JPS5788350A - Foreign particle detector - Google Patents

Foreign particle detector

Info

Publication number
JPS5788350A
JPS5788350A JP16182980A JP16182980A JPS5788350A JP S5788350 A JPS5788350 A JP S5788350A JP 16182980 A JP16182980 A JP 16182980A JP 16182980 A JP16182980 A JP 16182980A JP S5788350 A JPS5788350 A JP S5788350A
Authority
JP
Japan
Prior art keywords
particle detector
foreign particle
foreign
detector
particle
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16182980A
Other languages
Japanese (ja)
Other versions
JPS6249928B2 (en
Inventor
Urajimirouitsuchi Areku Yuurii
Domitorieuitsuchi Bi Bikutooru
Kuzumichi Zuefu Urajimiiru
Sutepanouitsuchi Oru Gennadeii
Andoreeeuitsuchi Fuiri Nikorai
Sutepanouitsuchi Fun Fuyoodoru
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
LE N PROIZ OBIEDEINENIE CHIEFU
RENINGURAADOSUKOE NAUCHINOOPUROIZUBODOSUTOBENNOE OBIEDEINENIE CHIEFUNOROGIICHIESUKOBO OBORUDOWANIA DOURIYA PUROIZUBODONUTOWA GOTOBUIFU
Original Assignee
LE N PROIZ OBIEDEINENIE CHIEFU
RENINGURAADOSUKOE NAUCHINOOPUROIZUBODOSUTOBENNOE OBIEDEINENIE CHIEFUNOROGIICHIESUKOBO OBORUDOWANIA DOURIYA PUROIZUBODONUTOWA GOTOBUIFU
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by LE N PROIZ OBIEDEINENIE CHIEFU, RENINGURAADOSUKOE NAUCHINOOPUROIZUBODOSUTOBENNOE OBIEDEINENIE CHIEFUNOROGIICHIESUKOBO OBORUDOWANIA DOURIYA PUROIZUBODONUTOWA GOTOBUIFU filed Critical LE N PROIZ OBIEDEINENIE CHIEFU
Priority to JP16182980A priority Critical patent/JPS5788350A/en
Publication of JPS5788350A publication Critical patent/JPS5788350A/en
Publication of JPS6249928B2 publication Critical patent/JPS6249928B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP16182980A 1980-11-17 1980-11-17 Foreign particle detector Granted JPS5788350A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16182980A JPS5788350A (en) 1980-11-17 1980-11-17 Foreign particle detector

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16182980A JPS5788350A (en) 1980-11-17 1980-11-17 Foreign particle detector

Publications (2)

Publication Number Publication Date
JPS5788350A true JPS5788350A (en) 1982-06-02
JPS6249928B2 JPS6249928B2 (en) 1987-10-22

Family

ID=15742700

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16182980A Granted JPS5788350A (en) 1980-11-17 1980-11-17 Foreign particle detector

Country Status (1)

Country Link
JP (1) JPS5788350A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005283527A (en) * 2004-03-31 2005-10-13 Hitachi High-Technologies Corp Apparatus for detecting foreign substance

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005283527A (en) * 2004-03-31 2005-10-13 Hitachi High-Technologies Corp Apparatus for detecting foreign substance

Also Published As

Publication number Publication date
JPS6249928B2 (en) 1987-10-22

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