JPS5754276A - Sankaaensupatsutaringumakunojokyohoho - Google Patents
SankaaensupatsutaringumakunojokyohohoInfo
- Publication number
- JPS5754276A JPS5754276A JP13022380A JP13022380A JPS5754276A JP S5754276 A JPS5754276 A JP S5754276A JP 13022380 A JP13022380 A JP 13022380A JP 13022380 A JP13022380 A JP 13022380A JP S5754276 A JPS5754276 A JP S5754276A
- Authority
- JP
- Japan
- Prior art keywords
- hydrogen peroxide
- aqueous hydrogen
- sputtering film
- acid
- zno sputtering
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- ing And Chemical Polishing (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13022380A JPS6056433B2 (ja) | 1980-09-18 | 1980-09-18 | 酸化亜鉛スパツタリング膜の除去方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13022380A JPS6056433B2 (ja) | 1980-09-18 | 1980-09-18 | 酸化亜鉛スパツタリング膜の除去方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5754276A true JPS5754276A (ja) | 1982-03-31 |
JPS6056433B2 JPS6056433B2 (ja) | 1985-12-10 |
Family
ID=15029026
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13022380A Expired JPS6056433B2 (ja) | 1980-09-18 | 1980-09-18 | 酸化亜鉛スパツタリング膜の除去方法 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6056433B2 (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58123878A (ja) * | 1982-01-11 | 1983-07-23 | エンソ−ン・インコ−ポレ−テツド | 剥離材 |
CN1294294C (zh) * | 2005-01-26 | 2007-01-10 | 中国科学院物理研究所 | 一种氧化锌材料的化学刻蚀方法 |
-
1980
- 1980-09-18 JP JP13022380A patent/JPS6056433B2/ja not_active Expired
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58123878A (ja) * | 1982-01-11 | 1983-07-23 | エンソ−ン・インコ−ポレ−テツド | 剥離材 |
JPS6334231B2 (ja) * | 1982-01-11 | 1988-07-08 | Ensoon Inc | |
CN1294294C (zh) * | 2005-01-26 | 2007-01-10 | 中国科学院物理研究所 | 一种氧化锌材料的化学刻蚀方法 |
Also Published As
Publication number | Publication date |
---|---|
JPS6056433B2 (ja) | 1985-12-10 |
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