JPS5754840A - Vibrator type moisture sensor - Google Patents

Vibrator type moisture sensor

Info

Publication number
JPS5754840A
JPS5754840A JP12927280A JP12927280A JPS5754840A JP S5754840 A JPS5754840 A JP S5754840A JP 12927280 A JP12927280 A JP 12927280A JP 12927280 A JP12927280 A JP 12927280A JP S5754840 A JPS5754840 A JP S5754840A
Authority
JP
Japan
Prior art keywords
vibrator
moisture
sensitive polymer
impregnated
polymer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12927280A
Other languages
Japanese (ja)
Inventor
Toru Sugawara
Shigeki Tsuchiya
Toshitaka Suzuki
Tokuyuki Kaneshiro
Shuichi Ohara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP12927280A priority Critical patent/JPS5754840A/en
Publication of JPS5754840A publication Critical patent/JPS5754840A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/02—Analysing fluids
    • G01N29/036—Analysing fluids by measuring frequency or resonance of acoustic waves
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/02—Indexing codes associated with the analysed material
    • G01N2291/025—Change of phase or condition
    • G01N2291/0256—Adsorption, desorption, surface mass change, e.g. on biosensors
    • G01N2291/0257—Adsorption, desorption, surface mass change, e.g. on biosensors with a layer containing at least one organic compound
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/02—Indexing codes associated with the analysed material
    • G01N2291/028—Material parameters
    • G01N2291/02845—Humidity, wetness
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/04—Wave modes and trajectories
    • G01N2291/042—Wave modes
    • G01N2291/0426—Bulk waves, e.g. quartz crystal microbalance, torsional waves

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)

Abstract

PURPOSE:To make a moisture sensitive polymer hard to peel under moisture absorption and desorption by arranging a porous on the surface of a vibrator so that it is impregnated with the polymer. CONSTITUTION:The frequency of a vibrator 1 made of barium titanate, lead titan- zirconate, quartz crystal or the like is determined by material, shape and dimensions. A porous material impregnated with a moisture sensitive polymer is preferably the same in the material as the vibrator. The vibrator 1 is supported on a support base 6 and a thin film electrode 2 made of gold or the like is connected to a connection terminal 5 with a lead with 4 while the vibrator 1 is connected to a part of an oscillation circuit 7. An output terminal 8 provides an output corresponding to the resonance frequency of the vibrator. When the vibrator 1 is placed in a measuring atmosphere, moisture is absorbed with the moisture sensitive polymer to increase weight and the resonance frequency of the vibrator 1 varies thereby allowing the detection of relative humidity. As a thin porous material is impregnated with a moisture-sensitive polymer, peeling is made so hard to occur to ensure stability for a long time.
JP12927280A 1980-09-19 1980-09-19 Vibrator type moisture sensor Pending JPS5754840A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12927280A JPS5754840A (en) 1980-09-19 1980-09-19 Vibrator type moisture sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12927280A JPS5754840A (en) 1980-09-19 1980-09-19 Vibrator type moisture sensor

Publications (1)

Publication Number Publication Date
JPS5754840A true JPS5754840A (en) 1982-04-01

Family

ID=15005477

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12927280A Pending JPS5754840A (en) 1980-09-19 1980-09-19 Vibrator type moisture sensor

Country Status (1)

Country Link
JP (1) JPS5754840A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0100661A2 (en) * 1982-07-31 1984-02-15 Shimadzu Corporation Moisture sensor and a process for the production thereof
JPS60201233A (en) * 1984-03-26 1985-10-11 Shimadzu Corp Measuring method of component concentration
JPS62288546A (en) * 1986-06-06 1987-12-15 Seiko Instr & Electronics Ltd Crystal oscillator biosensor and analysis of living body-related substances using same
JPH01161923A (en) * 1987-12-18 1989-06-26 Yamatake Honeywell Co Ltd A/d converter
JPH05505672A (en) * 1990-03-21 1993-08-19 ベルクヴェルクスフェルバント・ゲー・エム・ベー・ハー An exploration device that explores the underground using transient signals of electromagnetic measurements

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0100661A2 (en) * 1982-07-31 1984-02-15 Shimadzu Corporation Moisture sensor and a process for the production thereof
JPS60201233A (en) * 1984-03-26 1985-10-11 Shimadzu Corp Measuring method of component concentration
JPS62288546A (en) * 1986-06-06 1987-12-15 Seiko Instr & Electronics Ltd Crystal oscillator biosensor and analysis of living body-related substances using same
JPH01161923A (en) * 1987-12-18 1989-06-26 Yamatake Honeywell Co Ltd A/d converter
JPH05505672A (en) * 1990-03-21 1993-08-19 ベルクヴェルクスフェルバント・ゲー・エム・ベー・ハー An exploration device that explores the underground using transient signals of electromagnetic measurements

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