JPS5755045A - Scanning electron microscope - Google Patents

Scanning electron microscope

Info

Publication number
JPS5755045A
JPS5755045A JP13043280A JP13043280A JPS5755045A JP S5755045 A JPS5755045 A JP S5755045A JP 13043280 A JP13043280 A JP 13043280A JP 13043280 A JP13043280 A JP 13043280A JP S5755045 A JPS5755045 A JP S5755045A
Authority
JP
Japan
Prior art keywords
objective lens
focussed
cathode
ray tube
electron beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13043280A
Other languages
Japanese (ja)
Other versions
JPS606070B2 (en
Inventor
Hironobu Moriwaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NICHIDENSHI TECHNICS KK
Original Assignee
NICHIDENSHI TECHNICS KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NICHIDENSHI TECHNICS KK filed Critical NICHIDENSHI TECHNICS KK
Priority to JP13043280A priority Critical patent/JPS606070B2/en
Publication of JPS5755045A publication Critical patent/JPS5755045A/en
Publication of JPS606070B2 publication Critical patent/JPS606070B2/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)

Abstract

PURPOSE:To obtain a clear picture nicely focussed overall the screen by switching the focal point of an electron beam in two steps, while holding synchronizm with the horizontal scanning and displaying on a cathode-ray tube, only the nicely focussed part of a sample. CONSTITUTION:An electron beam from an electron gun 1 is focussed by a focussing lens 2 and an objective lens 3 and is projected on a sample 4. Two-step electron beam deflection coils 5a and 5b are arranged between the focussing lens 2 and objective lens 3, and horizontal and vertical sawtoothed wave signals are supplied from a scanning power supply 6. The current supplied to the objective lens 3 is switched by a changeover switch 13 every horizontal scanning and the focal length of the objective lens 3 is switched into two steps. Besides, the signal from the detector 8 is applied to the grid of a cathode-ray tube 7 through amplifiers 9 and 10. The output of the amplifier 9 is compared by a comparator circuit 15 with a signal which is delayed by a delay circuit 14 for one horizontal scanning period. When the output of the delay circuit 14 is large, a cathode-ray tube 7 is subjected to blanking.
JP13043280A 1980-09-19 1980-09-19 scanning electron microscope Expired JPS606070B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13043280A JPS606070B2 (en) 1980-09-19 1980-09-19 scanning electron microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13043280A JPS606070B2 (en) 1980-09-19 1980-09-19 scanning electron microscope

Publications (2)

Publication Number Publication Date
JPS5755045A true JPS5755045A (en) 1982-04-01
JPS606070B2 JPS606070B2 (en) 1985-02-15

Family

ID=15034092

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13043280A Expired JPS606070B2 (en) 1980-09-19 1980-09-19 scanning electron microscope

Country Status (1)

Country Link
JP (1) JPS606070B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001118537A (en) * 1999-10-19 2001-04-27 Hitachi Ltd Beam-scanning inspection apparatus

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0662183U (en) * 1993-02-16 1994-09-02 宣幸 高桑 Waterproof door device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001118537A (en) * 1999-10-19 2001-04-27 Hitachi Ltd Beam-scanning inspection apparatus

Also Published As

Publication number Publication date
JPS606070B2 (en) 1985-02-15

Similar Documents

Publication Publication Date Title
WO1995027994A3 (en) Particle-optical apparatus comprising a detector for secondary electrons
US3337684A (en) Television monitoring apparatus having dual function as picture monitor and oscilloscope
US3886305A (en) Automatic contrast and dark level control for scanning electron microscopes
GB1105115A (en) Improvements in and relating to the observation of the impact spot of a charged particle beam for machining of a workpiece
JPS5755045A (en) Scanning electron microscope
JPS57145259A (en) Scanning type electron microscope and its similar device
GB879569A (en) Improvements in or relating to electron discharge devices and to circuit arrangements embodying such devices
MY111942A (en) Color picture tube
US2944174A (en) Electronic image system and method
ES432249A1 (en) Video signal reproducing device with electron beam scanning velocity modulation
GB1315945A (en) Electron microscopes and microanalysers
JPS6465422A (en) Image analysis tube with streak compensation
JPS5755046A (en) Picture signal processor
Kurczewski et al. Pyroelectric vidicon camera system
JPS54149568A (en) Scanning electron microscope
KR900005827A (en) Image reproduction set with device for measuring beam current and cathode ray tube
JPS5478075A (en) Sample image display device
JPH0360297A (en) Image pickup device and its operating method
JPS5635343A (en) System for removing foreign object from cathode-ray tube
JPS57140090A (en) Shape recognizing image pickup device
SU456325A1 (en) Rasto electron microscope
JPS5630380A (en) Image display method
JPS56130065A (en) Scanning electron microscope
SU1488100A1 (en) Electron-beam welding apparatus
JPS5539122A (en) Color picture tube device