JPS5752859Y2 - - Google Patents

Info

Publication number
JPS5752859Y2
JPS5752859Y2 JP1976111658U JP11165876U JPS5752859Y2 JP S5752859 Y2 JPS5752859 Y2 JP S5752859Y2 JP 1976111658 U JP1976111658 U JP 1976111658U JP 11165876 U JP11165876 U JP 11165876U JP S5752859 Y2 JPS5752859 Y2 JP S5752859Y2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1976111658U
Other languages
Japanese (ja)
Other versions
JPS5329392U (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1976111658U priority Critical patent/JPS5752859Y2/ja
Publication of JPS5329392U publication Critical patent/JPS5329392U/ja
Application granted granted Critical
Publication of JPS5752859Y2 publication Critical patent/JPS5752859Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Sampling And Sample Adjustment (AREA)
JP1976111658U 1976-08-20 1976-08-20 Expired JPS5752859Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1976111658U JPS5752859Y2 (en) 1976-08-20 1976-08-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1976111658U JPS5752859Y2 (en) 1976-08-20 1976-08-20

Publications (2)

Publication Number Publication Date
JPS5329392U JPS5329392U (en) 1978-03-13
JPS5752859Y2 true JPS5752859Y2 (en) 1982-11-16

Family

ID=28721464

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1976111658U Expired JPS5752859Y2 (en) 1976-08-20 1976-08-20

Country Status (1)

Country Link
JP (1) JPS5752859Y2 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6111132A (en) * 1984-06-26 1986-01-18 Kokusai Electric Co Ltd Vacuum device
JP6054728B2 (en) * 2012-12-10 2016-12-27 日本電子株式会社 Sample positioning device and charged particle beam device

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4851578A (en) * 1971-10-29 1973-07-19

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4851578A (en) * 1971-10-29 1973-07-19

Also Published As

Publication number Publication date
JPS5329392U (en) 1978-03-13

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