JPS57211286A - Manufacture of josephson junction element - Google Patents

Manufacture of josephson junction element

Info

Publication number
JPS57211286A
JPS57211286A JP56096129A JP9612981A JPS57211286A JP S57211286 A JPS57211286 A JP S57211286A JP 56096129 A JP56096129 A JP 56096129A JP 9612981 A JP9612981 A JP 9612981A JP S57211286 A JPS57211286 A JP S57211286A
Authority
JP
Japan
Prior art keywords
layer
section
substrate
exposed
extending over
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP56096129A
Other languages
Japanese (ja)
Other versions
JPS6360555B2 (en
Inventor
Osamu Michigami
Yujiro Kato
Keiichi Tanabe
Shizuka Yoshii
Hisataka Takenaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Telegraph and Telephone Corp
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP56096129A priority Critical patent/JPS57211286A/en
Priority to CA000405292A priority patent/CA1168762A/en
Priority to US06/390,116 priority patent/US4412902A/en
Priority to NL8202511A priority patent/NL190858C/en
Priority to FR8211126A priority patent/FR2508237B1/en
Publication of JPS57211286A publication Critical patent/JPS57211286A/en
Publication of JPS6360555B2 publication Critical patent/JPS6360555B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N60/00—Superconducting devices
    • H10N60/01—Manufacture or treatment
    • H10N60/0912—Manufacture or treatment of Josephson-effect devices

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Superconductor Devices And Manufacturing Methods Thereof (AREA)

Abstract

PURPOSE:To obtain a Josephson junction element, the speed of operation thereof is fast, by forming a first superconductive layer consisting of an Nb-Al alloy according to a predetermined pattern onto a substrate and shaping a barrier layer through sputtering treatment in which CF4 gas is used and gas pressure is specified. CONSTITUTION:The substrate 1 consisting of an Si layer, the surface thereof has an oxide film, or sapphire or the like is coated with the first superconductive layer 2 made of an Nb-Al alloy containing approximately 75% Sb and approximately 25% Al alloy in prescried pattern form by using a mask through sputtering. A section in the vicinity of the end section of the layer 2 is coated with a mask, and a layer 3 in which Al is enriched is shaped to the section extending over the side surface from the surface of the layer 2 exposed through sputtering treatment employing CF4 gas under the gas pressure of 0.005-0.5 Torr extending over the side surface from the surface of the layer 2 exposed. The layer 3 is changed into an Al2O3 barrier layer 4, a dielectric constant thereof is extremely low, through oxidizing treatment, and the second superconductive layer 5 composed of Pb, etc. is attached extending over the exposed section of the substrate 1 while coating the layer 4.
JP56096129A 1981-06-22 1981-06-22 Manufacture of josephson junction element Granted JPS57211286A (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP56096129A JPS57211286A (en) 1981-06-22 1981-06-22 Manufacture of josephson junction element
CA000405292A CA1168762A (en) 1981-06-22 1982-06-16 Method of fabrication for josephson tunnel junction
US06/390,116 US4412902A (en) 1981-06-22 1982-06-18 Method of fabrication of Josephson tunnel junction
NL8202511A NL190858C (en) 1981-06-22 1982-06-22 Method of manufacturing a Josephson tunnel junction.
FR8211126A FR2508237B1 (en) 1981-06-22 1982-06-22 PROCESS FOR THE MANUFACTURE OF A JOSEPHSON JUNCTION, PARTICULARLY A TUNNEL JOSEPHSON JUNCTION

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56096129A JPS57211286A (en) 1981-06-22 1981-06-22 Manufacture of josephson junction element

Publications (2)

Publication Number Publication Date
JPS57211286A true JPS57211286A (en) 1982-12-25
JPS6360555B2 JPS6360555B2 (en) 1988-11-24

Family

ID=14156770

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56096129A Granted JPS57211286A (en) 1981-06-22 1981-06-22 Manufacture of josephson junction element

Country Status (1)

Country Link
JP (1) JPS57211286A (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63100147U (en) * 1986-12-19 1988-06-29

Also Published As

Publication number Publication date
JPS6360555B2 (en) 1988-11-24

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