JPS5728244A - Manufacture of gas sensor - Google Patents

Manufacture of gas sensor

Info

Publication number
JPS5728244A
JPS5728244A JP10393380A JP10393380A JPS5728244A JP S5728244 A JPS5728244 A JP S5728244A JP 10393380 A JP10393380 A JP 10393380A JP 10393380 A JP10393380 A JP 10393380A JP S5728244 A JPS5728244 A JP S5728244A
Authority
JP
Japan
Prior art keywords
substrate
thickness
resin film
100mum
adhesive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10393380A
Other languages
Japanese (ja)
Inventor
Kuni Ogawa
Masaharu Noyori
Atsushi Abe
Masahiro Nishikawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP10393380A priority Critical patent/JPS5728244A/en
Publication of JPS5728244A publication Critical patent/JPS5728244A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)

Abstract

PURPOSE:To quicken responsiveness of a gas detecting element with a less heating power by reducing the heat capacity with a thickness of the substrate ranging about 50-100mum. CONSTITUTION:An adhesive 33 is applied on the periphery of the surface of a silicon substrate 31 where a gas detecting element is formed to mtch a stainless steel plate 32. The substrate 31 is put into a silicon etching liquid to make it 50-100mum in the thickness. A heat insulator 36 having a hot melting resin film 35 several mum thick on both surfaces of a heat insulating resin film 34 with a thickness of 200- 300mum is applied on the substrate 31. Thereafter, the adhesive 33 is melted and the substrate 31 is remoed from a retaining plate 32. After a photosensitive resin is applied on th film 36 up to sevral mum in the thickness, a phtolithography is used to form a specifed pattern 37. Subsequently, after the removal of the resin films 35 and 34 with an etcing liquid, the substrate 31 is cut off along the broken line to make chips. The resin film 35 is fastened on a package by hot melting and the substrate 31 is connected to a lead wire.
JP10393380A 1980-07-28 1980-07-28 Manufacture of gas sensor Pending JPS5728244A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10393380A JPS5728244A (en) 1980-07-28 1980-07-28 Manufacture of gas sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10393380A JPS5728244A (en) 1980-07-28 1980-07-28 Manufacture of gas sensor

Publications (1)

Publication Number Publication Date
JPS5728244A true JPS5728244A (en) 1982-02-15

Family

ID=14367230

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10393380A Pending JPS5728244A (en) 1980-07-28 1980-07-28 Manufacture of gas sensor

Country Status (1)

Country Link
JP (1) JPS5728244A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63205554A (en) * 1987-02-20 1988-08-25 Osaka Gas Co Ltd Gas sensor
JP2006337150A (en) * 2005-06-01 2006-12-14 Ngk Spark Plug Co Ltd Combustible gas sensor
JP2016151472A (en) * 2015-02-17 2016-08-22 ヤマハファインテック株式会社 Contact combustion type gas sensor

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63205554A (en) * 1987-02-20 1988-08-25 Osaka Gas Co Ltd Gas sensor
JP2006337150A (en) * 2005-06-01 2006-12-14 Ngk Spark Plug Co Ltd Combustible gas sensor
JP2016151472A (en) * 2015-02-17 2016-08-22 ヤマハファインテック株式会社 Contact combustion type gas sensor

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