JPS5724817A - Reading device for optical type scale - Google Patents

Reading device for optical type scale

Info

Publication number
JPS5724817A
JPS5724817A JP10103580A JP10103580A JPS5724817A JP S5724817 A JPS5724817 A JP S5724817A JP 10103580 A JP10103580 A JP 10103580A JP 10103580 A JP10103580 A JP 10103580A JP S5724817 A JPS5724817 A JP S5724817A
Authority
JP
Japan
Prior art keywords
light
scale
constitution
lens
diffraction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10103580A
Other languages
Japanese (ja)
Other versions
JPS6128923B2 (en
Inventor
Hideto Iwaoka
Koji Akiyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yokogawa Electric Corp
Original Assignee
Yokogawa Hokushin Electric Corp
Yokogawa Electric Works Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yokogawa Hokushin Electric Corp, Yokogawa Electric Works Ltd filed Critical Yokogawa Hokushin Electric Corp
Priority to JP10103580A priority Critical patent/JPS5724817A/en
Publication of JPS5724817A publication Critical patent/JPS5724817A/en
Publication of JPS6128923B2 publication Critical patent/JPS6128923B2/ja
Granted legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/36Forming the light into pulses
    • G01D5/38Forming the light into pulses by diffraction gratings

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Optical Transform (AREA)

Abstract

PURPOSE:To simplify a constitution, by a method wherein an interference light by a primary diffraction light of a laser light projected to a scale is detected by 4 light-receiving elements displaced in position by 90 deg. respectively. CONSTITUTION:A light from a laser light source 30 is collected to a scale 30 through a half mirror 31 and lens L10. A zero-th order light, out of diffraction lights, is chekced by means of a stopper 32, the balancing diffraction lights are collected by means of a lens 10, and beat pattern S due to the primary diffraction light is produced at a screen 34 through a half mirror 31. The opening ratio of the lens L10 is appropriately set thereupon so that the secondary diffraction light and upward is prevented from bumping against a screen 30. The beat pattern is detected by means of light-receiving elements d1-d4 displaced in position by 90 deg.. The output is inputted as signals PA-PD to a controller 35 through buffer amplifiers A-D, signals (PA-Pc), corresponding to a moving distance of a scale 33, are outputted from an output terminal OUT1, and a signal in the moving direction of the scale 33 is outputted from an OUT2 utilizing a phase difference between (PA-Pc) and (PB- PD). Thereby, simplification of the constitution is realized.
JP10103580A 1980-07-23 1980-07-23 Reading device for optical type scale Granted JPS5724817A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10103580A JPS5724817A (en) 1980-07-23 1980-07-23 Reading device for optical type scale

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10103580A JPS5724817A (en) 1980-07-23 1980-07-23 Reading device for optical type scale

Publications (2)

Publication Number Publication Date
JPS5724817A true JPS5724817A (en) 1982-02-09
JPS6128923B2 JPS6128923B2 (en) 1986-07-03

Family

ID=14289903

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10103580A Granted JPS5724817A (en) 1980-07-23 1980-07-23 Reading device for optical type scale

Country Status (1)

Country Link
JP (1) JPS5724817A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5764717U (en) * 1980-10-06 1982-04-17
JPS61176817A (en) * 1985-01-31 1986-08-08 Foster Denki Kk Encoder
JPS62121314A (en) * 1985-11-21 1987-06-02 ドクトル・ヨハネス・ハイデンハイン・ゲゼルシヤフト・ミト・ベシユレンクテル・ハフツング Photoelectric position measuring device
JPS63277922A (en) * 1987-05-11 1988-11-15 Canon Inc Length measuring instrument
JPH01187406A (en) * 1988-01-22 1989-07-26 Rikagaku Kenkyusho Method and device for detecting position of equal-interval interference fringe

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111976327B (en) 2019-05-24 2022-07-05 佳能株式会社 Method for processing sheets, binding method and bound product

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5764717U (en) * 1980-10-06 1982-04-17
JPS61176817A (en) * 1985-01-31 1986-08-08 Foster Denki Kk Encoder
JPS62121314A (en) * 1985-11-21 1987-06-02 ドクトル・ヨハネス・ハイデンハイン・ゲゼルシヤフト・ミト・ベシユレンクテル・ハフツング Photoelectric position measuring device
JPH0130089B2 (en) * 1985-11-21 1989-06-16 Dokutoru Yohanesu Haidenhain Gmbh
JPS63277922A (en) * 1987-05-11 1988-11-15 Canon Inc Length measuring instrument
JPH0648169B2 (en) * 1987-05-11 1994-06-22 キヤノン株式会社 Length measuring device
JPH01187406A (en) * 1988-01-22 1989-07-26 Rikagaku Kenkyusho Method and device for detecting position of equal-interval interference fringe

Also Published As

Publication number Publication date
JPS6128923B2 (en) 1986-07-03

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