JPS58130350U - vacuum valve device - Google Patents
vacuum valve deviceInfo
- Publication number
- JPS58130350U JPS58130350U JP19888782U JP19888782U JPS58130350U JP S58130350 U JPS58130350 U JP S58130350U JP 19888782 U JP19888782 U JP 19888782U JP 19888782 U JP19888782 U JP 19888782U JP S58130350 U JPS58130350 U JP S58130350U
- Authority
- JP
- Japan
- Prior art keywords
- valve body
- vacuum
- valve rod
- valve
- main valve
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Lift Valve (AREA)
- Details Of Valves (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は本考案の一実施例を示す断面図、第２図は動作
を説明するための図、第３図及び第４図は本考案の他の
実施例を示す断面図である。
１：弁本体、２ａ及び２ｂ＝流入口及び流出口、３：主
弁体、４及び１３：０リングバツキング、５：弁座、６
：膨出部、７：弁杆、８ニガイド棒、９ａ及び９ｂ：長
溝、１０：連通穴、ｌｌａ及び１１ｂ＝横穴、１２：副
弁体、１４：ビシ、１５：穴、１６，２５及び２７：コ
イルバネ、１７：ラック、１８：回転軸、 。
１９：電磁クラッチ、２０：モーター、２１：ピニオン
、２２：制御回路、２３ａ乃至２３Ｃ：マイクロスイン
チ、２４：真空計。FIG. 1 is a sectional view showing one embodiment of the present invention, FIG. 2 is a diagram for explaining the operation, and FIGS. 3 and 4 are sectional views showing other embodiments of the present invention. 1: Valve body, 2a and 2b = inlet and outlet, 3: Main valve body, 4 and 13: 0 ring butting, 5: Valve seat, 6
: bulging part, 7: valve rod, 8 guide rod, 9a and 9b: long groove, 10: communicating hole, lla and 11b = horizontal hole, 12: sub-valve body, 14: hole, 15: hole, 16, 25 and 27 : Coil spring, 17: Rack, 18: Rotating shaft. 19: Electromagnetic clutch, 20: Motor, 21: Pinion, 22: Control circuit, 23a to 23C: Microsinch, 24: Vacuum gauge.
Claims (1)
られ常時弁座に押し付ける向きに弾性体２５によって力
を加えられている主弁体３と、該主弁体３に一体的に取
り付けられた筒状の膨出部６に挿入され所定の行程を往
復動できるように備えられた弁杆７と、該主弁体３に設
けられ被排気室と真空ポンプとを連通ずるための連通穴
１０と、該連通穴を塞ぐように常時弾性体によって力を
加えられ且つ弁杆７の先端に遊びを有して取り付けられ
た副弁体１２と弁杆７の特定の移動行程においてのみ主
弁体３を弁杆７と一体的に移動させるための弁杆７に膨
出部６を係止する機構と、弁杆７を移動させるためのモ
ーター２０を含む駆動機構と、被排気室の真空度に応じ
た信号を発生する真空計２４と、弁杆７の位置を検出す
るための複数の検出素子と、真空計２４と複数の検出素
子よりの信号が供給された主弁体３及び副弁体１２によ
り遮断された被排気室と真空ポンプとの間を連通させる
際に副弁体１２の開放後被排気室の真空度が予め設定し
た一定真空値まで向上したら主弁体３を゛開放するよう
に前記モーター２０の運転を制御する制御回路とを具備
することを特徴とする真空弁装置。The main valve body 3 is provided to control communication between the evacuated chamber and the vacuum pump and is constantly applied with force by an elastic body 25 in a direction of pressing against the valve seat, and the valve body 3 is integrally attached to the main valve body 3. A valve rod 7 is inserted into the cylindrical bulge 6 and is provided so as to be able to reciprocate a predetermined stroke, and a communication provided on the main valve body 3 for communicating the evacuated chamber and the vacuum pump. The main valve body 12 is attached to the tip of the valve rod 7 with some play, and is constantly applied with force by an elastic body so as to close the communication hole, and the main valve body 12 is attached to the tip of the valve rod 7 with some play. A mechanism for locking the bulging portion 6 on the valve rod 7 to move the valve body 3 integrally with the valve rod 7, a drive mechanism including a motor 20 for moving the valve rod 7, and a mechanism for moving the valve rod 7 integrally with the valve rod 7; A vacuum gauge 24 that generates a signal according to the degree of vacuum, a plurality of detection elements for detecting the position of the valve rod 7, a main valve body 3 and a main valve body 3 to which signals from the vacuum gauge 24 and the plurality of detection elements are supplied. When establishing communication between the vacuum pump and the evacuated chamber that has been shut off by the auxiliary valve element 12, after opening the auxiliary valve element 12, when the degree of vacuum in the evacuated chamber increases to a preset constant vacuum value, the main valve element 3 is opened. A vacuum valve device comprising: a control circuit for controlling the operation of the motor 20 so as to open the motor 20.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19888782U JPS601491Y2 (en) | 1982-12-28 | 1982-12-28 | vacuum valve device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19888782U JPS601491Y2 (en) | 1982-12-28 | 1982-12-28 | vacuum valve device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58130350U true JPS58130350U (en) | 1983-09-03 |
| JPS601491Y2 JPS601491Y2 (en) | 1985-01-16 |
Family
ID=30112047
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19888782U Expired JPS601491Y2 (en) | 1982-12-28 | 1982-12-28 | vacuum valve device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS601491Y2 (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014020457A (en) * | 2012-07-18 | 2014-02-03 | Rinnai Corp | Electric flow rate regulating valve |
| JP2019060479A (en) * | 2017-09-28 | 2019-04-18 | 株式会社不二工機 | Motor-operated valve |
| EP3587881A1 (en) * | 2018-06-22 | 2020-01-01 | SMC Corporation | Vacuum valve |
-
1982
- 1982-12-28 JP JP19888782U patent/JPS601491Y2/en not_active Expired
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014020457A (en) * | 2012-07-18 | 2014-02-03 | Rinnai Corp | Electric flow rate regulating valve |
| JP2019060479A (en) * | 2017-09-28 | 2019-04-18 | 株式会社不二工機 | Motor-operated valve |
| EP3587881A1 (en) * | 2018-06-22 | 2020-01-01 | SMC Corporation | Vacuum valve |
| US10895331B2 (en) | 2018-06-22 | 2021-01-19 | Smc Corporation | Vacuum valve |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS601491Y2 (en) | 1985-01-16 |
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