JPS5788350A - Foreign particle detector - Google Patents
Foreign particle detectorInfo
- Publication number
- JPS5788350A JPS5788350A JP16182980A JP16182980A JPS5788350A JP S5788350 A JPS5788350 A JP S5788350A JP 16182980 A JP16182980 A JP 16182980A JP 16182980 A JP16182980 A JP 16182980A JP S5788350 A JPS5788350 A JP S5788350A
- Authority
- JP
- Japan
- Prior art keywords
- particle detector
- foreign particle
- foreign
- detector
- particle
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16182980A JPS5788350A (en) | 1980-11-17 | 1980-11-17 | Foreign particle detector |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16182980A JPS5788350A (en) | 1980-11-17 | 1980-11-17 | Foreign particle detector |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5788350A true JPS5788350A (en) | 1982-06-02 |
JPS6249928B2 JPS6249928B2 (en) | 1987-10-22 |
Family
ID=15742700
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP16182980A Granted JPS5788350A (en) | 1980-11-17 | 1980-11-17 | Foreign particle detector |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5788350A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005283527A (en) * | 2004-03-31 | 2005-10-13 | Hitachi High-Technologies Corp | Apparatus for detecting foreign substance |
-
1980
- 1980-11-17 JP JP16182980A patent/JPS5788350A/en active Granted
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005283527A (en) * | 2004-03-31 | 2005-10-13 | Hitachi High-Technologies Corp | Apparatus for detecting foreign substance |
Also Published As
Publication number | Publication date |
---|---|
JPS6249928B2 (en) | 1987-10-22 |
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