JPS58139436A - Manipulator for plane moving device - Google Patents
Manipulator for plane moving deviceInfo
- Publication number
- JPS58139436A JPS58139436A JP961183A JP961183A JPS58139436A JP S58139436 A JPS58139436 A JP S58139436A JP 961183 A JP961183 A JP 961183A JP 961183 A JP961183 A JP 961183A JP S58139436 A JPS58139436 A JP S58139436A
- Authority
- JP
- Japan
- Prior art keywords
- shaft
- rack
- slide
- converter
- pinion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Wire Bonding (AREA)
Abstract
Description
【発明の詳細な説明】
本発明は、平面内で移動台を任意の方向に移動させるよ
うにした平面移動装置を操作するためのマニピュレータ
に関する。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a manipulator for operating a plane moving device that moves a moving table in any direction within a plane.
一般に半導体ワイヤボンダーのように工具をＸＹ方向に
移動させつつ加工を行なう装置においては、工具等を支
承した移動台をＸ方向及びＹ方向に移動させるようにし
た平面移動装置が用いられている。この種の移動装置と
して、移動台をＸ方向及びＹ方向に移動させるためのモ
ータをマニピュレータにより遠隔操作するようにした４
ｉｓ置が提案されでいる。Generally, in a device such as a semiconductor wire bonder that performs processing while moving a tool in the X and Y directions, a planar moving device is used in which a moving table supporting the tools and the like is moved in the X and Y directions. As this type of moving device, the motor for moving the moving table in the X direction and the Y direction is remotely controlled by a manipulator4.
is location has been proposed.
しかしながら従来のこの樵のマニピュレータは操作レバ
ーをＸ方向またはＹ方向に倒している間スイッチを閉じ
てＸ方向またはＹ方向のモータを１ＫｉＩＩ！７するた
めの信号を発生するようになっていたため、操作レバー
の―きが移動台の−きに対応せず、操作を行ない龜い欠
点があった。However, the conventional manipulator of this woodcutter closes the switch while tilting the control lever in the X or Y direction and operates the motor in the X or Y direction for 1 KiII! 7, the movement of the operating lever did not correspond to the movement of the movable table, making it slow to operate.
本発鳴の目的は、操作レバーの動きを移動台の―きに対
応させることができるようにした平面移動偏置用マニピ
ュレータを提供することにある。The purpose of the present invention is to provide a manipulator for planar movement and eccentric positioning in which the movement of the operating lever can be made to correspond to the movement of the moving table.
以下開示の実施例により本発鳴をＩＰｌ＆細に説明する
。嬉１図及び第２図に示すように、固定位置に配置され
たマニピュレータ台ｌの四隅には、パネル−９軸２が起
立されており、このパネル固足軸２にパネル３が固定さ
れでいる。マニピュレータ台ｌにはＸ方向に抵びるｖ＃
Ｉを備えた１対の平行なＸ方向スライドガイド４Ａ及び
４Ｂが取付けられ、各スライドガイド４ム、４Ｂ間に同
じくＸ方向に砥びるＶ壽を両儒画に有するＸ方向スライ
ド５が配置されている。Ｘ方向スライドガイド４Ａ。This emission will be explained in detail below using the disclosed embodiments. As shown in Figures 1 and 2, panel-9 shafts 2 are erected at the four corners of the manipulator table l placed at a fixed position, and a panel 3 is fixed to this panel-fixing shaft 2. There is. The manipulator table l has v# resisting in the X direction.
A pair of parallel X-direction slide guides 4A and 4B with I are attached, and an X-direction slide 5 having a V-shu that also sharpens in the X direction on both Confucian paintings is arranged between each slide guide 4M and 4B. ing. X direction slide guide 4A.
４Ｂの各ｖ＃ＩとＸ方向スライド５の各ｖ＃Ｉとの間に
ボール６が濠合され、これによりＸ方向スライド５がＸ
方向に摺動自在に支持されでいる。Ｘ方向スライド５の
上には一足具７を介してＹ方向に平行に延びるＹ方向ス
ライドガイド８ム及び８Ｂが取付けられている。Ｙ方向
スライドガイド８ム、８ＢはＸ方向スライドガイド４Ａ
、４Ｂと同様に形成され、これらのスライドガイド８人
、８Ｂにはボール９を介してＸ方向スライド５とｌＷ１
様なＹ方向スライドｌＯが摺動自在に支持されでいる。A ball 6 is connected between each v#I of 4B and each v#I of the X-direction slide 5, so that the X-direction slide 5
It is supported slidably in the direction. On the X-direction slide 5, Y-direction slide guides 8 and 8B extending in parallel to the Y-direction are attached via a pair of fixtures 7. Y direction slide guide 8mm, 8B is X direction slide guide 4A
, 4B, these eight slide guides, 8B has an X-direction slide 5 and lW1 via a ball 9.
A Y-direction slide lO of the same type is slidably supported.
Ｙ方向スライドｌＯにはパネル３に設けた孔３１を貫通
しで延びる操作軸１１が固定され、この操作軸１１のパ
ネルから突出する端部に操作用つまみ１２が取付けられ
ている。パネル３の孔３１はＸ方向及びＹ方向の各スラ
イド５、ｌＯの摺−を妨げないように十分大きく形成さ
れており、操作軸１１を変位させると、Ｘ方向スライド
５及びＹ方向スライドｌＯがそれぞれ操作軸１１の変位
のＸ方向成分及びＹ方向成分に等しい量だけ変位するよ
うになっている。An operating shaft 11 extending through a hole 31 provided in the panel 3 is fixed to the Y-direction slide lO, and an operating knob 12 is attached to the end of the operating shaft 11 protruding from the panel. The hole 31 in the panel 3 is formed sufficiently large so as not to obstruct the sliding of the slides 5 and 10 in the X and Y directions, and when the operating shaft 11 is displaced, the slides 5 in the X direction and the slide 10 in the Y direction are moved. They are each displaced by an amount equal to the X-direction component and the Y-direction component of the displacement of the operating shaft 11.
Ｘ方向スライド５の一端にはＸ方向に延びるＸ方向駆動
軸１３の一端が固定され、この駆動軸１３の一側面にラ
ック１３ｍが刻設されている。マニピュレータ台ｌには
駆動軸１３の下方に位置するようｌこして回転量を電気
信号に変換するｊｌｌの変換５１４が取付けられ、第１
の変換器１４に１転量を与える一転軸に取付けたピニオ
ン１５が駆動軸１３のラック−１’３ ’ａに噛み合さ
れでいる。またＹ方向スライドｌＯの一端にラック１６
ａを有するＹ方向駆動軸１６が設けられ、このＹ方向駆
動軸め下方に第１の変換器１４と同様な第２の変換１）
１７が蛾付けられでいる。第２の変換器１７に回転量を
与える回転軸にピニオン１８が取付けられ、このピニオ
ンがラック１６１に噛み合されている。セしでＸ方向ス
ライド５、ラック１３１及びピニオン１５により操作軸
の変位のＸ方向成分を一転量に変換する第１の回転量変
換機構が構成され、Ｘ方向スライド１０、ラック１６ｍ
及びピニオンＬ１こより操作軸の変位のＹ方向成分を回
転量−変換する第２の回転量変換機構が構成されている
。One end of an X-direction drive shaft 13 extending in the X direction is fixed to one end of the X-direction slide 5, and a rack 13m is carved on one side of the drive shaft 13. A converter 514 for converting the amount of rotation into an electric signal is attached to the manipulator table l so as to be located below the drive shaft 13.
A pinion 15 attached to the single rotation shaft that gives one rotation amount to the converter 14 is meshed with the rack -1'3'a of the drive shaft 13. Also, a rack 16 is attached to one end of the Y-direction slide lO.
A Y-direction drive shaft 16 having an angle a is provided, and below this Y-direction drive shaft a second transducer 1) similar to the first transducer 14 is provided.
17 are moth-attached. A pinion 18 is attached to the rotating shaft that provides the amount of rotation to the second converter 17, and this pinion is meshed with the rack 161. The X-direction slide 5, the rack 131, and the pinion 15 constitute a first rotation amount conversion mechanism that converts the X-direction component of the displacement of the operation shaft into a single rotation amount, and the X-direction slide 10 and the rack 16m
A second rotational amount conversion mechanism is configured to convert the Y-direction component of the displacement of the operating shaft into a rotational amount from the pinion L1.
従ってつまみ１２を持つで操作軸１１を変位させるとそ
のＸ方向成分及びＹ方向成分がそれぞれ第１の変換器１
４及び第２の変換器１月こより電気信号に変換され、第
１の変換器１４及び第２の変換器１７からそれぞれＸ方
向信号及びＹ方向信号が出力される。Therefore, when the operating shaft 11 is displaced by holding the knob 12, the X-direction component and Y-direction component are respectively transferred to the first transducer 1.
The signal is converted into an electrical signal by the first converter 14 and the second converter 17, and an X-direction signal and a Y-direction signal are output from the first converter 14 and the second converter 17, respectively.
ｉｌｌの変換＠１４及び＃Ｉ２の変換＠１７としては、
例えばスリットを設けた回転内板とこの回転円板を挾ん
で対向するように設けた投光器と光電変換素子とを組合
せで１転量番こ比例したパルス信号を発生させるように
した光電的変換器を用いることができ、このような変換
器としてはロータリーエンコーダとして市販されている
ものを採用することができる。As conversion of ill @14 and conversion of #I2 @17,
For example, a photoelectric converter that generates a pulse signal proportional to one rotation number by combining a rotating inner plate provided with slits, a projector placed facing the rotating disk, and a photoelectric conversion element. A commercially available rotary encoder can be used as such a converter.
１！３図に示すように、第１の変換器１４及び第２の変
換器１７から得られるＸ方向信号８ｘ及びＹ方向信号８
７はそれぞれ増巾器２０及び２１で増巾された後例えば
マイクロコンピュータ２２＃こ入力され、このコンピュ
ータの出力がパルスモータ駆動回路２３を介して平面移
動懐置のＸ方向駆動用パルスモータ２４とＹ方向駆動用
パルスモータ２５に供給される。この場合マイクロコン
ピュータ２２が行なう仕事は、マニピュレータの操作軸
の変位の向きの判断、パルスモータの能力に対しで操作
軸の変位速度が早すぎた場合にパルスを間引く操作、パ
ルスモータに入力されたパルス数の記憶等である。1! As shown in FIG. 3, the X direction signal 8x and the Y direction signal 8 obtained from the first converter 14 and the second converter 17
7 is amplified by amplifiers 20 and 21, and then inputted to, for example, a microcomputer 22#, and the output of this computer is passed through a pulse motor drive circuit 23 to a pulse motor 24 for driving the plane moving device in the X direction. It is supplied to the Y-direction drive pulse motor 25. In this case, the tasks performed by the microcomputer 22 include determining the direction of displacement of the operating shaft of the manipulator, thinning out pulses when the displacement speed of the operating shaft is too fast for the capacity of the pulse motor, and controlling the pulses input to the pulse motor. This includes memorizing the number of pulses.
上記の貞總例では、平面移動装置のＸ方向駆動用モータ
及びＹ方向駆動用モータをパルスモータとしたが、伽の
モータ、例えばサーボモータを用いる場合にも全く同機
に本発明のマニピュレータを用いることができる。In the above-mentioned example, pulse motors were used as the X-direction drive motor and Y-direction drive motor of the plane moving device, but even when using other motors, such as servo motors, the manipulator of the present invention can be used in the same device. be able to.
以上のように本発明によれば、操作軸の動きと平−移動
装置の移動台の動きを対応させることができるので、操
作軸を動かした通りに移動台を動かすことができ、操作
が行ない易くなる利点がある。As described above, according to the present invention, it is possible to make the movement of the operating axis correspond to the movement of the moving table of the flat moving device, so that the moving table can be moved in the same way as the operating axis is moved, and the operation can be performed easily. It has the advantage of being easier.
第１ＩＩは本発明の一実施例の内部構造を示す正面図
１１２図は１１１図においでパネルを取去った状態を示
す平面図、１１３図は電気回路を示すブロック図である
。
５・・・Ｘ方向スライド、 ｌＯ・・・Ｙ方向スラ
イド、１１・・・操作軸、 １３・・・Ｘ方
向駆動軸、１３ａ・・・ラック、 １４・・・
第１の変換器、１５・・・ピニオン、 １６・
・・Ｙ方向駆動軸、１６・・・ラック、 １
７・・・第２の変換器、１８・・・ピニオン。
第１図
第２図
第３図Part 1II is a front view showing the internal structure of an embodiment of the present invention.
FIG. 112 is a plan view of FIG. 111 with the panel removed, and FIG. 113 is a block diagram showing the electric circuit. 5...X-direction slide, lO...Y-direction slide, 11...operation axis, 13...X-direction drive shaft, 13a...rack, 14...
First converter, 15... Pinion, 16.
...Y direction drive shaft, 16...Rack, 1
7... Second converter, 18... Pinion. Figure 1 Figure 2 Figure 3
Claims (1)
とＹ軸により定められる平面内で移動台を任意の方向に
移動させるようにした平面移動装置の一記各駆動用毫一
夕を操作するマニピュレータにおいて、Ｘ方向に摺動自
在に設けられたＸ方向スライドと、このＸ方向スライド
に載置されＹ方向に摺動自在に設けられたＹ方向スライ
ドと、このＹ方向スライドの上置に固定された操作軸と
、前記Ｘ方向スライドに一定され一側面にラックが刻設
されたＸ方向ａｎ軸と、このＸ方向駆動輪のラックに噛
合するピニオンと、このピニオンによって回転させられ
１記Ｘ方向駆動用モータを制御するための電気１号に変
換する第１の変換器と、藺紀Ｙ方角スライドに一定され
一側面にラックがｊｌＩＷ／Ｉ！されたＸ方向駆動輪と
、このＹ方向駆動軸のラックに噛合するピニオンと、こ
のピニオンによって回転させられ一紀Ｙ方向駆動用モー
タを制御するための電気信号に変換する＄１２の変換器
とを具備したことを特徴とする平面移動装置用マニピュ
レータ。A planar moving device that uses an X-direction drive motor and a Y-direction drive motor to move a moving platform in any direction within a plane defined by the X-axis and Y-axis. In the manipulator to be operated, there is an X-direction slide provided slidably in the X-direction, a Y-direction slide placed on this X-direction slide and provided slidably in the Y-direction, and an upper position of this Y-direction slide. an operating shaft fixed to the X-direction slide, an X-direction an axis fixed to the X-direction slide with a rack carved on one side, a pinion meshing with the rack of the X-direction drive wheel, and a shaft rotated by the pinion; A first converter that converts the X-direction drive motor into electric power No. 1 for controlling the X-direction drive motor, and a rack fixed to the Y-direction slide and a rack on one side. A $12 converter rotates the pinion and converts it into an electric signal for controlling the Y-direction drive motor. A manipulator for a plane moving device, characterized by comprising:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP961183A JPS58139436A (en) | 1983-01-24 | 1983-01-24 | Manipulator for plane moving device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP961183A JPS58139436A (en) | 1983-01-24 | 1983-01-24 | Manipulator for plane moving device |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5965274A Division JPS5724565B2 (en) | 1974-05-29 | 1974-05-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS58139436A true JPS58139436A (en) | 1983-08-18 |
Family
ID=11725091
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP961183A Pending JPS58139436A (en) | 1983-01-24 | 1983-01-24 | Manipulator for plane moving device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58139436A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2415291A (en) * | 2004-06-15 | 2005-12-21 | Nanobeam Ltd | Substrate handling device for a charged particle beam system |
| US8569718B2 (en) | 2009-12-23 | 2013-10-29 | Nanobeam Limited | Charged particle beam system |
-
1983
- 1983-01-24 JP JP961183A patent/JPS58139436A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2415291A (en) * | 2004-06-15 | 2005-12-21 | Nanobeam Ltd | Substrate handling device for a charged particle beam system |
| GB2415291B (en) * | 2004-06-15 | 2008-08-13 | Nanobeam Ltd | Charged particle beam system |
| US8569718B2 (en) | 2009-12-23 | 2013-10-29 | Nanobeam Limited | Charged particle beam system |
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