JPS5729046B2 - - Google Patents
Info
- Publication number
- JPS5729046B2 JPS5729046B2 JP3607476A JP3607476A JPS5729046B2 JP S5729046 B2 JPS5729046 B2 JP S5729046B2 JP 3607476 A JP3607476 A JP 3607476A JP 3607476 A JP3607476 A JP 3607476A JP S5729046 B2 JPS5729046 B2 JP S5729046B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3607476A JPS52120680A (en) | 1976-04-02 | 1976-04-02 | Evaporation exposure method of amorphous-type semi-conductor layer |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3607476A JPS52120680A (en) | 1976-04-02 | 1976-04-02 | Evaporation exposure method of amorphous-type semi-conductor layer |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS52120680A JPS52120680A (en) | 1977-10-11 |
JPS5729046B2 true JPS5729046B2 (de) | 1982-06-21 |
Family
ID=12459582
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3607476A Granted JPS52120680A (en) | 1976-04-02 | 1976-04-02 | Evaporation exposure method of amorphous-type semi-conductor layer |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS52120680A (de) |
-
1976
- 1976-04-02 JP JP3607476A patent/JPS52120680A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS52120680A (en) | 1977-10-11 |