JPS5780719A - Semiconductor device - Google Patents
Semiconductor deviceInfo
- Publication number
- JPS5780719A JPS5780719A JP15653280A JP15653280A JPS5780719A JP S5780719 A JPS5780719 A JP S5780719A JP 15653280 A JP15653280 A JP 15653280A JP 15653280 A JP15653280 A JP 15653280A JP S5780719 A JPS5780719 A JP S5780719A
- Authority
- JP
- Japan
- Prior art keywords
- psg
- layer
- wire
- moisture preventive
- high density
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 title 1
- 230000003449 preventive effect Effects 0.000 abstract 3
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 abstract 2
- 229910052581 Si3N4 Inorganic materials 0.000 abstract 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 abstract 1
- 229910052782 aluminium Inorganic materials 0.000 abstract 1
- 229910000147 aluminium phosphate Inorganic materials 0.000 abstract 1
- 230000007797 corrosion Effects 0.000 abstract 1
- 238000005260 corrosion Methods 0.000 abstract 1
- 230000002093 peripheral effect Effects 0.000 abstract 1
- 230000001681 protective effect Effects 0.000 abstract 1
- 239000000758 substrate Substances 0.000 abstract 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Dicing (AREA)
- Electrodes Of Semiconductors (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Formation Of Insulating Films (AREA)
Abstract
PURPOSE:To prevent corrosion of a wire by externally completely shielding a a PSG layer of high density with a moisture preventive layer preferably contacted with a substrate, a wiring layer and an insulating layer preferably contacted with the moisture preventive layer, and wire. CONSTITUTION:A wiring pattern 4 on a PSG 3 and a moisture preventive layer 9 crossing over the PSG 3 and the dicing wire 6 at the peripheral edge of a chip are formed of metallic layers containing aluminum. A low density PSG of Si3N4 protective insulating film 5 is formed on the layer 9, the PSG 3 and the wiring pattern 4. It is cut and separated along the line 6. According to this structure, the PSG 3 of high density is completely externally shielded by the layer 9 and the wire 4, and no water is immersed. Accordingly, no phosphoric acid is produced in the boundary between the PSG 3 and the wire 4 and is not corroded.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15653280A JPS5780719A (en) | 1980-11-07 | 1980-11-07 | Semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15653280A JPS5780719A (en) | 1980-11-07 | 1980-11-07 | Semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5780719A true JPS5780719A (en) | 1982-05-20 |
Family
ID=15629843
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15653280A Pending JPS5780719A (en) | 1980-11-07 | 1980-11-07 | Semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5780719A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63128733A (en) * | 1986-11-19 | 1988-06-01 | Sony Corp | Semiconductor device |
JPH01315163A (en) * | 1988-02-12 | 1989-12-20 | Mitsubishi Electric Corp | Manufacture of semiconductor integrated circuit device |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4933907A (en) * | 1972-07-28 | 1974-03-28 | ||
JPS49114344A (en) * | 1973-02-28 | 1974-10-31 | ||
JPS5348474A (en) * | 1976-10-15 | 1978-05-01 | Hitachi Ltd | Electronic parts |
JPS54137273A (en) * | 1978-04-17 | 1979-10-24 | Nec Corp | Semiconductor device |
-
1980
- 1980-11-07 JP JP15653280A patent/JPS5780719A/en active Pending
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4933907A (en) * | 1972-07-28 | 1974-03-28 | ||
JPS49114344A (en) * | 1973-02-28 | 1974-10-31 | ||
JPS5348474A (en) * | 1976-10-15 | 1978-05-01 | Hitachi Ltd | Electronic parts |
JPS54137273A (en) * | 1978-04-17 | 1979-10-24 | Nec Corp | Semiconductor device |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63128733A (en) * | 1986-11-19 | 1988-06-01 | Sony Corp | Semiconductor device |
JPH01315163A (en) * | 1988-02-12 | 1989-12-20 | Mitsubishi Electric Corp | Manufacture of semiconductor integrated circuit device |
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