｌＯは、例えば波形成形をするための
信号前処理回路１１と、その出力を得てイメージセンサ
１の位置を計算する位置計算回路１２と、必要に応じて
イメージセンサｌの移動量等を示す指示計１３とにより
構成されている。更に、位置計算回路１２には、その出
力信号を基に、例えば位置制御を行うための信号を発す
る制御回路１４が接続されている。なお、第５図に示す
光反射型の光学系の場合でも信号処理は基本的に同じで
ある。In the light transmission type optical system shown in FIG. 4, the illumination light ρ irradiated from the light source 5 is transmitted through the scale plate 3 having a pattern 4 as shown in the block diagram of FIG. The pattern 4 of the scale plate 3 will be projected. Output signals output from each light receiving element 2 of this image sensor 1 are input to an arithmetic circuit 10. The arithmetic circuit 1O includes, for example, a signal preprocessing circuit 11 for shaping a waveform, a position calculation circuit 12 for calculating the position of the image sensor 1 based on the output thereof, and a calculation circuit 12 for calculating the movement amount of the image sensor 1 as necessary. The indicator 13 shown in FIG. Furthermore, a control circuit 14 is connected to the position calculation circuit 12, which generates a signal for performing position control, for example, based on the output signal thereof. Note that signal processing is basically the same even in the case of the light reflection type optical system shown in FIG.
本発明では、パターン４の形状と間隔を選択することに
より、幾つかの場合の位置又は移動量の検出を実現する
ことができる。In the present invention, by selecting the shape and spacing of the pattern 4, detection of the position or amount of movement can be realized in some cases.
例えば目盛板３のパターンの間隔Ｌｉを全て等しく、パ
ターンの巾Ｗｉが任意の大きさを有する場合には、各パ
ターン４ｉの位置と巾％１ｌｉ（ｉ＝１．２゜３、・・
・）は予め位置計算回路１２に記憶しであるものとし、
先ずイメージセンサｌの移動前に位置計算回路１２によ
り、イメージセンサｌの出力信号を基に、成るパターン
４ａを選択してその巾Ｗａの中心位置を計算する。この
ときイメージセンサｌ上の２番目の受光素子２ｐが、パ
ターン４ａの中心となるように基準点を定める。次にこ
のイメージセンサ１が移動し、パターン４をｍ個通過し
たとき、パターン４ａの中心がイメージセンサｌのｑ番
目の受光素子２ｑにあるとすれば、イメージセンサｌが
移動した距離りは、
Ｄ＝ｍ＊ ｗ＋ （ｐ−ｑ） ・％ｌｌａ ａ ａ
（１）となり、この（１）式を位置計算回路１２で計
算すればよい、なお、この移動は逆方向であっても同様
の計算により求めることができる。そしてイメージセン
サ１により、同時に必ず隣り合う２つのパターン４が完
全に感知できるように、パターン間隔Ｌｉを定めておけ
ば、目盛板３上のどの位置にイメージセンサ−が存在し
ても、イメージセンサー−の位置の計算が可能である。For example, if the intervals Li of the patterns on the scale plate 3 are all equal and the width Wi of the patterns is arbitrary, the position and width %1li of each pattern 4i (i=1.2°3, . . .
) is stored in the position calculation circuit 12 in advance,
First, before moving the image sensor l, the position calculation circuit 12 selects the pattern 4a based on the output signal of the image sensor l and calculates the center position of its width Wa. At this time, a reference point is determined so that the second light receiving element 2p on the image sensor l becomes the center of the pattern 4a. Next, when this image sensor 1 moves and passes m patterns 4, if the center of the pattern 4a is at the q-th light receiving element 2q of the image sensor l, then the distance that the image sensor l has moved is: D=m* w+ (p-q) ・%lla a a
(1), and this equation (1) can be calculated by the position calculation circuit 12. Note that this movement can be obtained by a similar calculation even in the opposite direction. If the pattern interval Li is determined so that the image sensor 1 can completely sense two adjacent patterns 4 at the same time, no matter where the image sensor is located on the scale plate 3, the image sensor It is possible to calculate the position of -.
また、目盛板３が第７図に示すようにパターン４の巾Ｗ
ｉ、パターン間隔Ｌ１が全て異なる場合に！
も、先の場合と同様の考えれってすれば、イメージセン
サ−の移動距離りは、
ｉ＝１
として求めることができる。但しこの場合、パターン４
の位置及び巾Ｗｉ、パターン間隔Ｌｉ（Ｌｘｌ、２、・
・・拳）の値は、先の場合と同様に予め位置計算回路１
２の中に記憶させておく必要がある。In addition, the scale plate 3 has a width W of the pattern 4 as shown in FIG.
i, when the pattern intervals L1 are all different! Also, if we consider the same idea as in the previous case, the moving distance of the image sensor can be found as i=1. However, in this case, pattern 4
position and width Wi, pattern interval Li (Lxl, 2, ・
The value of the fist) is determined in advance by the position calculation circuit 1 as in the previous case.
It is necessary to store it in 2.
イメージセンサ−の長さＬＯや、パターン間隔Ｌｉ、巾
Ｗｉの関係から生ずる分解能の制限から、前述の手段で
は目盛板３の長さが不足する場合がある。第８図に示す
応用例は、このような場合に対処するための目盛板３で
あり、全体を幾つかのブロックＢｋに分け、異なるブロ
ックＢでは、異なるパターン巾Ｗを用いるようにされて
いる。また、同一のブロックＢｋ内におけるパターン間
隔Ｌｋは互いに異なり、各ブロックＢｋ間での対応する
位置のパターン間隔Ｌｋは等しくなっている。このとき
位置計算回路１２に、パターン４にの位置及び巾Ｗｋと
ブロックＢｋとの関係、パターン間隔Ｌｋを記憶させて
おけば、イメージセンサｌの位置を求めることができる
。Due to resolution limitations caused by the relationship between the length LO of the image sensor, the pattern interval Li, and the width Wi, the length of the scale plate 3 may be insufficient in the above-mentioned means. The application example shown in FIG. 8 is a scale plate 3 to deal with such a case, and the entire scale is divided into several blocks Bk, and different block B uses different pattern widths W. . Further, the pattern intervals Lk within the same block Bk are different from each other, and the pattern intervals Lk at corresponding positions between each block Bk are equal. At this time, if the position of the pattern 4, the relationship between the width Wk and the block Bk, and the pattern interval Lk are stored in the position calculation circuit 12, the position of the image sensor l can be determined.
第９図は、例えば先に説明した場合の応用例であり、目
盛板３を幾つかのブロックＢｋに分割し、それぞれのブ
ロックＢｋ内でのパターン間隔Ｌｋは一定とし、異なる
ブロックＢでは異なるパターン間隔りを用いている。こ
れらの関係は、前述の場合と同様に位置計算回路１２に
記憶させればよく、長い目盛板３を用いることと等価に
することができる。FIG. 9 is an application example of the case described above, in which the scale plate 3 is divided into several blocks Bk, the pattern interval Lk within each block Bk is constant, and different blocks B have different patterns. It uses intervals. These relationships can be stored in the position calculation circuit 12 as in the case described above, and can be equivalent to using a long scale plate 3.
本発明に用いられるパターンの間隔りと巾Ｗの組合せの
碗を幾つか説明したが、パターン４の巾Ｗ、間隔りが目
盛板３上で位置が一義的に定まっている場合には、イメ
ージセンサ１の位置は基準点を予め定めなくとも検出可
能であり、当然にイメージセンサ１の移動距離を求める
ことができる。なお、パターン４の形状は巾Ｗだけでな
く高さも変化させ、例えば第２図に示した二次元的なイ
メージセンサｌを用いれば、更に多くの間隔と形状の組
合せが可能となる。また、この二次元のイメージセンサ
１については、横方向だけでなく縦方向にもパターンを
配列した目盛板を用いること″により、イメージセンサ
ｌの二次元方向の相対的位置又は移動量を求めることが
できる。Although several bowls with combinations of pattern spacing and width W used in the present invention have been described, if the width W of the pattern 4 and the spacing are uniquely determined on the scale plate 3, the image The position of the sensor 1 can be detected without predetermining a reference point, and naturally the moving distance of the image sensor 1 can be determined. Note that the shape of the pattern 4 can be varied not only in width W but also in height. For example, if a two-dimensional image sensor l shown in FIG. 2 is used, even more combinations of spacing and shape are possible. Furthermore, regarding this two-dimensional image sensor 1, the relative position or amount of movement of the image sensor l in the two-dimensional direction can be determined by using a scale plate with patterns arranged not only in the horizontal direction but also in the vertical direction. Can be done.
、以上説明したように本発明に係る光学的位置検出装置
は、簡便な演算処理による相対的位置と移動量を求める
ことが可能であり、測定分解能を受光゛素子の大きさと
することができ、測定精度も高く、産業上有為なもので
ある。As explained above, the optical position detection device according to the present invention is capable of determining the relative position and amount of movement through simple arithmetic processing, and the measurement resolution can be set to the size of the light receiving element. It has high measurement accuracy and is useful in industry.
第１図は受光素子を一次元的に配列したイメージセンサ
の平面図、第２図は受光素子を二次元的に配列したイメ
ージセンサの平面図、第３図は目盛板の正面図、第４図
は光源、目盛板及びイメージセンサを光透過型に配置し
た光学系の構成図。
第５図は光源、目盛板及びイメージセンサを光反射型に
配置した光学系の構成図、第６図は信号の伝達系を示す
ブロック図、第７図、第８図、第９図は目盛板の他の実
施例の正面図である。
符号ｌはイメージセンサ、２は受光素子、３は目盛板、
４はパターン、５は光源、ｌＯは演算回路、１１は信号
前処理回路、１２は位置計算回路、１３は指示計、Ｗｉ
はパターンの巾の寸法、Ｌｉはパターン間隔である。
特許出願人 京浜電測器株式会社
簡１ａ１
第２ｒｉ！Ｊ
Ｉ３Ｅ
第６１！１Fig. 1 is a plan view of an image sensor in which light-receiving elements are arranged one-dimensionally, Fig. 2 is a plan view of an image sensor in which light-receiving elements are arranged two-dimensionally, Fig. 3 is a front view of the scale plate, and Fig. 4 The figure is a configuration diagram of an optical system in which a light source, a scale plate, and an image sensor are arranged in a light-transmissive manner. Figure 5 is a configuration diagram of an optical system in which a light source, a scale plate, and an image sensor are arranged in a light-reflecting manner. Figure 6 is a block diagram showing a signal transmission system. Figures 7, 8, and 9 are scales. FIG. 7 is a front view of another embodiment of the plate. Symbol l is an image sensor, 2 is a light receiving element, 3 is a scale plate,
4 is a pattern, 5 is a light source, IO is an arithmetic circuit, 11 is a signal preprocessing circuit, 12 is a position calculation circuit, 13 is an indicator, Wi
is the width dimension of the pattern, and Li is the pattern interval. Patent applicant: Keihin Densokki Co., Ltd. Simple 1a1 2nd ri! J I3E No. 61!1
Claims (1)
ンサと、任意の形状を有し光学的に識別し得るパターン
が、列状にかつイメージセンサの有効長以下の任意の間
隔で配列された目盛板と、前記目盛板のパターンをイメ
ージセンサに投影するための光源と、前記目盛板のパタ
ーンの形状と間隔の組合せに対応するイメージセンサか
らの信号を受けて、予め記憶しであるパターンの形状及
び（又は）間隔を基にイメージセンサの位置を算出する
演算回路とから構成され、目盛板のパターン列方向とイ
メージセンサの受光素子の配列方向とが相対的に平行移
動可能とし、イメージセンサの目盛板に対する相対的な
位置又は移動量を検出することを特徴とする光学的位置
検出装置。 ２、 目盛板のパターンを複数個のブロックに分割し、
各ブロック間で対応するパターンの形状又は間隔の何れ
かが異なるようにした特許請求の範囲第１項記載の光学
的位置検出装置。 ３、 目盛板のパターンを光透過的にイメージセンサに
投影する特許請求の範囲第１項記載の光学的位置検出装
置。 ４、 目盛板のパターンを光反射的にイメージセンサに
投影する特許請求の範囲第１項記載の光学的位置検出装
置。[Claims] 1. A photoelectric image sensor in which a large number of light-receiving elements are arranged, and an optically distinguishable pattern having an arbitrary shape arranged in a row and having a length shorter than the effective length of the image sensor. Receiving a signal from an image sensor corresponding to a combination of scale plates arranged at arbitrary intervals, a light source for projecting the pattern of the scale plate onto an image sensor, and the shape and spacing of the pattern of the scale plate, It is composed of an arithmetic circuit that calculates the position of the image sensor based on the shape and/or interval of the pattern that is stored in advance, and the pattern row direction of the scale plate and the arrangement direction of the light-receiving elements of the image sensor are relative to each other. An optical position detection device that is capable of parallel movement and detects the relative position or amount of movement of an image sensor with respect to a scale plate. 2. Divide the scale plate pattern into multiple blocks,
2. The optical position detecting device according to claim 1, wherein either the shapes or the intervals of the corresponding patterns are different between the blocks. 3. The optical position detection device according to claim 1, wherein the pattern of the scale plate is projected onto the image sensor in a transparent manner. 4. The optical position detection device according to claim 1, which projects the pattern of the scale plate onto the image sensor in a light reflective manner.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3330782A JPS58150804A (en) | 1982-03-03 | 1982-03-03 | Optical position detector |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3330782A JPS58150804A (en) | 1982-03-03 | 1982-03-03 | Optical position detector |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1582587A Division JPS6333603A (en) | 1987-01-24 | 1987-01-24 | Optical position detector |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58150804A true JPS58150804A (en) | 1983-09-07 |
| JPS6232403B2 JPS6232403B2 (en) | 1987-07-14 |
Family
ID=12382894
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3330782A Granted JPS58150804A (en) | 1982-03-03 | 1982-03-03 | Optical position detector |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58150804A (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS633220A (en) * | 1986-06-23 | 1988-01-08 | Keihin Densokuki Kk | Optical linear scale |
| JPS6333603A (en) * | 1987-01-24 | 1988-02-13 | Keihin Densokuki Kk | Optical position detector |
| EP0350158A2 (en) * | 1988-07-08 | 1990-01-10 | Parker Hannifin Corporation | Position sensing device |
| US5258931A (en) * | 1988-07-08 | 1993-11-02 | Parker-Hannifin Corporation | Precision electronic absolute and relative position sensing device and method of using same |
| JP2008014739A (en) * | 2006-07-05 | 2008-01-24 | Mitsutoyo Corp | Two-dimensional encoder and scale thereof |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5185737A (en) * | 1974-12-27 | 1976-07-27 | Yokogawa Electric Works Ltd | HENIHENKANKI |
-
1982
- 1982-03-03 JP JP3330782A patent/JPS58150804A/en active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5185737A (en) * | 1974-12-27 | 1976-07-27 | Yokogawa Electric Works Ltd | HENIHENKANKI |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS633220A (en) * | 1986-06-23 | 1988-01-08 | Keihin Densokuki Kk | Optical linear scale |
| JPS6333603A (en) * | 1987-01-24 | 1988-02-13 | Keihin Densokuki Kk | Optical position detector |
| EP0350158A2 (en) * | 1988-07-08 | 1990-01-10 | Parker Hannifin Corporation | Position sensing device |
| US5258931A (en) * | 1988-07-08 | 1993-11-02 | Parker-Hannifin Corporation | Precision electronic absolute and relative position sensing device and method of using same |
| JP2008014739A (en) * | 2006-07-05 | 2008-01-24 | Mitsutoyo Corp | Two-dimensional encoder and scale thereof |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6232403B2 (en) | 1987-07-14 |
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