JPS5740847A - Gas analyzer - Google Patents
Gas analyzerInfo
- Publication number
- JPS5740847A JPS5740847A JP55116510A JP11651080A JPS5740847A JP S5740847 A JPS5740847 A JP S5740847A JP 55116510 A JP55116510 A JP 55116510A JP 11651080 A JP11651080 A JP 11651080A JP S5740847 A JPS5740847 A JP S5740847A
- Authority
- JP
- Japan
- Prior art keywords
- orifice
- vacuum chamber
- gas
- pump
- chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/26—Mass spectrometers or separator tubes
- H01J49/34—Dynamic spectrometers
- H01J49/42—Stability-of-path spectrometers, e.g. monopole, quadrupole, multipole, farvitrons
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Measuring Volume Flow (AREA)
- Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
- Electron Tubes For Measurement (AREA)
Abstract
PURPOSE:To enable high speed and accuracy analysis by providing an orifice at the gas induction section, forming an exhaust passage near it using an upward inclined wall, providing a vacuum chamber below the orifice, and arranging a pair of right and left quadruple type mass spectrometers crossing this chamber. CONSTITUTION:An orifice 3 is provided at the sample gas induction section in a gas analyzer 1 and a gas exhaust passage 5 which is bent upward is formed at the upper vicinity using an upward inclined wall 5a. The passage 5 is connected to an absorption pump 4 and gas is discharged in the air. A vacuum chamber 8 which is connected to a vacuum pump is formed at the lower part of the orifice 3 by combining a scattering pump 6 with an absorption pump 7 and a pair of right and left quadruple type mass spectrometers 11a and 11b are connected to this vacuum chamber crossing the chamber 8. Besides, the first and second on and off valves 9 and 10 are provided in the vacuum chamber 8. As a result, high speed and accuracy analysis can be made.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP55116510A JPS5829575B2 (en) | 1980-08-26 | 1980-08-26 | gas analyzer |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP55116510A JPS5829575B2 (en) | 1980-08-26 | 1980-08-26 | gas analyzer |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5740847A true JPS5740847A (en) | 1982-03-06 |
JPS5829575B2 JPS5829575B2 (en) | 1983-06-23 |
Family
ID=14688923
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP55116510A Expired JPS5829575B2 (en) | 1980-08-26 | 1980-08-26 | gas analyzer |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5829575B2 (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58118957A (en) * | 1982-01-08 | 1983-07-15 | Ulvac Corp | Air-fuel ratio meter |
JPS58158993A (en) * | 1982-03-17 | 1983-09-21 | 株式会社日立製作所 | Method and device for soldering electronic part |
JPH0235317A (en) * | 1988-07-25 | 1990-02-05 | Horiba Ltd | Method for measuring rate of fuel consumption of automobile |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2021044412A (en) | 2019-09-12 | 2021-03-18 | 株式会社日本製鋼所 | Laser processing device and laser beam monitoring method |
-
1980
- 1980-08-26 JP JP55116510A patent/JPS5829575B2/en not_active Expired
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58118957A (en) * | 1982-01-08 | 1983-07-15 | Ulvac Corp | Air-fuel ratio meter |
JPS58158993A (en) * | 1982-03-17 | 1983-09-21 | 株式会社日立製作所 | Method and device for soldering electronic part |
JPH0235317A (en) * | 1988-07-25 | 1990-02-05 | Horiba Ltd | Method for measuring rate of fuel consumption of automobile |
Also Published As
Publication number | Publication date |
---|---|
JPS5829575B2 (en) | 1983-06-23 |
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