JPS5763760A - Discharge lamp holding device - Google Patents

Discharge lamp holding device

Info

Publication number
JPS5763760A
JPS5763760A JP13589080A JP13589080A JPS5763760A JP S5763760 A JPS5763760 A JP S5763760A JP 13589080 A JP13589080 A JP 13589080A JP 13589080 A JP13589080 A JP 13589080A JP S5763760 A JPS5763760 A JP S5763760A
Authority
JP
Japan
Prior art keywords
discharge lamp
locator
glass tube
light source
coil spring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13589080A
Other languages
Japanese (ja)
Other versions
JPS6351346B2 (en
Inventor
Takashi Fujimura
Kiyoshi Saruwatari
Yoshifumi Tomita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
FUJI KOKEN KK
FUJI KOUKEN KK
Hitachi Ltd
Original Assignee
FUJI KOKEN KK
FUJI KOUKEN KK
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by FUJI KOKEN KK, FUJI KOUKEN KK, Hitachi Ltd filed Critical FUJI KOKEN KK
Priority to JP13589080A priority Critical patent/JPS5763760A/en
Priority to US06/306,714 priority patent/US4482842A/en
Publication of JPS5763760A publication Critical patent/JPS5763760A/en
Publication of JPS6351346B2 publication Critical patent/JPS6351346B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70008—Production of exposure light, i.e. light sources
    • G03F7/70016—Production of exposure light, i.e. light sources by discharge lamps
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/82—Lamps with high-pressure unconstricted discharge having a cold pressure > 400 Torr
    • H01J61/822—High-pressure mercury lamps

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • General Physics & Mathematics (AREA)
  • Common Detailed Techniques For Electron Tubes Or Discharge Tubes (AREA)
  • Vessels And Coating Films For Discharge Lamps (AREA)

Abstract

PURPOSE:To hold the location of light source for a discharge lamp accurately by winding a coil spring around the external periphery of the non-luminous part of a glass tube which constitutes the discharge lamp, and fixing the end of the spring with solder to a mounting plate attached to a locator. CONSTITUTION:A discharge lamp used for a light source of an exposing device etc. comprises a glass tube 1 formed in a circular arc and stems 2 provided on both ends of the glass tube 1, and is held on a locator 20 made of a metal plate. Then, A coil spring 24 made of phosphor bronze is wound around the external periphery of a non-luminous part of the glass tube 1 tightly, and the end of the spring 24 is jointed with solder to the end of a mounting plate 21 attached to the locator 20 with a screw 22. Thus, the mechanical strength and dimensional accuracy of the locator 20 can be improved as a metal plate, the location of light source for the discharge lamp can be set accurately by using the coil spring 24.
JP13589080A 1980-10-01 1980-10-01 Discharge lamp holding device Granted JPS5763760A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP13589080A JPS5763760A (en) 1980-10-01 1980-10-01 Discharge lamp holding device
US06/306,714 US4482842A (en) 1980-10-01 1981-09-29 Curved tube type ultra high pressure mercury arc discharge lamp device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13589080A JPS5763760A (en) 1980-10-01 1980-10-01 Discharge lamp holding device

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP15522990A Division JPH0465049A (en) 1990-06-15 1990-06-15 Discharge lamp

Publications (2)

Publication Number Publication Date
JPS5763760A true JPS5763760A (en) 1982-04-17
JPS6351346B2 JPS6351346B2 (en) 1988-10-13

Family

ID=15162183

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13589080A Granted JPS5763760A (en) 1980-10-01 1980-10-01 Discharge lamp holding device

Country Status (1)

Country Link
JP (1) JPS5763760A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0414748A (en) * 1990-05-09 1992-01-20 Toshiba Lighting & Technol Corp Low pressure discharge lamp

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0414748A (en) * 1990-05-09 1992-01-20 Toshiba Lighting & Technol Corp Low pressure discharge lamp

Also Published As

Publication number Publication date
JPS6351346B2 (en) 1988-10-13

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