JPS5740847A - Gas analyzer - Google Patents

Gas analyzer

Info

Publication number
JPS5740847A
JPS5740847A JP55116510A JP11651080A JPS5740847A JP S5740847 A JPS5740847 A JP S5740847A JP 55116510 A JP55116510 A JP 55116510A JP 11651080 A JP11651080 A JP 11651080A JP S5740847 A JPS5740847 A JP S5740847A
Authority
JP
Japan
Prior art keywords
orifice
vacuum chamber
gas
pump
chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP55116510A
Other languages
Japanese (ja)
Other versions
JPS5829575B2 (en
Inventor
Nobuhiko Nakano
Hitoshi Yamazaki
Tadashi Ayusawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NIPPON JIDOSHA KENKYUSHO
NIPPON JIDOUSHIYA KENKYUSHO
Original Assignee
NIPPON JIDOSHA KENKYUSHO
NIPPON JIDOUSHIYA KENKYUSHO
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NIPPON JIDOSHA KENKYUSHO, NIPPON JIDOUSHIYA KENKYUSHO filed Critical NIPPON JIDOSHA KENKYUSHO
Priority to JP55116510A priority Critical patent/JPS5829575B2/en
Publication of JPS5740847A publication Critical patent/JPS5740847A/en
Publication of JPS5829575B2 publication Critical patent/JPS5829575B2/en
Expired legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00Particle spectrometers or separator tubes
    • H01J49/26Mass spectrometers or separator tubes
    • H01J49/34Dynamic spectrometers
    • H01J49/42Stability-of-path spectrometers, e.g. monopole, quadrupole, multipole, farvitrons

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Measuring Volume Flow (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Electron Tubes For Measurement (AREA)

Abstract

PURPOSE:To enable high speed and accuracy analysis by providing an orifice at the gas induction section, forming an exhaust passage near it using an upward inclined wall, providing a vacuum chamber below the orifice, and arranging a pair of right and left quadruple type mass spectrometers crossing this chamber. CONSTITUTION:An orifice 3 is provided at the sample gas induction section in a gas analyzer 1 and a gas exhaust passage 5 which is bent upward is formed at the upper vicinity using an upward inclined wall 5a. The passage 5 is connected to an absorption pump 4 and gas is discharged in the air. A vacuum chamber 8 which is connected to a vacuum pump is formed at the lower part of the orifice 3 by combining a scattering pump 6 with an absorption pump 7 and a pair of right and left quadruple type mass spectrometers 11a and 11b are connected to this vacuum chamber crossing the chamber 8. Besides, the first and second on and off valves 9 and 10 are provided in the vacuum chamber 8. As a result, high speed and accuracy analysis can be made.
JP55116510A 1980-08-26 1980-08-26 gas analyzer Expired JPS5829575B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP55116510A JPS5829575B2 (en) 1980-08-26 1980-08-26 gas analyzer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55116510A JPS5829575B2 (en) 1980-08-26 1980-08-26 gas analyzer

Publications (2)

Publication Number Publication Date
JPS5740847A true JPS5740847A (en) 1982-03-06
JPS5829575B2 JPS5829575B2 (en) 1983-06-23

Family

ID=14688923

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55116510A Expired JPS5829575B2 (en) 1980-08-26 1980-08-26 gas analyzer

Country Status (1)

Country Link
JP (1) JPS5829575B2 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58118957A (en) * 1982-01-08 1983-07-15 Ulvac Corp Air-fuel ratio meter
JPS58158993A (en) * 1982-03-17 1983-09-21 株式会社日立製作所 Method and device for soldering electronic part
JPH0235317A (en) * 1988-07-25 1990-02-05 Horiba Ltd Method for measuring rate of fuel consumption of automobile

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2021044412A (en) 2019-09-12 2021-03-18 株式会社日本製鋼所 Laser processing device and laser beam monitoring method

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58118957A (en) * 1982-01-08 1983-07-15 Ulvac Corp Air-fuel ratio meter
JPS58158993A (en) * 1982-03-17 1983-09-21 株式会社日立製作所 Method and device for soldering electronic part
JPH0235317A (en) * 1988-07-25 1990-02-05 Horiba Ltd Method for measuring rate of fuel consumption of automobile

Also Published As

Publication number Publication date
JPS5829575B2 (en) 1983-06-23

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