JPS5737878Y2 - - Google Patents
Info
- Publication number
- JPS5737878Y2 JPS5737878Y2 JP1980179657U JP17965780U JPS5737878Y2 JP S5737878 Y2 JPS5737878 Y2 JP S5737878Y2 JP 1980179657 U JP1980179657 U JP 1980179657U JP 17965780 U JP17965780 U JP 17965780U JP S5737878 Y2 JPS5737878 Y2 JP S5737878Y2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1980179657U JPS5737878Y2 (en) | 1980-12-16 | 1980-12-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1980179657U JPS5737878Y2 (en) | 1980-12-16 | 1980-12-16 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS56156264U JPS56156264U (en) | 1981-11-21 |
| JPS5737878Y2 true JPS5737878Y2 (en) | 1982-08-20 |
Family
ID=29690131
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1980179657U Expired JPS5737878Y2 (en) | 1980-12-16 | 1980-12-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5737878Y2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2611200B2 (en) * | 1986-06-03 | 1997-05-21 | 株式会社島津製作所 | Particle beam mapping equipment |
-
1980
- 1980-12-16 JP JP1980179657U patent/JPS5737878Y2/ja not_active Expired
Non-Patent Citations (1)
| Title |
|---|
| SURFACE SCIENCE=1967 * |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS56156264U (en) | 1981-11-21 |