JPS58119145A - X-ray spectroscope for charged particle beam device - Google Patents
X-ray spectroscope for charged particle beam deviceInfo
- Publication number
- JPS58119145A JPS58119145A JP57002178A JP217882A JPS58119145A JP S58119145 A JPS58119145 A JP S58119145A JP 57002178 A JP57002178 A JP 57002178A JP 217882 A JP217882 A JP 217882A JP S58119145 A JPS58119145 A JP S58119145A
- Authority
- JP
- Japan
- Prior art keywords
- sample
- charged particle
- detection element
- particle beam
- rod
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/244—Detectors; Associated components or circuits therefor
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
- Measurement Of Radiation (AREA)
Abstract
Description
【発明の詳細な説明】
本発明は荷電粒子線を試料に照射することにより発生す
るＸ線を分光するための装置に関する。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to an apparatus for spectroscopy of X-rays generated by irradiating a sample with a charged particle beam.
電子顕微鏡は試料に電子線を照射して試料の内部構造や
表面形状を観察する有力な手段であるが、更に試料から
発生するＸ線を分光して試料元素の定性、定量分析を行
うことも盛んに行われている。Electron microscopy is an effective means of observing the internal structure and surface shape of a sample by irradiating it with electron beams, but it can also perform qualitative and quantitative analysis of sample elements by spectroscopy of the X-rays generated by the sample. It is being actively carried out.
しかしながら、観察される試料は電子レンズに極めて接
近した位置やレンズ磁場内の位置に挿入されるため、試
料の周辺の空間は狭く試料に近接して設ける必要のある
部材を多数同時に設けることはできないので、観察目的
に応じてＸ線分光器を含めたこれらの部材を交換して取
付ける必要があった。特に半導体を検出素子として用い
る波長分散型Ｘ線分光器（以下ＥＤＳと称す）はＸ線測
定時以外にもＸ線や電子線が検出素子へ入射し続けてい
ると検出素子の特性劣化を早める原因となるので、必要
な時以外はＥＤＳを電子顕微鏡から取外しておく事が要
求される。このようなＥＤＳの取付、取外し作業は面倒
であるというだけでなく慎重さを欠・くと互いに接近し
て設けられる部材を破損する事故も生じていた。又、Ｅ
ＤＳを取外す代わりに検出素子と試料との間に真空外か
ら操作されるシャッターを設けることも考えられるが、
この場合には装置が複雑になると共に試料と検出素子の
間の距離を短かくして検出感度を上げることができなく
なるという欠点を生じる。However, since the sample to be observed is inserted very close to the electron lens or within the lens's magnetic field, the space around the sample is narrow and it is not possible to install many components that need to be placed close to the sample at the same time. Therefore, it was necessary to replace and install these parts, including the X-ray spectrometer, depending on the purpose of observation. In particular, wavelength dispersive X-ray spectrometers (hereinafter referred to as EDS) that use semiconductors as detection elements accelerate the deterioration of the characteristics of the detection element if X-rays or electron beams continue to enter the detection element other than when measuring X-rays. Therefore, it is required to remove the EDS from the electron microscope except when necessary. The work of installing and removing such an EDS is not only troublesome, but also causes damage to members installed close to each other if care is not taken. Also, E
Instead of removing the DS, it may be possible to install a shutter operated from outside the vacuum between the detection element and the sample, but
In this case, the disadvantage is that the apparatus becomes complicated and it becomes impossible to increase the detection sensitivity by shortening the distance between the sample and the detection element.
本発明はこのような間〒を解決し、ＥＤＳの荷電粒子線
装置への取付、取外しが容易に行われるようにすること
を主な目的とするもので、電磁レンズの光軸と角度αを
なす方向へ発生するＸ線を検出するＸ線検出素子を保持
する棒状体を、その長軸が前記光軸とαより大きな角度
βをなすように荷電粒子線装置の真空壁に真空が保たれ
るように貫通させて取付ると共に、前記棒状体をその長
軸方向へ移動させるための機構を設けたことを特徴とす
るものである。The main purpose of the present invention is to solve this problem and to facilitate the installation and removal of EDS from a charged particle beam device. A vacuum is maintained on the vacuum wall of the charged particle beam device so that the long axis of the rod-shaped body holding the X-ray detection element that detects the X-rays generated in the direction makes an angle β larger than α with the optical axis. The present invention is characterized in that the rod-shaped body is attached through the rod-shaped body so that the rod-shaped body is inserted therethrough, and a mechanism for moving the rod-shaped body in the longitudinal direction of the rod-shaped body is provided.
図面は本発明を透過結像型電子顕微鏡に適用した場合の
要部を示す断面図である。The drawing is a sectional view showing the main parts when the present invention is applied to a transmission imaging electron microscope.
図面中、１は電子顕微鏡の鏡筒の真空壁を示し、その内
部は真空に保たれて、対物レンズ２その他の電子レンズ
等が収納されている。対轡レンズ２のレンズ磁場内には
試料３が挿入されており、レンズ光＄１１４に沿った方
向から試料を照射する電子線によって試料から全ゆる方
向に発生するＸ線のうち光軸４と角度αをなすＸ線５が
コリメータ６を通過してＥＤＳの半導体検出素子７の検
出面に入射する。検出素子７に生じた電気信号は検出素
子を保持する棒状体８の内部をとおるリード線によって
鏡筒外の端子９を経てＥＤＳの信号分析装置へ取り出さ
れる。又、検出素子７はＸ線検出時のノイズを出来るだ
け低減するため棒状体８の端部に設けられた冷却体容器
１０内の液体窒素によって冷却する必要があり、そのた
め棒状体８の内部には容器１０内の冷却体と検出素子を
熱的に接続するための手段が設けられている。鏡筒の壁
１には窓１１があけられており、該窓１１を真空を保っ
て塞ぐようにＯリング１２を介して取付部材１３が取外
し可能に取付けられている。取付部材１３に穿たれた穴
１４には棒状体８がＯリング１５によって真空を保った
状態で貫通しており、光軸４と角度βをなす棒状体の長
軸方向へ移動することが可能となっている。又、取付部
材１３には回転棒１６が取付けられており、回転棒１６
の一端１６ａは取付部材に埋め込まれている″ため棒状
体の長軸方向への移動は阻止されているが他端に設けら
れたハンドル１７を回わすことにより回転棒１６を棒状
体の長軸と平行に保ったまま回転させるように構成され
ている。回転棒１６の中央部に刻設された雄ネジ部は棒
状体８に固定された部材１８に刻設された厳ネジ部と螺
合しており、ハンドル１７を回ねすことにより棒状体８
の長軸方向に移動し、その位置は部材１８に取り付けら
れた針１９と取付部材１３に刻まれた目盛２０によって
知る゛ことができる。In the drawings, reference numeral 1 indicates a vacuum wall of a lens barrel of an electron microscope, and the interior thereof is kept in a vacuum, and an objective lens 2 and other electron lenses are housed therein. A sample 3 is inserted into the lens magnetic field of the objective lens 2, and among the X-rays generated from the sample in all directions by the electron beam that irradiates the sample from the direction along the lens light $114, the optical axis 4 and The X-rays 5 forming an angle α pass through the collimator 6 and enter the detection surface of the semiconductor detection element 7 of the EDS. The electrical signal generated in the detection element 7 is taken out to the signal analyzer of the EDS via a terminal 9 outside the lens barrel by a lead wire passing through the inside of a rod-shaped body 8 that holds the detection element. In addition, the detection element 7 needs to be cooled with liquid nitrogen in a cooling body container 10 provided at the end of the rod-shaped body 8 in order to reduce noise as much as possible during X-ray detection. is provided with means for thermally connecting the cooling body in the container 10 and the detection element. A window 11 is formed in the wall 1 of the lens barrel, and a mounting member 13 is removably mounted via an O-ring 12 so as to close the window 11 while maintaining a vacuum. A rod-shaped body 8 passes through a hole 14 drilled in the mounting member 13 while maintaining a vacuum with an O-ring 15, and can be moved in the longitudinal direction of the rod-shaped body forming an angle β with the optical axis 4. It becomes. Further, a rotating rod 16 is attached to the mounting member 13.
Since one end 16a is embedded in the mounting member, movement in the long axis direction of the rod-like body is prevented, but by turning the handle 17 provided at the other end, the rotating rod 16 is moved along the long axis of the rod-like body. The rotating rod 16 is configured to be rotated while being held parallel to the rod.A male threaded portion cut in the center of the rotating rod 16 is screwed into a tightly threaded portion cut into a member 18 fixed to the rod-shaped body 8. By turning the handle 17, the rod-shaped body 8
The needle 19 attached to the member 18 and the scale 20 engraved on the mounting member 13 indicate the position of the needle 19 .
以上の構成の実施例装置においてＸ線分光を行うには、
ハンドル１７を回わして検出素子７の位置が出来るだけ
試料３に近ずくように棒状体８を長軸に沿って移動させ
る。その位置は予め目盛２０で読み取られており、この
状態で試料に電子線を照射してＸ線を分光する。次にＸ
線分光以外の試料観察を行うにはハンドル１７を逆の方
向に回わして検出素子７が試料３から離れる方向に移動
させる。このときコリメータ６から取り出されるＸ線の
角度αよりも検出素子７の移動角度βの方が大きいため
検出素子７が試料３から距離的に遠ざかるだけでなく、
検出素子７と試料３の間にＸ線の透過や反射電子線の通
過を阻止する部材が介在することになる。そのため試料
に電子線を照射してＸ線分光以外の観察を行っても検出
素子７の検出面にＸ線や反射電子線が照射されて検出素
子７の検出特性を劣化させるという虞れをなくすことが
可能となる。In order to perform X-ray spectroscopy with the embodiment apparatus having the above configuration,
By turning the handle 17, the rod-shaped body 8 is moved along the long axis so that the detection element 7 is positioned as close to the sample 3 as possible. The position is read in advance on the scale 20, and in this state, the sample is irradiated with an electron beam to analyze the X-rays. Then X
To perform sample observation other than line spectroscopy, the handle 17 is turned in the opposite direction to move the detection element 7 away from the sample 3. At this time, since the movement angle β of the detection element 7 is larger than the angle α of the X-rays taken out from the collimator 6, the detection element 7 not only moves away from the sample 3 in terms of distance, but also
A member is interposed between the detection element 7 and the sample 3 to block transmission of X-rays and reflected electron beams. Therefore, even if an observation other than X-ray spectroscopy is performed by irradiating a sample with an electron beam, there is no possibility that the detection surface of the detection element 7 will be irradiated with X-rays or reflected electron beams, which will deteriorate the detection characteristics of the detection element 7. becomes possible.
更に試料に対する種々の測定を行うため対物レンズ２の
上部に種々の部材を設置しようとするときには、ＥＤＳ
を鏡筒から取外すことが必要となるが、この場合にはハ
ンドル１７を操作して検出素子７を鏡筒の壁１の穴１１
に近い方向へ移動させた状態にしてから取付部材１３を
鏡筒から取外すようにする。このようにすれば、取外し
操作のときに誤って検出素子の周辺を他の部材と接触さ
せて破損させるというような事故の発生を抑えることが
できる。又ＥＤＳの取付は操作の際にも同様の効果が得
られることは云うまでもない。Furthermore, when trying to install various members above the objective lens 2 in order to perform various measurements on the sample, EDS
In this case, operate the handle 17 to insert the detection element 7 into the hole 11 in the wall 1 of the lens barrel.
The mounting member 13 is removed from the lens barrel after being moved in a direction close to . In this way, it is possible to suppress the occurrence of an accident in which the periphery of the detection element accidentally comes into contact with another member and is damaged during the removal operation. It goes without saying that the same effect can be obtained when the EDS is installed and operated.
尚、本発明は以上の実施例装置に限定されるものではな
く、例えば、走査電子顕微鏡やイオンマイクロアナライ
ザー等の試料から発生するＸ線を分光しようとする場合
にも容易に適用することが可能である。It should be noted that the present invention is not limited to the above-described embodiments, and can be easily applied to, for example, a scanning electron microscope, an ion microanalyzer, etc., in which X-rays generated from a sample are analyzed. It is.
以上のように、本発明によればＥＤＳに簡単な移動機構
を設けることによりその取付、取外しが安全に行えるよ
うになり、又検出素子と試料との間に保護用のシャッタ
ー機構を設ける必要がないため検出素子と試料の閣の距
離を短くしてＸ線検出の感度を上げることが出来る等の
著しい効果が得られる。As described above, according to the present invention, by providing the EDS with a simple movement mechanism, it is possible to safely install and remove the EDS, and it is not necessary to provide a protective shutter mechanism between the detection element and the sample. Therefore, significant effects such as increasing the sensitivity of X-ray detection by shortening the distance between the detection element and the sample can be obtained.
図面は本発明の一実施例装置を示す略図である。
１：鏡筒の真空壁、２：対物レンズ、３：試料、４：光
軸１．５：Ｘ線、６：コリメータ、７：半導体検出素子
、８：棒状体、１０：容器、１３：取付部材、１６：回
転棒。
特許出願人
日本電子株式会社
代表者 加勢忠雄The drawing is a schematic diagram showing an embodiment of the present invention. 1: Vacuum wall of lens barrel, 2: Objective lens, 3: Sample, 4: Optical axis 1.5: X-ray, 6: Collimator, 7: Semiconductor detection element, 8: Rod-shaped body, 10: Container, 13: Mounting Member 16: Rotating rod. Patent applicant JEOL Ltd. Representative Tadao Kase
Claims (1)
！ｌを検出する検出素子を保持する棒状体を、その長軸
が前記光軸とαより大きな角度βをなすように荷電粒子
線装置の真空壁に真空を保って貫通させるように取付け
ると共に、前記棒状０体をその長軸方向へ移動させるた
めの機構を設けたことを特徴とする荷電粒子線装置用Ｘ
線分光器。X generated in the direction forming an angle α with the optical axis of the electromagnetic lens,!
! A rod-shaped body holding a detection element for detecting l is attached so as to pass through the vacuum wall of the charged particle beam device while maintaining a vacuum so that its long axis forms an angle β larger than α with the optical axis, and A charged particle beam device
Line spectrometer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57002178A JPS58119145A (en) | 1982-01-09 | 1982-01-09 | X-ray spectroscope for charged particle beam device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57002178A JPS58119145A (en) | 1982-01-09 | 1982-01-09 | X-ray spectroscope for charged particle beam device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS58119145A true JPS58119145A (en) | 1983-07-15 |
Family
ID=11522102
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP57002178A Pending JPS58119145A (en) | 1982-01-09 | 1982-01-09 | X-ray spectroscope for charged particle beam device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58119145A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2017094721A1 (en) * | 2015-12-03 | 2017-06-08 | 松定プレシジョン株式会社 | Charged particle beam device and scanning electron microscope |
| US10438770B2 (en) | 2015-01-30 | 2019-10-08 | Matsusada Precision, Inc. | Charged particle beam device and scanning electron microscope |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS54122465U (en) * | 1978-02-17 | 1979-08-27 | ||
| JPS56116259A (en) * | 1980-02-15 | 1981-09-11 | Jeol Ltd | Transmissive electron microscope |
-
1982
- 1982-01-09 JP JP57002178A patent/JPS58119145A/en active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS54122465U (en) * | 1978-02-17 | 1979-08-27 | ||
| JPS56116259A (en) * | 1980-02-15 | 1981-09-11 | Jeol Ltd | Transmissive electron microscope |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10438770B2 (en) | 2015-01-30 | 2019-10-08 | Matsusada Precision, Inc. | Charged particle beam device and scanning electron microscope |
| US10541106B2 (en) | 2015-01-30 | 2020-01-21 | Matsusada Precision, Inc. | Charged particle beam device and scanning electron microscope |
| WO2017094721A1 (en) * | 2015-12-03 | 2017-06-08 | 松定プレシジョン株式会社 | Charged particle beam device and scanning electron microscope |
| JPWO2017094721A1 (en) * | 2015-12-03 | 2018-05-31 | 松定プレシジョン株式会社 | Charged particle beam apparatus and scanning electron microscope |
| CN108292580A (en) * | 2015-12-03 | 2018-07-17 | 松定精度株式会社 | Charged particle line apparatus and scanning electron microscope |
| CN108292580B (en) * | 2015-12-03 | 2019-06-11 | 松定精度株式会社 | Charged particle line apparatus and scanning electron microscope |
| US10497535B2 (en) | 2015-12-03 | 2019-12-03 | Matsusada Precision, Inc. | Charged particle beam device and scanning electron microscope |
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