JPS5795687A - Magnetic resistance element - Google Patents
Magnetic resistance elementInfo
- Publication number
- JPS5795687A JPS5795687A JP55171006A JP17100680A JPS5795687A JP S5795687 A JPS5795687 A JP S5795687A JP 55171006 A JP55171006 A JP 55171006A JP 17100680 A JP17100680 A JP 17100680A JP S5795687 A JPS5795687 A JP S5795687A
- Authority
- JP
- Japan
- Prior art keywords
- film
- substrate
- inorganic
- organic
- magnetic thin
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010408 film Substances 0.000 abstract 9
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 2
- 239000000758 substrate Substances 0.000 abstract 2
- 239000010409 thin film Substances 0.000 abstract 2
- 239000004642 Polyimide Substances 0.000 abstract 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 abstract 1
- 239000000919 ceramic Substances 0.000 abstract 1
- 239000011248 coating agent Substances 0.000 abstract 1
- 238000000576 coating method Methods 0.000 abstract 1
- 229910052681 coesite Inorganic materials 0.000 abstract 1
- 239000004020 conductor Substances 0.000 abstract 1
- 238000010276 construction Methods 0.000 abstract 1
- 230000007797 corrosion Effects 0.000 abstract 1
- 238000005260 corrosion Methods 0.000 abstract 1
- 229910052593 corundum Inorganic materials 0.000 abstract 1
- 229910052906 cristobalite Inorganic materials 0.000 abstract 1
- 239000004033 plastic Substances 0.000 abstract 1
- 229920000728 polyester Polymers 0.000 abstract 1
- 229920001721 polyimide Polymers 0.000 abstract 1
- 239000011347 resin Substances 0.000 abstract 1
- 229920005989 resin Polymers 0.000 abstract 1
- 239000000377 silicon dioxide Substances 0.000 abstract 1
- 235000012239 silicon dioxide Nutrition 0.000 abstract 1
- 238000004544 sputter deposition Methods 0.000 abstract 1
- 229910052682 stishovite Inorganic materials 0.000 abstract 1
- 229910052905 tridymite Inorganic materials 0.000 abstract 1
- 239000002966 varnish Substances 0.000 abstract 1
- 229910001845 yogo sapphire Inorganic materials 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N50/00—Galvanomagnetic devices
- H10N50/10—Magnetoresistive devices
Landscapes
- Hall/Mr Elements (AREA)
Abstract
PURPOSE:To obtain sufficient resistivity to humidity and corrosion by covering a highly magnetic thin film conductor formed on a substrate with multi-layered construction of an inorganic film and an organic film. CONSTITUTION:A highly magnetic thin film 2 is formed on a substrate 1 and covered, except for a junction pad, with a laminated layer 7 of an inorganic film 3 and an organic film 4. The film 3 is made of SiO2, Al2O3 and the like by sputtering and the film 4 is made by coating resin varnish of polyester group or polyimide group. The fluidity of the organic film 4 coveres possible pin holes produced in the inorganic film 3, effectively protecting the high magnetic element film 2 and making it unnecessary to contain the element in a plastic mold or ceramic container.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP55171006A JPS5795687A (en) | 1980-12-05 | 1980-12-05 | Magnetic resistance element |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP55171006A JPS5795687A (en) | 1980-12-05 | 1980-12-05 | Magnetic resistance element |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5795687A true JPS5795687A (en) | 1982-06-14 |
Family
ID=15915349
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP55171006A Pending JPS5795687A (en) | 1980-12-05 | 1980-12-05 | Magnetic resistance element |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5795687A (en) |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59113675A (en) * | 1982-12-20 | 1984-06-30 | Matsushita Electric Ind Co Ltd | Magnetic sensor |
JPS60257582A (en) * | 1984-06-04 | 1985-12-19 | Nippon Denso Co Ltd | Magnetoresistive device |
JPH0438485A (en) * | 1990-06-01 | 1992-02-07 | Matsushita Electric Ind Co Ltd | Magnetic sensor |
WO1992011661A1 (en) * | 1990-12-20 | 1992-07-09 | Fmc Co., Ltd. | Magnetic resistance element and its manufacturing method, and magnetic sensor using the magnetic resistance element |
US5297881A (en) * | 1991-05-16 | 1994-03-29 | Mitsubishi Steel Mfg. Co., Ltd. | Printing machine carriage having a magnetic encoder |
WO2004025745A1 (en) * | 2002-09-13 | 2004-03-25 | Matsushita Electric Industrial Co., Ltd. | Magnetoresistance effect element and production method and application method therefor |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5235989A (en) * | 1975-09-16 | 1977-03-18 | Matsushita Electric Works Ltd | Thin film magnetic resistance element |
-
1980
- 1980-12-05 JP JP55171006A patent/JPS5795687A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5235989A (en) * | 1975-09-16 | 1977-03-18 | Matsushita Electric Works Ltd | Thin film magnetic resistance element |
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59113675A (en) * | 1982-12-20 | 1984-06-30 | Matsushita Electric Ind Co Ltd | Magnetic sensor |
JPH0371795B2 (en) * | 1982-12-20 | 1991-11-14 | Matsushita Electric Ind Co Ltd | |
JPS60257582A (en) * | 1984-06-04 | 1985-12-19 | Nippon Denso Co Ltd | Magnetoresistive device |
JPH0438485A (en) * | 1990-06-01 | 1992-02-07 | Matsushita Electric Ind Co Ltd | Magnetic sensor |
WO1992011661A1 (en) * | 1990-12-20 | 1992-07-09 | Fmc Co., Ltd. | Magnetic resistance element and its manufacturing method, and magnetic sensor using the magnetic resistance element |
US5539372A (en) * | 1990-12-20 | 1996-07-23 | Mitsubishi Steel Mfg. Co., Ltd. | Magnetic resistance element, method for preparing the same and magnetic sensor using the same |
US5297881A (en) * | 1991-05-16 | 1994-03-29 | Mitsubishi Steel Mfg. Co., Ltd. | Printing machine carriage having a magnetic encoder |
WO2004025745A1 (en) * | 2002-09-13 | 2004-03-25 | Matsushita Electric Industrial Co., Ltd. | Magnetoresistance effect element and production method and application method therefor |
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