JPS5743437A - Vacuum treating apparatus slidably moving article to be treated by gravity - Google Patents

Vacuum treating apparatus slidably moving article to be treated by gravity

Info

Publication number
JPS5743437A
JPS5743437A JP11829280A JP11829280A JPS5743437A JP S5743437 A JPS5743437 A JP S5743437A JP 11829280 A JP11829280 A JP 11829280A JP 11829280 A JP11829280 A JP 11829280A JP S5743437 A JPS5743437 A JP S5743437A
Authority
JP
Japan
Prior art keywords
article
wafer
chamber
gravity
treatment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11829280A
Other languages
Japanese (ja)
Inventor
Toshiaki Fujioka
Takenobu Fuda
Tomohisa Sawada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ulvac Inc
Original Assignee
Ulvac Inc
Nihon Shinku Gijutsu KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulvac Inc, Nihon Shinku Gijutsu KK filed Critical Ulvac Inc
Priority to JP11829280A priority Critical patent/JPS5743437A/en
Publication of JPS5743437A publication Critical patent/JPS5743437A/en
Pending legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23P—METAL-WORKING NOT OTHERWISE PROVIDED FOR; COMBINED OPERATIONS; UNIVERSAL MACHINE TOOLS
    • B23P19/00—Machines for simply fitting together or separating metal parts or objects, or metal and non-metal parts, whether or not involving some deformation; Tools or devices therefor so far as not provided for in other classes
    • B23P19/001—Article feeders for assembling machines

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)

Abstract

PURPOSE:To substantially eliminate the damage and contamination of an article by slidably moving the article by gravity when applying additional treatment thereupon. CONSTITUTION:A wafer 7 pushed out of a cassette chamber 21 is passed through the article passage port of a delivery gate valve 23, is then moved along the guide supporting plate 24 of a front stage treating chamber 18, and is temporarily stopped by a latch 25. At this time the wafer 7 is ion etched and heat treated. The latch 25 is removed after the treatment, and the wafer 7 is again moved slidably by the gravity along the lower surface 12 of the delivery opening 13 and a bridge piece 16. the wafer 17 is further moved along a conveying member 6. In this manner, the article is fed from the chamber 21 through an additional treatment chamber 18 to the conveying member 6 in the vacuum chamber 1. The rear stage treatment is similarly performed.
JP11829280A 1980-08-29 1980-08-29 Vacuum treating apparatus slidably moving article to be treated by gravity Pending JPS5743437A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11829280A JPS5743437A (en) 1980-08-29 1980-08-29 Vacuum treating apparatus slidably moving article to be treated by gravity

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11829280A JPS5743437A (en) 1980-08-29 1980-08-29 Vacuum treating apparatus slidably moving article to be treated by gravity

Publications (1)

Publication Number Publication Date
JPS5743437A true JPS5743437A (en) 1982-03-11

Family

ID=14733058

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11829280A Pending JPS5743437A (en) 1980-08-29 1980-08-29 Vacuum treating apparatus slidably moving article to be treated by gravity

Country Status (1)

Country Link
JP (1) JPS5743437A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60115227A (en) * 1983-11-28 1985-06-21 Plasma Syst:Kk Plasma processing method and apparatus for the same
JPS629985A (en) * 1985-07-08 1987-01-17 Ookura Eng Kk Apparatus for adjusting stamping gap in automatic stamping apparatus
US5533134A (en) * 1993-08-16 1996-07-02 Sony Corporation Motional feedback loudspeaker apparatus having a coupling member for connecting a voice coil bobbin with a detecting coil bobbin
CN106670765A (en) * 2017-02-24 2017-05-17 锐思特电子科技（苏州）有限公司 Automatic feeding device of bearing press-fitting device

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54141392A (en) * 1978-04-26 1979-11-02 Ulvac Corp Vacuum deposition apparatus

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54141392A (en) * 1978-04-26 1979-11-02 Ulvac Corp Vacuum deposition apparatus

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60115227A (en) * 1983-11-28 1985-06-21 Plasma Syst:Kk Plasma processing method and apparatus for the same
JPS629985A (en) * 1985-07-08 1987-01-17 Ookura Eng Kk Apparatus for adjusting stamping gap in automatic stamping apparatus
US5533134A (en) * 1993-08-16 1996-07-02 Sony Corporation Motional feedback loudspeaker apparatus having a coupling member for connecting a voice coil bobbin with a detecting coil bobbin
CN106670765A (en) * 2017-02-24 2017-05-17 锐思特电子科技（苏州）有限公司 Automatic feeding device of bearing press-fitting device

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