JPS573710A - Amophous silicon and its production - Google Patents
Amophous silicon and its productionInfo
- Publication number
- JPS573710A JPS573710A JP7742480A JP7742480A JPS573710A JP S573710 A JPS573710 A JP S573710A JP 7742480 A JP7742480 A JP 7742480A JP 7742480 A JP7742480 A JP 7742480A JP S573710 A JPS573710 A JP S573710A
- Authority
- JP
- Japan
- Prior art keywords
- silane
- reaction
- amorphous silicon
- decomposition
- silicon
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
PURPOSE: A spherical powder of amorphous silicon that has a specified particle size, Si-H bond content and semiconductivity and shows good coating properties.
CONSTITUTION: The objective amorphous silicon (abbreviated to a-Si) has particles sizes of 0.1W1μm and an Si-H bond content of 0.01W30mol%. The a-Si is obtained by heating a silane gas at about 300W700°C for 1W100sec. The reaction proceeds in accordance with the equation to give the a-Si in the form of a spherical powder. When the temperature is too high, the powder of a-Si crystallizes and reduces the content of Si-H bonds, whereas, when too low, the decomposition reaction of the silane becomes undesirably slow. Further, when the reaction time is too short, the silane decomposition is insufficient. On the contrary, when too long, a-Si deposits on the wall of the reaction tube and the crystallinity increases undesirably. In the practical production, the silicon granules 2 are preferably fluidized with a carrier gas to form the fluidized bed 3 and the silane gas 1 is introduced.
COPYRIGHT: (C)1982,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7742480A JPS573710A (en) | 1980-06-09 | 1980-06-09 | Amophous silicon and its production |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7742480A JPS573710A (en) | 1980-06-09 | 1980-06-09 | Amophous silicon and its production |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS573710A true JPS573710A (en) | 1982-01-09 |
JPS6138126B2 JPS6138126B2 (en) | 1986-08-27 |
Family
ID=13633584
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7742480A Granted JPS573710A (en) | 1980-06-09 | 1980-06-09 | Amophous silicon and its production |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS573710A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5945918A (en) * | 1982-07-26 | 1984-03-15 | ロ−ヌ−プ−ラン・スペシアリテ・シミ−ク | Powdered pure silicon of high density and its manufacture |
JPS60221311A (en) * | 1984-04-18 | 1985-11-06 | Mitsubishi Gas Chem Co Inc | Amorphous composition |
WO2008155438A1 (en) * | 2007-06-18 | 2008-12-24 | Consejo Superior De Investigaciones Cientificas | Microspheres of silicon and photonic sponges, method for production and uses thereof in the manufacture of photonic devices |
-
1980
- 1980-06-09 JP JP7742480A patent/JPS573710A/en active Granted
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5945918A (en) * | 1982-07-26 | 1984-03-15 | ロ−ヌ−プ−ラン・スペシアリテ・シミ−ク | Powdered pure silicon of high density and its manufacture |
JPS60221311A (en) * | 1984-04-18 | 1985-11-06 | Mitsubishi Gas Chem Co Inc | Amorphous composition |
JPH05326B2 (en) * | 1984-04-18 | 1993-01-05 | Mitsubishi Gas Chemical Co | |
WO2008155438A1 (en) * | 2007-06-18 | 2008-12-24 | Consejo Superior De Investigaciones Cientificas | Microspheres of silicon and photonic sponges, method for production and uses thereof in the manufacture of photonic devices |
ES2331824A1 (en) * | 2007-06-18 | 2010-01-15 | Consejo Superior De Investigaciones Cientificas | Microspheres of silicon and photonic sponges, method for production and uses thereof in the manufacture of photonic devices |
Also Published As
Publication number | Publication date |
---|---|
JPS6138126B2 (en) | 1986-08-27 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPS5751205A (en) | Production of fine powder metal | |
JPS5360979A (en) | Polytetrafluoroethylene fine powder and its preparation | |
JPS573710A (en) | Amophous silicon and its production | |
JPS56100114A (en) | Alpha-type silicon nitride of high purity and its manufacture | |
EP0476709A3 (en) | Hydration-resistant magnesia powder and process for preparation thereof | |
JPS5215498A (en) | Process for production of granular corrundum | |
JPS57135708A (en) | Manufacturing of high purity silicon granule | |
JPS5576891A (en) | Production of methoxysilane | |
CA1271616A (en) | Process for production of silane | |
JPS5435736A (en) | Carrier material for electrophotography and production of the same | |
JPS5237369A (en) | Powder particle feeding device | |
JPS531458A (en) | Heater for electron tube | |
JPS5717499A (en) | Manufacture of silicon nitride whisker | |
JPS55105110A (en) | Method for removal of hydrogen chloride contained in waste gas discharged from fluidized-bed incinerator | |
Park et al. | Preparation of Ultrafine Carbon Powder by Pyrolysis of 1, 1-Dichloroethylene | |
JPS52151891A (en) | Resistor body for high temperature | |
JPS5571730A (en) | Formable resin composition for drying | |
JPS5236618A (en) | Process for preparation of granular solbic acid | |
JPS643074A (en) | Production of high-density sintered boron nitride | |
DE3265836D1 (en) | Process for preparing ammoniumnitrate-containing granules of high bulk density | |
JPS54142197A (en) | Preparation of zinc sulfide precipitates | |
JPS5426803A (en) | Coking prevention and its device | |
JPS5345308A (en) | Granulated detergent and its production | |
JPS5717500A (en) | Manufacture of silicon nitride whisker | |
JPS5423604A (en) | Production of molded coal |