JPS575285B2 - - Google Patents

Info

Publication number
JPS575285B2
JPS575285B2 JP15089876A JP15089876A JPS575285B2 JP S575285 B2 JPS575285 B2 JP S575285B2 JP 15089876 A JP15089876 A JP 15089876A JP 15089876 A JP15089876 A JP 15089876A JP S575285 B2 JPS575285 B2 JP S575285B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP15089876A
Other languages
Japanese (ja)
Other versions
JPS5376055A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15089876A priority Critical patent/JPS5376055A/en
Publication of JPS5376055A publication Critical patent/JPS5376055A/en
Publication of JPS575285B2 publication Critical patent/JPS575285B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Optical Transform (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP15089876A 1976-12-17 1976-12-17 Method of position detection Granted JPS5376055A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15089876A JPS5376055A (en) 1976-12-17 1976-12-17 Method of position detection

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15089876A JPS5376055A (en) 1976-12-17 1976-12-17 Method of position detection

Publications (2)

Publication Number Publication Date
JPS5376055A JPS5376055A (en) 1978-07-06
JPS575285B2 true JPS575285B2 (en) 1982-01-29

Family

ID=15506779

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15089876A Granted JPS5376055A (en) 1976-12-17 1976-12-17 Method of position detection

Country Status (1)

Country Link
JP (1) JPS5376055A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5914694U (en) * 1982-07-17 1984-01-28 薮内　庸子 doll
JPS6313799U (en) * 1986-07-14 1988-01-29

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56149445U (en) * 1981-02-19 1981-11-10
JPS5895042U (en) * 1981-12-21 1983-06-28 日産自動車株式会社 Semiconductor element with V-shaped groove
JPS59232416A (en) * 1983-06-16 1984-12-27 Oki Electric Ind Co Ltd Alignment mark
JPS61210630A (en) * 1985-03-15 1986-09-18 Toshiba Corp Manufacture of positioning mark

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS499265A (en) * 1972-05-12 1974-01-26

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS499265A (en) * 1972-05-12 1974-01-26

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5914694U (en) * 1982-07-17 1984-01-28 薮内　庸子 doll
JPS6313799U (en) * 1986-07-14 1988-01-29

Also Published As

Publication number Publication date
JPS5376055A (en) 1978-07-06

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