JPS5763760A - Discharge lamp holding device - Google Patents
Discharge lamp holding deviceInfo
- Publication number
- JPS5763760A JPS5763760A JP13589080A JP13589080A JPS5763760A JP S5763760 A JPS5763760 A JP S5763760A JP 13589080 A JP13589080 A JP 13589080A JP 13589080 A JP13589080 A JP 13589080A JP S5763760 A JPS5763760 A JP S5763760A
- Authority
- JP
- Japan
- Prior art keywords
- discharge lamp
- locator
- glass tube
- light source
- coil spring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70008—Production of exposure light, i.e. light sources
- G03F7/70016—Production of exposure light, i.e. light sources by discharge lamps
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/82—Lamps with high-pressure unconstricted discharge having a cold pressure > 400 Torr
- H01J61/822—High-pressure mercury lamps
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- General Physics & Mathematics (AREA)
- Common Detailed Techniques For Electron Tubes Or Discharge Tubes (AREA)
- Vessels And Coating Films For Discharge Lamps (AREA)
Abstract
PURPOSE:To hold the location of light source for a discharge lamp accurately by winding a coil spring around the external periphery of the non-luminous part of a glass tube which constitutes the discharge lamp, and fixing the end of the spring with solder to a mounting plate attached to a locator. CONSTITUTION:A discharge lamp used for a light source of an exposing device etc. comprises a glass tube 1 formed in a circular arc and stems 2 provided on both ends of the glass tube 1, and is held on a locator 20 made of a metal plate. Then, A coil spring 24 made of phosphor bronze is wound around the external periphery of a non-luminous part of the glass tube 1 tightly, and the end of the spring 24 is jointed with solder to the end of a mounting plate 21 attached to the locator 20 with a screw 22. Thus, the mechanical strength and dimensional accuracy of the locator 20 can be improved as a metal plate, the location of light source for the discharge lamp can be set accurately by using the coil spring 24.
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13589080A JPS5763760A (en) | 1980-10-01 | 1980-10-01 | Discharge lamp holding device |
US06/306,714 US4482842A (en) | 1980-10-01 | 1981-09-29 | Curved tube type ultra high pressure mercury arc discharge lamp device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13589080A JPS5763760A (en) | 1980-10-01 | 1980-10-01 | Discharge lamp holding device |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15522990A Division JPH0465049A (en) | 1990-06-15 | 1990-06-15 | Discharge lamp |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5763760A true JPS5763760A (en) | 1982-04-17 |
JPS6351346B2 JPS6351346B2 (en) | 1988-10-13 |
Family
ID=15162183
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13589080A Granted JPS5763760A (en) | 1980-10-01 | 1980-10-01 | Discharge lamp holding device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5763760A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0414748A (en) * | 1990-05-09 | 1992-01-20 | Toshiba Lighting & Technol Corp | Low pressure discharge lamp |
-
1980
- 1980-10-01 JP JP13589080A patent/JPS5763760A/en active Granted
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0414748A (en) * | 1990-05-09 | 1992-01-20 | Toshiba Lighting & Technol Corp | Low pressure discharge lamp |
Also Published As
Publication number | Publication date |
---|---|
JPS6351346B2 (en) | 1988-10-13 |
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