JPS576789Y2 - - Google Patents
Info
- Publication number
- JPS576789Y2 JPS576789Y2 JP1975025513U JP2551375U JPS576789Y2 JP S576789 Y2 JPS576789 Y2 JP S576789Y2 JP 1975025513 U JP1975025513 U JP 1975025513U JP 2551375 U JP2551375 U JP 2551375U JP S576789 Y2 JPS576789 Y2 JP S576789Y2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Rotary Pumps (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1975025513U JPS576789Y2 (en) | 1975-02-26 | 1975-02-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1975025513U JPS576789Y2 (en) | 1975-02-26 | 1975-02-26 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS51106918U JPS51106918U (en) | 1976-08-26 |
| JPS576789Y2 true JPS576789Y2 (en) | 1982-02-08 |
Family
ID=28124165
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1975025513U Expired JPS576789Y2 (en) | 1975-02-26 | 1975-02-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS576789Y2 (en) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06103030B2 (en) * | 1985-10-21 | 1994-12-14 | 株式会社日立製作所 | Screen-vacuum pump |
| JP2650897B2 (en) * | 1986-10-27 | 1997-09-10 | 株式会社日立製作所 | Screw vacuum pump for semiconductor manufacturing equipment |
| JP5180709B2 (en) * | 2008-07-10 | 2013-04-10 | 株式会社神戸製鋼所 | Screw compressor |
| WO2016157449A1 (en) * | 2015-03-31 | 2016-10-06 | 株式会社日立産機システム | Gas compressor |
| CN114555947A (en) * | 2019-10-07 | 2022-05-27 | 开利公司 | Screw compressor with adjustable channel |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4930167A (en) * | 1972-08-03 | 1974-03-18 |
-
1975
- 1975-02-26 JP JP1975025513U patent/JPS576789Y2/ja not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4930167A (en) * | 1972-08-03 | 1974-03-18 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS51106918U (en) | 1976-08-26 |